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公开(公告)号:US07617836B2
公开(公告)日:2009-11-17
申请号:US11377679
申请日:2006-03-17
申请人: Ju-Won Kim , Doo-Keun An , Kwang-Il Choi , Pyong-Soon Jung , Yong-Nam Choi , Jeong-Yong Bae
发明人: Ju-Won Kim , Doo-Keun An , Kwang-Il Choi , Pyong-Soon Jung , Yong-Nam Choi , Jeong-Yong Bae
IPC分类号: G05D11/08
CPC分类号: C02F1/008 , C01B5/00 , C02F1/685 , C02F2103/02 , C02F2103/026 , Y10T137/0324 , Y10T137/0329 , Y10T137/2509
摘要: A supply system for supplying a functional water to a process unit which treats a substrate using the functional water is provided. In the system, the functional water generated in the functional water generator is supplied to a distributor through a functional water supply pipe. Thereafter, the functional water is supplied to the process unit while the process unit performs a process, and the functional water is returned to the functional water generator through a functional water returning pipe while the process unit does not perform a process. A buffer tank is installed in the functional water supply pipe and the concentration of the functional water is measured in a circulation line connected with the buffer tank. When the measured concentration of the functional water goes out of a set concentration range, the functional water is returned to the functional water generator through functional water returning pipe.
摘要翻译: 提供了一种用于向功能水处理基板的处理单元供给功能水的供给系统。 在该系统中,功能水发生器中产生的功能水通过功能性供水管道供给到分配器。 此后,在处理单元执行处理时,将功能水供给处理单元,并且在处理单元不执行处理时,功能水通过功能回水管返回到功能水生成器。 在功能性供水管中安装缓冲罐,在与缓冲罐连接的循环管线中测量功能水的浓度。 当功能水的测量浓度超出设定浓度范围时,功能水通过功能回水管返回到功能水发生器。
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公开(公告)号:US20060207777A1
公开(公告)日:2006-09-21
申请号:US11377679
申请日:2006-03-17
申请人: Ju-Won Kim , Doo-Keun An , Kwang-II Choi , Pyong-Soon Jung , Yong-Nam Choi , Jeong-Yong Bae
发明人: Ju-Won Kim , Doo-Keun An , Kwang-II Choi , Pyong-Soon Jung , Yong-Nam Choi , Jeong-Yong Bae
IPC分类号: B25D15/00
CPC分类号: C02F1/008 , C01B5/00 , C02F1/685 , C02F2103/02 , C02F2103/026 , Y10T137/0324 , Y10T137/0329 , Y10T137/2509
摘要: A supply system for supplying a functional water to a process unit which treats a substrate using the functional water is provided. In the system, the functional water generated in the functional water generator is supplied to a distributor through a functional water supply pipe. Thereafter, the functional water is supplied to the process unit while the process unit performs a process, and the functional water is returned to the functional water generator through a functional water returning pipe while the process unit does not perform a process. A buffer tank is installed in the functional water supply pipe and the concentration of the functional water is measured in a circulation line connected with the buffer tank. When the measured concentration of the functional water goes out of a set concentration range, the functional water is returned to the functional water generator through functional water returning pipe.
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公开(公告)号:US07415838B2
公开(公告)日:2008-08-26
申请号:US11357073
申请日:2006-02-21
申请人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang , Jae-Heuk Choi
发明人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang , Jae-Heuk Choi
IPC分类号: F25D17/02
CPC分类号: F25B25/005 , F25B13/00 , F25B2313/0253 , F25B2400/075 , F25B2500/01 , F25B2500/19 , F25B2600/021 , F25B2700/04 , F25B2700/15 , F25B2700/21173 , F25B2700/21174 , F25B2700/21175 , Y02B30/741
摘要: A second-refrigerant pump driving type air conditioner, including an indoor unit having an indoor heat exchanger that circulates a refrigerant containing no oil, a first circulator including a compressor that compresses and discharges a refrigerant containing oil, a first outdoor heat exchanger, a second outdoor heat exchanger, and an outdoor expander, and a second circulator including an intermediate heat exchanger connected to the indoor heat exchanger that circulates the refrigerant containing no oil and heat-exchanges the refrigerant of the first outdoor heat exchanger, a receiver, and a pump. A restriction of a length and a diameter of a connection pipe for connecting an outdoor unit and the indoor unit is decreased, and an oil shortage of the compressor is prevented.
摘要翻译: 一种第二制冷剂泵驱动型空调机,包括具有使不含油的制冷剂循环的室内热交换器的室内机,包含压缩并排出含油的制冷剂的压缩机的第一循环器,第一室外热交换器,第二室内热交换器 室外热交换器和室外膨胀机,以及第二循环器,其包括连接到室内热交换器的中间热交换器,其使不含油的制冷剂循环,并且热交换第一室外热交换器,接收器和泵的制冷剂 。 用于连接室外机和室内机的连接管的长度和直径的限制减少,并且防止了压缩机的缺油。
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公开(公告)号:US20060090487A1
公开(公告)日:2006-05-04
申请号:US11262895
申请日:2005-11-01
申请人: Bong-Soo Park , Sai-Kee Oh , Baik Chung , Se Chang , Chi-Woo Song , Ju-Won Kim
发明人: Bong-Soo Park , Sai-Kee Oh , Baik Chung , Se Chang , Chi-Woo Song , Ju-Won Kim
IPC分类号: F25B13/00
CPC分类号: F25B49/027 , F25B13/00 , F25B2313/0231 , F25B2313/0252 , F25B2313/02531 , F25B2313/02533 , F25B2400/075
摘要: Disclosed is an air conditioner. The air conditioner includes: at least one indoor unit; an outdoor unit communicating with the indoor unit and having at least one compressor and one outdoor heat exchanger; a fluid path opening/closing valve for opening or closing a fluid path through which a refrigerant can flow to the outdoor heat exchanger; and a control unit for controlling the compressor and the fluid path opening/closing valve to perform appropriate compression and condensation of the refrigerant according to the load amount of the indoor unit. Accordingly, as the air conditioner comprises the fluid path opening/closing valve and the branch fluid path opening/closing valve which are capable of opening or closing fluid paths and a control unit for controlling the valves, a high pressure of a cycle is appropriately maintained even during small-load operation and therefore reliability in operation can be increased.
摘要翻译: 公开了一种空调。 空调包括:至少一个室内单元; 与室内机连通并具有至少一个压缩机和一个室外热交换器的室外机; 用于打开或关闭流体通道的流体通道开/关阀,制冷剂可以通过该流体通道流向室外热交换器; 以及控制单元,用于控制压缩机和流体通道打开/关闭阀,以根据室内单元的负载量进行适当的制冷剂的压缩和冷凝。 因此,由于空调包括能够打开或关闭流体路径的流体通道开闭阀和分支流体通路开闭阀以及用于控制阀的控制单元,因此适当地保持循环的高压 即使在小负载操作期间,因此可以提高操作的可靠性。
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公开(公告)号:US20060112712A1
公开(公告)日:2006-06-01
申请号:US11286354
申请日:2005-11-25
申请人: Se-Dong Chang , Sai-Kee Oh , Chi-Woo Song , Baik-Young Chung , Ju-Won Kim , Bong-Soo Park
发明人: Se-Dong Chang , Sai-Kee Oh , Chi-Woo Song , Baik-Young Chung , Ju-Won Kim , Bong-Soo Park
CPC分类号: F25B13/00 , F25B25/005 , F25B2400/16 , F25B2500/01 , F25B2700/04
摘要: An air conditioning system comprises an indoor unit in which a first refrigerant flows, a first tank connected to an outlet side refrigerant line of the indoor unit for sucking a first refrigerant, a second tank connected to an inlet side refrigerant line of the indoor unit and directly connected to the first tank at a position lower than the first tank for feeding back the first refrigerant stored in the first tank to the indoor unit, a connection line disposed between the first tank and the second tank, a pressure equalizing line disposed between the first tank and the second tank, a heat source cycle for cooling the first refrigerant inside the first tank by circulating a second refrigerant and heating the first refrigerant of the second tank, and a controller for controlling a plurality of switching valves installed at the connection line and the pressure equalizing line.
摘要翻译: 空调系统包括:第一制冷剂流入的室内机,与室内机的出口侧制冷剂管路连接的第一制冷剂吸入第一制冷剂;第二罐,连接到室内机的入口侧制冷剂管线;以及 在比第一箱低的位置处直接连接到第一箱,用于将存储在第一箱中的第一制冷剂反馈到室内单元;设置在第一箱和第二箱之间的连接管,设置在第一箱之间的均压管 第一罐和第二罐,通过循环第二制冷剂并加热第二罐的第一制冷剂来冷却第一罐内的第一制冷剂的热源循环,以及用于控制安装在连接管线上的多个切换阀的控制器 和压力平衡线。
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公开(公告)号:US07650759B2
公开(公告)日:2010-01-26
申请号:US11244364
申请日:2005-10-06
申请人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang
发明人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang
CPC分类号: F25B43/006 , F25B49/02 , F25B2500/01 , F25B2600/05 , F25B2700/04 , G01F23/22 , G01F23/248 , G05D9/12
摘要: An apparatus for controlling a refrigerant level comprises a first detecting unit installed at a lower side of the inside of a refrigerant tank, for detecting whether a refrigerant stored at a lower side of the inside of the refrigerant is a liquefied refrigerant or a gaseous refrigerant, a second detecting unit installed at an upper side of the inside of the refrigerant tank, for detecting whether a refrigerant stored at an upper side of the inside of the refrigerant tank is a liquefied refrigerant and a gaseous refrigerant, and a control unit controlling intake and discharge of the liquefied refrigerant according to a value measured by the first detecting unit and the second detecting unit.
摘要翻译: 一种用于控制制冷剂水平的装置包括:第一检测单元,安装在制冷剂罐内部的下侧,用于检测储存在制冷剂内侧的制冷剂是液化制冷剂还是气态制冷剂, 第二检测单元,安装在制冷剂罐内部的上侧,用于检测储存在制冷剂罐内部的上侧的制冷剂是液化制冷剂和气态制冷剂;以及控制单元, 根据由第一检测单元和第二检测单元测量的值排出液化制冷剂。
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公开(公告)号:US20060191286A1
公开(公告)日:2006-08-31
申请号:US11357073
申请日:2006-02-21
申请人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang , Jae-Heuk Choi
发明人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang , Jae-Heuk Choi
IPC分类号: F25D17/02
CPC分类号: F25B25/005 , F25B13/00 , F25B2313/0253 , F25B2400/075 , F25B2500/01 , F25B2500/19 , F25B2600/021 , F25B2700/04 , F25B2700/15 , F25B2700/21173 , F25B2700/21174 , F25B2700/21175 , Y02B30/741
摘要: A second-refrigerant pump driving type air conditioner, including an indoor unit having an indoor heat exchanger that circulates a refrigerant containing no oil, a first circulator including a compressor that compresses and discharges a refrigerant containing oil, a first outdoor heat exchanger, a second outdoor heat exchanger, and an outdoor expander, and a second circulator including an intermediate heat exchanger connected to the indoor heat exchanger that circulates the refrigerant containing no oil and heat-exchanges the refrigerant of the first outdoor heat exchanger, a receiver, and a pump. A restriction of a length and a diameter of a connection pipe for connecting an outdoor unit and the indoor unit is decreased, and an oil shortage of the compressor is prevented.
摘要翻译: 一种第二制冷剂泵驱动型空调机,包括具有使不含油的制冷剂循环的室内热交换器的室内机,包含压缩并排出含油的制冷剂的压缩机的第一循环器,第一室外热交换器,第二室内热交换器 室外热交换器和室外膨胀机,以及第二循环器,其包括连接到室内热交换器的中间热交换器,其使不含油的制冷剂循环,并且热交换第一室外热交换器,接收器和泵的制冷剂 。 用于连接室外机和室内机的连接管的长度和直径的限制减少,并且防止了压缩机的缺油。
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公开(公告)号:US20060075763A1
公开(公告)日:2006-04-13
申请号:US11244364
申请日:2005-10-06
申请人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang
发明人: Bong-Soo Park , Sai-Kee Oh , Chi-Woo Song , Ju-Won Kim , Baik-Young Chung , Se-Dong Chang
CPC分类号: F25B43/006 , F25B49/02 , F25B2500/01 , F25B2600/05 , F25B2700/04 , G01F23/22 , G01F23/248 , G05D9/12
摘要: An apparatus for controlling a refrigerant level comprises a first detecting unit installed at a lower side of the inside of a refrigerant tank, for detecting whether a refrigerant stored at a lower side of the inside of the refrigerant is a liquefied refrigerant or a gaseous refrigerant, a second detecting unit installed at an upper side of the inside of the refrigerant tank, for detecting whether a refrigerant stored at an upper side of the inside of the refrigerant tank is a liquefied refrigerant and a gaseous refrigerant, and a control unit controlling intake and discharge of the liquefied refrigerant according to a value measured by the first detecting unit and the second detecting unit.
摘要翻译: 一种用于控制制冷剂水平的装置包括:第一检测单元,安装在制冷剂罐内部的下侧,用于检测储存在制冷剂内侧的制冷剂是液化制冷剂还是气态制冷剂, 第二检测单元,安装在制冷剂罐内部的上侧,用于检测储存在制冷剂罐内部的上侧的制冷剂是液化制冷剂和气态制冷剂;以及控制单元, 根据由第一检测单元和第二检测单元测量的值排出液化制冷剂。
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公开(公告)号:US07343756B2
公开(公告)日:2008-03-18
申请号:US11286358
申请日:2005-11-25
申请人: Se-Dong Chang , Sai-Kee Oh , Chi-Woo Song , Baik-Young Chung , Ju-Won Kim , Bong-Soo Park
发明人: Se-Dong Chang , Sai-Kee Oh , Chi-Woo Song , Baik-Young Chung , Ju-Won Kim , Bong-Soo Park
CPC分类号: F25B25/005 , F25B13/00 , F25B2400/053 , F25B2400/16 , F25B2500/01 , F25B2700/04
摘要: An air conditioning system comprises a first tank connected to an outlet side refrigerant line of an indoor unit, a second tank disposed to be lower than the first tank, middle tank installed between the first tank and the second tank, a heat source cycle for depressurizing and cooling the first refrigerant inside the first tank by circulating a second refrigerant and heating the first refrigerant of the second tank, a middle tank cooling unit for feed back connected to an inlet side refrigerant line of the second tank among refrigerant lines of the heat source cycle, a middle tank heating unit for feed back connected to a refrigerant line between the first tank and the second tank among refrigerant lines of the heat source cycle, and a controller for selectively circulating the second refrigerant of the heat source cycle to the middle tank cooling unit for feed back or the middle tank heating unit for feed back.
摘要翻译: 空调系统包括连接到室内机的出口侧制冷剂管路的第一罐,设置成比第一罐低的第二罐,安装在第一罐和第二罐之间的中间罐,用于减压的热源循环 并且通过循环第二制冷剂并加热第二罐的第一制冷剂来冷却第一罐内的第一制冷剂,在热源的制冷剂管线中连接到第二罐的入口侧制冷剂管线的反馈中间罐冷却单元 循环,用于在热源循环的制冷剂管线之间连接到第一罐和第二罐之间的制冷剂管线的中间罐加热单元,以及用于选择性地将热源循环的第二制冷剂循环到中间罐的控制器 用于反馈的冷却单元或用于反馈的中间罐加热单元。
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公开(公告)号:US20060112713A1
公开(公告)日:2006-06-01
申请号:US11286358
申请日:2005-11-25
申请人: Se-Dong Chang , Sai-Kee Oh , Chi-Woo Song , Baik-Young Chung , Ju-Won Kim , Bong-Soo Park
发明人: Se-Dong Chang , Sai-Kee Oh , Chi-Woo Song , Baik-Young Chung , Ju-Won Kim , Bong-Soo Park
CPC分类号: F25B25/005 , F25B13/00 , F25B2400/053 , F25B2400/16 , F25B2500/01 , F25B2700/04
摘要: An air conditioning system comprises a first tank connected to an outlet side refrigerant line of an indoor unit, a second tank disposed to be lower than the first tank, middle tank installed between the first tank and the second tank, a heat source cycle for depressurizing and cooling the first refrigerant inside the first tank by circulating a second refrigerant and heating the first refrigerant of the second tank, a middle tank cooling unit for feed back connected to an inlet side refrigerant line of the second tank among refrigerant lines of the heat source cycle, a middle tank heating unit for feed back connected to a refrigerant line between the first tank and the second tank among refrigerant lines of the heat source cycle, and a controller for selectively circulating the second refrigerant of the heat source cycle to the middle tank cooling unit for feed back or the middle tank heating unit for feed back.
摘要翻译: 空调系统包括连接到室内机的出口侧制冷剂管路的第一罐,设置成比第一罐低的第二罐,安装在第一罐和第二罐之间的中间罐,用于减压的热源循环 并且通过循环第二制冷剂并加热第二罐的第一制冷剂来冷却第一罐内的第一制冷剂,在热源的制冷剂管线中连接到第二罐的入口侧制冷剂管线的反馈中间罐冷却单元 循环,用于在热源循环的制冷剂管线之间连接到第一罐和第二罐之间的制冷剂管线的中间罐加热单元,以及用于选择性地将热源循环的第二制冷剂循环到中间罐的控制器 用于反馈的冷却单元或用于反馈的中间罐加热单元。
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