公开(公告)号：US20070097381A1

公开(公告)日：2007-05-03

申请号：US11263600

申请日：2005-10-31

申请人： Joseph Tobiason ,  Michael Nahum ,  Paul Gladnick

发明人： Joseph Tobiason ,  Michael Nahum ,  Paul Gladnick

IPC分类号： G01B11/24

CPC分类号： G01B11/25 ,  G06T7/521

摘要： A hand-size structured-light three-dimensional metrology imaging system and method. Laser illumination stripes are scanned across a workpiece surface for obtaining z-height and x-coordinate information. A Scheimpflug configuration is used. Utilizing this configuration, a laser illumination stripe across a raised workpiece portion will be shown in a contour image at the image sensor in a focused manner, such that the offsets along the contour image line due to the raised portions of the workpiece surface can be accurately converted to a z-height measurement. The y-axis positions associated with each of the contour images, used for reassembling the information from the contour images into a surface map for the workpiece, may be determined without the need for a position sensor, by including a reference object in the contour images.

摘要翻译： 手工尺寸结构光三维计量成像系统及方法。 激光照射条纹跨工件表面扫描，以获得z高度和x坐标信息。 使用Scheimpflug配置。 利用这种构造，将以聚焦方式在跨越升高的工件部分的激光照射条纹图像显示在图像传感器的轮廓图像中，使得由于工件表面的凸起部分而沿着轮廓图像线的偏移可以精确地 转换为z高度测量。 可以通过在轮廓图像中包括参考对象来确定与轮廓图像中的每个轮廓图像相关联的用于将信息从轮廓图像重新组装到工件的表面图中的y轴位置，而不需要位置传感器 。

公开(公告)号：US20070025709A1

公开(公告)日：2007-02-01

申请号：US11191969

申请日：2005-07-29

申请人： Paul Gladnick ,  Joseph Tobiason

发明人： Paul Gladnick ,  Joseph Tobiason

IPC分类号： G03B15/02

CPC分类号： G01N21/8806 ,  G01N2021/8838 ,  H04N5/2354

摘要： Various exemplary embodiments may provide systems and methods for strobe illumination of a workpiece. The systems may include an illumination source, an image acquisition device and a control system. The illumination source may emit visible, UV, or near-IR light as a transient flash to the workpiece, the transient flash occurring in response to a lamp trigger. The illumination source may emit the light at an illumination intensity that rises from a begin threshold to a peak and afterwards diminishes to an end threshold during a flash duration. The image acquisition device may capture the light associated with the workpiece for an exposure duration starting from an exposure trigger. The control system may control the illumination source and the image acquisition device to synchronize the lamp trigger so that the exposure duration ends during the flash duration, such that a remaining portion of the flash does not affect the image exposure.

摘要翻译： 各种示例性实施例可以提供用于工件的闪光照明的系统和方法。 该系统可以包括照明源，图像采集装置和控制系统。 照明光源可以作为对工件的瞬态闪光发出可见光，UV或近红外光，响应于灯触发而发生瞬态闪光。 照明源可以以从开始阈值上升到峰值的照明强度发射光，然后在闪光持续时间期间减小到结束阈值。 图像采集装置可以从曝光触发开始捕获与工件相关联的曝光持续时间。 控制系统可以控制照明源和图像采集装置使灯触发器同步，使得曝光持续时间期间结束，使得闪光灯的剩余部分不影响图像曝光。

公开(公告)号：US20050211885A1

公开(公告)日：2005-09-29

申请号：US10808849

申请日：2004-03-25

申请人： Joseph Tobiason ,  Michelle Milvich ,  Michael Nahum ,  Vidya Venkatachalam

发明人： Joseph Tobiason ,  Michelle Milvich ,  Michael Nahum ,  Vidya Venkatachalam

IPC分类号： G01B11/00 ,  G01B11/02 ,  G01D5/26 ,  G01D5/347 ,  G01D5/34

CPC分类号： G01D5/34723 ,  G01D5/268

摘要： A position sensor using a novel optical path array (OPA) element, an angle-selective spatial filter, and an imaging array is capable of measuring the translation and orientation relative to a target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. A target member includes an array of target points surrounded by a contrasting surface. The position sensor uses the OPA element in combination with the angle-selective spatial filter in a target point imaging arrangement such that the imaging array of the position sensor only receives light rays that enter the OPA element according to an operable cone angle α. Accordingly, each target point generally produces a ring-shaped image having a size on the imaging array that varies with the Z position of each target point. The X-Y position of each target point image on the imaging array varies with the X-Y position of each target point. Accordingly, three or more target point images analyzed in the same image are usable to determine a 6D measurement relative to the target member. X and Y displacement of the target member can be accumulated by known methods and the other 6D measurement components are absolute measurements at any position.

摘要翻译： 使用新型光路阵列（OPA）元件，角度选择性空间滤波器和成像阵列的位置传感器能够测量相对于目标构件在X，Y，Z，偏航，俯仰和 滚动（“6D”），并具有高精度。 目标成员包括由对比表面包围的目标点阵列。 位置传感器将OPA元件与目标点成像布置中的角度选择性空间滤波器组合使用，使得位置传感器的成像阵列仅接收根据可操作锥角α进入OPA元件的光线。 因此，每个目标点通常产生具有随着每个目标点的Z位置而变化的成像阵列上的尺寸的环形图像。 成像阵列上的每个目标点图像的X-Y位置随着每个目标点的X-Y位置而变化。 因此，在相同图像中分析的三个或更多个目标点图像可用于确定相对于目标成员的6D测量。 目标构件的X和Y位移可以通过已知方法积累，其他6D测量分量是任何位置的绝对测量。

公开(公告)号：US20060012798A1

公开(公告)日：2006-01-19

申请号：US10890919

申请日：2004-07-13

申请人： Benjamin Jones ,  Michael Nahum ,  Joseph Tobiason ,  Karl Masreliez

发明人： Benjamin Jones ,  Michael Nahum ,  Joseph Tobiason ,  Karl Masreliez

IPC分类号： G01B11/02

CPC分类号： G01D5/34715 ,  G01B11/002 ,  G01B11/16

摘要： A system and method for improving the accuracy of a speckle-based image correlation displacement sensor provides ultra-high accuracy by ensuring that, in the absence of motion, the speckle image does not vary over time. In one embodiment, the speckle image is stabilized by reducing or compensating for laser diode wavelength changes. Various methods for stabilizing the wavelength include thermoelectric temperature control, measuring and correcting the wavelength by any suitable means, or providing a specific wavelength of light feedback from an external grating. Image stabilization may also be accomplished by monitoring the warm-up process of the system. Once the system is determined to have completed the warm-up process, an indicator is provided to the user to indicate that the system is ready for use. Sensor geometric configurations that reduce or eliminate wavelength-related errors are also disclosed.

摘要翻译： 用于提高基于散斑的图像相关位移传感器的精度的系统和方法通过确保在不存在运动的情况下，斑点图像不随时间变化而提供超高精度。 在一个实施例中，斑点图像通过减少或补偿激光二极管波长变化来稳定。 用于稳定波长的各种方法包括热电温度控制，通过任何合适的手段测量和校正波长，或提供来自外部光栅的特定波长的光反馈。 图像稳定也可以通过监视系统的预热过程来实现。 一旦确定系统已经完成了预热过程，则向用户提供指示器以指示系统准备好使用。 还公开了减少或消除波长相关误差的传感器几何配置。

公开(公告)号：US20050047728A1

公开(公告)日：2005-03-03

申请号：US10650453

申请日：2003-08-27

申请人： Joseph Tobiason ,  Michael Nahum ,  Kim Atherton

发明人： Joseph Tobiason ,  Michael Nahum ,  Kim Atherton

IPC分类号： G01B11/00 ,  G01D5/347 ,  G02B6/36

CPC分类号： G01D5/34723

摘要： A fiber optic readhead arrangement for imaging a scale onto a set of optical fiber receiver channels is disclosed. The readhead arrangement includes an imaging lens and may include an aperture positioned at a focal point of the imaging lens in a telecentric arrangement. An axicon lens may be utilized to direct source light away from the imaging lens and into a ring-shaped annular source lens which surrounds the imaging lens. A source lens may concentrate source light on the scale in an area where it will be imaged back through the imaging lens to the readhead. In one embodiment, multiple source fibers may be provided around the perimeter of the fiber optic readhead arrangement. In another embodiment, the receiver fibers may also function as source fibers. In various exemplary embodiments, high levels of displacement signal interpolation may be achieved to provide high resolution measurement.

摘要翻译： 公开了一种用于将刻度成像到一组光纤接收器通道上的光纤读头装置。 读取头装置包括成像透镜，并且可以包括以远心布置定位在成像透镜的焦点处的孔。 可以使用旋转透镜来将源光引导离开成像透镜并且将其引导到围绕成像透镜的环形环形源透镜中。 源透镜可以将源光集中在其将通过成像透镜成像回到读取头的区域中的刻度上。 在一个实施例中，可以围绕光纤读头装置的周边设置多个源光纤。 在另一个实施例中，接收器光纤也可用作源光纤。 在各种示例性实施例中，可以实现高水平的位移信号内插以提供高分辨率测量。

公开(公告)号：US20070229665A1

公开(公告)日：2007-10-04

申请号：US11395776

申请日：2006-03-31

申请人： Joseph Tobiason ,  Yuhua Ding

发明人： Joseph Tobiason ,  Yuhua Ding

IPC分类号： H04N17/00

CPC分类号： H04N5/3572

摘要： A method characterizes field of view (FOV) distortion and may correct machine vision measurements accordingly. A plurality of distorted images are acquired, with the same calibration target at a plurality of spaced-apart locations within the FOV. The method analyzes the images and determines distortion parameters that can correct the distortions in the images such that features included in the calibration target pattern achieve a sufficient or optimum degree of congruence between the various images. Distortion parameters may be determined for each optical configuration (e.g., lens combination, magnification, etc.) that is used by a machine vision inspection system. The distortion parameters may then be used to correct FOV distortion errors in subsequent inspection and measurement operations.

摘要翻译： 一种表征视场（FOV）失真的方法，可以相应地校正机器视觉测量。 获取多个失真的图像，在FOV内的多个间隔开的位置处具有相同的校准目标。 该方法分析图像并确定可以校正图像中的失真的失真参数，使得包括在校准目标图案中的特征在各种图像之间达到充分或最佳程度的一致性。 可以针对机器视觉检查系统使用的每个光学配置（例如，镜头组合，放大等）确定失真参数。 然后可以使用失真参数来校正后续检查和测量操作中的FOV失真误差。

公开(公告)号：US20050105565A1

公开(公告)日：2005-05-19

申请号：US10705903

申请日：2003-11-13

申请人： Joseph Tobiason ,  David Sesko

发明人： Joseph Tobiason ,  David Sesko

IPC分类号： H01S3/106 ,  H01S5/14 ,  H01S3/10

CPC分类号： H01S3/1062 ,  H01S3/08059 ,  H01S5/02248 ,  H01S5/141

摘要： An external cavity laser has a wavelength of the laser output that is tuned by a rotary tuning element mounted on the axle of a motor. The rotary tuning element includes a variable thickness interference film for wavelength selection, and a variable thickness compensation prism to adjust the cavity length appropriately for the selected wavelength, to stable wavelengths and mode-hop-free tuning ranges as the tuning element is rotated.

摘要翻译： 外腔激光器具有由安装在电动机轴上的旋转调谐元件调谐的激光输出的波长。 旋转调谐元件包括用于波长选择的可变厚度干涉膜和可调节厚度补偿棱镜，用于在调谐元件旋转时将所选择的波长适当地调节腔长度，到稳定波长和无跳跃调谐范围。

公开(公告)号：US20050224705A1

公开(公告)日：2005-10-13

申请号：US10901701

申请日：2004-07-29

申请人： Joseph Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim Atherton

发明人： Joseph Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim Atherton

IPC分类号： G01D5/34 ,  G01D5/353 ,  G01J1/04 ,  G01J5/08 ,  G02B6/38

CPC分类号： G01D5/35303 ,  G02B6/381

摘要： All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10-50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

摘要翻译： 公开了感测内部刻度光栅的位移的全光输出精密测量计。 每种类型的量规包括一个紧凑型，微型或超微型光学读取头，其包括用于将光传输到刻度光栅的光源和用于接收来自刻度光栅的光的光纤检测器通道，并从该规格输出光学测量信号 。 在各种实施例中，光纤检测器通道具有各自的相位光栅掩模，用于接收对应于刻度光栅移动的周期性光图案，并且通道以平衡对布置。 在各种实施例中，光学读取头是干涉式光学读取头，其提供的精度为10-50纳米或更小的测量分辨率。 在各种实施例中，以前所未有的微型尺寸提供量规。 在各种实施例中，将该量规机动化以提供精密致动器。

公开(公告)号：US20070215797A1

公开(公告)日：2007-09-20

申请号：US10599105

申请日：2005-03-18

申请人： Toshitaka Shimomura ,  Shingo Nihommori ,  Miyako Mizutani ,  Eric Altendorf ,  Joseph Tobiason

发明人： Toshitaka Shimomura ,  Shingo Nihommori ,  Miyako Mizutani ,  Eric Altendorf ,  Joseph Tobiason

IPC分类号： G01D5/34

CPC分类号： G01D5/38 ,  G01D5/00 ,  G01D5/34715 ,  G01D5/36

摘要： A photoelectric encoder has a telecentric optical system in which a first lens and an aperture located at a focal position of the first lens are interposed between a main scale and a photoreceptor. At least a second lens is interposed between the aperture and the photoreceptor with a focus of the second lens on the aperture, thereby constituting a bilateral telecentric optical system. This makes it possible to improve the signal detection efficiency and increase the assembly tolerance.

摘要翻译： 光电编码器具有远心光学系统，其中位于第一透镜的焦点位置处的第一透镜和孔插入主刻度尺和感光体之间。 在孔和感光体之间插入至少第二透镜，第二透镜的焦点在孔上，从而构成双向远心光学系统。 这使得可以提高信号检测效率并增加组装公差。

公开(公告)号：US20050219554A1

公开(公告)日：2005-10-06

申请号：US10815893

申请日：2004-03-31

申请人： Joseph Tobiason ,  Michelle Milvich ,  Vidya Venkatachalam

发明人： Joseph Tobiason ,  Michelle Milvich ,  Vidya Venkatachalam

IPC分类号： G01B11/00 ,  G01B11/14 ,  G01C19/00 ,  G01C25/00 ,  G01D5/26 ,  G01D18/00 ,  G01F25/00

CPC分类号： G01D5/262 ,  G01B11/002 ,  G01D5/26 ,  G01D5/347

摘要： A position sensor using a novel structured light generating scale or target member is provided. An imaging array is capable of measuring the relative translation and orientation of the structured light generating scale or target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. The target member includes an array of lenses that provide an array of structured light patterns that diverge, converge, or both, to change the size of the corresponding structured light image as a function of the “Z” coordinate of the relative position, in various embodiments. The X-Y position of each individual structured light image on the imaging array varies with the relative X-Y position of the structured light generating target member, and the shape of structured light image changes as a function of the relative angular orientation. Accordingly, three or more structured light images analyzed in the same image are usable to determine a 6D measurement between the structured light generating target member and the array detector. X and Y displacement of the target member can be accumulated by known methods and the other 6D measurement components are absolute measurements at any position.

摘要翻译： 提供了一种使用新型结构光产生标尺或目标构件的位置传感器。 成像阵列能够以高精度同时测量X，Y，Z，偏转，俯仰和滚动（“6D”）中的结构光产生标尺或目标构件的相对平移和取向。 目标构件包括透镜阵列，其提供发散，会聚或两者的结构光图案阵列，以根据相对位置的“Z”坐标改变相应结构光图像的大小，以各种方式 实施例。 成像阵列上的每个单独的结构光图像的X-Y位置随着结构化光产生目标构件的相对X-Y位置而变化，并且结构化光图像的形状作为相对角度取向的函数而变化。 因此，在相同图像中分析的三个或更多个结构光图像可用于确定结构化光产生目标构件和阵列检测器之间的6D测量。 目标构件的X和Y位移可以通过已知方法积累，其他6D测量分量是任何位置的绝对测量。