GAS SENSOR
    6.
    发明申请
    GAS SENSOR 有权
    气体传感器

    公开(公告)号:US20150020577A1

    公开(公告)日:2015-01-22

    申请号:US14375665

    申请日:2013-01-30

    Abstract: A gas sensor using a metal organic framework material can be fully integrated with related circuitry on a single substrate. In an on-chip application, the gas sensor can result in an area-efficient fully integrated gas sensor solution. In one aspect, a gas sensor can include a first gas sensing region including a first pair of electrodes, and a first gas sensitive material proximate to the first pair of electrodes, wherein the first gas sensitive material includes a first metal organic framework material.

    Abstract translation: 使用金属有机骨架材料的气体传感器可以与单个基板上的相关电路完全集成。 在片上应用中,气体传感器可以产生全面集成的气体传感器解决方案。 在一个方面,气体传感器可以包括包括第一对电极的第一气体感测区域和靠近第一对电极的第一气体敏感材料,其中第一气体敏感材料包括第一金属有机骨架材料。

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