公开(公告)号：US10920318B2

公开(公告)日：2021-02-16

申请号：US15771525

申请日：2016-10-27

Applicant: KYOCERA CORPORATION

Inventor： Yukio Noguchi ,  Yuuji Kawase ,  Hiromasa Matsufuji ,  Kouji Teramoto

IPC: C23C16/455 ,  C04B37/00 ,  C04B35/626 ,  B28B11/12 ,  C04B35/111 ,  B28B11/24 ,  C04B35/117 ,  C04B35/64 ,  H01L21/67

Abstract: A shower plate according to the present disclosure includes a ceramic sintered body, the ceramic sintered body comprising a first surface, a second surface facing the first surface, and a through hole positioned between the first surface and the second surface. An inner surface of the through hole includes a protruding crystal grain which protrudes more than an exposed part of a grain boundary phase existing between crystal grains. In addition, a semiconductor manufacturing apparatus according to the present disclosure includes the shower plate mentioned above.

公开(公告)号：US09117625B2

公开(公告)日：2015-08-25

申请号：US14348559

申请日：2012-09-27

Applicant: KYOCERA Corporation

Inventor： Yukio Noguchi

IPC: G21K5/04 ,  H01J37/12 ,  H01J37/28 ,  H01J37/317 ,  H01J3/18 ,  H01J37/30 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: H01J37/12 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J37/28 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/03 ,  H01J2237/1205

Abstract: To provide an electrostatic lens which improves an irradiation accuracy of an electron beam while satisfying the need for higher throughput. An electrostatic lens according to one embodiment of the present invention includes a substrate which includes an insulating plate in which a plurality of first through holes that allow an electron beam to pass through are formed, a plurality of electrodes that are formed on an inner wall of the plurality of first through holes, and a plurality of wirings that are formed on the insulating plate and are electrically connected to each of the electrodes, wherein the plurality of electrodes are electrically independent from each other.

Abstract translation: 提供一种提高电子束的照射精度的静电透镜，同时满足更高的生产量。 根据本发明的一个实施例的静电透镜包括：基板，其包括绝缘板，其中形成有允许电子束穿过的多个第一通孔;多个电极，其形成在 多个第一通孔和多个布线，其形成在绝缘板上并与每个电极电连接，其中多个电极彼此电独立。

公开(公告)号：US20140224999A1

公开(公告)日：2014-08-14

申请号：US14348559

申请日：2012-09-27

Applicant: KYOCERA Corporation

Inventor： Yukio Noguchi

IPC: H01J37/12 ,  H01J37/30 ,  H01J3/18

CPC classification number: H01J37/12 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J37/28 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/03 ,  H01J2237/1205

Abstract: To provide an electrostatic lens which improves an irradiation accuracy of an electron beam while satisfying the need for higher throughput. An electrostatic lens according to one embodiment of the present invention includes a substrate which includes an insulating plate in which a plurality of first through holes that allow an electron beam to pass through are formed, a plurality of electrodes that are formed on an inner wall of the plurality of first through holes, and a plurality of wirings that are formed on the insulating plate and are electrically connected to each of the electrodes, wherein the plurality of electrodes are electrically independent from each other.

Abstract translation: 提供一种提高电子束的照射精度的静电透镜，同时满足更高的生产量。 根据本发明的一个实施例的静电透镜包括：基板，其包括绝缘板，其中形成有允许电子束穿过的多个第一通孔;多个电极，其形成在 多个第一通孔和多个布线，其形成在绝缘板上并与每个电极电连接，其中多个电极彼此电独立。

公开(公告)号：US12183551B2

公开(公告)日：2024-12-31

申请号：US17296052

申请日：2019-11-22

Applicant: KYOCERA Corporation

Inventor： Yukio Noguchi ,  Tomoya Sahashi

IPC: B24C1/04 ,  B24C1/08 ,  C04B35/505 ,  C04B35/64 ,  C23C16/455 ,  H01J37/32

Abstract: A gas nozzle according to the present disclosure includes a supply hole having a tubular shape and configured to guide a gas and an injection hole connecting to the supply hole. The gas nozzle configured to inject the gas from the injection hole is made from ceramics or single crystal including an oxide, a fluoride, or an oxyfluoride of a rare earth element or an yttrium aluminum composite oxide as a primary component. An arithmetic mean roughness Ra of an inner circumferential surface forming the supply hole is smaller on an outflow side than on an inflow side of the gas.

公开(公告)号：US10090628B2

公开(公告)日：2018-10-02

申请号：US15115649

申请日：2015-01-30

Applicant: KYOCERA Corporation

Inventor： Yukio Noguchi

IPC: H01S3/03 ,  H01S3/032

Abstract: There is provided a cylinder including a first cylinder having an inner surface exposed; and a second cylinder joined to an outer surface of the first cylinder, the second cylinder containing alumina as a main component, the first cylinder containing yttrium-containing oxide as a main component.