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1.发明申请Scanning Electron Microscope Alignment Method and Scanning Electron Microscope 有权扫描电子显微镜对准方法和扫描电子显微镜公开(公告)号：US20090032693A1
公开(公告)日：2009-02-05
申请号：US12182704
申请日：2008-07-30
CPC分类号： G01N23/225 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： The present invention aims to provide an axis alignment method, astigmatism correction method and SEM for implementing these methods, which can prevent an alignment or correction error attributable to conditions of a specimen. A first aspect is to obtain the difference between the optimal values acquired from an automatic axis alignment result on a standard sample and from each of automatic axis alignment results on a observation target sample, and to correct an optimal value adjusted using the standard sample by use of the difference thus obtained. A second aspect is to acquire an optimal stigmator value (astigmatism correction signal) by using the standard sample, to store the optimal stigmator value as a default value, to add the optimal stigmator value and the default value depending on the height of an observation target sample pattern, and to perform an astigmatism correction on the basis of the resultant stigmator value.
摘要翻译： 本发明旨在提供一种用于实现这些方法的轴对准方法，像散校正方法和SEM，其可以防止由于样品的条件引起的对准或校正误差。 第一方面是获得从标准样品的自动轴对准结果获取的最佳值与观察目标样品上的自动轴对准结果中的每一种之间的差异，并且通过使用校正使用标准样品调整的最佳值 的差异。 第二方面是通过使用标准样本来获取最佳标称值（像散校正信号），以将最佳标称值作为默认值来存储，以根据观察目标的高度添加最优标示符值和默认值 样本图案，并且基于得到的标记值进行散光校正。
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2.发明授权Scanning electron microscope alignment method and scanning electron microscope 有权扫描电子显微镜对准方法和扫描电子显微镜公开(公告)号：US08188427B2
公开(公告)日：2012-05-29
申请号：US12182704
申请日：2008-07-30
CPC分类号： G01N23/225 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： A method and apparatus for alignment and astigmatism correction for a scanning electron microscope can prevent an alignment or correction error attributable to the conditions of a particular specimen. First, a difference is determined between optimal values acquired from an automatic axis alignment result on a standard sample, and those obtained from each of a plurality automatic axis alignment results on a observation target sample. An optimal value is then adjusted using the standard sample, by use of the difference thus obtained. Correspondingly, an optimal stigmator value (astigmatism correction signal) is acquired by using the standard sample, and storing the optimal stigmator value as a default value. The optimal stigmator value and the default value depending on the height of an observation target sample pattern are added, and an astigmatism correction is performed on the basis of the resultant stigmator value.
摘要翻译： 用于扫描电子显微镜的对准和像散校正的方法和装置可以防止由特定样品的条件引起的对准或校正误差。 首先，在从标准样品的自动轴对准结果获得的最佳值与从观察对象样本的多个自动轴对准结果中得到的最佳值之间确定差异。 然后使用标准样品通过使用由此获得的差异来调整最佳值。 相应地，通过使用标准样品获取最佳标称值（像散校正信号），并将最佳标定值存储为默认值。 添加根据观察目标样本图案的高度的最佳标称值和默认值，并根据得到的标示符值进行像散校正。
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3.发明授权Method of manufacturing a template matching template, as well as a device for manufacturing a template 有权制造模板匹配模板的方法以及用于制造模板的装置公开(公告)号：US08929665B2
公开(公告)日：2015-01-06
申请号：US13375131
申请日：2010-05-21
申请人： Yukari Yamada , Kyoungmo Yang , Junichi Kakuta
发明人： Yukari Yamada , Kyoungmo Yang , Junichi Kakuta
CPC分类号： G06T7/0044 , G06K9/6255 , G06T7/74 , G06T2207/10056 , G06T2207/20216 , G06T2207/30148
摘要： Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations. As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant device, is proposed by both of which a template memorized in advance and an image acquired by a microscope are compared, thereby identifying a desired position, and by which a plurality of images at the identified location are acquired by template matching, and the aforementioned plurality of images are added and averaged, thereby manufacturing a new template.
摘要翻译： 提供了一种制造模板匹配模板的方法，以及用于制造模板的装置，通过两者都可以稳定地确保高匹配精度，而不受诸如工艺变化的因素的影响。 作为上述的实施例，提出了一种制造模板匹配模板的方法以及相关装置，其中比较预先存储的模板和通过显微镜获取的图像，从而识别期望的位置， 并通过模板匹配获取识别位置处的多个图像，并且对上述多个图像进行相加和平均，从而制造新的模板。
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4.发明申请公开(公告)号：US20110215243A1
公开(公告)日：2011-09-08
申请号：US13107892
申请日：2011-05-14
申请人： Makoto EZUMI , Satoru Iwama , Junichi Kakuta , Takahiro Sato , Akira Ikegami
发明人： Makoto EZUMI , Satoru Iwama , Junichi Kakuta , Takahiro Sato , Akira Ikegami
IPC分类号： H01J37/28
CPC分类号： H01J37/26 , G01N23/2251 , H01J37/265 , H01J37/28 , H01J2237/0048 , H01J2237/281
摘要： As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first electron beam to a sample to charge the sample are proposed wherein the beam diameter of the first electron beam is made larger than the beam diameter of the second electron beam.
摘要翻译： 作为用于实现具有大纵横比的接触孔的精确观察，检查或测量的一个方面，提出了在将第一电子束扫描到样品以对样品充电之后扫描第二电子束的方法和装置，其中， 使第一电子束的直径大于第二电子束的光束直径。
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5.发明申请公开(公告)号：US20120070089A1
公开(公告)日：2012-03-22
申请号：US13375131
申请日：2010-05-21
申请人： Yukari Yamada , Kyoungmo Yang , Junichi Kakuta
发明人： Yukari Yamada , Kyoungmo Yang , Junichi Kakuta
IPC分类号： G06K9/62
CPC分类号： G06T7/0044 , G06K9/6255 , G06T7/74 , G06T2207/10056 , G06T2207/20216 , G06T2207/30148
摘要： Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations. As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant deice, is proposed by both of which a template memorized in advance and an image acquired by a microscope are compared, thereby identifying a desired position, and by which a plurality of images at the identified location are acquired by template matching, and the aforementioned plurality of images are added and averaged, thereby manufacturing a new template.
摘要翻译： 提供了一种制造模板匹配模板的方法，以及用于制造模板的装置，通过两者都可以稳定地确保高匹配精度，而不受诸如工艺变化的因素的影响。 作为上述的实施例，提出了一种制造模板匹配模板的方法以及相关的模板，其中比较了预先存储的模板和通过显微镜获取的图像，从而识别期望的位置， 并通过模板匹配获取识别位置处的多个图像，并且对上述多个图像进行相加和平均，从而制造新的模板。
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公开(公告)号：US08052146B2
公开(公告)日：2011-11-08
申请号：US12450243
申请日：2008-08-28
IPC分类号： B65H5/02
CPC分类号： B65H15/00 , B65H5/224 , B65H5/38 , B65H29/242 , B65H29/245 , B65H2220/09 , B65H2301/3423 , B65H2404/612 , B65H2406/122 , B65H2406/3662 , B65H2406/42
摘要： Provided is a sheet inverting apparatus wherein members, such as a roller, are not brought into contact with the printed surface of a sheet at all, and the occurrence of dirt can be prevented by eliminating friction of ink on the surface of the sheet. A first transport apparatus and a second transport apparatus each have a plurality of transport belts which move on transport tracks along sheet transport directions and a suction box which sucks the sheet on the transport belts through suction holes formed on the transport belts. A turn guide arranged between the first transport apparatus and the second transport apparatus has a plurality of guide ribs disposed between the transport belts. Each of the guide ribs coming into slidable contact with the sheet forms a curved inverting transfer surface from an inversion starting point side to an inversion end point side.
摘要翻译： 提供了一种片材翻转装置，其中诸如辊的构件根本不与片材的印刷表面接触，并且可以通过消除片材表面上的墨水的摩擦来防止污垢的发生。 第一输送装置和第二输送装置分别具有沿着输送方向在输送轨道上移动的多个输送带，以及通过形成在输送带上的吸孔将纸张吸附在输送带上的吸引箱。 布置在第一输送装置和第二输送装置之间的转向引导件具有设置在输送带之间的多个引导肋。 与片材滑动接触的每个引导肋从反转起点侧到反转端点侧形成弯曲的反转转移面。
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公开(公告)号：US20110147587A1
公开(公告)日：2011-06-23
申请号：US13059667
申请日：2009-09-16
IPC分类号： H01J37/285
CPC分类号： H01J37/28 , H01J37/222 , H01J37/265 , H01J2237/216 , H01J2237/221 , H01J2237/24578 , H01J2237/2817 , H01J2237/2826
摘要： Disclosed is a diagnosis device of a recipe used for a scanning electron microscope that quickly specifies an error causing factor of the recipe due to a process fluctuation or the like. Specifically disclosed is, a diagnosis device of a recipe to operate a scanning electron microscope is provided with a program to make a display device show shift in a score indicating the degree of pattern matching consistency, wherein a condition of the pattern matching is set in the recipe; a deviation of coordinates before and after the pattern matching; changes in information or the like on fluctuation amounts of a lens before and after the execution of automatic focuses.
摘要翻译： 公开了一种用于扫描电子显微镜的食谱的诊断装置，其快速指定由于处理波动等导致的食谱的误差引起因子。 具体公开了一种操作扫描电子显微镜的配方的诊断装置，其具有使显示装置显示表示图案匹配一致性程度的分数的程序的程序，其中，将模式匹配的条件设置在 食谱; 模式匹配前后的坐标偏差; 在执行自动聚焦之前和之后的透镜的波动量上的信息变化等。
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8.发明授权公开(公告)号：US08481934B2
公开(公告)日：2013-07-09
申请号：US13107892
申请日：2011-05-14
申请人： Makoto Ezumi , Satoru Iwama , Junichi Kakuta , Takahiro Sato , Akira Ikegami
发明人： Makoto Ezumi , Satoru Iwama , Junichi Kakuta , Takahiro Sato , Akira Ikegami
IPC分类号： H01J37/28
CPC分类号： H01J37/26 , G01N23/2251 , H01J37/265 , H01J37/28 , H01J2237/0048 , H01J2237/281
摘要： As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first electron beam to a sample to charge the sample are proposed wherein the beam diameter of the first electron beam is made larger than the beam diameter of the second electron beam.
摘要翻译： 作为用于实现具有大纵横比的接触孔的精确观察，检查或测量的一个方面，提出了在将第一电子束扫描到样品以对样品充电之后扫描第二电子束的方法和装置，其中， 使第一电子束的直径大于第二电子束的光束直径。
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9.发明授权公开(公告)号：US07960696B2
公开(公告)日：2011-06-14
申请号：US12238171
申请日：2008-09-25
申请人： Makoto Ezumi , Satoru Iwama , Junichi Kakuta , Takahiro Sato , Akira Ikegami
发明人： Makoto Ezumi , Satoru Iwama , Junichi Kakuta , Takahiro Sato , Akira Ikegami
IPC分类号： H01J37/28
CPC分类号： H01J37/26 , G01N23/2251 , H01J37/265 , H01J37/28 , H01J2237/0048 , H01J2237/281
摘要： As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first electron beam to a sample to charge the sample are proposed wherein the beam diameter of the first electron beam is made larger than the beam diameter of the second electron beam.
摘要翻译： 作为用于实现具有大纵横比的接触孔的精确观察，检查或测量的一个方面，提出了在将第一电子束扫描到样品以对样品充电之后扫描第二电子束的方法和装置，其中， 使第一电子束的直径大于第二电子束的光束直径。
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公开(公告)号：US20100109235A1
公开(公告)日：2010-05-06
申请号：US12450243
申请日：2008-08-28
IPC分类号： B65H3/12
CPC分类号： B65H15/00 , B65H5/224 , B65H5/38 , B65H29/242 , B65H29/245 , B65H2220/09 , B65H2301/3423 , B65H2404/612 , B65H2406/122 , B65H2406/3662 , B65H2406/42
摘要： Provided is a sheet inverting apparatus wherein members, such as a roller, are not brought into contact with the printed surface of a sheet at all, and the occurrence of dirt can be prevented by eliminating friction of ink on the surface of the sheet. A first transport apparatus and a second transport apparatus each have a plurality of transport belts which move on transport tracks along sheet transport directions and a suction box which sucks the sheet on the transport belts through suction holes formed on the transport belts. A turn guide arranged between the first transport apparatus and the second transport apparatus has a plurality of guide ribs disposed between the transport belts. Each of the guide ribs coming into slidable contact with the sheet forms a curved inverting transfer surface from an inversion starting point side to an inversion end point side.
摘要翻译： 提供了一种片材翻转装置，其中诸如辊的构件根本不与片材的印刷表面接触，并且可以通过消除片材表面上的墨水的摩擦来防止污垢的发生。 第一输送装置和第二输送装置分别具有沿着输送方向在输送轨道上移动的多个输送带，以及通过形成在输送带上的吸孔将纸张吸附在输送带上的吸引箱。 布置在第一输送装置和第二输送装置之间的转向引导件具有设置在输送带之间的多个引导肋。 与片材滑动接触的每个引导肋从反转起点侧到反转端点侧形成弯曲的反转转移面。
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