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公开(公告)号：US20060290445A1
公开(公告)日：2006-12-28
申请号：US11153998
申请日：2005-06-16
申请人： Jun Su , Dong Shim , Oing Ma , Valluri Rao
发明人： Jun Su , Dong Shim , Oing Ma , Valluri Rao
CPC分类号： H03H7/0153 , B81B7/02 , B81B2201/018 , B81B2201/0271 , H01P1/203 , H03H7/1758 , H03H7/1766 , H03H7/1783 , H03H7/1791 , H03H2007/006 , H03H2007/013 , H03H2210/015
摘要： According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.
摘要翻译： 根据本发明的实施例，微机电系统（MEMS）元件将谐振器调谐到频率。
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2.发明授权Structure to achieve high-Q and low insertion loss film bulk acoustic resonators 有权结构实现高Q和低插入损耗薄膜体声共振器公开(公告)号：US07116034B2
公开(公告)日：2006-10-03
申请号：US11065511
申请日：2005-02-23
申请人： Li-Peng Wang , Oing Ma , Valluri Rao
发明人： Li-Peng Wang , Oing Ma , Valluri Rao
CPC分类号： H03H9/174 , H03H3/02 , H03H2003/023 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T29/49156
摘要： A film bulk acoustic resonator is formed on a substrate. The film bulk acoustic resonator includes a layer of piezoelectric material having a first surface proximate the substrate, and a second surface distal from the substrate. The first conductive layer deposited on the first surface of the piezoelectric material includes a first portion having a surface on a different plane than a surface associated with a second portion.
摘要翻译： 在基板上形成膜体声波谐振器。 膜体声波谐振器包括具有靠近衬底的第一表面的压电材料层和远离衬底的第二表面。 沉积在压电材料的第一表面上的第一导电层包括具有与与第二部分相关联的表面不同的平面上的表面的第一部分。
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3.发明申请Structure to achieve high-Q and low insertion loss film bulk acoustic resonators 有权结构实现高Q和低插入损耗薄膜体声共振器公开(公告)号：US20050140246A1
公开(公告)日：2005-06-30
申请号：US11065511
申请日：2005-02-23
申请人： Li-Peng Wang , Oing Ma , Valluri Rao
发明人： Li-Peng Wang , Oing Ma , Valluri Rao
CPC分类号： H03H9/174 , H03H3/02 , H03H2003/023 , Y10T29/42 , Y10T29/49005 , Y10T29/4908 , Y10T29/49156
摘要： A film bulk acoustic resonator is formed on a substrate. The film bulk acoustic resonator includes a layer of piezoelectric material having a first surface proximate the substrate, and a second surface distal from the substrate. The first conductive layer deposited on the first surface of the piezoelectric material includes a first portion having a surface on a different plane than a surface associated with a second portion.
摘要翻译： 在基板上形成膜体声波谐振器。 膜体声波谐振器包括具有靠近衬底的第一表面的压电材料层和远离衬底的第二表面。 沉积在压电材料的第一表面上的第一导电层包括具有与与第二部分相关联的表面不同的平面上的表面的第一部分。
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公开(公告)号：US07339446B2
公开(公告)日：2008-03-04
申请号：US11153998
申请日：2005-06-16
申请人： Jun Su , Dong S. Shim , Oing Ma , Valluri R. Rao
发明人： Jun Su , Dong S. Shim , Oing Ma , Valluri R. Rao
CPC分类号： H03H7/0153 , B81B7/02 , B81B2201/018 , B81B2201/0271 , H01P1/203 , H03H7/1758 , H03H7/1766 , H03H7/1783 , H03H7/1791 , H03H2007/006 , H03H2007/013 , H03H2210/015
摘要： According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.
摘要翻译： 根据本发明的实施例，微机电系统（MEMS）元件将谐振器调谐到频率。
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公开(公告)号：US20080309191A1
公开(公告)日：2008-12-18
申请号：US11818315
申请日：2007-06-14
申请人： Tsung-Kuan Allen Chou , Oing Ma
发明人： Tsung-Kuan Allen Chou , Oing Ma
CPC分类号： B81B3/0051 , B81B2201/11 , B81B2203/056 , H02N1/008
摘要： A MEMS platform with four actuators and four corresponding actuation electrodes. Movement of the platform in the x-y lateral plane is controlled by voltages applied to the four actuation electrodes. Other embodiments are described and claimed.
摘要翻译： 具有四个致动器和四个相应的致动电极的MEMS平台。 平台在x-y横向平面中的运动由施加到四个致动电极的电压控制。 描述和要求保护其他实施例。
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