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公开(公告)号：US08389314B2
公开(公告)日：2013-03-05
申请号：US11538281
申请日：2006-10-03
申请人： John R. Martin , Thomas D. Chen , Jinbo Kuang , Thomas Kieran Nunan , Xin Zhang
发明人： John R. Martin , Thomas D. Chen , Jinbo Kuang , Thomas Kieran Nunan , Xin Zhang
IPC分类号： H01L21/00
CPC分类号： B81B3/001 , B81B2201/0257 , B81C2201/115
摘要： A method of producing a MEMS device provides a MEMS apparatus having released structure. The MEMS apparatus is formed at least in part from an SOI wafer having a first layer, a second layer spaced from the first layer, and an insulator layer between the first layer and second layer. The first layer has a top surface, while the second layer has a bottom surface facing the top surface. After providing the MEMS apparatus, the method increases the roughness of at least the top surface of the first layer or the bottom surface of the second layer.
摘要翻译： 制造MEMS器件的方法提供了具有释放结构的MEMS装置。 MEMS器件至少部分地由具有第一层，与第一层隔开的第二层和在第一层和第二层之间的绝缘体层的SOI晶片形成。 第一层具有顶表面，而第二层具有面向顶表面的底表面。 在提供MEMS装置之后，该方法增加了至少第一层的顶表面或第二层的底表面的粗糙度。
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公开(公告)号：US20080081391A1
公开(公告)日：2008-04-03
申请号：US11538281
申请日：2006-10-03
申请人： John R. Martin , Thomas D. Chen , Jinbo Kuang , Thomas Kieran Nunan , Xin Zhang
发明人： John R. Martin , Thomas D. Chen , Jinbo Kuang , Thomas Kieran Nunan , Xin Zhang
IPC分类号： H01L21/00
CPC分类号： B81B3/001 , B81B2201/0257 , B81C2201/115
摘要： A method of producing a MEMS device provides a MEMS apparatus having released structure. The MEMS apparatus is formed at least in part from an SOI wafer having a first layer, a second layer spaced from the first layer, and an insulator layer between the first layer and second layer. The first layer has a top surface, while the second layer has a bottom surface facing the top surface. After providing the MEMS apparatus, the method increases the roughness of at least the top surface of the first layer or the bottom surface of the second layer.
摘要翻译： 制造MEMS器件的方法提供了具有释放结构的MEMS装置。 MEMS器件至少部分地由具有第一层，与第一层隔开的第二层和在第一层和第二层之间的绝缘体层的SOI晶片形成。 第一层具有顶表面，而第二层具有面向顶表面的底表面。 在提供MEMS装置之后，该方法增加了至少第一层的顶表面或第二层的底表面的粗糙度。
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公开(公告)号：US20050229703A1
公开(公告)日：2005-10-20
申请号：US11106354
申请日：2005-04-14
申请人： John Geen , William Clark , Jinbo Kuang
发明人： John Geen , William Clark , Jinbo Kuang
CPC分类号： G01C19/5719 , G01C19/574
摘要： A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at least one supporting structure supporting the bar. The at least one structure is coupled to a substrate underlying the frames. The structures allow the bar to rotate at a pivot point when the frames move in anti-phase to one another along substantially parallel axes but substantially prevent in-phase movements of the frames.
摘要翻译： 耦合装置允许惯性传感器元件框架沿着平行轴线的相位移动，但是基本上防止框架的相位移动。 联接装置包括连接在第一和第二传感器元件框架之间的杆和支撑杆的至少一个支撑结构。 至少一个结构耦合到框架下方的基板。 当框架沿着基本上平行的轴线彼此反相移动而基本上防止框架的相位移动时，结构允许杆在枢转点处旋转。
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4.发明授权Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies 有权惯性传感器对正交误差和微加工误差的灵敏度降低公开(公告)号：US08266961B2
公开(公告)日：2012-09-18
申请号：US12535477
申请日：2009-08-04
申请人： Jinbo Kuang , John A. Geen
发明人： Jinbo Kuang , John A. Geen
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies include a gyroscope incorporating two specially-configured single-axis gyroscopes for sensing rotations about two orthogonal axes (the axes of sensitivity) in the device plane, where each single-axis gyroscope includes a resonator having two rotationally-dithered shuttles interconnected by a fork and each shuttle is configured to tilt out-of-plane along a tilt axis perpendicular to the axis of sensitivity and includes corresponding Coriolis sensing electrodes positioned along an axis perpendicular to the tilt axis (i.e., parallel to the axis of sensitivity). The two single-axis gyroscopes may be interconnected, e.g., by one or more in-phase or anti-phase couplings interconnecting the forks and/or the shuttles.
摘要翻译： 惯性传感器对正交误差和微加工不精确度的灵敏度降低，包括一个陀螺仪，包括两个特别配置的单轴陀螺仪，用于感测设备平面中两个正交轴（灵敏轴）的旋转，其中每个单轴陀螺仪包括谐振器 具有通过叉和每个梭互连的两个旋转抖动的梭子被配置为沿着垂直于灵敏度轴的倾斜轴倾斜于平面外，并且包括沿着垂直于倾斜轴的轴定位的对应的科里奥利感测电极（即， 平行于灵敏度轴）。 两个单轴陀螺仪可以例如通过将叉和/或梭子互连的一个或多个同相或反相耦合互连。
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5.发明申请Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers 有权使用压电传感器的压电传感器和惯性传感器公开(公告)号：US20120210790A1
公开(公告)日：2012-08-23
申请号：US13461961
申请日：2012-05-02
CPC分类号： G01C19/56 , G01C19/5677 , G01P15/09 , Y10T29/42
摘要： An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.
摘要翻译： 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。
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公开(公告)号：US20060230830A1
公开(公告)日：2006-10-19
申请号：US11106053
申请日：2005-04-14
申请人： John Geen , Jinbo Kuang
发明人： John Geen , Jinbo Kuang
IPC分类号： G01P15/10
CPC分类号： G01C19/574
摘要： An inertial sensor includes a cross-quad configuration of four interconnected sensor elements. Each sensor element has a frame and a resonator suspended within the frame. The sensor elements are arranged so that the frames of adjacent sensor elements are allowed to move in anti-phase to one another but are substantially prevented from moving in phase with one another. The sensor elements may be configured in a horizontally coupled arrangement, a vertically coupled arrangement, or a fully coupled arrangement. A pair of sensor elements may be vertically coupled.
摘要翻译： 惯性传感器包括四个互连传感器元件的十字形配置。 每个传感器元件具有悬架在框架内的框架和谐振器。 传感器元件布置成使得相邻传感器元件的框架被允许彼此反相移动，但是基本上被阻止彼此相位移动。 传感器元件可以被配置为水平耦合布置，垂直耦合布置或完全耦合布置。 一对传感器元件可以垂直联接。
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7.发明授权Piezoelectric transducers and inertial sensors using piezoelectric transducers 有权使用压电换能器的压电换能器和惯性传感器公开(公告)号：US08408060B2
公开(公告)日：2013-04-02
申请号：US13461961
申请日：2012-05-02
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5677 , G01P15/09 , Y10T29/42
摘要： An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.
摘要翻译： 惯性传感器包括驱动压电换能器，用于实现谐振器的振荡，感测压电换能器，以便能够检测惯性传感器的运动，以及压电补偿元件在驱动和感测压电换能器之间基本上等距离，其中补偿元件和 谐振器形成具有电容间隙的相应的电容器，并且其中，在谐振器的振荡期间，用补偿元件测量存储在电容器中的静电电荷的变化，并且被修改以便改变谐振器的振荡。
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公开(公告)号：US20100043551A1
公开(公告)日：2010-02-25
申请号：US12194288
申请日：2008-08-19
申请人： John A. Geen , Jinbo Kuang , Vineet Kumar
发明人： John A. Geen , Jinbo Kuang , Vineet Kumar
IPC分类号： G01R27/26 , G01P15/125 , G01P15/00
CPC分类号： G01P15/097 , G01C19/5719 , G01C19/5726 , G01P15/125
摘要： In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the electrical charge accumulated on a drive capacitor and comparing the measured electrical charge to a nominal electrical charge to determine the displacement of the movable shuttle.
摘要翻译： 在具有在振荡中驱动的可移动梭的微加工装置中，测量累积在相对的驱动电容器上的电荷，以确定可移动梭的位移。 或者，在这种微加工装置中，测量累积在驱动电容器上的电荷并将测量的电荷与标称电荷比较以确定可移动梭的位移。
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公开(公告)号：US07347094B2
公开(公告)日：2008-03-25
申请号：US11106354
申请日：2005-04-14
申请人： John A. Geen , William A. Clark , Jinbo Kuang
发明人： John A. Geen , William A. Clark , Jinbo Kuang
IPC分类号： G01P9/04
CPC分类号： G01C19/5719 , G01C19/574
摘要： A coupling apparatus allows anti-phase movements of inertial sensor element frames along parallel axes but substantially prevents in-phase movements of the frames. The coupling apparatus includes a bar coupled between first and second sensor element frames and at least one supporting structure supporting the bar. The at least one structure is coupled to a substrate underlying the frames. The structures allow the bar to rotate at a pivot point when the frames move in anti-phase to one another along substantially parallel axes but substantially prevent in-phase movements of the frames.
摘要翻译： 耦合装置允许惯性传感器元件框架沿着平行轴线的相位移动，但是基本上防止框架的相位移动。 联接装置包括连接在第一和第二传感器元件框架之间的杆和支撑杆的至少一个支撑结构。 至少一个结构耦合到框架下方的基板。 当框架沿着基本上平行的轴线彼此反相移动而基本上防止框架的相位移动时，结构允许杆在枢转点处旋转。
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公开(公告)号：US07980133B2
公开(公告)日：2011-07-19
申请号：US12194288
申请日：2008-08-19
申请人： John A. Geen , Jinbo Kuang , Vineet Kumar
发明人： John A. Geen , Jinbo Kuang , Vineet Kumar
IPC分类号： G01P9/04
CPC分类号： G01P15/097 , G01C19/5719 , G01C19/5726 , G01P15/125
摘要： In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the electrical charge accumulated on a drive capacitor and comparing the measured electrical charge to a nominal electrical charge to determine the displacement of the movable shuttle.
摘要翻译： 在具有在振荡中驱动的可移动梭的微加工装置中，测量累积在相对的驱动电容器上的电荷，以确定可移动梭的位移。 或者，在这种微加工装置中，测量累积在驱动电容器上的电荷并将测量的电荷与标称电荷比较以确定可移动梭的位移。
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