Method and apparatus for detecting a change in capacitance of a capacitive proximity sensor
    1.
    发明授权
    Method and apparatus for detecting a change in capacitance of a capacitive proximity sensor 失效
    用于检测电容式接近传感器的电容变化的方法和装置

    公开(公告)号:US06777958B2

    公开(公告)日:2004-08-17

    申请号:US10142641

    申请日:2002-05-10

    IPC分类号: G01R3108

    摘要: A method for detecting a change in capacitance of a capacitive sensing element having a nominal capacitance value is disclosed. In an exemplary embodiment, the method includes coupling the sensing element to a first oscillator, the first oscillator generating a first frequency dependent upon the capacitance value of the sensing element. The first frequency is compared to a reference frequency generated by a second oscillator. The change in capacitance from the nominal capacitance value is detected if the first frequency differs from said reference frequency by a determined frequency value.

    摘要翻译: 公开了一种用于检测具有标称电容值的电容式感测元件的电容变化的方法。 在示例性实施例中,该方法包括将感测元件耦合到第一振荡器,第一振荡器根据感测元件的电容值产生第一频率。 将第一频率与由第二振荡器产生的参考频率进行比较。 如果第一频率与所述参考频率不同于所确定的频率值,则检测来自标称电容值的电容的变化。

    Active circuit multi-port membrane probe for full wafer testing
    2.
    发明授权
    Active circuit multi-port membrane probe for full wafer testing 失效
    主动电路多端口膜探头,用于全面晶圆测试

    公开(公告)号:US5642054A

    公开(公告)日:1997-06-24

    申请号:US512736

    申请日:1995-08-08

    IPC分类号: G01R1/073 G01R31/00

    CPC分类号: G01R1/0735

    摘要: A membrane probe (10) for simultaneously testing two or more alternate columns or rows of integrated circuit chips (14) on the processing wafer (12) includes a flexible transparent and self planarizing membrane (22). The membrane includes circuit traces (26) and is carried by a substrate (16) defining parallel ports (18) corresponding to alternate columns or rows of circuit chips (14). Active test circuitry units (48) are mounted on the substrate (16) to perform test functions close to the site of testing. Two probes (10,110) are employed for testing each full wafer. One membrane probe (10) contains ports (18) and membrane segments (22) corresponding to one set of chips on the processing wafer, while the other probe (110) containing ports (18) and membrane segments (22) for the other interlaced set of chips on the wafer. Contact pads (34) are provided on areas of the membrane traces (26) to be visually registered through the membrane with contact pads of the chips under test. A test fixture insert (54) receives either membrane test probe (10, 110) and cooperatively forms a sealed chamber (80) in which pressurized gas urges the contact pads (34) against the contacts pads of the chips (14) for testing. Sufficient space on the surface of the test head (10,110) is provided for mounting active test circuit units (48) on the membrane test heads.

    摘要翻译: 用于同时测试处理晶片(12)上的两个或更多个交替的列或集成电路芯片(14)的膜探针(10)包括柔性透明和自平坦化膜(22)。 膜包括电路迹线(26),并且由限定与交替列或行电路芯片(14)对应的并行端口(18)的衬底(16)承载。 主动测试电路单元(48)安装在基板(16)上以执行接近测试现场的测试功能。 使用两个探针(10,110)来测试每个全晶片。 一个膜探针(10)包含对应于处理晶片上的一组芯片的端口(18)和膜片段(22),而另一个探针(110)包含用于另一个交织的端口(18)和膜片段(22) 晶片上的芯片组。 接触垫(34)设置在膜迹线(26)的区域上,以通过膜与视觉记录在一起的被测芯片的接触垫。 测试夹具插入件(54)接收膜测试探针(10,110)并且协同地形成密封腔室(80),在该腔室中,加压气体将接触焊盘(34)推压到芯片(14)的接触垫上进行测试。 提供了测试头表面上足够的空间(10,110),用于将活动测试电路单元(48)安装在膜测试头上。

    Non-contact obstacle detection system utilizing ultra sensitive capacitive sensing
    3.
    发明授权
    Non-contact obstacle detection system utilizing ultra sensitive capacitive sensing 失效
    利用超灵敏电容感应的非接触式障碍物检测系统

    公开(公告)号:US06750624B2

    公开(公告)日:2004-06-15

    申请号:US10143141

    申请日:2002-05-10

    IPC分类号: H02P700

    摘要: A non-contact obstacle detection system utilizing ultra sensitive capacitive techniques. In an exemplary embodiment, the system includes a sensing element disposed in proximity to a moveable panel and a proximity detection circuit in communication with the sensing element. The proximity detection circuit generates a differential output signal reflective of whether a foreign object is in proximity to the sensing element. In addition, a central control module is in communication with the sensing element. The central control module determines whether the differential output signal is reflective of a foreign object in proximity to the sensing element. If the central control module determines that the differential output signal is reflective of a foreign object in proximity to the sensing element, and the moveable panel is moving toward a closed position, then the central control module generates a control output signal to stop the moveable panel from moving toward the closed position.

    摘要翻译: 一种利用超灵敏电容技术的非接触式障碍物检测系统。 在示例性实施例中,系统包括设置在可移动面板附近的感测元件和与感测元件通信的接近检测电路。 接近检测电路产生反映异物是否接近感测元件的差分输出信号。 此外,中央控制模块与感测元件通信。 中央控制模块确定差分输出信号是否反映在感测元件附近的异物。 如果中央控制模块确定差分输出信号反映在感测元件附近的异物,并且可移动面板朝着关闭位置移动,则中央控制模块产生控制输出信号以停止可移动面板 从移动到关闭位置。

    Capacitive sensor assembly for use in a non-contact obstacle detection system
    4.
    发明授权
    Capacitive sensor assembly for use in a non-contact obstacle detection system 失效
    用于非接触障碍物检测系统的电容式传感器组件

    公开(公告)号:US06700393B2

    公开(公告)日:2004-03-02

    申请号:US10142680

    申请日:2002-05-10

    IPC分类号: G01R2726

    摘要: A capacitive sensor assembly is disclosed. In an exemplary embodiment, the assembly includes a capacitive strip having an elongated body for flexible mounting to a panel along a bottom surface of the elongated body. A first elongated planar conductor is contained within an upper section of the elongated body, while a longitudinal cavity is formed through a central portion of the elongated body. The longitudinal cavity is disposed between the planar conductor and the bottom surface. A capacitance detector module is inserted within the longitudinal cavity, the capacitance detector module including a capacitance detector circuit therein that is coupled to the first elongated planar conductor.

    摘要翻译: 公开了一种电容传感器组件。 在示例性实施例中,组件包括具有细长主体的电容条,用于沿着细长主体的底表面柔性地安装到面板。 第一细长平面导体被包含在细长主体的上部中,而纵向空腔通过细长体的中心部分形成。 纵向腔体设置在平面导体和底面之间。 电容检测器模块插入纵向腔内,电容检测器模块包括耦合到第一细长平面导体的电容检测器电路。

    Cast elastomer/membrane test probe assembly
    5.
    发明授权
    Cast elastomer/membrane test probe assembly 失效
    铸弹性体/膜测试探头组件

    公开(公告)号:US5600256A

    公开(公告)日:1997-02-04

    申请号:US387674

    申请日:1995-02-13

    IPC分类号: G01R1/073 G01R31/02

    CPC分类号: G01R1/0735 Y10T29/49158

    摘要: A flexible membrane (12) of an integrated circuit chip test probe is provided with raised contact features (14) on one side arranged in the pattern of contact pads of the chip to be tested. During manufacture, the membrane, in the area of its raised contact features, is specifically shaped by applying a vacuum to the outside of the membrane and casting a solid resilient elastomer (26) in place on the other side of the membrane to act as a shape retaining solid backup and to provide an anti-drape (226) shaped membrane (212) or to ensure planarity (326) of the ends of the membrane contact features (314). The vacuum may be used to pull the membrane and its contacts against a shape defining mandrel (60, 260, 360) while the elastomer is cast into place.

    摘要翻译: 集成电路芯片测试探针的柔性膜(12)在被测芯片的接触焊盘的图案的一侧上设有凸起的接触特征(14)。 在制造过程中,膜在其凸起接触特征的区域中通过向膜的外部施加真空并将固体弹性弹性体(26)浇铸在膜的另一侧上的位置而特别地成形为充当 形状保持固体支撑并且提供防悬垂(226)形状的膜(212)或确保膜接触特征(314)的端部的平坦度(326)。 当将弹性体浇铸到位时,可以使用真空将膜及其接触件压靠在限定心轴(60,260,360)的形状上。

    Powered door object detection system and method
    6.
    发明授权
    Powered door object detection system and method 失效
    电动门对象检测系统及方法

    公开(公告)号:US07151350B2

    公开(公告)日:2006-12-19

    申请号:US10776675

    申请日:2004-02-11

    摘要: A non-contact detection system and method for detecting obstructions in relation to a powered door on a vehicle such that contact with the door may be prevented. The detection system includes an object detection sensor located on the powered door for sensing an object within an adjustable sensing zone. A door position sensor senses position of the door relative to at least one of an open and closed door position. A controller adjusts the sensing zone of the object detection sensor as a function of the sensed door position.

    摘要翻译: 一种用于检测与车辆上的电动门相关的障碍物的非接触检测系统和方法,可以防止与门的接触。 检测系统包括位于动力门上的物体检测传感器,用于感测可调节检测区域内的物体。 门位置传感器相对于打开和关闭门位置中的至少一个感测门的位置。 控制器根据检测到的门位置来调节物体检测传感器的感测区域。

    Multiport membrane probe for full-wafer testing
    7.
    发明授权
    Multiport membrane probe for full-wafer testing 失效
    用于全片测试的多端口膜探针

    公开(公告)号:US5623214A

    公开(公告)日:1997-04-22

    申请号:US708360

    申请日:1996-09-04

    CPC分类号: G01R1/0735

    摘要: A membrane probe (10) for simultaneously testing two or more columns or rows of integrated circuits (37) while still on the wafer (56) upon which they are manufactured includes a flexible visually clear and self planarizing membrane (18) having circuit traces (22). A substrate (12) on which the membrane (18) is mounted features parallel ports (14) corresponding to alternate columns or rows of circuit chips (37) on the wafer to be tested. Two such substrates (12,112) thus forming two alternately used probe test heads (10,110) are employed for testing each full wafer, one test head (10) containing ports (14) corresponding to one set of alternate wafer columns or rows, the other test head (110) containing ports (114) corresponding to the remaining interlaced wafer columns or rows. Probe contact pads (30) are electroplated on areas of the traces (22) so that the contact pads (30) are visually registrable through the substrate ports. The probe test heads (10,110) have a configuration, dimension and structure like that of the wafer (56) itself so that automated pick and place equipment employed for handling the wafers (56) may also be used to handle the probe test heads (10,110). A unique pair of test fixture inserts (34,134) is adapted to receive and detachably secure a selected probe test head (11,110) to the its corresponding test fixture insert.

    摘要翻译: 用于同时测试两个或更多个列或列的集成电路(37)而仍在其上制造它们的晶片(56)上的膜探针(10)包括具有电路迹线的柔性视觉清晰和自平坦化膜(18) 22)。 其上安装有膜(18)的衬底(12)具有与待测晶片上的交替列或行电路芯片(37)相对应的并行端口(14)。 采用这样形成两个交替使用的探针测试头(10,110)的两个这样的基片(12,112)来测试每个完整的晶片,一个测试头(10)包含对应于一组交替晶片列或行的端口(14),另一个测试 头部(110)包含对应于剩余的隔行晶片列或行的端口(114)。 探针接触焊盘(30)电镀在迹线(22)的区域上,使得接触焊盘(30)在视觉上可通过衬底端口注册。 探针测试头(10,110)具有类似于晶片(56)本身的构造,尺寸和结构,使得用于处理晶片(56)的自动拾取和放置设备也可用于处理探针测试头(10,110 )。 独特的一对测试夹具插入件(34,134)适于将选定的探针测试头(11,110)接收并可拆卸地固定到其对应的测试夹具插入件上。

    Alignment mark detector for electron beam lithography
    8.
    发明授权
    Alignment mark detector for electron beam lithography 失效
    用于电子束光刻的对准标记检测器

    公开(公告)号:US4803644A

    公开(公告)日:1989-02-07

    申请号:US778572

    申请日:1985-09-20

    CPC分类号: H01J37/3045

    摘要: A hardware system is disclosed for detecting alignment marks on a substrate in connection with electron beam lithography. The system is considerably faster than prior software approaches. A scanning signal derived from backscattered electrons as the beam scans the substrate is stored and updated in a set of shift registers as scanning proceeds. The signals in the scanning shift registers are compared with a predetermined reference signal, corresponding to the expected scanning signal when the beam traverses an edge of an alignment mark, stored in another set of shift registers. A correlation is obtained between the scanning and reference signals by multiplying the values of the corresponding cells in the scanning and reference registers, and accumulating and weighting the result. The locations of the maximum positive and negative correlations, and hence the locations of the opposed edges of the alignment mark, are obtained by means of a timing mechanism coordinated with the scanning.

    摘要翻译: 公开了用于检测与电子束光刻有关的衬底上的对准标记的硬件系统。 该系统比以前的软件方法快得多。 随着扫描进行,随着扫描基板的反向散射电子的扫描信号被存储并更新在一组移位寄存器中。 当存储在另一组移位寄存器中时,将扫描移位寄存器中的信号与预定的参考信号进行比较,该参考信号对应于期望的扫描信号,当波束穿过对准标记的边缘时。 通过将扫描和参考寄存器中的相应单元格的值相乘,并对结果进行累积和加权,在扫描和参考信号之间获得相关性。 通过与扫描协调的定时机制来获得最大正和负相关的位置以及因此对准标记的相对边缘的位置。

    Control system and method for diversity antenna system
    9.
    发明授权
    Control system and method for diversity antenna system 失效
    分集天线系统的控制系统和方法

    公开(公告)号:US07546146B2

    公开(公告)日:2009-06-09

    申请号:US11199809

    申请日:2005-08-09

    IPC分类号: H04B7/185 H04W4/00

    CPC分类号: H04B7/0814

    摘要: A control system and method for controlling switching between and among multiple antennas in a diversity antenna system comprising a radio head unit associated with a radio receiver; two or more antennas, either located in separate antenna modules or co-located in the same antenna module; a switch circuit; and a single cable. Control signals for controlling switching are provided as changes in a DC power supply signal carried on the single cable. In the case of multiple antenna modules, the radio head unit and the antenna modules are connected by the single cable using a daisy-chain architecture.

    摘要翻译: 一种用于控制分集天线系统中的多个天线之间和之间的切换的控制系统和方法,包括与无线电接收机相关联的无线电头单元; 两个或更多个天线,位于单独的天线模块中或共同位于相同的天线模块中; 开关电路; 和单根电缆。 作为用于控制切换的控制信号被提供为在单个电缆上承载的直流电源信号的变化。 在多个天线模块的情况下,无线电头单元和天线模块通过使用菊花链架构的单根电缆连接。

    Probe for jesting an electrical circuit chip
    10.
    发明授权
    Probe for jesting an electrical circuit chip 失效
    探针用于测试电路芯片

    公开(公告)号:US5313157A

    公开(公告)日:1994-05-17

    申请号:US875511

    申请日:1992-04-29

    CPC分类号: G01R1/0735

    摘要: A membrane probe (10, 12, 14, 16, 58, 144) for testing integrated circuits (56,138) while still on the wafer upon which they are manufactured includes a flexible visually clear and self planarizing membrane (26) having circuit traces (20) and ground shielding planes (14), terminating resistor (152) and active buffer chips (172) formed thereon. Probe contact pads (36,38) electroplated on areas of the traces, and connector pads (32) plated on the membrane facilitate rapid detachable connection to a test fixture (50). The probe has a configuration, dimension and structure like that of the wafer itself so that automated pick and place equipment (136,142) employed for handling the wafers (138) may also be used to handle the probes (144). An unique test fixture (50) is adapted to receive and detachably secure a selected probe to the fixture.A metal-on-elastomer annulus (88,104) is employed in the test fixture to make electrical contact between contact pads (32) plated on the back side of the membrane probe and a printed circuit board that is used to route signals to the testing equipment.

    摘要翻译: 用于测试集成电路(56,138)同时仍在制造它们的晶片上的膜探针(10,12,14,16,58,144)包括具有电路迹线(20)的柔性视觉清晰和自平坦化膜(26) )和接地屏蔽平面(14),终端电阻(152)和形成在其上的有源缓冲芯片(172)。 在迹线的区域上电镀的探针接触垫(36,38),以及镀在膜上的连接器垫(32)促进了与测试夹具(50)的快速可拆卸连接。 探针具有类似于晶片本身的构造,尺寸和结构,使得用于处理晶片(138)的自动拾取和放置设备(136,142)也可用于处理探针(144)。 独特的测试夹具(50)适于将所选择的探头接收并可拆卸地固定到固定装置。 在测试夹具中使用金属弹性体环(88,104),以在电镀在膜探针背面的接触垫(32)和用于将信号路由到测试设备的印刷电路板之间进行电接触 。