LAYERED PRODUCT FOR FINE PATTERN FORMATION AND METHOD OF MANUFACTURING LAYERED PRODUCT FOR FINE PATTERN FORMATION
    2.
    发明申请
    LAYERED PRODUCT FOR FINE PATTERN FORMATION AND METHOD OF MANUFACTURING LAYERED PRODUCT FOR FINE PATTERN FORMATION 有权
    精细图案形成的层叠产品和制作细小图案形成层状产品的方法

    公开(公告)号:US20140151733A1

    公开(公告)日:2014-06-05

    申请号:US14004305

    申请日:2012-06-18

    IPC分类号: H01L33/58 H01L33/00

    摘要: Disclosed is a layered product for fine pattern formation and a method of manufacturing the layered product for fine pattern formation, capable of easily forming a fine pattern having a thin or no remaining film in order to form a fine pattern having a high aspect ratio on a processing object. The layered product for fine pattern formation (1) of the present invention used to form a fine pattern (220) in a processing object (200) using a first mask layer (103) includes: a mold (101) having a concavo-convex structure (101a) on a surface; and a second mask layer (102) provided on the concavo-convex structure (101a), wherein in the second mask layer (102), a distance (lcc) and a height (h) of the concavo-convex structure (101a) satisfy Formula (1) 0

    摘要翻译: 公开了用于精细图案形成的层叠产品和用于精细图案形成的层叠产品的制造方法,能够容易地形成具有薄或不残留的薄膜的精细图案,以形成具有高纵横比的精细图案 处理对象。 用于在使用第一掩模层(103)的处理对象(200)中形成精细图案(220)的本发明的精细图案形成层叠体(1)包括:模具(101),具有凹凸 结构(101a); 以及设置在所述凹凸结构(101a)上的第二掩模层(102),其中在所述第二掩模层(102)中,所述凹凸结构(101a)的距离(lcc)和高度(h)满足 式(1)0

    LAYERED PRODUCT FOR METAMATERIAL TRANSFER AND METAMATERIAL TRANSFERRED SUBSTRATE
    3.
    发明申请
    LAYERED PRODUCT FOR METAMATERIAL TRANSFER AND METAMATERIAL TRANSFERRED SUBSTRATE 有权
    用于金属转移和金属转移基板的层状产品

    公开(公告)号:US20130101815A1

    公开(公告)日:2013-04-25

    申请号:US13610360

    申请日:2012-09-11

    IPC分类号: B29C33/56 B32B3/08

    摘要: Disclosed is a layered product for metamaterial transfer for transferring a metamaterial layer onto a substrate, including: a resin mold having a fine convex-concave structure on a surface; and an inorganic layer as a metamaterial layer including at least one dielectric layer and at least one metal layer deposited on a surface of the resin mold, wherein resin of the resin mold contains fluorine, and a ratio between an average elemental fluorine concentration Eb of the resin and an elemental fluorine concentration Es of the surface of the resin mold satisfies the following equation: 200≧Es/Eb≧5.0.

    摘要翻译: 公开了一种用于将超材料层转移到基底上的超材料转移层压体,其包括:表面具有微细凹凸结构的树脂模具; 以及作为超材料层的无机层,所述无机层包含至少一层电介质层和沉积在所述树脂模具的表面上的至少一层金属层,其中所述树脂模具的树脂含有氟,并且所述树脂模具的树脂的平均元素氟浓度Eb 树脂和树脂模具的表面的元素氟浓度Es满足下式:200> = Es / Eb> = 5.0。