摘要:
A method for processing a substrate includes providing a substrate including a metal layer, a dielectric layer arranged on the metal layer, and at least one of a via and a trench formed in the dielectric layer; depositing a metal using chemical vapor deposition (CVD) during a first deposition period, wherein the first deposition period is longer than a first nucleation period that is required to deposit the metal on the metal layer; stopping the first deposition period prior to a second nucleation delay period, wherein the second nucleation period is required to deposit the metal on the dielectric layer; performing the depositing and the stopping N times, where N is an integer greater than or equal to one; and after the performing, depositing the metal using CVD during a second deposition period that is longer than the second nucleation delay period.
摘要:
A method for processing a substrate includes providing a substrate including a metal layer, a dielectric layer arranged on the metal layer, and at least one of a via and a trench formed in the dielectric layer; depositing a metal using chemical vapor deposition (CVD) during a first deposition period, wherein the first deposition period is longer than a first nucleation period that is required to deposit the metal on the metal layer; stopping the first deposition period prior to a second nucleation delay period, wherein the second nucleation period is required to deposit the metal on the dielectric layer; performing the depositing and the stopping N times, where N is an integer greater than or equal to one; and after the performing, depositing the metal using CVD during a second deposition period that is longer than the second nucleation delay period.
摘要:
Methods of improving the adhesion of low resistivity tungsten/tungsten nitride layers are provided. Low resistivity tungsten/tungsten nitride layers with good adhesion are formed by treating a tungsten or tungsten nitride layer before depositing low resistivity tungsten. Treatments include a plasma treatment and a temperature treatment. According to various embodiments, the treatment methods involve different gaseous atmospheres and plasma conditions.
摘要:
Methods of improving the adhesion of low resistivity tungsten/tungsten nitride layers are provided. Low resistivity tungsten/tungsten nitride layers with good adhesion are formed by treating a tungsten or tungsten nitride layer before depositing low resistivity tungsten. Treatments include a plasma treatment and a temperature treatment. According to various embodiments, the treatment methods involve different gaseous atmospheres and plasma conditions.
摘要:
A multi-axial expandable pedicle screw includes a hollow screw having a spherical shaped end for connecting with an adapting piece in the form of a universal joint structure. The hollow screw further includes a tip shaped end, and a bore formed inside the hollow structure having a taper shaped tip. Expansion gaps are formed in the hollow screw to uniformly set up two, three, four or more anterior fins on the hollow screw extending upward along its axial direction, from its tip to the bore. The hollow screw is configured to receive an inner needle disposed in the bore. This pedicle screw is easy to operate and provides a high degree of control in screw expansion with increased stability and reliability. At the same time, this pedicle screw reduces the occurrence of screw loosening, and screw pull-out events, and also reduces failure rates of spinal surgeries.
摘要:
The invention disclosed a multi-axial expandable pedicle screw and an expansion method by using the same. Structure of the screw comprising a hollow screw being spherical shaped end connecting with an adapting piece, which is universal joint structure; an inner wall of the adapting piece connecting a lock bolt through screw threads; the hollow screw with sharp shaped on another end having a bore inside formed hollow structure in its entirety; the bore having taper shaped tip; expansion gaps uniformly setting up two, or three or four or more anterior fins on the hollow screw along its axial direction upward, prolonging from its tip to the bore; the inner needle is disposed in the bore. The invention can reduce the pedicle screw loose and even occurrence ratio of pull-out and increase the stability and reliability and reduce the failure rate of spinal surgeries at the same time. It is also easy to operate, and degree of expansion is of controllable level.
摘要:
An artificial cervical vertebrae composite joint is composed of two upper and lower fixing members disposed vertically symmetrically, a cervical vertebrae body member, and two connection members, the cervical vertebrae body member being connected between the fixing members through the connection members. The fixing members each have an L shape and comprise a front wing part and a base part. A locking screw hole is formed in the front wing part, and a skidproof groove provided with an inverted tooth and a protrusion is disposed on a middle portion of the base part. A bone grafting hole is transversely disposed through a middle portion of the cervical vertebrae body member, and two cavities are disposed on both upper and lower sides of the cervical vertebrae body member at an axial center of the cervical vertebrae body member to mount the connection members. The connection member has one end mounted in the cavity by means of a fixing ring, and another end connected with the fixing member to form a stable sliding-trough type ball-and-socket joint.
摘要:
The disclosure discloses a method and device for reporting channel state information aperiodically. Wherein the method comprises: collecting the channel state information reported by the UE through the configured receiving window; determining the change speed degree of the channel state of the UE according to the criterion for determining a change speed of the channel state information; deciding whether the UE needs to perform aperiodic reporting according to the mapping relationship between the change speed degree of the channel state information and a reporting period adjusting value, and determining timing for the aperiodic reporting if needed. By the method of the disclosure, on one hand, the base station sufficiently obtains the channel state information reported by the UE, which benefits for more suitable scheduling and resource allocating for the UE; on the other hand, PUSCH resources can be used more rationally.
摘要:
An artificial cervical vertebrae composite joint is composed of two upper and lower fixing members disposed vertically symmetrically, a cervical vertebrae body member, and two connection members, the cervical vertebrae body member being connected between the fixing members through the connection members. The fixing members each have an L shape and comprise a front wing part and a base part. A locking screw hole is formed in the front wing part, and a skidproof groove provided with an inverted tooth and a protrusion is disposed on a middle portion of the base part. A bone grafting hole is transversely disposed through a middle portion of the cervical vertebrae body member, and two cavities are disposed on both upper and lower sides of the cervical vertebrae body member at an axial center of the cervical vertebrae body member to mount the connection members. The connection member has one end mounted in the cavity by means of a fixing ring, and another end connected with the fixing member to form a stable sliding-trough type ball-and-socket joint.
摘要:
The disclosure discloses a method and device for reporting channel state information aperiodically. Wherein the method comprises: collecting the channel state information reported by the UE through the configured receiving window; determining the change speed degree of the channel state of the UE according to the criterion for determining a change speed of the channel state information; deciding whether the UE needs to perform aperiodic reporting according to the mapping relationship between the change speed degree of the channel state information and a reporting period adjusting value, and determining timing for the aperiodic reporting if needed. By the method of the disclosure, on one hand, the base station sufficiently obtains the channel state information reported by the UE, which benefits for more suitable scheduling and resource allocating for the UE; on the other hand, PUSCH resources can be used more rationally.