公开(公告)号：US20060284114A1

公开(公告)日：2006-12-21

申请号：US11300425

申请日：2005-12-15

申请人： Joseph Olson ,  Jonathan England ,  Morgan Evans ,  Douglas Fielder ,  Gregg Norris ,  Shengwu Chang ,  Damian Brennan ,  William Callahan

发明人： Joseph Olson ,  Jonathan England ,  Morgan Evans ,  Douglas Fielder ,  Gregg Norris ,  Shengwu Chang ,  Damian Brennan ,  William Callahan

IPC分类号： H01J37/317

CPC分类号： H01J37/304 ,  H01J37/3171 ,  H01J2237/24542 ,  H01J2237/30483 ,  H01J2237/31703

摘要： A technique for uniformity tuning in an ion implanter system is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for ion beam uniformity tuning. The method may comprise generating an ion beam in an ion implanter system. The method may also comprise tuning one or more beam-line elements in the ion implanter system to reduce changes in a beam spot of the ion beam when the ion beam is scanned along a beam path. The method may further comprise adjusting a velocity profile for scanning the ion beam along the beam path such that the ion beam produces a substantially uniform ion beam profile along the beam path.

摘要翻译： 公开了一种用于离子注入机系统中均匀性调谐的技术。 在一个特定的示例性实施例中，该技术可以被实现为用于离子束均匀性调谐的方法。 该方法可以包括在离子注入机系统中产生离子束。 该方法还可以包括调整离子注入系统中的一个或多个束线元件，以便当沿着光束路径扫描离子束时，减小离子束的束斑的变化。 该方法还可以包括调整用于沿着光束路径扫描离子束的速度分布，使得离子束沿着光束路径产生基本均匀的离子束分布。

公开(公告)号：US20060076510A1

公开(公告)日：2006-04-13

申请号：US10960904

申请日：2004-10-07

申请人： Shengwu Chang ,  Antonella Cucchetti ,  Joseph Dzengeleski ,  Gregory Gibilaro ,  Rosario Mollica ,  Gregg Norris ,  Joseph Olson ,  Marie Welsch

发明人： Shengwu Chang ,  Antonella Cucchetti ,  Joseph Dzengeleski ,  Gregory Gibilaro ,  Rosario Mollica ,  Gregg Norris ,  Joseph Olson ,  Marie Welsch

IPC分类号： H01J37/317

CPC分类号： H01J37/3171 ,  H01J2237/24542 ,  H01J2237/30461 ,  H01J2237/31703

摘要： An ion beam tuning method, system and program product for tuning an ion implanter system are disclosed. The invention obtains an ion beam profile of the ion beam by, for example, scanning the ion beam across a profiler that is within an implant chamber; and tunes the ion implanter system to maximize an estimated implant current based on the ion beam profile to simultaneously optimize total ion beam current and ion beam spot width, and maximize implant current. In addition, the tuning can also position the ion beam along a desired ion beam path based on the feedback of the spot beam center, which improves ion implanter system productivity and performance by reducing ion beam setup time and provides repeatable beam angle performance for each ion beam over many setups.

摘要翻译： 公开了用于调整离子注入机系统的离子束调谐方法，系统和程序产品。 本发明通过例如扫描离子束通过植入室内的轮廓仪获得离子束的离子束轮廓; 并调整离子注入系统，以根据离子束轮廓最大化估计的注入电流，以同时优化总离子束电流和离子束斑点宽度，并最大化注入电流。 此外，调谐还可以基于点光束中心的反馈沿着期望的离子束路径定位离子束，其通过减少离子束建立时间改善离子注入系统的生产率和性能，并为每个离子提供可重复的射束角度性能 横跨许多设置。

公开(公告)号：US20080073551A1

公开(公告)日：2008-03-27

申请号：US11479397

申请日：2006-06-30

申请人： Joseph P. Dzengeleski ,  Greg Gibilaro ,  Gregg Norris ,  David Olden

发明人： Joseph P. Dzengeleski ,  Greg Gibilaro ,  Gregg Norris ,  David Olden

IPC分类号： G01K1/08

CPC分类号： H01J37/3171 ,  H01J37/244 ,  H01J37/302 ,  H01J37/32412 ,  H01J2237/24405 ,  H01J2237/24507

摘要： A Faraday sensor test system includes a Faraday sensor configured to intercept a quantity of ions incident on said Faraday sensor, a primary conductor and a test conductor coupled to said Faraday sensor, and a controller. The controller is configured to automatically provide a test current into the test conductor in response to a test condition. The controller is further configured to receive a return current from the primary conductor in response to the test current and to compare the return current to a value representative of the test current to determine a condition of a conductive path comprising the test conductor, the Faraday sensor, and the primary conductor.

摘要翻译： 法拉第传感器测试系统包括法拉第传感器，其被配置为拦截入射在所述法拉第传感器上的一定数量的离子，连接到所述法拉第传感器的主导体和测试导体以及控制器。 控制器被配置为响应于测试条件自动向测试导体提供测试电流。 控制器还被配置为响应于测试电流从主导体接收返回电流，并将返回电流与表示测试电流的值进行比较，以确定包含测试导体的导电路径的状况，法拉第传感器 ，和主导体。

公开(公告)号：US07564048B2

公开(公告)日：2009-07-21

申请号：US11479397

申请日：2006-06-30

申请人： Joseph P. Dzengeleski ,  Greg Gibilaro ,  Gregg Norris ,  David Olden ,  Tamer Onat

发明人： Joseph P. Dzengeleski ,  Greg Gibilaro ,  Gregg Norris ,  David Olden ,  Tamer Onat

IPC分类号： G21K5/10

CPC分类号： H01J37/3171 ,  H01J37/244 ,  H01J37/302 ,  H01J37/32412 ,  H01J2237/24405 ,  H01J2237/24507

摘要： A Faraday sensor test system includes a Faraday sensor configured to intercept a quantity of ions incident on said Faraday sensor, a primary conductor and a test conductor coupled to said Faraday sensor, and a controller. The controller is configured to automatically provide a test current into the test conductor in response to a test condition. The controller is further configured to receive a return current from the primary conductor in response to the test current and to compare the return current to a value representative of the test current to determine a condition of a conductive path comprising the test conductor, the Faraday sensor, and the primary conductor.

摘要翻译： 法拉第传感器测试系统包括法拉第传感器，其被配置为拦截入射在所述法拉第传感器上的一定数量的离子，耦合到所述法拉第传感器的主导体和测试导体以及控制器。 控制器被配置为响应于测试条件自动向测试导体提供测试电流。 控制器还被配置为响应于测试电流从主导体接收返回电流，并将返回电流与表示测试电流的值进行比较，以确定包含测试导体的导电路径的状况，法拉第传感器 ，和主导体。