公开(公告)号：US06635114B2

公开(公告)日：2003-10-21

申请号：US09467296

申请日：1999-12-17

申请人： Jun Zhao ,  Charles Dornfest ,  Frank Chang ,  Xiaoliang Jin ,  Po Tang

发明人： Jun Zhao ,  Charles Dornfest ,  Frank Chang ,  Xiaoliang Jin ,  Po Tang

IPC分类号： C23C1600

CPC分类号： C23C16/4402 ,  C23C16/4481 ,  C23C16/4486

摘要： The present invention generally provides a deposition chamber for depositing materials which require vaporization, especially low volatility precursors, which are transported as a liquid to a vaporizer to be converted to vapor phase through one or more vaporizing elements and which must be transported at elevated temperatures to prevent unwanted condensation on chamber components. In one aspect, the chamber comprises a series of heated temperature controlled internal liners as vaporizing surfaces which are configured for rapid removal, cleaning and/or replacement and preferably are made of a material having a thermal coefficient of expansion close to that of the deposition material. The vaporizing surfaces “flash” sprayed liquid precursors on the surface of the vaporizing surfaces and then purify the flashed precursors before flowing further into the system. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules. Preferably, internal surfaces of the chamber are adjustable and maintainable at a suitable temperature above ambient, e.g., about 150° C. to about 300° C., to prevent decomposition and/or condensation of vaporized material on the chamber and related gas flow surfaces.

摘要翻译： 本发明通常提供一种用于沉积需要蒸发的材料，特别是低挥发性前体的沉积室，其作为液体被输送到蒸发器，以通过一个或多个汽化元件转化为气相，并且必须在升高的温度下运输至 防止腔室部件发生不必要的冷凝。 在一个方面，腔室包括一系列加热的受温度控制的内衬，作为蒸发表面，其被构造用于快速去除，清洁和/或更换，并且优选地由具有接近沉积材料的热膨胀系数的材料制成 。 蒸发表面在蒸发表面的表面上“闪蒸”喷射的液体前体，然后在进一步进入系统之前净化闪光的前体。 特别考虑的是用于在硅晶片上沉积诸如钡，锶，氧化钛（BST）膜的金属氧化物膜的装置和方法，以使集成电路电容器用于高容量动态存储器模块。 优选地，室的内表面是可调节的并且可在高于环境温度（例如约150℃至约300℃）的合适温度下保持，以防止气化材料在室和相关气流表面上的分解和/或冷凝 。

公开(公告)号：US06210485B1

公开(公告)日：2001-04-03

申请号：US09352629

申请日：1999-07-13

申请人： Jun Zhao ,  Lee Luo ,  Xiaoliang Jin ,  Frank Chang ,  Charles Dornfest ,  Po Tang

发明人： Jun Zhao ,  Lee Luo ,  Xiaoliang Jin ,  Frank Chang ,  Charles Dornfest ,  Po Tang

IPC分类号： C23C1600

CPC分类号： C23C16/4481

摘要： The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the vaporization of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, for deposition on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules. The vaporizer comprises thermally controlled components which are adapted for easy assembly and disassembly. A main vaporizing section provides a large heated surface for flash vaporization. A high conductance blocker is disposed at a lower end of the vaporizer to provide an extended vaporization surface. Optionally, a filter may be employed to capture unvaporized precursor droplets.

摘要翻译： 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于蒸发金属氧化物膜如钡，锶，氧化钛（BST）膜的装置和方法，用于沉积在硅晶片上，以使集成电路电容器用于高容量动态存储器模块。 蒸发器包括适于容易组装和拆卸的热控部件。 主蒸发部分提供用于闪蒸的大的加热表面。 高电导阻挡器设置在蒸发器的下端以提供延长的蒸发表面。 任选地，可以使用过滤器来捕获未汽化的前体液滴。

公开(公告)号：US06258170B1

公开(公告)日：2001-07-10

申请号：US08927700

申请日：1997-09-11

申请人： Sasson Somekh ,  Jun Zhao ,  Charles Dornfest ,  Talex Sajoto ,  Leonid Selyutin ,  Vincent Ku ,  Chris Wang ,  Frank Chang ,  Po Tang

发明人： Sasson Somekh ,  Jun Zhao ,  Charles Dornfest ,  Talex Sajoto ,  Leonid Selyutin ,  Vincent Ku ,  Chris Wang ,  Frank Chang ,  Po Tang

IPC分类号： C23C1600

CPC分类号： C23C16/4409 ,  C23C16/4401 ,  C23C16/4412 ,  C23C16/4481 ,  C23C16/45561 ,  C23C16/4557 ,  H01L21/67017 ,  H01L21/6715 ,  Y10S261/65 ,  Y10T137/87684

摘要： The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.

摘要翻译： 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于在硅晶片上沉积诸如钡，锶，氧化钛（BST）膜的金属氧化物膜的装置和方法，以使集成电路电容器用于高容量动态存储器模块。

公开(公告)号：US6082714A

公开(公告)日：2000-07-04

申请号：US052767

申请日：1998-03-31

申请人： Charles Dornfest ,  Jun Zhao ,  Vincent Ku ,  Po Tang ,  Talex Sajoto ,  Frank Chang

发明人： Charles Dornfest ,  Jun Zhao ,  Vincent Ku ,  Po Tang ,  Talex Sajoto ,  Frank Chang

IPC分类号： C23C16/52 ,  C23C16/44 ,  C23C16/448 ,  C23C16/455 ,  H01L21/00 ,  H01L21/31 ,  C23C16/00

CPC分类号： C23C16/4409 ,  C23C16/4401 ,  C23C16/4412 ,  C23C16/4481 ,  C23C16/45561 ,  C23C16/4557 ,  H01L21/67017 ,  H01L21/6715 ,  Y10S261/65

摘要： The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.

摘要翻译： 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于在硅晶片上沉积诸如钡，锶，氧化钛（BST）膜的金属氧化物膜的装置和方法，以使集成电路电容器用于高容量动态存储器模块。

公开(公告)号：US20070210205A1

公开(公告)日：2007-09-13

申请号：US11369829

申请日：2006-03-08

申请人： Po Tang

发明人： Po Tang

IPC分类号： B65D85/02

CPC分类号： B65H35/0033 ,  Y10T156/1795

摘要： A tightening mechanism for adjustably setting a tape holder to an immovable state on a tape dispenser includes a tape holder being provided at an axially outer end with a flared round recess, a bushing ring having a bevel wall and being fitted in the flared round recess, and a locating member slightly smaller than the bushing ring for fitly seating in the bushing ring. A turning knob having a spring put thereon is sequentially extended through the locating member and the bushing ring to screw into a fixing bar, on which the tape holder is mounted. When the knob is turned, a tightness of the bushing ring against the flared round recess is progressively changed to thereby adjust the tape holder to different degrees of immobility, allowing the tape dispenser to apply to tapes of different adhesion ability.

摘要翻译： 用于将带座可调整地设置在带分配器上的不动状态的紧固机构包括：带轴保持器，其在轴向外端处设置有扩口的圆形凹部，具有斜面壁的套筒环，并且装配在扩张的圆形凹部中， 以及比衬套环稍小的定位构件，以适合地安置在衬套环中。 具有放置在其上的弹簧的旋转旋钮依次延伸穿过定位构件和衬套环，以旋入固定杆，固定杆上安装有磁带架。 当旋钮旋转时，衬套环紧靠喇叭形的圆形凹槽逐渐改变，从而将胶带支架调整到不同程度的不动，使胶带分配器适用于不同粘附能力的胶带。

公开(公告)号：US20070210204A1

公开(公告)日：2007-09-13

申请号：US11370055

申请日：2006-03-08

申请人： Po Tang

发明人： Po Tang

IPC分类号： B65H75/24

CPC分类号： B65H35/0033 ,  B65H35/0073 ,  B65H2402/412

摘要： A packing structure for immovably mounting a tape holder on a tape dispenser includes a rubber seat having a conical body and defining an axially extended central bore. An upper edge of the conical body is provided with a plurality of equally spaced lugs, and a slot is centered between two adjacent lugs to extend downward by a predetermined distance. The seat is connected to an inner end of a sleeve in the tape holder and then mounted on a fixing bar of the tape dispenser. When a turning knob of the tape dispenser is turned to tighten the tape holder against the fixing bar, the conical and slotted seat enhances the tightening effect, and the slots on the seat allow adjusting of a tightness of the tape holder against the fixing bar.

摘要翻译： 用于将胶带保持器固定在胶带分配器上的包装结构包括具有圆锥体并限定轴向延伸的中心孔的橡胶座。 锥形体的上边缘设置有多个等间隔的凸耳，并且狭槽在两个相邻凸耳之间居中以向下延伸预定距离。 座椅连接到带座中的套筒的内端，然后安装在胶带分配器的固定杆上。 当转动胶带分配器的转动旋钮将胶带保持器固定在固定杆上时，锥形和开槽的座椅增强了紧固效果，并且座椅上的狭槽允许调节胶带支架抵靠固定杆的紧密度。