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公开(公告)号:US06210485B1
公开(公告)日:2001-04-03
申请号:US09352629
申请日:1999-07-13
申请人: Jun Zhao , Lee Luo , Xiaoliang Jin , Frank Chang , Charles Dornfest , Po Tang
发明人: Jun Zhao , Lee Luo , Xiaoliang Jin , Frank Chang , Charles Dornfest , Po Tang
IPC分类号: C23C1600
CPC分类号: C23C16/4481
摘要: The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the vaporization of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, for deposition on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules. The vaporizer comprises thermally controlled components which are adapted for easy assembly and disassembly. A main vaporizing section provides a large heated surface for flash vaporization. A high conductance blocker is disposed at a lower end of the vaporizer to provide an extended vaporization surface. Optionally, a filter may be employed to capture unvaporized precursor droplets.
摘要翻译: 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于蒸发金属氧化物膜如钡,锶,氧化钛(BST)膜的装置和方法,用于沉积在硅晶片上,以使集成电路电容器用于高容量动态存储器模块。 蒸发器包括适于容易组装和拆卸的热控部件。 主蒸发部分提供用于闪蒸的大的加热表面。 高电导阻挡器设置在蒸发器的下端以提供延长的蒸发表面。 任选地,可以使用过滤器来捕获未汽化的前体液滴。
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公开(公告)号:US06635114B2
公开(公告)日:2003-10-21
申请号:US09467296
申请日:1999-12-17
申请人: Jun Zhao , Charles Dornfest , Frank Chang , Xiaoliang Jin , Po Tang
发明人: Jun Zhao , Charles Dornfest , Frank Chang , Xiaoliang Jin , Po Tang
IPC分类号: C23C1600
CPC分类号: C23C16/4402 , C23C16/4481 , C23C16/4486
摘要: The present invention generally provides a deposition chamber for depositing materials which require vaporization, especially low volatility precursors, which are transported as a liquid to a vaporizer to be converted to vapor phase through one or more vaporizing elements and which must be transported at elevated temperatures to prevent unwanted condensation on chamber components. In one aspect, the chamber comprises a series of heated temperature controlled internal liners as vaporizing surfaces which are configured for rapid removal, cleaning and/or replacement and preferably are made of a material having a thermal coefficient of expansion close to that of the deposition material. The vaporizing surfaces “flash” sprayed liquid precursors on the surface of the vaporizing surfaces and then purify the flashed precursors before flowing further into the system. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules. Preferably, internal surfaces of the chamber are adjustable and maintainable at a suitable temperature above ambient, e.g., about 150° C. to about 300° C., to prevent decomposition and/or condensation of vaporized material on the chamber and related gas flow surfaces.
摘要翻译: 本发明通常提供一种用于沉积需要蒸发的材料,特别是低挥发性前体的沉积室,其作为液体被输送到蒸发器,以通过一个或多个汽化元件转化为气相,并且必须在升高的温度下运输至 防止腔室部件发生不必要的冷凝。 在一个方面,腔室包括一系列加热的受温度控制的内衬,作为蒸发表面,其被构造用于快速去除,清洁和/或更换,并且优选地由具有接近沉积材料的热膨胀系数的材料制成 。 蒸发表面在蒸发表面的表面上“闪蒸”喷射的液体前体,然后在进一步进入系统之前净化闪光的前体。 特别考虑的是用于在硅晶片上沉积诸如钡,锶,氧化钛(BST)膜的金属氧化物膜的装置和方法,以使集成电路电容器用于高容量动态存储器模块。 优选地,室的内表面是可调节的并且可在高于环境温度(例如约150℃至约300℃)的合适温度下保持,以防止气化材料在室和相关气流表面上的分解和/或冷凝 。
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公开(公告)号:US06258170B1
公开(公告)日:2001-07-10
申请号:US08927700
申请日:1997-09-11
申请人: Sasson Somekh , Jun Zhao , Charles Dornfest , Talex Sajoto , Leonid Selyutin , Vincent Ku , Chris Wang , Frank Chang , Po Tang
发明人: Sasson Somekh , Jun Zhao , Charles Dornfest , Talex Sajoto , Leonid Selyutin , Vincent Ku , Chris Wang , Frank Chang , Po Tang
IPC分类号: C23C1600
CPC分类号: C23C16/4409 , C23C16/4401 , C23C16/4412 , C23C16/4481 , C23C16/45561 , C23C16/4557 , H01L21/67017 , H01L21/6715 , Y10S261/65 , Y10T137/87684
摘要: The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.
摘要翻译: 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于在硅晶片上沉积诸如钡,锶,氧化钛(BST)膜的金属氧化物膜的装置和方法,以使集成电路电容器用于高容量动态存储器模块。
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公开(公告)号:US6082714A
公开(公告)日:2000-07-04
申请号:US052767
申请日:1998-03-31
申请人: Charles Dornfest , Jun Zhao , Vincent Ku , Po Tang , Talex Sajoto , Frank Chang
发明人: Charles Dornfest , Jun Zhao , Vincent Ku , Po Tang , Talex Sajoto , Frank Chang
IPC分类号: C23C16/52 , C23C16/44 , C23C16/448 , C23C16/455 , H01L21/00 , H01L21/31 , C23C16/00
CPC分类号: C23C16/4409 , C23C16/4401 , C23C16/4412 , C23C16/4481 , C23C16/45561 , C23C16/4557 , H01L21/67017 , H01L21/6715 , Y10S261/65
摘要: The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.
摘要翻译: 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于在硅晶片上沉积诸如钡,锶,氧化钛(BST)膜的金属氧化物膜的装置和方法,以使集成电路电容器用于高容量动态存储器模块。
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公开(公告)号:US6096134A
公开(公告)日:2000-08-01
申请号:US52747
申请日:1998-03-31
IPC分类号: C23C16/52 , C23C16/44 , C23C16/448 , C23C16/455 , H01L21/00 , H01L21/31 , C23C16/00
CPC分类号: C23C16/4409 , C23C16/4401 , C23C16/4412 , C23C16/4481 , C23C16/45561 , C23C16/4557 , H01L21/67017 , H01L21/6715 , Y10S261/65
摘要: The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.
摘要翻译: 本发明涉及一种用于蒸发液体前体并将膜沉积在合适基底上的装置和方法。 特别考虑的是用于在硅晶片上沉积诸如钡,锶,氧化钛(BST)膜的金属氧化物膜的装置和方法,以使集成电路电容器用于高容量动态存储器模块。
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6.
公开(公告)号:US09187601B2
公开(公告)日:2015-11-17
申请号:US13253186
申请日:2011-10-05
申请人: Jinyu Huang , Frank Chang , Robert Scott , Arturo Norberto Medina , Manivakkam J. Shankernarayanan , Selma Kuyu , Dawn Alison Smith , Daqing Wu
发明人: Jinyu Huang , Frank Chang , Robert Scott , Arturo Norberto Medina , Manivakkam J. Shankernarayanan , Selma Kuyu , Dawn Alison Smith , Daqing Wu
IPC分类号: C08F230/08 , C08G77/42 , C08G77/442 , C08L83/10 , G02B1/04 , C08G77/20
CPC分类号: G02B1/043 , C08G77/20 , C08G77/42 , C08G77/442 , C08J3/075 , C08J2343/04 , C08J2383/08 , C08L83/10 , C08L101/14 , C08L83/04
摘要: The invention provide a class of water-processable polymerizable prepolymers which comprises (1) siloxane-containing monomeric units derived at least one siloxane containing monomer having one hydrophilic group or chain and/or polysiloxane-containing crosslinking units derived from at least one hydrophilized polysiloxane or chain-extended polysiloxane crosslinker; (2) hydrophilic monomeric units derived from one or more hydrophilic vinylic monomers; and (3) from about 0.05% to about 5% by weight of polymerizable units each having a pendant or terminal, ethylenically-unsaturated group and free of any polysiloxane segment. The prepolymer comprises from about 20% to about 50% by weight of silicone relative to the total weight of the prepolymer and has a high water solubility or dispersibility of at least about 5% by weight in water and suitable for making silicone hydrogel contact lenses.
摘要翻译: 本发明提供了一类可水加工的可聚合预聚物,其包含(1)衍生自至少一种含有一个含硅氧烷的单体的含硅氧烷的单体单元,所述单体具有一个亲水基团或至少一种亲水化聚硅氧烷的链和/或含聚硅氧烷的交联单元,或 链延长聚硅氧烷交联剂; (2)衍生自一种或多种亲水乙烯基单体的亲水单体单元; 和(3)约0.05%至约5%重量的各自具有侧基或末端的可聚合单元,烯属不饱和基团并且不含任何聚硅氧烷链段。 预聚物相对于预聚物的总重量包含约20重量%至约50重量%的硅氧烷,并且在水中具有至少约5重量%的高水溶性或分散性,并且适于制备硅酮水凝胶隐形眼镜。
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公开(公告)号:US08729822B2
公开(公告)日:2014-05-20
申请号:US13191174
申请日:2011-07-26
申请人: Jinhwa Chung , Frank Chang , Byunghak Ahn , Moonho Choi
发明人: Jinhwa Chung , Frank Chang , Byunghak Ahn , Moonho Choi
IPC分类号: H05B37/02
CPC分类号: H05B33/0827
摘要: The present invention relates to an LED emitting device and a driving method thereof including at least two LED channels. If a power source voltage supplied to an LED emitting device reaches a predetermined threshold voltage, the power source voltage is maintained as a threshold voltage during an overvoltage regulation period.
摘要翻译: 本发明涉及一种LED发光装置及其驱动方法,其包括至少两个LED通道。 如果提供给LED发射装置的电源电压达到预定阈值电压,则在过电压调节周期期间将电源电压维持为阈值电压。
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公开(公告)号:US20130045899A1
公开(公告)日:2013-02-21
申请号:US13254872
申请日:2010-11-03
申请人: Oscar Bustos , Mathew Samuel , Frank Chang , Leiming Li
发明人: Oscar Bustos , Mathew Samuel , Frank Chang , Leiming Li
摘要: A method and apparatus for treating a subterranean formation traversed by a wellbore including forming an emulsion comprising oil, acid, and particulate, wherein the forming the emulsion is prepared on the fly, and introducing the emulsion into a wellbore.
摘要翻译: 一种用于处理由井筒穿过的地下地层的方法和装置,包括形成包含油,酸和颗粒的乳液,其中形成所述乳液在飞行中制备,并将乳液引入井眼。
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9.
公开(公告)号:US08283429B2
公开(公告)日:2012-10-09
申请号:US13284119
申请日:2011-10-28
IPC分类号: C08F30/08
CPC分类号: C08F283/12 , C08L51/085 , C08L2666/02
摘要: The invention provide a new class of silicone-containing prepolymers containing dangling hydrophilic polymer chains. This class of silicone-containing prepolymer is capable of being actinically crosslinked to form a silicone hydrogel material with a hydrophilic surface without post curing surface treatment. The present invention is also related to silicone hydrogel contact lenses made from this class of silicone-containing prepolymers and to methods for making the silicone hydrogel contact lenses.
摘要翻译: 本发明提供了一类含有悬浮亲水聚合物链的含硅氧烷预聚物。 这种含硅氧烷的预聚物能够进行光化交联以形成具有亲水表面的硅氧烷水凝胶材料,而无需后固化表面处理。 本发明还涉及由这种含硅氧烷的预聚物制成的硅酮水凝胶隐形眼镜以及制备硅酮水凝胶隐形眼镜的方法。
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公开(公告)号:US08074912B2
公开(公告)日:2011-12-13
申请号:US12645360
申请日:2009-12-22
申请人: Frank Chang
发明人: Frank Chang
CPC分类号: B02C18/2283 , B02C18/0007 , B02C2018/003
摘要: Disclosed is an auto-feed built-in a paper shredder, including a pair of bisecting lids that are each provided at an inside thereof with a paper press, a paper receiving compartment, an auto-feed, and a paper shredding device located exactly below the auto-feed, wherein the auto-feed includes a paper tray, a paper inlet and two roller assemblies; the paper inlet and the paper shredding device located therebelow are aligned along an identical central axis; the two roller assemblies are provided at opposing sides of the paper inlet in parallel and project into the paper tray, whereby after placing a pile of paper into the paper receiving compartment to be supported by the paper tray, and closing the bisecting lids, the paper presses provided at the insides of the lids would apply a force against the pile of paper, such that a bottommost paper of the pile of paper would be folded in half by the two rollers rotating towards each other and then fed into the paper inlet to be subsequently shredded by the paper shredding device located below the paper inlet.
摘要翻译: 公开了一种自动进料内置的切碎机,包括一对平分盖,其内侧均设置有压纸机,纸容纳室,自动进给和位于正好下方的切纸装置 自动进给,其中自动进给包括纸盘,纸入口和两个辊组件; 位于其下方的进纸口和切纸装置沿着相同的中心轴线排列; 两个辊组件平行地设置在纸入口的相对侧并突出到纸盘中,由此在将一堆纸放置在纸容纳室中以由纸盘支撑并且闭合平分盖之后,纸张 设置在盖子内侧的压力将对纸张施加力,使得纸堆中的最下面的纸张将被两个相互转动的辊折叠成一半,然后被送入纸张入口 随后由位于进纸口下方的切纸装置切碎。
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