公开(公告)号：US20050196688A1

公开(公告)日：2005-09-08

申请号：US11121498

申请日：2005-05-03

申请人： Juhwan Kim ,  Keun-Young Kim

发明人： Juhwan Kim ,  Keun-Young Kim

IPC分类号： C23C14/00 ,  C23C14/32 ,  G01F9/00 ,  G03F1/00 ,  G03F1/72 ,  G03F9/00 ,  G06F17/50 ,  G06K9/00

CPC分类号： G03F1/72 ,  G03F1/32

摘要： Mask shops typically use carbon to repair any clear defects identified on a mask, irrespective of the type of mask. However, carbon can have different characteristics than the original patterning material on the mask. Therefore, a mask that is repaired using carbon may not optically perform as if it were defect-free. An automated method of repairing a clear defect on an attenuated phase shifting mask (PSM) provides an optimized plug size/shape. In this method, a repair solution to the clear defect can be simulated, thereby allowing the repair decision for an attenuated PSM to be advantageously made at the same time that inspection is done and before actual repair. Simulation can include performing model-based OPC on the repair solution.

公开(公告)号：US06927003B2

公开(公告)日：2005-08-09

申请号：US10364260

申请日：2003-02-11

申请人： Juhwan Kim ,  Keun-Young Kim

发明人： Juhwan Kim ,  Keun-Young Kim

IPC分类号： C23C14/00 ,  C23C14/32 ,  G01F9/00 ,  G03F1/00 ,  G03F1/72 ,  G03F9/00 ,  G06F17/50 ,  G06K9/00

CPC分类号： G03F1/72 ,  G03F1/32

摘要： Mask shops typically use carbon to repair any clear defects identified on a mask, irrespective of the type of mask. However, carbon can have different characteristics than the original patterning material on the mask. Therefore, a mask that is repaired using carbon may not optically perform as if it were defect-free. An automated method of repairing a clear defect on an attenuated phase shifting mask (PSM) provides an optimized plug size/shape. In this method, a repair solution to the clear defect can be simulated, thereby allowing the repair decision for an attenuated PSM to be advantageously made at the same time that inspection is done and before actual repair. Simulation can include performing model-based OPC on the repair solution.

摘要翻译： 掩模商店通常使用碳来修复掩模上识别的任何明显的缺陷，而不管掩模的类型。 然而，碳可以具有与掩模上的原始图案形成材料不同的特性。 因此，使用碳修复的面膜可能不像光学性能那样无缺陷。 在衰减的相移掩模（PSM）上修复清晰缺陷的自动化方法提供了优化的插头尺寸/形状。 在该方法中，可以模拟清除缺陷的修复解决方案，从而允许在进行检查并在实际修复之前进行衰减PSM的修复决定。 模拟可以包括在修复解决方案上执行基于模型的OPC。

公开(公告)号：US07415402B2

公开(公告)日：2008-08-19

申请号：US11121498

申请日：2005-05-03

申请人： Juhwan Kim ,  Keun-Young Kim

发明人： Juhwan Kim ,  Keun-Young Kim

IPC分类号： G06F17/50

CPC分类号： G03F1/72 ,  G03F1/32

摘要： Mask shops typically use carbon to repair any clear defects identified on a mask, irrespective of the type of mask. However, carbon can have different characteristics than the original patterning material on the mask. Therefore, a mask that is repaired using carbon may not optically perform as if it were defect-free. An automated method of repairing a clear defect on an attenuated phase shifting mask (PSM) provides an optimized plug size/shape. In this method, a repair solution to the clear defect can be simulated, thereby allowing the repair decision for an attenuated PSM to be advantageously made at the same time that inspection is done and before actual repair. Simulation can include performing model-based OPC on the repair solution.

摘要翻译： 掩模商店通常使用碳来修复掩模上识别的任何明显的缺陷，而不管掩模的类型。 然而，碳可以具有与掩模上的原始图案形成材料不同的特性。 因此，使用碳修复的面膜可能不像光学性能那样无缺陷。 在衰减的相移掩模（PSM）上修复清晰缺陷的自动化方法提供了优化的插头尺寸/形状。 在该方法中，可以模拟清除缺陷的修复解决方案，从而允许在进行检查并在实际修复之前进行衰减PSM的修复决定。 模拟可以包括在修复解决方案上执行基于模型的OPC。

公开(公告)号：US20120042777A1

公开(公告)日：2012-02-23

申请号：US13284016

申请日：2011-10-28

申请人： Young Moo LEE ,  Keun-Young Kim ,  Chul-Ho Jung ,  Ho-Bum Park ,  Hye Jin Kwon ,  Sang Hoon Han

发明人： Young Moo LEE ,  Keun-Young Kim ,  Chul-Ho Jung ,  Ho-Bum Park ,  Hye Jin Kwon ,  Sang Hoon Han

IPC分类号： C08G73/22 ,  B01D53/22

CPC分类号： B01D53/228 ,  B01D69/02 ,  B01D71/62 ,  B01D2325/22 ,  B01D2325/24 ,  C01B3/503 ,  C01B2203/0405 ,  C01B2203/0475 ,  C01B2203/048 ,  C08G73/22 ,  C08L79/04

摘要： A method of separating components of a gas mixture, the method comprising: passing the gas mixture through a benzoxazole-based polymer membrane at a temperature of from about 30° C. to about 400° C., wherein the benzoxazole-based polymer membrane is represented by the formula: as is defined herein.

摘要翻译： 一种分离气体混合物的组分的方法，所述方法包括：使气体混合物通过基于苯并恶唑的聚合物膜，温度为约30℃至约400℃，其中苯并恶唑基聚合物膜为 由下式表示：如本文所定义。

公开(公告)号：US08519444B2

公开(公告)日：2013-08-27

申请号：US12879447

申请日：2010-09-10

申请人： Annie Lum ,  Derek C. Tao ,  Cheng Hung Lee ,  Chung-Ji Lu ,  Hong-Chen Cheng ,  Vineet Kumar Agrawal ,  Keun-Young Kim ,  Pyong Yun Cho

发明人： Annie Lum ,  Derek C. Tao ,  Cheng Hung Lee ,  Chung-Ji Lu ,  Hong-Chen Cheng ,  Vineet Kumar Agrawal ,  Keun-Young Kim ,  Pyong Yun Cho

IPC分类号： H01L27/118

CPC分类号： G06F17/5068 ,  G06F17/5081 ,  G06F2217/12 ,  H01L27/0207 ,  H01L27/088 ,  Y02P90/265

摘要： The layouts, device structures, and methods described above utilize dummy devices to extend the diffusion regions of edge structures and/or non-allowed structures to the dummy device. Such extension of diffusion regions resolves or reduces LOD and edge effect issues. In addition, treating the gate structure of a dummy device next to an edge device also allows only one dummy structure to be added next to the dummy device and saves the real estate on the semiconductor chip. The dummy devices are deactivated and their performance is not important. Therefore, utilizing dummy devices to extend the diffusion regions of edge structures and/or non-allowed structures according to design rules allows the resolution or reduction or LOD and edge effect issues without the penalty of yield reduction or increase in layout areas.

摘要翻译： 上述布局，装置结构和方法利用虚设装置将边缘结构和/或非允许结构的扩散区域扩展到虚设装置。 这种扩散区域的扩展可解决或减少LOD和边缘效应问题。 此外，在边缘装置旁边处理伪装置的栅极结构也仅允许在虚设装置旁边添加一个虚拟结构，并将该不动产保存在半导体芯片上。 虚拟设备被禁用，其性能不重要。 因此，利用虚设装置根据设计规则扩展边缘结构和/或非允许结构的扩散区域允许分辨率或降低或LOD和边缘效应发生，而不会降低成品率或增加布局面积。

公开(公告)号：US20060045094A1

公开(公告)日：2006-03-02

申请号：US11218047

申请日：2005-09-01

申请人： Sang-Boh Yun ,  Hoon Kim ,  Youngnam Han ,  Keun-Young Kim

发明人： Sang-Boh Yun ,  Hoon Kim ,  Youngnam Han ,  Keun-Young Kim

IPC分类号： H04L12/56 ,  H04L12/28

CPC分类号： H04L47/824 ,  H04L47/14 ,  H04L47/15 ,  H04L47/2433 ,  H04L47/70 ,  H04L47/805 ,  H04L47/822

摘要： A proportional fair scheduling apparatus for a multi-transmission channel system, a method thereof and a recording medium for recording program of the same. When each user reports an available transmission rate of a current slot according to transmission channels in the multiple transmission channel system, the scheduling apparatus calculates an average transmission rate of previous slots, and calculates scheduling priority values for all allocation schemes of allocating each transmission channel to users according to transmission channels based on information about the transmission rates. The scheduling apparatus determines an allocation scheme having the maximum priority value from among the calculated priority values, and allocates the transmission channels to the users according to the result of the determination. Therefore, the proportional fair scheduling scheme is applied to the multiple transmission channel system, and the users can transmit signals in an optimum channel environment.

摘要翻译： 一种用于多传输信道系统的比例公平调度装置，其方法和用于记录其的程序的记录介质。 当每个用户根据多个传输信道系统中的传输信道报告当前时隙的可用传输速率时，调度装置计算先前时隙的平均传输速率，并且计算分配每个传输信道的所有分配方案的调度优先级值 用户根据传输通道信息传输速率。 调度装置从计算的优先级值中确定具有最大优先级值的分配方案，并根据确定结果向用户分配传输信道。 因此，比例公平调度方案应用于多传输信道系统，用户可以在最佳信道环境中传输信号。

公开(公告)号：US08618244B2

公开(公告)日：2013-12-31

申请号：US12921980

申请日：2008-03-13

申请人： Young Moo Lee ,  Keun-Young Kim ,  Chul-Ho Jung ,  Ho-Bum Park

发明人： Young Moo Lee ,  Keun-Young Kim ,  Chul-Ho Jung ,  Ho-Bum Park

IPC分类号： C08G73/22 ,  C08G73/06 ,  C08G61/12 ,  B01D69/02 ,  B01D71/62

CPC分类号： B01D53/228 ,  B01D69/02 ,  B01D71/62 ,  B01D2325/22 ,  B01D2325/24 ,  C01B3/503 ,  C01B2203/0405 ,  C01B2203/0475 ,  C01B2203/048 ,  C08G73/22 ,  C08L79/04

摘要： Disclosed herein are a method for preparing a benzoxazole-based polymer by thermal rearrangement, the benzoxazole-based polymer prepared by the method and a gas separation membrane comprising the polymer. More specifically, provided are a method for preparing a benzoxazole-based polymer by subjecting poly(hydroxyamide) as an intermediate to thermal treatment involving dehydration, the benzoxazole-based polymer obtained thereby and gas separation membrane comprising the polymer. The benzoxazole-based polymer of the present invention can be simply prepared by thermally rearrangement via thermal treatment at low temperatures, and thus exhibits superior mechanical and morphological properties and has well-connected microcavities. Due to showing excellent permeability and selectivity for various gases, the benzoxazole-based polymer is suited for application to gas separation membranes, in particular, gas separation membranes for small gases.

摘要翻译： 本文公开了通过热重排制备苯并恶唑类聚合物的方法，通过该方法制备的苯并恶唑类聚合物和包含聚合物的气体分离膜。 更具体地说，提供了通过使作为中间体的聚（羟基酰胺）作为中间体进行脱水的热处理，由此获得的苯并恶唑类聚合物和包含该聚合物的气体分离膜来制备苯并恶唑类聚合物的方法。 本发明的苯并恶唑类聚合物可以通过在低温下热处理的热重排简单地制备，因此表现出优异的机械和形态特性，并具有良好连接的微腔。 由于显示出优异的各种气体的渗透性和选择性，所以基于苯并恶唑的聚合物适用于气体分离膜，特别是用于小气体的气体分离膜。

公开(公告)号：US20110009506A1

公开(公告)日：2011-01-13

申请号：US12921980

申请日：2008-03-13

申请人： Young Moo Lee ,  Keun-Young Kim ,  Chul-Ho Jung ,  Ho-Bum Park

发明人： Young Moo Lee ,  Keun-Young Kim ,  Chul-Ho Jung ,  Ho-Bum Park

IPC分类号： C08G69/48 ,  C08G69/08

CPC分类号： B01D53/228 ,  B01D69/02 ,  B01D71/62 ,  B01D2325/22 ,  B01D2325/24 ,  C01B3/503 ,  C01B2203/0405 ,  C01B2203/0475 ,  C01B2203/048 ,  C08G73/22 ,  C08L79/04

摘要： Disclosed herein are a method for preparing a benzoxazole-based polymer by thermal rearrangement, the benzoxazole-based polymer prepared by the method and a gas separation membrane comprising the polymer. More specifically, provided are a method for preparing a benzoxazole-based polymer by subjecting poly(hydroxyamide) as an intermediate to thermal treatment involving dehydration, the benzoxazole-based polymer obtained thereby and gas separation membrane comprising the polymer. The benzoxazole-based polymer of the present invention can be simply prepared by thermally rearrangement via thermal treatment at low temperatures, and thus exhibits superior mechanical and morphological properties and has well-connected microcavities. Due to showing excellent permeability and selectivity for various gases, the benzoxazole-based polymer is suited for application to gas separation membranes, in particular, gas separation membranes for small gases.

摘要翻译： 本文公开了通过热重排制备苯并恶唑类聚合物的方法，通过该方法制备的苯并恶唑类聚合物和包含聚合物的气体分离膜。 更具体地说，提供了通过使作为中间体的聚（羟基酰胺）作为中间体进行脱水的热处理，由此获得的苯并恶唑类聚合物和包含该聚合物的气体分离膜来制备苯并恶唑类聚合物的方法。 本发明的苯并恶唑类聚合物可以通过在低温下热处理的热重排简单地制备，因此表现出优异的机械和形态特性，并具有良好连接的微腔。 由于显示出优异的各种气体的渗透性和选择性，所以基于苯并恶唑的聚合物适用于气体分离膜，特别是用于小气体的气体分离膜。