PUPIL PLANE CALIBRATION FOR SCATTEROMETRY OVERLAY MEASUREMENT
    4.
    发明申请
    PUPIL PLANE CALIBRATION FOR SCATTEROMETRY OVERLAY MEASUREMENT 有权
    用于SCATTERMETRY OVERLAY测量的PUPIL PLANE校准

    公开(公告)号:US20140257734A1

    公开(公告)日:2014-09-11

    申请号:US14244179

    申请日:2014-04-03

    CPC classification number: G01N21/4785 G03F7/70633

    Abstract: Methods and calibrations modules are provided, for calibrating a pupil center in scatterometry overlay measurements. The calibration comprises calculating fluctuations from a first statistical figure of merit such as an average of an overlay signal per pixel at the pupil and significantly reducing, for example minimizing, the fluctuations with respect to a second statistical figure of merit thereof, such as a pupil weighted variance of the fluctuations.

    Abstract translation: 提供了方法和校准模块,用于在散射测量叠加测量中校准瞳孔中心。 校准包括从第一统计品质因数计算波动,例如在瞳孔处的每个像素的覆盖信号的平均值,并且显着地减少例如相对于其第二统计品质因数例如瞳孔的波动最小化 波动的加权方差。

    PHASE CHARACTERIZATION OF TARGETS
    7.
    发明申请
    PHASE CHARACTERIZATION OF TARGETS 有权
    目标相位特征

    公开(公告)号:US20140111791A1

    公开(公告)日:2014-04-24

    申请号:US14057827

    申请日:2013-10-18

    Abstract: Systems and methods are provided which derive target characteristics from interferometry images taken at multiple phase differences between target beams and reference beams yielding the interferometry images. The illumination of the target and the reference has a coherence length of less than 30 microns to enable scanning the phase through the coherence length of the illumination. The interferometry images are taken at the pupil plane and/or in the field plane to combine angular and spectroscopic scatterometry data that characterize and correct target topography and enhance the performance of metrology systems.

    Abstract translation: 提供了系统和方法,其从在目标光束和参考光束之间的多个相位差处拍摄的产生干涉测量图像的干涉测量图像中导出目标特征。 目标和参考物的照明具有小于30微米的相干长度,以使得能够通过照明的相干长度扫描相位。 在瞳孔平面和/或场平面中拍摄干涉测量图像,以组合表征和校正目标地形的角度和光谱散射数据,并增强计量系统的性能。

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