METHOD OF INTEGRATED CIRCUIT CHIP FABRICATION AND PROGRAM PRODUCT THEREFOR
    6.
    发明申请
    METHOD OF INTEGRATED CIRCUIT CHIP FABRICATION AND PROGRAM PRODUCT THEREFOR 有权
    集成电路芯片制造方法及其程序产品

    公开(公告)号:US20100318956A1

    公开(公告)日:2010-12-16

    申请号:US12482504

    申请日:2009-06-11

    IPC分类号: G06F17/50

    CPC分类号: G03F1/36

    摘要: A method of physical design for integrated circuit (IC) chip fabrication, physical design system and program product therefor. A design shape is fragmented into segments for Optical Proximity Correction (OPC) and a harmonic mean of the segments is determined. Electrical intent is determined for the shape and a harmonic mean is determined for the segments. Segments may be moved based on a effect on the harmonic mean from moving the segments, measured using a harmonic mean cost function. Finally segmented shapes are passed to OPC.

    摘要翻译: 一种用于集成电路(IC)芯片制造,物理设计系统及其程序产品的物理设计方法。 设计形状被分段为光学邻近校正(OPC)的段,并确定段的谐波平均值。 根据形状确定电气意图,并为段确定谐波平均值。 可以基于使用谐波平均成本函数测量的移动段的对谐波平均值的影响来移动段。 最后分段形状传递给OPC。

    Optimizing integrated circuit chip designs for optical proximity correction
    7.
    发明授权
    Optimizing integrated circuit chip designs for optical proximity correction 有权
    优化用于光学邻近校正的集成电路芯片设计

    公开(公告)号:US08122387B2

    公开(公告)日:2012-02-21

    申请号:US12482504

    申请日:2009-06-11

    IPC分类号: G06F17/50

    CPC分类号: G03F1/36

    摘要: A method of physical design for integrated circuit (IC) chip fabrication, physical design system and program product therefor. A design shape is fragmented into segments for Optical Proximity Correction (OPC) and a harmonic mean of the segments is determined. Electrical intent is determined for the shape and a harmonic mean is determined for the segments. Segments may be moved based on a effect on the harmonic mean from moving the segments, measured using a harmonic mean cost function. Finally segmented shapes are passed to OPC.

    摘要翻译: 一种用于集成电路(IC)芯片制造,物理设计系统及其程序产品的物理设计方法。 设计形状被分段为光学邻近校正(OPC)的段,并确定段的谐波平均值。 根据形状确定电气意图,并为段确定谐波平均值。 可以基于使用谐波平均成本函数测量的移动段的对谐波平均值的影响来移动段。 最后分段形状传递给OPC。