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公开(公告)号：US4725720A
公开(公告)日：1988-02-16
申请号：US867143
申请日：1986-05-27
CPC分类号： G02B21/241 , G02B21/06
摘要： A microscope comprises:a mount for mounting an object, a light source for illuminating the object, an enlarging optical system including a plurality of objectives provided on a revolver, and means for receiving light from the object to enlargingly form an image of the object. An observing optical system includes an ocular lens for observing said image. The microscope further comprises a magnification selecting unit including a driving mechanism for rotating the revolver, and a magnification selection control circuit for automatically positioning said selected objective to the optical axis of the enlarging optical system. An automatic focus adjusting unit includes a focus detector opposed to the observing optical system for discriminating the enlargedly formed image, and a mount moving device for driving the mount to the position of focus in response to an output signal from the focus detector. A light quantity adjusting unit adjusts the quantity of emitted light from the light source on the basis of a preset light quantity value. A control table automatically actuates the magnification selecting unit, the automatic focus adjusting unit and the light quantity adjusting unit in accordance with predetermined steps in response to a magnification selection signal.
摘要翻译： 显微镜包括：用于安装物体的安装件，用于照射物体的光源，包括设置在左轮上的多个物镜的放大光学系统，以及用于从物体接收光以扩大形成物体的图像的装置。 观察光学系统包括用于观察所述图像的目镜。 该显微镜还包括一个放大率选择单元，它包括用于旋转左轮的驱动机构，以及用于将所选择的物镜自动定位到放大光学系统的光轴的放大率选择控制电路。 自动对焦调整单元包括与用于识别放大形成的图像的观察光学系统相对的聚焦检测器，以及用于响应于来自聚焦检测器的输出信号将该安装座驱动到聚焦位置的安装移动装置。 光量调节单元基于预设的光量值来调节来自光源的发射光量。 响应于放大率选择信号，控制表根据预定步骤自动启动倍率选择单元，自动对焦调整单元和光量调节单元。
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2.发明授权Catadioptric projection optical system, exposure apparatus having the same, device fabrication method 失效折反射投影光学系统，具有相同的曝光设备，器件制造方法公开(公告)号：US07317571B2
公开(公告)日：2008-01-08
申请号：US11196378
申请日：2005-08-02
IPC分类号： G02B27/18
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225
摘要： A catadioptric projection optical for forming an image of the intermediate image onto a second object, the catadioptric projection optical system include, a first dioptric group including a first lens group that has a positive refractive power and a second lens group that has a positive refractive power, a catadioptric group including a concave mirror and a third lens group that an incidence light and reflected light from the concave mirror pass, and a second dioptric group. A first deflective reflector is arranged between the first lens group and the second lens group. A second deflective reflector is arranged between the second lens group and the third lens group or between the third lens group and the second dioptric group. A first intermediate image is formed between the second lens group and the concave mirror. A second intermediate image is formed between the concave mirror and the second dioptric group.
摘要翻译： 一种用于将中间图像的图像形成在第二物体上的反射折射投影光学装置，所述反射折射投影光学系统包括：第一度数组，包括具有正折光力的第一透镜组和具有正折光力的第二透镜组 包括入射光和来自凹面镜的反射光通过的凹面镜和第三透镜组的反射折射组和第二屈光度组。 第一偏转反射器布置在第一透镜组和第二透镜组之间。 第二偏转反射器布置在第二透镜组和第三透镜组之间或第三透镜组和第二屈光度组之间。 在第二透镜组和凹面镜之间形成第一中间图像。 在凹面镜和第二屈光度组之间形成第二中间图像。
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3.发明授权Astigmatism-correcting optical system, projection exposure apparatus using the optical system and device manufacturing method 失效散光校正光学系统，使用光学系统的投影曝光装置及器件制造方法
公开(公告)号：US5864433A
公开(公告)日：1999-01-26
申请号：US887902
申请日：1997-07-08
IPC分类号： G02B27/00 , G03F7/20 , H01L21/027 , G02B27/14
CPC分类号： G03F7/70241 , G02B27/0025 , G03F7/70258
摘要： In a projection exposure apparatus, two plane-parallel plates, which are equal in thickness and refractive index, are interposed between a projection optical system and a wafer. By tilting these two plane-parallel plates at the same angle in opposite directions with respect to the optical axis of the optical system by means of an adjusting device, astigmatism caused in the optical system by exposure is corrected. The amount of astigmatism is calculated by a calculating device based on the amount of light incident on the optical system per unit of time which is obtained according to the output of a light amount sensor.
摘要翻译： 在投影曝光装置中，在投影光学系统和晶片之间插入两个平面厚度和折射率相等的平面平行板。 通过借助于调节装置相对于光学系统的光轴在相反方向上以相同角度倾斜这两个平面平行板，校正在光学系统中通过曝光引起的像散。 通过计算装置根据根据光量传感器的输出获得的每单位时间入射到光学系统上的光量来计算散光量。
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公开(公告)号：US5760879A
公开(公告)日：1998-06-02
申请号：US498483
申请日：1995-07-05
摘要： A method of detecting coma of a projection optical system includes receiving an image of a pattern projected by the projection optical system, at at least one position along an optical axis of the projection optical system, detecting a position of at least one received pattern image, with respect to a plane perpendicular to the optical axis of the projection optical system, and determining coma of the projection optical system on the basis of the detection.
摘要翻译： 一种检测投影光学系统的彗差的方法包括：在沿着投影光学系统的光轴的至少一个位置处接收由投影光学系统投影的图案的图像，检测至少一个接收的图案图像的位置， 相对于垂直于投影光学系统的光轴的平面，并且基于检测确定投影光学系统的彗差。
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公开(公告)号：US5031047A
公开(公告)日：1991-07-09
申请号：US505987
申请日：1990-04-06
申请人： Itsuo Takanashi , Shintaro Nakagaki , Hirohiko Shinonaga , Tsutou Asakura , Masato Furuya , Tetsuji Suzuki
发明人： Itsuo Takanashi , Shintaro Nakagaki , Hirohiko Shinonaga , Tsutou Asakura , Masato Furuya , Tetsuji Suzuki
摘要： There are provided an image information processing method and an apparatus thereof to process information carried by an electro-magnetic radiation beam by means of a photo-to-photo transducer. An intensity of an image information is adjusted by varying the intensity of an electro-magnetic radiation beam used for reading the information as electro-magnetic radiation beam information, which has been recorded on the transducer as a charge image. The electro-magnetic raidation beam information read out from the transducer is inverted by changing an operating range of a photo-modulation layer which is one of the components of the transducer. Furthermore, the electro-magnetic radiation beam information read out from the transducer is nonlinearly processed.
摘要翻译： 提供了一种图像信息处理方法及其装置，用于通过光电转换器处理由电磁辐射束携带的信息。 通过将作为电磁辐射束信息读取的电磁辐射束的强度改变为作为电荷图像记录在换能器上的电磁辐射束信息来调整图像信息的强度。 通过改变作为换能器的组件之一的光调制层的操作范围来反转从换能器读出的电磁冲击波束信息。 此外，从换能器读出的电磁辐射束信息被非线性处理。
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6.发明授权Charge latent image recording reproducing system with a uniformly charge detection region providing a reference intensity of a recorded object 失效具有提供记录对象的参考强度的均匀电荷检测区域的充电潜像记录再现系统
公开(公告)号：US5006935A
公开(公告)日：1991-04-09
申请号：US412310
申请日：1989-09-26
摘要： There is disclosed a recording/reproducing system comprising an optical system for directing along a path of an electromagnetic radio ray from an object toward a recording medium, and a recording head disposed in the path for generating a charge latent image onto the medium. The feature of the system resides in that the recording head (system) forms the detection region which is not entirely subject to the influence of the electromagnetic radio ray and which is provided in a portion of the charge recording region of the medium, and in that a reproducing system discriminates the polarity of charges or the recording mode of the charge latent image recorded onto the medium by detecting the charges in the dectection region.
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7.发明授权
公开(公告)号：US5594549A
公开(公告)日：1997-01-14
申请号：US70904
申请日：1993-06-04
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30 , G01N21/86
CPC分类号： G03F9/7088 , G03F9/7049
摘要： A position detecting method includes illuminating a grating mark of an object with monochromatic light; forming an interference image on an image pickup device by using .+-. n-th order light (n=1, 2, 3 . . . ) among reflective diffraction light from the grating mark; integrating an image signal produced by the image pickup device within a two-dimensional window of a predetermined size set with respect to the image signal and along one direction in two-dimensional coordinates, whereby a one-dimensional projection integration signal is produced; transforming, through rectangular transformation, the one-dimensional projection integration signal into a spatial frequency region; selecting, on the spatial frequency region and from the one-dimensional projection integration signal, a spatial frequency component which appears in the interference image due to the periodicity of the grating mark; and detecting the position of the grating mark on the basis of the selection.
摘要翻译： 位置检测方法包括用单色光照射物体的光栅标记; 在来自光栅标记的反射衍射光中使用+/- n级光（n = 1,2,3，...）在图像拾取装置上形成干涉图像; 将由图像拾取装置产生的图像信号在相对于图像信号设置的预定尺寸的二维窗口中并沿着二维坐标沿着一个方向进行积分，由此产生一维投影积分信号; 通过矩形变换将一维投影积分信号转换成空间频率区域; 在空间频率区域和一维投影积分信号上选择由于光栅标记的周期性而出现在干涉图像中的空间频率分量; 并根据选择来检测光栅标记的位置。
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8.发明授权Optical scanning system for scanning object with light beam and displaying apparatus 失效用光束扫描物体的光学扫描系统和显示装置
公开(公告)号：US5144471A
公开(公告)日：1992-09-01
申请号：US543404
申请日：1990-06-26
申请人： Itsuo Takanashi , Shintaro Nakagaki , Tsutou Asakura , Masato Furuya , Tetsuji Suzuki , Hirohiko Shinonaga
发明人： Itsuo Takanashi , Shintaro Nakagaki , Tsutou Asakura , Masato Furuya , Tetsuji Suzuki , Hirohiko Shinonaga
CPC分类号： G02F1/134309 , G02F1/29 , H04N1/04 , G02F2203/28
摘要： An electromagnetic radiation beam scanning system for scanning an object with an electromagnetic radiation beam. The scanning system comprises first and second beam-narrowing devices which are arranged so as to have elongated light-transmission regions, respectively, and which are overlapped each other so that the light-transmission regions intersect each other. Each of the beam-narrowing devices includes a light modulation layer showing an electro-optic effect, first and second electrodes disposed so as to sandwich the light modulation layer, first and second polarizers disposed so as to sandwich the light modulation layer and a power source for applying voltages to the first and second electrodes. The light modulation layer combined with the polarizers forms the elongated light-transmission region in response to application of the voltages to the first and second electrodes due to the power source so as to produce a narrowed beam when a light beam is incident thereon. The position of each of the light-transmission regions in each of the first and second beam-narrowing devices is arranged to be movable in response to variation of at least one of the application voltages due to the power source.
摘要翻译： 一种用电磁辐射束扫描物体的电磁辐射束扫描系统。 扫描系统包括分别布置成具有细长的光透射区域并且彼此重叠以使得透光区域彼此相交的第一和第二光束变窄装置。 每个光束变窄装置包括显示电光效应的光调制层，设置成夹着光调制层的第一和第二电极，被布置以夹住光调制层的第一和第二偏振器和电源 用于向第一和第二电极施加电压。 与偏振器组合的光调制层响应于由于电源而施加到第一和第二电极的电压而形成细长的光透射区域，以便当光束入射时产生变窄的光束。 每个第一和第二光束变窄装置中的每个光透射区域的位置被布置成响应于由于电源而引起的至少一个施加电压的变化而是可移动的。
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9.发明授权Apparatus for reproducing charge latent image with vibration of electrode to modulate field generated by image thereby electro-optically modulating a reading light 失效用于将具有电极振动的电荷特征图像重新调整为由图像产生的电场的电器的电光调制装置
公开(公告)号：US5144443A
公开(公告)日：1992-09-01
申请号：US505240
申请日：1990-04-04
申请人： Itsuo Takanashi , Shintaro Nakagaki , Hirohiko Shinonaga , Tsutou Asakura , Masato Furuya , Tetsuji Suzuki
发明人： Itsuo Takanashi , Shintaro Nakagaki , Hirohiko Shinonaga , Tsutou Asakura , Masato Furuya , Tetsuji Suzuki
CPC分类号： G11C7/005 , H04N5/2259 , H04N5/30 , H04N5/80
摘要： There is provided an apparatus for reproducing a charge latent image prerecorded on a recording medium composed of at least a photo-modulation layer and a charge holding layer laminated thereto and holding said charge latent image. The apparatus has two electrodes interposing the recording medium therebetween. The electrodes are connected to each other and one of which is spaced from the recording medium. A reading light is allowed to permeate the photo-modulation layer. The apparatus also has a vibrator which vibrates one of the electrodes to modulate an electric field generated between the electrodes by the charge latent image prerecorded on the recording medium. The reading light is then electro-optically modulated to reproduce the charge latent image.
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公开(公告)号：US5099261A
公开(公告)日：1992-03-24
申请号：US347640
申请日：1989-05-05
IPC分类号： H04N5/30
CPC分类号： H04N5/30
摘要： An apparatus for recording an image information on a recording medium comprises means for charging the recording medium in response to a light from the object; means for forming an effective region and a reference region on the recording medium, the effective region representing the image information, the reference region being charged to a reference potential; a sensing head sequentially detecting surface potentials in the effective region and the reference region of the recording medium through electrostatic induction, the sensing head comprising field effect transistor means; a gate input capacitance of the gate means fo the transistor means being charged by a leakage current between the drain means and the gate means of the transistor means; means for subjecting the gate means of the transistor means to a voltage electrostatically induced in correspondence with the surface potentials in the effective region and in the reference region of the recording medium; means for discharging a charge in the gate input capacitance; and means for timely activating said discharging means with a predetermined timing relation to the detection of the surface potential of one of the effective region and the reference region of the recording medium by the sensing head.
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