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    Method and apparatus for controlling the output of a gas discharge MOPA laser system
    2.
    发明申请
    Method and apparatus for controlling the output of a gas discharge MOPA laser system 有权

    公开(公告)号：US20050135451A1

    公开(公告)日：2005-06-23

    申请号：US10740659

    申请日：2003-12-18

    申请人： John Rule ,  Paolo Zambon

    发明人： John Rule ,  Paolo Zambon

    IPC分类号： H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

    CPC分类号： H01S3/225 ,  H01S3/134 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

    摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region; based upon the identity of the identified region, and parameters of that region relative to the condition of an actuator in each of the oscillator and the amplifier, determining a necessary modification to the actuator for each of the oscillator and the amplifier to attempt to move the multidimensional operating point from the parameters indicated by the position of the multidimensional operating point being in the particular region to a preselected region in the coordinate system. The method and apparatus may also comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; changing the gas mixture in one or both of the oscillator and amplifier by injection of at least one constituent gas in the gas mixture at least part of which injection for the respective oscillator and amplifier is based upon a calculated estimate of consumption of the at least one constituent gas in the gas mixture in the respective oscillator and amplifier from a prior change in the gas mixture; allowing the oscillator and amplifier to operate for a selected period of time with the changed gas mixture; determining the position of an operating point in the multidimensional variable state space and based upon the location of the operating point in the multidimensional state space determining a respective boost factor to modify the calculated estimate of consumption for the current change of the gas mixture in the respective oscillator and amplifier. A third dimension may be added relating to a spectral characteristic of the output of the oscillator or the amplifier, which may be bandwidth of the output of the amplifier, and including modifying that output with a beam correction device.

    Method and apparatus for controlling the output of a gas discharge MOPA laser system
    3.
    发明申请
    Method and apparatus for controlling the output of a gas discharge MOPA laser system 有权

    公开(公告)号：US20050238077A9

    公开(公告)日：2005-10-27

    申请号：US10740659

    申请日：2003-12-18

    申请人： John Rule ,  Paolo Zambon

    发明人： John Rule ,  Paolo Zambon

    IPC分类号： H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

    CPC分类号： H01S3/225 ,  H01S3/134 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

    摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region; based upon the identity of the identified region, and parameters of that region relative to the condition of an actuator in each of the oscillator and the amplifier, determining a necessary modification to the actuator for each of the oscillator and the amplifier to attempt to move the multidimensional operating point from the parameters indicated by the position of the multidimensional operating point being in the particular region to a preselected region in the coordinate system. The method and apparatus may also comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; changing the gas mixture in one or both of the oscillator and amplifier by injection of at least one constituent gas in the gas mixture at least part of which injection for the respective oscillator and amplifier is based upon a calculated estimate of consumption of the at least one constituent gas in the gas mixture in the respective oscillator and amplifier from a prior change in the gas mixture; allowing the oscillator and amplifier to operate for a selected period of time with the changed gas mixture; determining the position of an operating point in the multidimensional variable state space and based upon the location of the operating point in the multidimensional state space determining a respective boost factor to modify the calculated estimate of consumption for the current change of the gas mixture in the respective oscillator and amplifier. A third dimension may be added relating to a spectral characteristic of the output of the oscillator or the amplifier, which may be bandwidth of the output of the amplifier, and including modifying that output with a beam correction device.

    Chemically sintered composite electrodes and manufacturing processes
    5.
    发明授权
    Chemically sintered composite electrodes and manufacturing processes 有权
    化学烧结复合电极及制造工艺

    公开(公告)号：US09583778B2

    公开(公告)日：2017-02-28

    申请号：US11888943

    申请日：2007-08-03

    申请人： Samuel B. Schaevitz ,  Zachary Byars ,  Ramanan Ganeshananthan ,  Atul Verma ,  John Rule

    发明人： Samuel B. Schaevitz ,  Zachary Byars ,  Ramanan Ganeshananthan ,  Atul Verma ,  Vladimir Petrovsky ,  John Rule

    IPC分类号： H01M8/1213 ,  H01M8/1286 ,  H01M8/1004 ,  H01M8/1097 ,  H01M8/1246 ,  H01M8/12 ,  H01M4/86 ,  H01M4/88 ,  H01M8/10

    CPC分类号： H01M8/1213 ,  H01M4/8652 ,  H01M4/8657 ,  H01M4/8828 ,  H01M4/8885 ,  H01M8/1004 ,  H01M8/1097 ,  H01M8/1246 ,  H01M8/1286 ,  Y02E60/521 ,  Y02E60/525 ,  Y02P70/56 ,  Y10T428/25

    摘要： An iterative process of depositing on a solid electrolyte a coating of unconnected particles composed of an ionically conductive material. A liquid solution is also applied. The liquid solution includes an inorganic component. The deposited liquid is heated to a temperature sufficient to evaporate or otherwise remove some or all of the volatile components of the liquid solution. Typically the temperature is below 1000° and often at about 850° C. The effect of heating the solution is to cause ion conducting material in the solution to adhere to the surface of the existing ion conducting particles and form connections between these particles. This is understood to create an ion conducting skeletal support structure. Within the intrestices of this skeletal support structure, the step of heating is also understood to result in the deposition of the inorganic component that will begin to form a electron conducting structure. The process of applying the liquid solution and heating may be repeated until a sufficiently thick layer of material is laid over the solid electrolyte to provide the composite electrode structure desired.

    摘要翻译： 在固体电解质上沉积由离子导电材料组成的未连接颗粒的涂层的迭代过程。 还应用液体溶液。 液体溶液包含无机成分。 将沉积的液体加热到足以蒸发或以其它方式除去液体溶液的一些或全部挥发性组分的温度。 通常，温度低于1000°，通常在约850℃。加热溶液的效果是使溶液中的离子传导材料粘附到现有离子传导颗粒的表面上并形成这些颗粒之间的连接。 这被理解为产生离子导电骨架支撑结构。 在该骨骼支撑结构的内部，加热步骤也被理解为导致开始形成电子传导结构的无机组分的沉积。 可以重复施加液体溶液和加热的过程，直到将足够厚的材料层铺在固体电解质上以提供所需的复合电极结构。

    Method of doping a polysilicon layer on a semiconductor wafer
    6.
    发明授权
    Method of doping a polysilicon layer on a semiconductor wafer 失效
    在半导体晶片上掺杂多晶硅层的方法

    公开(公告)号：US5244831A

    公开(公告)日：1993-09-14

    申请号：US877871

    申请日：1992-05-04

    申请人： Gregory Hindman ,  John Rule ,  Jack Berg

    发明人： Gregory Hindman ,  John Rule ,  Jack Berg

    IPC分类号： H01L21/3215

    CPC分类号： H01L21/32155 ,  Y10S148/122 ,  Y10S148/123

    摘要： The present invention concerns a method for doping a polysilicon layer with phosphorous in which phosphorous oxychloride is supplied to the silicon wafer near the beginning of the oven temperature ramping of the silicon wafer. By introducing the phosphorous oxychloride earlier than in prior art methods, the present invention can reduce the poly rho and poly rho sigma of the doped polysilicon layer. Alternatively, the root DT of the diffusion of the doped material in the doped silicon region on the silicon wafer can be reduced, which helps to maintain the junction depth of the doped silicon region.

    摘要翻译： 本发明涉及一种用磷掺杂多晶硅层的方法，其中在硅晶片的烘箱温度斜坡开始附近向硅晶片提供磷酰氯。 通过比现有技术方法更早地引入磷酰氯，本发明可以减少掺杂多晶硅层的多晶硅和多晶硅。 或者，可以减少掺杂材料在硅晶片上的掺杂硅区域中的扩散的根DT，这有助于保持掺杂硅区域的结深度。

    Chemically sintered composite electrodes and manufacturing processes
    7.
    发明申请
    Chemically sintered composite electrodes and manufacturing processes 有权
    化学烧结复合电极及制造工艺

    公开(公告)号：US20090035633A1

    公开(公告)日：2009-02-05

    申请号：US11888943

    申请日：2007-08-03

    申请人： John Rule ,  Samuel B. Schaevitz ,  Zachary Byars ,  Ramanan Ganeshananthan ,  Atul Verma ,  Vladimir Petrovsky

    发明人： John Rule ,  Samuel B. Schaevitz ,  Zachary Byars ,  Ramanan Ganeshananthan ,  Atul Verma ,  Vladimir Petrovsky

    IPC分类号： H01M8/10 ,  B05D5/12 ,  B32B5/16

    CPC分类号： H01M8/1213 ,  H01M4/8652 ,  H01M4/8657 ,  H01M4/8828 ,  H01M4/8885 ,  H01M8/1004 ,  H01M8/1097 ,  H01M8/1246 ,  H01M8/1286 ,  Y02E60/521 ,  Y02E60/525 ,  Y02P70/56 ,  Y10T428/25

    摘要： An iterative process of depositing on a solid electrolyte a coating of unconnected particles composed of an ionically conductive material. A liquid solution is also applied. The liquid solution includes an inorganic component. The deposited liquid is heated to a temperature sufficient to evaporate or otherwise remove some or all of the volatile components of the liquid solution. Typically the temperature is below 1000° and often at about 850° C. The effect of heating the solution is to cause ion conducting material in the solution to adhere to the surface of the existing ion conducting particles and form connections between these particles. This is understood to create an ion conducting skeletal support structure. Within the intrestices of this skeletal support structure, the step of heating is also understood to result in the deposition of the inorganic component that will begin to form a electron conducting structure. The process of applying the liquid solution and heating may be repeated until a sufficiently thick layer of material is laid over the solid electrolyte to provide the composite electrode structure desired.

    摘要翻译： 在固体电解质上沉积由离子导电材料组成的未连接颗粒的涂层的迭代过程。 还应用液体溶液。 液体溶液包含无机成分。 将沉积的液体加热到足以蒸发或以其它方式除去液体溶液的一些或全部挥发性组分的温度。 通常，温度低于1000°，通常在约850℃。加热溶液的效果是使溶液中的离子传导材料粘附到现有离子传导颗粒的表面上并形成这些颗粒之间的连接。 这被理解为产生离子导电骨架支撑结构。 在该骨骼支撑结构的内部，加热步骤也被理解为导致开始形成电子传导结构的无机组分的沉积。 可以重复施加液体溶液和加热的过程，直到将足够厚的材料层铺在固体电解质上以提供所需的复合电极结构。