METHOD OF MANUFACTURING FILM BULK ACOUSTIC RESONATOR USING INTERNAL STRESS OF METALLIC FILM AND RESONATOR MANUFACTURED THEREBY
    1.
    发明申请
    METHOD OF MANUFACTURING FILM BULK ACOUSTIC RESONATOR USING INTERNAL STRESS OF METALLIC FILM AND RESONATOR MANUFACTURED THEREBY 有权
    使用金属膜内部应力和制造的谐振器制造薄膜泡沫谐振器的方法

    公开(公告)号:US20100132174A1

    公开(公告)日:2010-06-03

    申请号:US12684454

    申请日:2010-01-08

    IPC分类号: H01L41/22

    摘要: A method of manufacturing a film bulk acoustic resonator and the resonator manufactured thereby. The method includes the laminating a sacrificial layer on a semiconductor substrate, removing a predetermined area from the sacrificial layer to realize electric contact between a signal line of the semiconductor substrate and a lower electrode, forming the lower electrode by depositing metal film for lower electrode on the sacrificial layer, by patterning based on a shape of the sacrificial layer, forming a piezoelectric layer by depositing a piezoelectric material on the lower electrode and by patterning based on a shape of the lower electrode, and forming an upper electrode by depositing metal film on the piezoelectric layer and by patterning based on a shape of the piezoelectric layer, wherein at least one of a deposition pressure and a deposition power is controlled to generate upward stress when depositing the metal film for the lower electrode.

    摘要翻译: 一种制造薄膜体声波谐振器的方法和由此制造的谐振器。 该方法包括在半导体衬底上层叠牺牲层,从牺牲层去除预定区域以实现半导体衬底的信号线与下电极之间的电接触,通过在下电极上沉积金属膜形成下电极 牺牲层,通过基于牺牲层的形状进行图案化,通过在下电极上沉积压电材料并基于下电极的形状进行图案化形成压电层,并且通过将金属膜沉积在上而形成上电极 压电层和基于压电层的形状的图案化,其中当沉积用于下电极的金属膜时,沉积压力和沉积功率中的至少一个被控制以产生向上的应力。

    DISPLAY APPARATUS HAVING A COOLING DEVICE
    4.
    发明申请
    DISPLAY APPARATUS HAVING A COOLING DEVICE 失效
    具有冷却装置的显示装置

    公开(公告)号:US20110080708A1

    公开(公告)日:2011-04-07

    申请号:US12721661

    申请日:2010-03-11

    IPC分类号: H05K7/20 F25B21/00

    CPC分类号: H05K7/20972

    摘要: A display apparatus having a front substrate that is a display panel, a rear substrate disposed at a predetermined distance apart from the front substrate and facing the front substrate, the rear substrate comprising a back light unit, and a cooling device to remove heat generated by the rear substrate. The cooling device includes an actuator disposed between the front substrate and the rear substrate, the actuator to generate an ion wind using a voltage, a transparent electrode installed to face the actuator and which is grounded, a plurality of supports to support ends of the actuator, and a high-voltage power source to apply a voltage to the actuator.

    摘要翻译: 一种显示装置,具有作为显示面板的前面基板,与前面基板隔开预定距离并且面向前方基板的后方基板,后方基板包括背光单元,以及用于除去由 后基板。 冷却装置包括:致动器,其设置在前基板和后基板之间,致动器使用电压产生离子风;透明电极,安装成面向致动器并接地;多个支撑件,用于支撑致动器的端部; 以及向致动器施加电压的高压电源。

    MICRO-OPTICAL SWITCHING DEVICE, IMAGE DISPLAY APPARATUS INCLUDING MICRO-OPTICAL SWITCHING DEVICE, AND METHOD OF MANUFACTURING MICRO-OPTICAL SWITCHING DEVICE
    5.
    发明申请
    MICRO-OPTICAL SWITCHING DEVICE, IMAGE DISPLAY APPARATUS INCLUDING MICRO-OPTICAL SWITCHING DEVICE, AND METHOD OF MANUFACTURING MICRO-OPTICAL SWITCHING DEVICE 有权
    微光开关装置,包括微光开关装置的图像显示装置,以及制造微光开关装置的方法

    公开(公告)号:US20130070445A1

    公开(公告)日:2013-03-21

    申请号:US13461387

    申请日:2012-05-01

    IPC分类号: G09F13/04 B05D5/12 G02B26/08

    CPC分类号: G02B26/0841

    摘要: A micro-optical switching device, an image display apparatus including the micro-optical switching device, and a method of manufacturing the micro-optical switching device are provided. The micro-optical switching device includes a substrate; a first electrode disposed on the substrate and including a first opening array, wherein the first opening array includes a plurality of openings; and a second electrode disposed spaced apart from the first electrode and including a second opening array including a plurality of openings, wherein the plurality of openings of the second opening array do not overlap with the plurality of openings of the first opening array.

    摘要翻译: 提供一种微型光开关装置,包括该微型光开关装置的图像显示装置以及该微型光开关装置的制造方法。 微光开关装置包括:基板; 第一电极,其设置在所述基板上并且包括第一开口阵列,其中所述第一开口阵列包括多个开口; 以及第二电极,与第一电极间隔开并且包括包括多个开口的第二开口阵列,其中第二开口阵列的多个开口不与第一开口阵列的多个开口重叠。