Memory elements having patterned electrodes and method of forming the same

    公开(公告)号:US07663133B2

    公开(公告)日:2010-02-16

    申请号:US11599471

    申请日:2006-11-15

    CPC classification number: H01L27/24

    Abstract: A memory element having a resistance variable material and methods for forming the same are provided. The method includes forming a plurality of first electrodes over a substrate and forming a blanket material stack over the first electrodes. The stack includes a plurality of layers, at least one layer of the stack includes a resistance variable material. The method also includes forming a first conductive layer on the stack and etching the conductive layer and at least one of the layers of the stack to form a first pattern of material stacks. The etched first conductive layer forming a plurality of second electrodes with a portion of the resistance variable material located between each of the first and second electrodes.

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