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公开(公告)号：US20170344695A1
公开(公告)日：2017-11-30
申请号：US15285111
申请日：2016-10-04
Applicant: KLA-Tencor Corporation
Inventor： Prasanti Uppaluri , Thirupurasundari Jayaraman , Ardis Liang , Srikanth Kandukuri , Sagar Kekare
IPC: G06F17/50
CPC classification number: G03F7/7065 , G03F7/70658 , G06F17/5081 , G06F2217/12
Abstract: A method for automatically classifying one or more defects based on electrical design properties includes receiving one or more images of a selected region of a sample, receiving one or more sets of design data associated with the selected region of the sample, locating one or more defects in the one or more images of the selected region of the sample by comparing the one or more images of the selected region of the sample to the one or more sets of design data, retrieving one or more patterns of interest from the one or more sets of design data corresponding to the one or more defects, and classifying the one or more defects in the one or more images of the selected region of the sample based on one or more annotated electrical design properties included in the one or more patterns of interest.
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公开(公告)号：US20160258879A1
公开(公告)日：2016-09-08
申请号：US15058115
申请日：2016-03-01
Applicant: KLA-Tencor Corporation
Inventor： Ardis Liang , Martin Plihal , Raghav Babulnath , Sankar Venkataraman
CPC classification number: G01N21/8806 , G01N21/9501 , G01N23/20008 , G01N2021/8809 , G01N2201/061 , G01N2201/0683
Abstract: Methods and systems for generating inspection results for a specimen with an adaptive nuisance filter are provided. One method includes selecting a portion of events detected during inspection of a specimen having values for at least one feature of the events that are closer to at least one value of at least one parameter of the nuisance filter than the values for at least one feature of another portion of the events. The method also includes acquiring output of an output acquisition subsystem for the sample of events, classifying the events in the sample based on the acquired output, and determining if one or more parameters of the nuisance filter should be modified based on results of the classifying. The nuisance filter or the modified nuisance filter can then be applied to results of the inspection of the specimen to generate final inspection results for the specimen.
Abstract translation: 提供了一种用于产生具有自适应扰动滤波器的样本检测结果的方法和系统。 一种方法包括选择在样本检查期间检测到的事件的一部分，该样本具有关于事件的至少一个特征的值，该值至少与有害过滤器的至少一个参数的值相比， 另一部分事件。 该方法还包括获取用于事件采样的输出采集子系统的输出，基于所获取的输出对样本中的事件进行分类，以及基于分类结果确定是否应该修改妨扰滤波器的一个或多个参数。 然后可以将妨扰过滤器或修改后的滋扰过滤器应用于样品的检查结果，以产生样品的最终检验结果。
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公开(公告)号：US10209628B2
公开(公告)日：2019-02-19
申请号：US15285111
申请日：2016-10-04
Applicant: KLA-Tencor Corporation
Inventor： Prasanti Uppaluri , Thirupurasundari Jayaraman , Ardis Liang , Srikanth Kandukuri , Sagar Kekare
Abstract: A method for automatically classifying one or more defects based on electrical design properties includes receiving one or more images of a selected region of a sample, receiving one or more sets of design data associated with the selected region of the sample, locating one or more defects in the one or more images of the selected region of the sample by comparing the one or more images of the selected region of the sample to the one or more sets of design data, retrieving one or more patterns of interest from the one or more sets of design data corresponding to the one or more defects, and classifying the one or more defects in the one or more images of the selected region of the sample based on one or more annotated electrical design properties included in the one or more patterns of interest.
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公开(公告)号：US09835566B2
公开(公告)日：2017-12-05
申请号：US15058115
申请日：2016-03-01
Applicant: KLA-Tencor Corporation
Inventor： Ardis Liang , Martin Plihal , Raghav Babulnath , Sankar Venkataraman
CPC classification number: G01N21/8806 , G01N21/9501 , G01N23/20008 , G01N2021/8809 , G01N2201/061 , G01N2201/0683
Abstract: Methods and systems for generating inspection results for a specimen with an adaptive nuisance filter are provided. One method includes selecting a portion of events detected during inspection of a specimen having values for at least one feature of the events that are closer to at least one value of at least one parameter of the nuisance filter than the values for at least one feature of another portion of the events. The method also includes acquiring output of an output acquisition subsystem for the sample of events, classifying the events in the sample based on the acquired output, and determining if one or more parameters of the nuisance filter should be modified based on results of the classifying. The nuisance filter or the modified nuisance filter can then be applied to results of the inspection of the specimen to generate final inspection results for the specimen.
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