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    Position detecting method and projection exposure apparatus using the same
    1.
    发明授权
    Position detecting method and projection exposure apparatus using the same 失效
    位置检测方法和使用其的投影曝光装置

    公开(公告)号：US5594549A

    公开(公告)日：1997-01-14

    申请号：US70904

    申请日：1993-06-04

    申请人： Tetsuya Mori ,  Eiichi Murakami ,  Hirohiko Shinonaga

    发明人： Tetsuya Mori ,  Eiichi Murakami ,  Hirohiko Shinonaga

    IPC分类号： G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01N21/86

    CPC分类号： G03F9/7088 ,  G03F9/7049

    摘要： A position detecting method includes illuminating a grating mark of an object with monochromatic light; forming an interference image on an image pickup device by using .+-. n-th order light (n=1, 2, 3 . . . ) among reflective diffraction light from the grating mark; integrating an image signal produced by the image pickup device within a two-dimensional window of a predetermined size set with respect to the image signal and along one direction in two-dimensional coordinates, whereby a one-dimensional projection integration signal is produced; transforming, through rectangular transformation, the one-dimensional projection integration signal into a spatial frequency region; selecting, on the spatial frequency region and from the one-dimensional projection integration signal, a spatial frequency component which appears in the interference image due to the periodicity of the grating mark; and detecting the position of the grating mark on the basis of the selection.

    摘要翻译： 位置检测方法包括用单色光照射物体的光栅标记; 在来自光栅标记的反射衍射光中使用+/- n级光（n = 1,2,3，...）在图像拾取装置上形成干涉图像; 将由图像拾取装置产生的图像信号在相对于图像信号设置的预定尺寸的二维窗口中并沿着二维坐标沿着一个方向进行积分，由此产生一维投影积分信号; 通过矩形变换将一维投影积分信号转换成空间频率区域; 在空间频率区域和一维投影积分信号上选择由于光栅标记的周期性而出现在干涉图像中的空间频率分量; 并根据选择来检测光栅标记的位置。

    Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates
    2.
    发明授权
    Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates 失效
    曝光装置和方法，其中通过比较入射在标线片台和晶片台参考板上的标记进行对准

    公开(公告)号：US5751404A

    公开(公告)日：1998-05-12

    申请号：US684100

    申请日：1996-07-22

    申请人： Eiichi Murakami ,  Fumio Sakai ,  Shigeyuki Uzawa ,  Shigeki Ogawa ,  Tetsuya Mori

    发明人： Eiichi Murakami ,  Fumio Sakai ,  Shigeyuki Uzawa ,  Shigeki Ogawa ,  Tetsuya Mori

    IPC分类号： G03F7/20 ,  G03F9/00 ,  G03B27/42 ,  G02B11/00 ,  G03B27/32 ,  G03B27/52

    CPC分类号： G03F7/70691 ,  G03F7/70358 ,  G03F9/7015

    摘要： A scanning exposure apparatus includes a first movable stage being movable while carrying a first object thereon, a second movable stage being movable while carrying a second object thereon, a projection optical system for projecting a pattern, a control system serviceable to scan the first and second movable stages in a timed relation and relative to the projection optical system and to project a pattern of the first object onto the second object through the projection optical system, a first reference plate fixedly mounted on the first movable stage, a second reference plate fixedly mounted on the second movable stage, and a detecting system serviceable to scan at least one of the first and second movable stages to detect a relative positional relationship between alignment marks of the first and second reference plates to thereby determine a scan direction of one of the first and second movable stages.

    摘要翻译： 一种扫描曝光装置，包括：可移动的第一可移动台，其上携带有第一物体;可移动的第二可移动台，其上携带有第二物体;投影光学系统，用于投影图案;可控制的扫描第一和第二物体的控制系统 以相对于投影光学系统的定时关系的可移动台阶，并且通过投影光学系统将第一物体的图案投射到第二物体上，固定地安装在第一可移动台上的第一参考板，固定地安装在第二参考板上的第二参考板 在第二可移动台上，以及检测系统，其能够扫描第一和第二可移动台中的至少一个，以检测第一和第二参考板的对准标记之间的相对位置关系，从而确定第一和第二可移动台之一的扫描方向 和第二可动台。

    Optical waveguide, optical wiring component, optical waveguide module and electronic device
    3.
    发明授权
    Optical waveguide, optical wiring component, optical waveguide module and electronic device 有权
    光波导，光配线元件，光波导模块及电子元件

    公开(公告)号：US09297951B2

    公开(公告)日：2016-03-29

    申请号：US14381115

    申请日：2012-09-13

    申请人： Tetsuya Mori ,  Kimio Moriya

    发明人： Tetsuya Mori ,  Kimio Moriya

    IPC分类号： G02B6/028 ,  G02B6/122 ,  G02B6/036 ,  G02B6/125

    CPC分类号： G02B6/028 ,  G02B6/036 ,  G02B6/1221 ,  G02B6/125

    摘要： A core layer (13) of an optical waveguide (1) includes a plurality of core groups (140) disposed so as to mutually intersect on the same plane, each core group (140) being an assembly of a plurality of core portions (14), at least some of which are arranged in parallel, and side cladding portions (15) provided so as to adjoin the side surfaces of each core portion (14). A transverse cross-section of the optical waveguide (1) includes a high refractive index region (WH) in a position corresponding with each core portion (14) and having a relatively high refractive index, and a low refractive index region (WL) in a position corresponding with each side cladding portion (15) and having a lower refractive index than the high refractive index region (WH), and a refractive index distribution is formed in which the refractive index varies continuously across the entire distribution.

    摘要翻译： 光波导（1）的芯层（13）包括设置成在相同平面上相互交叉的多个芯组（140），每个芯组（140）是多个芯部（14）的组件 ），其中至少一些平行布置，以及设置成邻接每个芯部（14）的侧表面的侧包层部分（15）。 光波导（1）的横截面包括在与每个芯部分（14）对应的位置并且具有相对较高折射率的位置处的高折射率区域（WH）和低折射率区域 与每个侧包层部分（15）相对应并具有比高折射率区域（WH）低的折射率的位置，并且形成折射率分布，其中折射率在整个分布上连续变化。

    OPTICAL WAVEGUIDE, OPTICAL WIRING COMPONENT, OPTICAL WAVEGUIDE MODULE AND ELECTRONIC DEVICE
    4.
    发明申请
    OPTICAL WAVEGUIDE, OPTICAL WIRING COMPONENT, OPTICAL WAVEGUIDE MODULE AND ELECTRONIC DEVICE 有权
    光波导，光接线组件，光波模块和电子设备

    公开(公告)号：US20150016794A1

    公开(公告)日：2015-01-15

    申请号：US14381115

    申请日：2012-09-13

    申请人： Tetsuya Mori ,  Kimio Moriya

    发明人： Tetsuya Mori ,  Kimio Moriya

    IPC分类号： G02B6/028 ,  G02B6/036

    CPC分类号： G02B6/028 ,  G02B6/036 ,  G02B6/1221 ,  G02B6/125

    摘要： A core layer (13) of an optical waveguide (1) includes a plurality of core groups (140) disposed so as to mutually intersect on the same plane, each core group (140) being an assembly of a plurality of core portions (14), at least some of which are arranged in parallel, and side cladding portions (15) provided so as to adjoin the side surfaces of each core portion (14). A transverse cross-section of the optical waveguide (1) includes a high refractive index region (WH) in a position corresponding with each core portion (14) and having a relatively high refractive index, and a low refractive index region (WL) in a position corresponding with each side cladding portion (15) and having a lower refractive index than the high refractive index region (WH), and a refractive index distribution is formed in which the refractive index varies continuously across the entire distribution.

    摘要翻译： 光波导（1）的芯层（13）包括设置成在相同平面上相互交叉的多个芯组（140），每个芯组（140）是多个芯部（14）的组件 ），其中至少一些平行布置，以及设置成邻接每个芯部（14）的侧表面的侧包层部分（15）。 光波导（1）的横截面包括在与每个芯部分（14）对应的位置并且具有相对较高折射率的位置处的高折射率区域（WH）和低折射率区域 与每个侧包层部分（15）相对应并具有比高折射率区域（WH）低的折射率的位置，并且形成折射率分布，其中折射率在整个分布上连续变化。

    Electronic apparatus, cellular phone, flexible cable and method for manufacturing optical waveguide forming body
    5.
    发明授权
    Electronic apparatus, cellular phone, flexible cable and method for manufacturing optical waveguide forming body 失效
    电子设备，蜂窝电话，柔性电缆及制造光波导成形体的方法

    公开(公告)号：US08588566B2

    公开(公告)日：2013-11-19

    申请号：US12997136

    申请日：2009-06-09

    申请人： Mutsuhiro Matsuyama ,  Koji Choki ,  Tetsuya Mori ,  Kei Watanabe

    发明人： Mutsuhiro Matsuyama ,  Koji Choki ,  Tetsuya Mori ,  Kei Watanabe

    IPC分类号： G02B6/26 ,  G02B6/42 ,  G02B6/36

    CPC分类号： G02B6/43 ,  G02B6/14 ,  G02B6/4214 ,  G02B6/4246 ,  H01R35/02 ,  H05K1/0274 ,  H05K1/028 ,  H05K1/148 ,  H05K2201/051

    摘要： According to the electronic apparatus and cellular phone of the present invention, in an optical waveguide forming body of a flexible cable, an air layer is provided in a deforming section which experiences bending deformation as a result of the movement of a second body relative to a first body (either a pivoting or sliding movement), and the position of this air layer becomes located on the outer circumferential side of a core when the deforming section undergoes bending deformation. As a result of this, it is possible to ensure sufficient flexibility and to also achieve a sufficient improvement in the folding endurance of the core portion for this optical waveguide forming body to be utilized in practical applications. Moreover, it is possible to suppress light loss and achieve high-speed, large-capacity transmissions even when the optical waveguide forming body of a flexible cable experiences bending deformation due to the relative movement of the second body relative to the first body.

    摘要翻译： 根据本发明的电子设备和便携式电话机，在柔性电缆的光波导形成体中，空气层设置在变形部分中，该变形部分由于第二主体相对于第二主体的运动而经历弯曲变形 第一体（旋转或滑动运动），并且当变形部经历弯曲变形时，该空气层的位置位于芯的外周侧。 作为其结果，可以确保足够的灵活性，并且还可以实现在实际应用中用于该光波导形成体的芯部的折叠耐久性的充分改善。 此外，即使当柔性电缆的光波导形成体由于第二主体相对于第一主体的相对运动而遭受弯曲变形时，也可以抑制光损失并实现高速，大容量传输。

    Process for producing metal film
    6.
    发明授权
    Process for producing metal film 有权
    金属膜生产工艺

    公开(公告)号：US08361628B2

    公开(公告)日：2013-01-29

    申请号：US12675579

    申请日：2008-11-14

    申请人： Seiji Nakajima ,  Tetsuo Hayase ,  Tetsuya Mori

    发明人： Seiji Nakajima ,  Tetsuo Hayase ,  Tetsuya Mori

    IPC分类号： B32B15/08 ,  B32B15/04 ,  B05D3/10 ,  C08G63/00

    CPC分类号： H05K3/387 ,  C23C18/06 ,  C23C18/08 ,  C23C18/14 ,  C23C18/1667 ,  C23C18/1678 ,  C23C18/1893 ,  C23C18/2086 ,  C23C18/31 ,  G02B5/0808 ,  G02B27/1073 ,  G02B27/144 ,  H05K3/181 ,  H05K2203/1157 ,  H05K2203/121 ,  Y10T428/31678 ,  Y10T428/31681 ,  Y10T428/31692

    摘要： The present invention provides (i) a process for producing a metal film with which process a metal film and a metal pattern can be formed, at low cost, on an arbitrary substrate, (ii) a primer composition, (iii) a metal film, and (iv) use of the metal film. The process includes the steps of: forming an organic film with use of a primer composition which contains (i) an addition polymerizable compound including three or more reactive groups, (ii) an addition polymerizable compound including an acid group, (iii) an addition polymerizable compound including a basic group, and (iv) an addition polymerizable compound including a hydrophilic functional group; form a metal (M1) salt from the acid group; substituting the metal (M1) salt of the acid group with a metal (M2) salt by processing with a metal (M2) ion aqueous solution containing a metal (M2) ion which has a less ionization tendency than the metal (M1) ion; and reducing the metal (M2) ion so that a metal film is formed on a surface of the organic film.

    摘要翻译： 本发明提供（i）金属膜的制造方法，可以在任意的基材上以低成本形成金属膜和金属图案，（ii）底漆组合物，（iii）金属膜 ，和（iv）使用金属膜。 该方法包括以下步骤：使用底漆组合物形成有机膜，该底漆组合物包含（i）包含三个或更多个反应性基团的加成聚合性化合物，（ii）包含酸基的加聚性化合物，（iii） 包含碱性基团的可聚合化合物，和（iv）包含亲水官能团的加成聚合性化合物; 从酸基形成金属（M1）盐; 用含金属（M2）离子的金属（M2）离子水溶液加工，用金属（M2）盐代替金属（M1）盐，电离倾向比金属（M1）离子少; 并且还原金属（M2）离子，使得在有机膜的表面上形成金属膜。

    Method for producing scyllo-inositol
    9.
    发明授权
    Method for producing scyllo-inositol 有权
    鲨肌醇的制备方法

    公开(公告)号：US07745671B2

    公开(公告)日：2010-06-29

    申请号：US10576030

    申请日：2004-10-14

    申请人： Masanori Yamaguchi ,  Yuichi Kita ,  Tetsuya Mori ,  Kenji Kanbe ,  Akihiro Tomoda ,  Atsushi Takahashi ,  Wakako Ichikawa

    发明人： Masanori Yamaguchi ,  Yuichi Kita ,  Tetsuya Mori ,  Kenji Kanbe ,  Akihiro Tomoda ,  Atsushi Takahashi ,  Wakako Ichikawa

    IPC分类号： C07C35/16 ,  C07H1/06 ,  C07C35/46

    CPC分类号： C12P7/02 ,  C07C29/145 ,  C12N9/0004 ,  C12N9/0006 ,  C12P7/18 ,  C12P7/26

    摘要： It is intended to provide a novel NAD+-independent myo-inositol 2-dehydrogenase which converts myo-inositol into scyllo-inosose in the absence of NAD+; a novel enzyme scyllo-inositol dehydrogenase which stereospecifically reduces scyllo-inosose into scyllo-inositol in the presence of NADH or NADPH; and a novel microorganism which belongs to the genus Acetobacter or Burkholderia and can convert myo-inositol into scyllo-inositol. By using these enzymes or the microorganism, scyllo-inositol is produced. Furthermore, scyllo-inositol is purified by adding boric acid and a metal salt to a liquid mixture containing scyllo-inositol and a neutral saccharide other than scyllo-inositol to form a scyllo-inositol/boric acid complex, separating the complex from the liquid mixture, dissolving the thus separated complex in an acid to give an acidic solution or an acidic suspension and then purifying scyllo-inositol from the acidic solution or the acidic suspension.

    摘要翻译： 旨在提供一种新的NAD +独立肌醇2-脱氢酶，其在不存在NAD +的情况下将肌醇转化为鲨肌内糖; 在NADH或NADPH的存在下，立体选择性地将鲨肌内糖降解成鲨肌醇的新型鲨肌醇肌醇脱氢酶; 和属于醋杆菌属或伯克霍尔德氏菌属的新型微生物，可将肌醇转化为鲨肌醇。 通过使用这些酶或微生物，产生鲨肌醇。 此外，通过向含有鲨肌醇和除了鲨肌醇之外的中性糖的液体混合物中加入硼酸和金属盐以形成鲨肌醇/硼酸络合物，将所述络合物与液体混合物分离，将鲨肌醇纯化 将如此分离的络合物溶解在酸中，得到酸性溶液或酸性悬浮液，然后从酸性溶液或酸性悬浮液中纯化鲨肌醇。