公开(公告)号：US07915056B2

公开(公告)日：2011-03-29

申请号：US12051868

申请日：2008-03-20

申请人： John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Sambasivan Narayan ,  Anthony J. Perri ,  Richard J. Rassel ,  Tian Xia

发明人： John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Sambasivan Narayan ,  Anthony J. Perri ,  Richard J. Rassel ,  Tian Xia

IPC分类号： G01R31/26

CPC分类号： H01L22/34 ,  G01R31/2884 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor die including a semiconductor chip and a test structure, located in a scribe area, is designed and manufactured. The test structure includes an array of complementary metal oxide semiconductor (CMOS) image sensors that are of the same type as CMOS image sensors employed in another array in the semiconductor chip and having a larger array size. Such a test structure is provided in a design phase by providing a design structure in which the orientations of the CMOS image sensors match between the two arrays. The test structure provides effective and accurate monitoring of manufacturing processes through in-line testing before a final test on the semiconductor chip.

摘要翻译： 设计并制造了包括位于划线区域中的半导体芯片和测试结构的半导体管芯。 测试结构包括互补金属氧化物半导体（CMOS）图像传感器的阵列，其与在半导体芯片中的另一阵列中使用并具有较大阵列尺寸的CMOS图像传感器具有相同的类型。 通过提供CMOS图像传感器的取向在两个阵列之间匹配的设计结构，在设计阶段提供了这种测试结构。 测试结构通过在半导体芯片上的最终测试之前的在线测试来提供对制造工艺的有效和准确的监控。

公开(公告)号：US20090237103A1

公开(公告)日：2009-09-24

申请号：US12051868

申请日：2008-03-20

申请人： John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Sambasivan Narayan ,  Anthony J. Perri ,  Richard J. Rassel ,  Tian Xia

发明人： John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Sambasivan Narayan ,  Anthony J. Perri ,  Richard J. Rassel ,  Tian Xia

IPC分类号： G01R31/26 ,  H01L23/00 ,  G06F17/50

CPC分类号： H01L22/34 ,  G01R31/2884 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor die including a semiconductor chip and a test structure, located in a scribe area, is designed and manufactured. The test structure includes an array of complementary metal oxide semiconductor (CMOS) image sensors that are of the same type as CMOS image sensors employed in another array in the semiconductor chip and having a larger array size. Such a test structure is provided in a design phase by providing a design structure in which the orientations of the CMOS image sensors match between the two arrays. The test structure provides effective and accurate monitoring of manufacturing processes through in-line testing before a final test on the semiconductor chip.

摘要翻译： 设计并制造了包括位于划线区域中的半导体芯片和测试结构的半导体管芯。 测试结构包括互补金属氧化物半导体（CMOS）图像传感器的阵列，其与在半导体芯片中的另一阵列中使用并具有较大阵列尺寸的CMOS图像传感器具有相同的类型。 通过提供CMOS图像传感器的取向在两个阵列之间匹配的设计结构，在设计阶段提供了这种测试结构。 测试结构通过在半导体芯片上的最终测试之前的在线测试来提供对制造工艺的有效和准确的监控。

公开(公告)号：US20090236644A1

公开(公告)日：2009-09-24

申请号：US12050967

申请日：2008-03-19

申请人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Charles F. Musante ,  Richard J. Rassel

发明人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Charles F. Musante ,  Richard J. Rassel

IPC分类号： H01L31/113 ,  H04N5/335 ,  G06F17/50

CPC分类号： H04N5/361 ,  G06F17/5063 ,  H04N5/359 ,  H04N5/3745

摘要： A global shutter compatible pixel circuit comprising a reset gate (RG) transistor is provided in which a dynamic voltage is applied to the drain of the reset gate transistor in order to reduce a floating diffusion (FD) leakage therethrough during signal hold time. The drain voltage of the reset gate transistor is held at a lower voltage than a circuit supply voltage to minimize the off-state leakage through the RG transistor, thus reducing the change in the voltage at the floating diffusion during the signal hold time. In addition, a design structure for such a circuit providing a dynamic voltage to the drain of a reset gate of a pixel circuit is also provided.

摘要翻译： 提供了包括复位栅极（RG）晶体管的全局快门兼容像素电路，其中动态电压被施加到复位栅极晶体管的漏极，以便减少在信号保持时间期间通过其的浮动扩散（FD）泄漏。 复位栅极晶体管的漏极电压保持在比电路电源电压更低的电压，以最小化通过RG晶体管的截止状态泄漏，从而减少在信号保持时间期间浮动扩散时的电压变化。 此外，还提供了用于向像素电路的复位栅极的漏极提供动态电压的这种电路的设计结构。

公开(公告)号：US07675097B2

公开(公告)日：2010-03-09

申请号：US11565801

申请日：2006-12-01

申请人： James W. Adkisson ,  John J. Ellis-Monaghan ,  R. Michael Guidash ,  Mark D. Jaffe ,  Edward T. Nelson ,  Richard J. Rassel ,  Charles V. Stancampiano

发明人： James W. Adkisson ,  John J. Ellis-Monaghan ,  R. Michael Guidash ,  Mark D. Jaffe ,  Edward T. Nelson ,  Richard J. Rassel ,  Charles V. Stancampiano

IPC分类号： H01L27/146

CPC分类号： H01L27/14609 ,  H01L27/14643 ,  H01L27/14689

摘要： A CMOS active pixel sensor (APS) cell structure having dual workfunction transfer gate device and method of fabrication. The transfer gate device comprises a dielectric layer formed on a substrate and a dual workfunction gate conductor layer formed on the dielectric layer comprising a first conductivity type doped region and an abutting second conductivity type doped region. The transfer gate device defines a channel region where charge accumulated by a photosensing device is transferred to a diffusion region. A silicide structure is formed atop the dual workfunction gate conductor layer for electrically coupling the first and second conductivity type doped regions. In one embodiment, the silicide contact is smaller in area dimension than an area dimension of said dual workfunction gate conductor layer. Presence of the silicide strap prevents the diodic behavior from allowing one or the other side of the gate to float to an indeterminate voltage.

摘要翻译： 具有双功能转移栅极器件和制造方法的CMOS有源像素传感器（APS）单元结构。 传输栅极器件包括形成在衬底上的电介质层和形成在包括第一导电类型掺杂区和邻接第二导电类型掺杂区的电介质层上的双功函数栅导体层。 传输门装置限定了由光敏装置累积的电荷被传送到扩散区的沟道区。 在双功函数栅极导体层顶部形成硅化物结构，用于电耦合第一和第二导电类型掺杂区域。 在一个实施例中，硅化物接触面积尺寸小于所述双功函数栅极导体层的面积尺寸。 硅化物带的存在防止了双极性行为允许栅极的一侧或另一侧浮动到不确定的电压。

公开(公告)号：US20080128767A1

公开(公告)日：2008-06-05

申请号：US11565801

申请日：2006-12-01

申请人： James W. Adkisson ,  John J. Ellis-Monaghan ,  R. Michael Guidash ,  Mark D. Jaffe ,  Edward T. Nelson ,  Richard J. Rassel ,  Charles V. Stancampiano

发明人： James W. Adkisson ,  John J. Ellis-Monaghan ,  R. Michael Guidash ,  Mark D. Jaffe ,  Edward T. Nelson ,  Richard J. Rassel ,  Charles V. Stancampiano

IPC分类号： H01L27/146 ,  H01L31/18

CPC分类号： H01L27/14609 ,  H01L27/14643 ,  H01L27/14689

摘要： A CMOS active pixel sensor (APS) cell structure having dual workfunction transfer gate device and method of fabrication. The transfer gate device comprises a dielectric layer formed on a substrate and a dual workfunction gate conductor layer formed on the dielectric layer comprising a first conductivity type doped region and an abutting second conductivity type doped region. The transfer gate device defines a channel region where charge accumulated by a photosensing device is transferred to a diffusion region. A silicide structure is formed atop the dual workfunction gate conductor layer for electrically coupling the first and second conductivity type doped regions. In one embodiment, the silicide contact is smaller in area dimension than an area dimension of said dual workfunction gate conductor layer. Presence of the silicide strap prevents the diodic behavior from allowing one or the other side of the gate to float to an indeterminate voltage.

摘要翻译： 具有双功能转移栅极器件和制造方法的CMOS有源像素传感器（APS）单元结构。 传输栅极器件包括形成在衬底上的电介质层和形成在包括第一导电类型掺杂区和邻接第二导电类型掺杂区的电介质层上的双功函数栅导体层。 传输门装置限定了由光敏装置累积的电荷被传送到扩散区的沟道区。 在双功函数栅极导体层顶部形成硅化物结构，用于电耦合第一和第二导电类型掺杂区域。 在一个实施例中，硅化物接触面积尺寸小于所述双功函数栅极导体层的面积尺寸。 硅化物带的存在防止了双极性行为允许栅极的一侧或另一侧浮动到不确定的电压。

公开(公告)号：US20100097511A1

公开(公告)日：2010-04-22

申请号：US12641589

申请日：2009-12-18

申请人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Charles F. Musante ,  Richard J. Rassel

发明人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Charles F. Musante ,  Richard J. Rassel

IPC分类号： H04N5/335 ,  G06F17/50

CPC分类号： H04N5/361 ,  G06F17/5063 ,  H04N5/359 ,  H04N5/3745

摘要： A global shutter compatible pixel circuit comprising a reset gate (RG) transistor is provided in which a dynamic voltage is applied to the drain of the reset gate transistor in order to reduce a floating diffusion (FD) leakage therethrough during signal hold time. The drain voltage of the reset gate transistor is held at a lower voltage than a circuit supply voltage to minimize the off-state leakage through the RG transistor, thus reducing the change in the voltage at the floating diffusion during the signal hold time. In addition, a design structure for such a circuit providing a dynamic voltage to the drain of a reset gate of a pixel circuit is also provided.

摘要翻译： 提供了包括复位栅极（RG）晶体管的全局快门兼容像素电路，其中动态电压被施加到复位栅极晶体管的漏极，以便减少在信号保持时间期间通过其的浮动扩散（FD）泄漏。 复位栅极晶体管的漏极电压保持在比电路电源电压更低的电压，以最小化通过RG晶体管的截止状态泄漏，从而减少信号保持时间期间浮动扩散时的电压变化。 此外，还提供了用于向像素电路的复位栅极的漏极提供动态电压的这种电路的设计结构。

公开(公告)号：US08158453B2

公开(公告)日：2012-04-17

申请号：US12699419

申请日：2010-02-03

申请人： James W. Adkisson ,  John J. Ellis-Monaghan ,  R. Michael Guidash ,  Mark D. Jaffe ,  Edward T. Nelson ,  Richard J. Rassel ,  Charles V. Stancampiano

发明人： James W. Adkisson ,  John J. Ellis-Monaghan ,  R. Michael Guidash ,  Mark D. Jaffe ,  Edward T. Nelson ,  Richard J. Rassel ,  Charles V. Stancampiano

IPC分类号： H01L21/336

CPC分类号： H01L27/14609 ,  H01L27/14643 ,  H01L27/14689

摘要： A CMOS active pixel sensor (APS) cell structure having dual workfunction transfer gate device and method of fabrication. The transfer gate device comprises a dielectric layer formed on a substrate and a dual workfunction gate conductor layer formed on the dielectric layer comprising a first conductivity type doped region and an abutting second conductivity type doped region. The transfer gate device defines a channel region where charge accumulated by a photosensing device is transferred to a diffusion region. A silicide structure is formed atop the dual workfunction gate conductor layer for electrically coupling the first and second conductivity type doped regions. In one embodiment, the silicide contact is smaller in area dimension than an area dimension of said dual workfunction gate conductor layer. Presence of the silicide strap prevents the diodic behavior from allowing one or the other side of the gate to float to an indeterminate voltage.

摘要翻译： 具有双功能转移栅极器件和制造方法的CMOS有源像素传感器（APS）单元结构。 传输栅极器件包括形成在衬底上的电介质层和形成在包括第一导电类型掺杂区和邻接第二导电类型掺杂区的电介质层上的双功函数栅导体层。 传输门装置限定了由光敏装置累积的电荷被传送到扩散区的沟道区。 在双功函数栅极导体层顶部形成硅化物结构，用于电耦合第一和第二导电类型掺杂区域。 在一个实施例中，硅化物接触面积尺寸小于所述双功函数栅极导体层的面积尺寸。 硅化物带的存在防止了双极性行为允许栅极的一侧或另一侧浮动到不确定的电压。

公开(公告)号：US07821553B2

公开(公告)日：2010-10-26

申请号：US11275417

申请日：2005-12-30

申请人： John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Alain Loiseau ,  Richard J. Rassel

发明人： John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Alain Loiseau ,  Richard J. Rassel

IPC分类号： H04N3/14 ,  H04N5/335 ,  H04N9/04 ,  H04N9/083

CPC分类号： H04N9/045

摘要： A pixel array in an image sensor, the image sensor and a digital camera including the image sensor. The image sensor includes a pixel array with colored pixels and unfiltered (color filter-free) pixels. Each unfiltered pixel occupies one or more array locations. The colored pixels may be arranged in uninterrupted rows and columns with unfiltered pixels disposed between the uninterrupted rows and columns. The image sensor may in CMOS with the unfiltered pixels reducing low-light noise and improving low-light sensitivity.

摘要翻译： 图像传感器中的像素阵列，图像传感器和包括图像传感器的数字照相机。 图像传感器包括具有彩色像素和未滤波（无滤色器）像素的像素阵列。 每个未过滤的像素占据一个或多个阵列位置。 彩色像素可以布置在不间断的行和列中，其中未过滤的像素布置在不间断的行和列之间。 图像传感器可以在CMOS中，未滤色像素降低低光噪声并改善低光灵敏度。

公开(公告)号：US07655966B2

公开(公告)日：2010-02-02

申请号：US12050967

申请日：2008-03-19

申请人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Charles F. Musante ,  Richard J. Rassel

发明人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Charles F. Musante ,  Richard J. Rassel

IPC分类号： H04N3/14

CPC分类号： H04N5/361 ,  G06F17/5063 ,  H04N5/359 ,  H04N5/3745

摘要： A global shutter compatible pixel circuit comprising a reset gate (RG) transistor is provided in which a dynamic voltage is applied to the drain of the reset gate transistor in order to reduce a floating diffusion (FD) leakage therethrough during signal hold time. The drain voltage of the reset gate transistor is held at a lower voltage than a circuit supply voltage to minimize the off-state leakage through the RG transistor, thus reducing the change in the voltage at the floating diffusion during the signal hold time. In addition, a design structure for such a circuit providing a dynamic voltage to the drain of a reset gate of a pixel circuit is also provided.

摘要翻译： 提供了包括复位栅极（RG）晶体管的全局快门兼容像素电路，其中动态电压被施加到复位栅极晶体管的漏极，以便减少在信号保持时间期间通过其的浮动扩散（FD）泄漏。 复位栅极晶体管的漏极电压保持在比电路电源电压更低的电压，以最小化通过RG晶体管的截止状态泄漏，从而减少信号保持时间期间浮动扩散时的电压变化。 此外，还提供了用于向像素电路的复位栅极的漏极提供动态电压的这种电路的设计结构。

公开(公告)号：US07491992B2

公开(公告)日：2009-02-17

申请号：US11619024

申请日：2007-01-02

申请人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Richard J. Rassel ,  Jeffrey P. Gambino

发明人： James W. Adkisson ,  John J. Ellis-Monaghan ,  Mark D. Jaffe ,  Richard J. Rassel ,  Jeffrey P. Gambino

IPC分类号： H01L31/62 ,  H01L31/113

CPC分类号： H01L27/14609 ,  H01L27/1463 ,  H01L27/14641 ,  H01L27/14643 ,  H01L31/035281

摘要： A structure (and method for forming the same) for an image sensor cell. The method includes providing a semiconductor substrate. Then, a charge collection well is formed in the semiconductor substrate, the charge collection well comprising dopants of a first doping polarity. Next, a surface pinning layer is formed in the charge collection well, the surface pinning layer comprising dopants of a second doping polarity opposite to the first doping polarity. Then, an electrically conductive push electrode is formed in direct physical contact with the surface pinning layer but not in direct physical contact with the charge collection well. Then, a transfer transistor is formed on the semiconductor substrate. The transfer transistor includes first and second source/drain regions and a channel region. The first and second source/drain regions comprise dopants of the first doping polarity. The first source/drain region is in direct physical contact with the charge collection well.

摘要翻译： 用于图像传感器单元的结构（及其形成方法）。 该方法包括提供半导体衬底。 然后，在半导体衬底中形成电荷收集阱，电荷收集阱包含第一掺杂极性的掺杂剂。 接下来，在电荷收集阱中形成表面钉扎层，表面钉扎层包括与第一掺杂极性相反的第二掺杂极性的掺杂剂。 然后，导电的推动电极形成为与表面钉扎层直接物理接触，但不与电荷收集阱直接物理接触。 然后，在半导体衬底上形成传输晶体管。 传输晶体管包括第一和第二源极/漏极区域和沟道区域。 第一和第二源/漏区包括第一掺杂极性的掺杂剂。 第一源极/漏极区域与电荷收集阱直接物理接触。