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12 条记录 (耗时 0.025 秒)

    Micro-Electromechanical System Microphone
    5.
    发明申请
    Micro-Electromechanical System Microphone 有权
    微机电系统麦克风

    公开(公告)号：US20110123043A1

    公开(公告)日：2011-05-26

    申请号：US12625157

    申请日：2009-11-24

    申请人： Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan Van Lippen ,  Iris Bominaar-Silkens

    发明人： Franz Felberer ,  Remco Henricus Wilhelmus Pijnenburg ,  Twan Van Lippen ,  Iris Bominaar-Silkens

    IPC分类号： H04B15/00 ,  H04R3/06

    CPC分类号： H04R19/005 ,  H04R2410/00

    摘要： A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.

    摘要翻译： 电容式微机电系统（MEMS）麦克风包括具有延伸穿过基板的开口的半导体基板。 麦克风具有延伸穿过开口的膜和延伸穿过开口的背板。 膜被配置为响应于声音产生信号。 背板通过绝缘体与膜隔开，背板呈现弹簧常数。 麦克风还包括后室，其包围开口以与膜形成压力室，调谐结构被配置为将背板的共振频率设定为与谐振值基本相同的值 膜的频率。

    RF MEMS switch with a grating as middle electrode
    6.
    发明授权
    RF MEMS switch with a grating as middle electrode 有权
    RF MEMS开关，光栅作为中间电极

    公开(公告)号：US09070524B2

    公开(公告)日：2015-06-30

    申请号：US13319034

    申请日：2010-05-07

    申请人： Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    发明人： Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    IPC分类号： H01G5/16 ,  H03K17/975 ,  H01H59/00

    CPC分类号： H01H59/0009 ,  H01H2059/0018

    摘要： The present invention provides a capacitive MEMS device comprising a first electrode lying in a plane, and a second electrode suspended above the first electrode and movable with respect to the first electrode. The first electrode functions as an actuation electrode. A gap is present between the first electrode and the second electrode. A third electrode is placed intermediate the first and second electrode with the gap between the third electrode and the second electrode. The third electrode has one or a plurality of holes therein, preferably in an orderly or irregular array. An aspect of the present invention integration of a conductive, e.g. metallic grating as a middle (or third) electrode. An advantage of the present invention is that it can reduce at least one problem of the prior art. This advantage allows an independent control over the pull-in and release voltage of a switch.

    摘要翻译： 本发明提供了一种电容MEMS器件，其包括位于平面中的第一电极和悬挂在第一电极上方并可相对于第一电极移动的第二电极。 第一电极用作致动电极。 在第一电极和第二电极之间存在间隙。 第三电极被放置在第一和第二电极之间，第三电极和第二电极之间具有间隙。 第三电极在其中具有一个或多个孔，优选为有序或不规则的阵列。 本发明的一个方面是导电的，例如， 金属光栅作为中间（或第三）电极。 本发明的优点在于它可以减少至少一个现有技术的问题。 这个优点允许独立控制开关的拉入和释放电压。

    RF MEMS SWITCH WITH A GRATING AS MIDDLE ELECTRODE
    7.
    发明申请
    RF MEMS SWITCH WITH A GRATING AS MIDDLE ELECTRODE 有权
    RF MEMS开关作为中间电极

    公开(公告)号：US20120048709A1

    公开(公告)日：2012-03-01

    申请号：US13319034

    申请日：2010-05-07

    申请人： Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    发明人： Peter Gerard Steeneken ,  Hilco Suy ,  Rodolf Herfst ,  Twan Van Lippen

    IPC分类号： H01H59/00

    CPC分类号： H01H59/0009 ,  H01H2059/0018

    摘要： The present invention provides a capacitive MEMS device comprising a first electrode lying in a plane, and a second electrode suspended above the first electrode and movable with respect to the first electrode. The first electrode functions as an actuation electrode. A gap is present between the first electrode and the second electrode. A third electrode is placed intermediate the first and second electrode with the gap between the third electrode and the second electrode. The third electrode has one or a plurality of holes therein, preferably in an orderly or irregular array. An aspect of the present invention integration of a conductive, e.g. metallic grating as a middle (or third) electrode. An advantage of the present invention is that it can reduce at least one problem of the prior art. This advantage allows an independent control over the pull-in and release voltage of a switch.

    摘要翻译： 本发明提供了一种电容MEMS器件，其包括位于平面中的第一电极和悬挂在第一电极上方并可相对于第一电极移动的第二电极。 第一电极用作致动电极。 在第一电极和第二电极之间存在间隙。 第三电极被放置在第一和第二电极之间，第三电极和第二电极之间具有间隙。 第三电极在其中具有一个或多个孔，优选为有序或不规则的阵列。 本发明的一个方面是导电的，例如， 金属光栅作为中间（或第三）电极。 本发明的优点在于它可以减少至少一个现有技术的问题。 这个优点允许独立控制开关的拉入和释放电压。

    MEMS Transducer for an Audio Device
    8.
    发明申请
    MEMS Transducer for an Audio Device 审中-公开
    用于音频设备的MEMS传感器

    公开(公告)号：US20120056282A1

    公开(公告)日：2012-03-08

    申请号：US13262609

    申请日：2010-03-30

    申请人： Twan Van Lippen ,  Geert Langereis ,  Josef Lutz ,  Hilco Suy ,  Cas Van Der Avoort ,  Andreas Bernardus Maria Jansman

    发明人： Twan Van Lippen ,  Geert Langereis ,  Josef Lutz ,  Hilco Suy ,  Cas Van Der Avoort ,  Andreas Bernardus Maria Jansman

    IPC分类号： H01L29/84 ,  H04R31/00

    CPC分类号： H04R19/00 ,  H04R2499/11 ,  Y10T29/49005

    摘要： A MEMS transducer (10) for an audio device comprises a substrate (12), a membrane (14) attached to the substrate (12), and a back-electrode (18) attached to the substrate (12), wherein a resonant frequency of the back-electrode (18) is matched to a resonant frequency of the membrane (14). Further, a method of manufacturing a MEMS transducer (19) for an audio device comprises attaching a membrane to a substrate (12), attaching a back-electrode (18) to the substrate (12), matching a resonant frequency of the back-electrode (18) to a resonant frequency of the membrane (14).

    摘要翻译： 用于音频装置的MEMS换能器（10）包括基板（12），附着到基板（12）的膜（14）和附接到基板（12）的背电极（18），其中谐振频率 （18）的谐振频率匹配。 此外，制造用于音频装置的MEMS换能器（19）的方法包括将膜附接到基板（12），将背电极（18）附接到基板（12），匹配背面电极（18）的谐振频率， 电极（18）到膜（14）的共振频率。

    MEMS accelerometer using capacitive sensing and production method thereof
    10.
    发明授权
    MEMS accelerometer using capacitive sensing and production method thereof 有权
    MEMS加速度计采用电容式传感及其制作方法

    公开(公告)号：US08686519B2

    公开(公告)日：2014-04-01

    申请号：US13576184

    申请日：2011-01-25

    申请人： Geert Langereis ,  Iris Bominaar-Silkens ,  Twan Van Lippen

    发明人： Geert Langereis ,  Iris Bominaar-Silkens ,  Twan Van Lippen

    IPC分类号： H01L29/84

    CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/084 ,  H04R19/005

    摘要： A MEMS accelerometer uses capacitive sensing between two electrode layers. One of the electrode layers has at least four independent electrodes arranged as two pairs of electrodes, with one pair aligned orthogonally to the other such that tilting of the membrane can be detected as well as normal-direction movement of the membrane. In this way, a three axis accelerometer can be formed from a single suspended mass, and by sensing using a set of capacitor electrodes which are all in the same plane. This means the fabrication is simple and is compatible with other MEMS manufacturing processes, such as MEMS microphones.

    摘要翻译： MEMS加速度计在两个电极层之间使用电容感应。 一个电极层具有布置成两对电极的至少四个独立电极，其中一对电极与另一对电极垂直排列，从而可以检测膜的倾斜以及膜的法向运动。 以这种方式，可以由单个悬挂质量形成三轴加速度计，并且通过使用一组全部在同一平面内的电容器电极进行感测。 这意味着制造简单，并且与其他MEMS制造工艺（例如MEMS麦克风）兼容。