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公开(公告)号：US20240153737A1
公开(公告)日：2024-05-09
申请号：US17981141
申请日：2022-11-04
申请人： KLA Corporation
CPC分类号： H01J37/28 , H01J37/261
摘要： A system and method of a tilt-column electron beam imaging system is disclosed. The system may include an imaging sub-system. The imaging sub-system may include a plurality of electron beam sources configured to generate a plurality of beamlets. The imaging sub-system may further include a plurality of tilt-illumination columns, where a respective tilt-illumination column is configured to receive a respective beamlet from a respective electron beam source. For the system and method, a first tilt axis of a first tilt-illumination column may be orientated along a first angle and at least one additional tilt axis of at least one additional tilt-illumination column may be orientated along at least one additional angle different from the first angle, where each of the plurality of beam lets pass through a first common crossover volume.
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公开(公告)号：US11749495B2
公开(公告)日：2023-09-05
申请号：US17494784
申请日：2021-10-05
申请人： KLA Corporation
发明人： Youfei Jiang , Michael Steigerwald
IPC分类号： H01J37/244 , H01J37/28 , H01J37/05 , H01J37/147
CPC分类号： H01J37/244 , H01J37/05 , H01J37/1471 , H01J37/28 , H01J2237/0492 , H01J2237/2448 , H01J2237/24475
摘要： Methods and systems for detecting charged particles from a specimen are provided. One system includes a first repelling mesh configured to repel charged particles from a specimen having an energy lower than a first predetermined energy and a second repelling mesh configured to repel the charged particles that pass through the first repelling mesh and have an energy that is lower than a second predetermined energy. The system also includes a first attracting mesh configured to attract the charged particles that pass through the first repelling mesh, are repelled by the second repelling mesh, and have an energy that is higher than the first predetermined energy and lower than the second predetermined energy. The system further includes a first detector configured to generate output responsive to the charged particles that pass through the first attracting mesh.
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公开(公告)号：US20230395349A1
公开(公告)日：2023-12-07
申请号：US17830244
申请日：2022-06-01
申请人： KLA Corporation
IPC分类号： H01J37/073 , H01J37/28 , H01J37/147 , H01J37/22 , H01J37/12 , H01J37/14
CPC分类号： H01J37/073 , H01J37/28 , H01J37/1472 , H01J37/22 , H01J37/12 , H01J37/14 , H01J2237/103 , H01J2237/2448 , H01J2237/0492 , H01J2237/06333
摘要： An electron-beam device includes a laser and a photocathode film. The photocathode film has a front side and a back side and emits a plurality of electron beamlets when illuminated from the back side using the laser. The electron-beam device also includes electrodes to extract the plurality of electron beamlets from the front side of the photocathode film and to control shapes of the plurality of electron beamlets.
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公开(公告)号：US12068129B2
公开(公告)日：2024-08-20
申请号：US17981141
申请日：2022-11-04
申请人： KLA Corporation
CPC分类号： H01J37/28 , H01J37/261
摘要： A system and method of a tilt-column electron beam imaging system is disclosed. The system may include an imaging sub-system. The imaging sub-system may include a plurality of electron beam sources configured to generate a plurality of beamlets. The imaging sub-system may further include a plurality of tilt-illumination columns, where a respective tilt-illumination column is configured to receive a respective beamlet from a respective electron beam source. For the system and method, a first tilt axis of a first tilt-illumination column may be orientated along a first angle and at least one additional tilt axis of at least one additional tilt-illumination column may be orientated along at least one additional angle different from the first angle, where each of the plurality of beamlets pass through a first common crossover volume.
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