摘要:
A metal line having a MoxSiy/Mo diffusion barrier of a semiconductor device and corresponding methods of fabricating the same are presented. The metal line includes an insulation layer, a diffusion barrier, and a metal layer. The insulation layer is formed on a semiconductor substrate and has a metal line forming region. The diffusion barrier is formed on a surface of the metal line forming region of the insulation layer and has a stack structure composed of a MoxSiy layer and a Mo layer. The metal layer is formed on the diffusion barrier which fills in the metal line forming region of the insulation layer.
摘要:
A metal line of a semiconductor device includes an insulation layer formed on a semiconductor substrate and a metal line forming region is formed in the insulation layer. A diffusion barrier is formed on a surface of the metal line forming region of the insulation layer, and the diffusion layer has a multi-layered structure of an Ru layer, an RuxOy layer, an IrxOy layer, and a Ti layer. A metal layer is formed on the diffusion barrier to fill the metal line forming region of the insulation layer.
摘要:
An electrical conductor having a multilayer diffusion barrier of use in a resultant semiconductor device is presented. The electrical conductor line includes an insulation layer, a diffusion barrier, and a metal line. The insulation layer is formed on a semiconductor substrate and having a metal line forming region. The diffusion barrier is formed on a surface of the metal line forming region of the insulation layer and has a multi-layered structure made of TaN layer, an MoxOy layer and an Mo layer. The metal line is formed on the diffusion barrier to fill the metal line forming region of the insulation layer.
摘要:
A metal line of a semiconductor device includes an insulation layer formed on a semiconductor substrate. The insulation layer has a metal line forming region. A diffusion barrier is formed on a surface of the metal line forming region of the insulation layer. The diffusion barrier includes a stack structure including an MoxSiyNz layer and an Mo layer. A metal layer is formed on the diffusion barrier to fill the metal line forming region of the insulation layer.
摘要:
A metal line having a MoxSiy/Mo diffusion barrier of a semiconductor device and corresponding methods of fabricating the same are presented. The metal line includes an insulation layer, a diffusion barrier, and a metal layer. The insulation layer is formed on a semiconductor substrate and has a metal line forming region. The diffusion barrier is formed on a surface of the metal line forming region of the insulation layer and has a stack structure composed of a MoxSiy layer and a Mo layer. The metal layer is formed on the diffusion barrier which fills in the metal line forming region of the insulation layer.
摘要:
A copper line having self assembled monolayer for use in ULSI semiconductor devices and methods of making the same are presented. The copper line includes an interlayer dielectric, a self-assembled monolayer, catalytic particles on the monolayer, and a copper layer on the monolayer with the catalytic particles. The method includes the steps of forming an interlayer dielectric on a semiconductor substrate having a metal line forming region; forming a self-assembled monolayer on the metal line forming region; adsorbing catalytic particles on the self-assembled monolayer; forming using an electroless process a copper seed layer on the self-assembled monolayer having the catalytic particles adsorbed thereto; and forming a copper layer on the copper seed layer to fill in the metal line forming region.
摘要:
Disclosed are a wearable behavioral pattern collecting apparatus for generating collected information by analyzing a behavioral pattern of a wearer, and generating and thereby transmitting emergency call information when an emergency situation occurs, a network including a repeater to transmit information received from the behavioral pattern collecting apparatus to a remote monitoring server, and a behavioral pattern analyzing system and method for transmitting information on an emergency accident and a position of the wearer to a corresponding institution or a corresponding person in charge when an emergency situation such as a falling accident or the emergency accident occurs by observing a change in the behavioral pattern of the wearer.
摘要:
An apparatus for detecting contact, according to the present invention, comprises: a substrate; a plurality of first electrodes which are formed on the substrate; a plurality of second electrodes which are formed on the substrate; and a controller chip for receiving applied signals from the plurality of first electrodes and the plurality of second electrodes, and determining a contact input, wherein the controller chip eliminates a value of a predetermined proportion of values from each of the signals.
摘要:
An optical measuring apparatus and method for a stereoscopic display device are capable of measuring optical characteristics of the stereoscopic display device. The optical measuring apparatus includes a test image supplier for generating a 3D test signal, a 3D display for displaying left-eye image and/or right-eye image based on the 3D test signal supplied from the test image supplier, an image selection member for selectively transmitting the left-eye image and right-eye image to be displayed on the 3D display, and a light measuring device that measures luminance of the image transmitted via the image selection member and calculates 3D image crosstalk of the left eye image and the right eye image based on the measured luminance.
摘要:
The present invention detects a candidate ROI group associated with character strings/figure strings on the basis of a result acquired through prior learning of various types of license plates, verifies the interested region candidate group detected by using at least one condition of five predetermined conditions, and determines an MBR region in the selected ROI region from the verified interested region candidate group by considering a ratio between the height and width of the ROI region to recognize the license plate for the automobile. According to the present invention, it is possible to automatically detect the location of the license plate regardless of various types of license plate specifications defined for each of countries.