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1.Method and apparatus for controlling the output of a gas discharge laser system 有权
标题翻译: 用于控制气体放电激光系统的输出的方法和装置公开(公告)号:US20050185690A1
公开(公告)日:2005-08-25
申请号:US11035938
申请日:2005-01-13
申请人: John Rule , Paolo Zambon , Tom Watson , Omez Mesina , Weijie Zheng
发明人: John Rule , Paolo Zambon , Tom Watson , Omez Mesina , Weijie Zheng
CPC分类号: H01S3/036 , H01S3/097 , H01S3/10069 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/225 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要: The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
摘要翻译: 本发明涉及一种氟气放电激光器系统,并且当气体放电激光器工作并消耗氟时,控制补充氟气。
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2.Method and apparatus for controlling the output of a gas discharge laser system 有权
标题翻译: 用于控制气体放电激光系统的输出的方法和装置公开(公告)号:US07277464B2
公开(公告)日:2007-10-02
申请号:US11035938
申请日:2005-01-13
申请人: John A. Rule , Paolo Zambon , Tom A. Watson , Omez S. Mesina , Weijie Zheng
发明人: John A. Rule , Paolo Zambon , Tom A. Watson , Omez S. Mesina , Weijie Zheng
IPC分类号: H01S3/22
CPC分类号: H01S3/036 , H01S3/097 , H01S3/10069 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/225 , H01S3/2258 , H01S3/2308 , H01S3/2366
摘要: The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
摘要翻译: 本发明涉及一种氟气放电激光器系统,并且当气体放电激光器工作并消耗氟时,控制补充氟气。
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