摘要:
An erase method of a charge trap flash memory device, the method including receiving a temperature detection result, and performing an erase operation based on the temperature detection result, wherein the erase operation includes an erase execution interval, an erase verify interval and a delay time between the erase execution interval and the erase verify interval, wherein the erase operation changes a level of a word line voltage applied to word lines during the erase execution interval, a length of the delay time, or a level of the word line voltage applied to the word lines during the delay time.
摘要:
A three-dimensional (3D) semiconductor memory device may include an electrode structure extending in a first direction and including insulating patterns and horizontal electrodes stacked on a substrate, a semiconductor pillar penetrating the electrode structure and connected to the substrate, a charge storage layer between the semiconductor pillar and the electrode structure, a tunnel insulating layer between the charge storage layer and the semiconductor pillar, and a blocking insulating layer between the charge storage layer and the electrode structure. A first horizontal electrode of the horizontal electrodes includes a gate electrode and a metal stopper between the gate electrode and the blocking insulating layer.
摘要:
A semiconductor memory device and a method of fabricating the same. The device includes a plurality of gates vertically stacked on a top surface of a substrate with an epitaxial layer formed in the substrate, a vertical channel vertically penetrating the gates to be electrically connected to the epitaxial layer, and a memory layer provided between the vertical channel and the gates. The epitaxial layer has a top surface positioned at a level between a bottom surface of the lowermost one of the gates and the top surface of the substrate.