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公开(公告)号:US20050185690A1
公开(公告)日:2005-08-25
申请号:US11035938
申请日:2005-01-13
申请人: John Rule , Paolo Zambon , Tom Watson , Omez Mesina , Weijie Zheng
发明人: John Rule , Paolo Zambon , Tom Watson , Omez Mesina , Weijie Zheng
IPC分类号: H01S3/134 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号: H01S3/036 , H01S3/097 , H01S3/10069 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/225 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要: The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
摘要翻译: 本发明涉及一种氟气放电激光器系统,并且当气体放电激光器工作并消耗氟时,控制补充氟气。