公开(公告)号：US06554408B1

公开(公告)日：2003-04-29

申请号：US09506751

申请日：2000-02-18

申请人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

发明人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

IPC分类号： B41J2045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14387

摘要： A fluid ejection device, such as for an ink jet printer or the like, having increased increasing nozzle density. A through-hole (15) is provided in a glass substrate (18) to which a second silicon substrate (19) is directly bonded to form an ink outlet (14). The first silicon substrate (17) is etched to form a pressure chamber (12), an ink channel (13) and an ink inlet (16), and bonded directly to the glass substrate (18). A piezoelectric thin film (11), having a conductive, elastic body (20), is bonded to the first substrate covering the pressure chamber (12). The elastic body (20) is sandwiched between the piezoelectric thin film (11) and a resin layer (25). The second substrate (19) has a thickness of less than about 0.8 mm in a range of thickness comprising about 1.2 to about 1.9 times (rg-rs), wherein rg is the diameter of the wide end of the through-hole (15) and rs is the diameter of the narrow end of the through-hole (15).

摘要翻译： 诸如用于喷墨打印机等的流体喷射装置具有增加的喷嘴密度的增加。 在玻璃基板（18）上设置有通孔（15），第二硅基板（19）直接接合在该玻璃基板（18）上形成出墨口（14）。 蚀刻第一硅衬底（17）以形成压力室（12），墨水通道（13）和墨水入口（16），并直接粘合到玻璃基底（18）上。 具有导电弹性体（20）的压电薄膜（11）与覆盖压力室（12）的第一基板接合。 弹性体（20）夹在压电薄膜（11）和树脂层（25）之间。 第二基板（19）的厚度小于约0.8mm，其厚度范围为约1.2至约1.9倍（rg-rs），其中rg是通孔（15）的宽端的直径， 并且rs是通孔（15）的窄端的直径。

公开(公告)号：US06688731B1

公开(公告)日：2004-02-10

申请号：US09701856

申请日：2000-12-01

申请人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

发明人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/313 ,  H01L41/316

摘要： A piezoelectric thin film element D, in which a piezoelectric thin film 1 with first and second electrode films 2 and 3 respectively formed on its opposite surfaces in the thickness direction is held by a hold film 5, is fabricated by forming each film 1, 2, 3, and 5 on a film formation substrate 11 and removing the film formation substrate 11 by etching. Even when the hold film 5 is made of material such as resin and therefore exhibits relatively poor adhesion with respect to the other films, the piezoelectric thin film 1 is protected from damage by etchant because the first electrode film 2 which comes into contact with the film formation substrate 11 is formed such that the overall circumference of a peripheral edge portion of the first electrode film 2 laterally extends beyond the lateral surface of the piezoelectric thin film 1 and closely adheres to the hold film 5.

摘要翻译： 通过形成每个膜1,2制造压电薄膜元件D，其中分别在其厚度方向的相对表面上形成有第一和第二电极膜2和3的压电薄膜1由保持膜5保持 ，3和5在成膜基板11上，并通过蚀刻去除成膜基板11。 即使当保持膜5由诸如树脂的材料制成并且因此相对于其它膜显示相对较差的粘合力时，由于与膜接触的第一电极膜2，保护了压电薄膜1免受腐蚀剂损伤 形成基板11形成为使得第一电极膜2的周边部分的整个周边横向延伸超过压电薄膜1的侧表面并且紧密地附着到保持膜5。

公开(公告)号：US06326621B1

公开(公告)日：2001-12-04

申请号：US09323730

申请日：1999-06-01

申请人： Takeshi Kamada ,  Ryoichi Takayama ,  Satoru Fujii ,  Atsushi Tomozawa ,  Isaku Kanno

发明人： Takeshi Kamada ,  Ryoichi Takayama ,  Satoru Fujii ,  Atsushi Tomozawa ,  Isaku Kanno

IPC分类号： G01J502

CPC分类号： G01J5/20 ,  G01J5/34

摘要： The invention provides a compact and high performance infrared radiation detector. The infrared radiation detector contains: a substrate; and at least two infrared radiation detector units selected from the group consisting of a pyroelectric infrared radiation detector unit, a resistive bolometer type infrared radiation detector unit and a ferroelectric bolometer type infrared radiation detector unit, the infrared radiation detector units being disposed on the same side of the substrate.

摘要翻译： 本发明提供了一种紧凑且高性能的红外辐射探测器。 红外辐射检测器包含：基板; 以及选自热电型红外线辐射检测器单元，电阻辐射热计型红外线检测器单元和铁电测辐射热计型红外线检测器单元的至少两个红外线检测器单元，所述红外线检测器单元设置在同一侧 的基底。

公开(公告)号：US07024738B2

公开(公告)日：2006-04-11

申请号：US10116096

申请日：2002-04-04

申请人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Takeshi Kamada

发明人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Takeshi Kamada

IPC分类号： H04R17/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H02N2/00

CPC分类号： G01P15/0802 ,  B41J2/14233 ,  B41J2002/14258 ,  G01P15/09 ,  H01L41/094 ,  H01L41/1132 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49147

摘要： To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films (2, 3) are formed by sputtering on the both surfaces of a metal thin plate (1) which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films (2, 3) are controlled. A pair of electrode films (5) are formed on the respective surfaces of the first and second piezoelectric thin films (2, 3) opposite to the metal thin plate (1).

摘要翻译： 为了以低成本制造紧凑且高性能的薄膜压电双晶片元件，通过溅射在金属薄板（1）的两个表面上形成第一和第二压电薄膜（2,3），所述两个表面与 彼此沿着其厚度，同时控制第一和第二压电薄膜（2,3）的各自的极化状态。 在与金属薄板（1）相对的第一和第二压电薄膜（2,3）的各个表面上形成一对电极薄膜（5）。

公开(公告)号：US07001014B2

公开(公告)日：2006-02-21

申请号：US10381995

申请日：2001-09-26

申请人： Hideo Torii ,  Takeshi Kamada ,  Isaku Kanno ,  Ryoichi Takayama

发明人： Hideo Torii ,  Takeshi Kamada ,  Isaku Kanno ,  Ryoichi Takayama

IPC分类号： B41J2/45

CPC分类号： C01G25/006 ,  C01P2002/34 ,  H01L41/094 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric thin film can achieve a large piezoelectric displacement. A chemical composition of the piezoelectric thin film is expressed by Pb1+a(ZrxTi1−x)O3+a(0.2≦a≦0.6 and 0.50≦x≦0.62). The crystal structure of the piezoelectric thin film is a mixture of a perovskite columnar crystal region (24) having an ionic defect in which a portion of the constitutive elements of an oxygen ion, a titanium ion, and a zirconium ion is missing and a perovskite columnar crystal region (25) of stoichiometric composition having no ionic defect. This configuration allows a residual compressive stress in the crystal to be relaxed by the perovskite columnar crystal region (24) having an ionic defect, thus achieving a large piezoelectric displacement (displacement amount).

摘要翻译： 压电薄膜可实现较大的压电位移。 压电薄膜的化学组成由Pb 1 + a（Zr x 1 Ti 1-x O）O 3+表示， （0.2 <= a <= 0.6和0.50 <= x <= 0.62）。 压电薄膜的晶体结构是具有离子缺陷的钙钛矿柱状晶体区域（24）的混合物，其中一部分氧离子，钛离子和锆离子的构成元素缺失，钙钛矿 没有离子缺陷的化学计量组成的柱状晶体区域（25）。 这种结构允许通过具有离子缺陷的钙钛矿柱状晶体区域（24）使晶体中的残余压缩应力松弛，从而实现大的压电位移（位移量）。

公开(公告)号：US06361154B1

公开(公告)日：2002-03-26

申请号：US09385842

申请日：1999-08-30

申请人： Osamu Watanabe ,  Kenji Tomita ,  Isaku Kanno ,  Ryoichi Takayama

发明人： Osamu Watanabe ,  Kenji Tomita ,  Isaku Kanno ,  Ryoichi Takayama

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2202/11

摘要： An ink jet including a head body including plural pressure chamber concaves each having a supply port for supplying ink and a discharge port for discharging ink, and a piezoelectric actuator including mutually electrically connected vibration plates that cover the concaves of the head body in order to form pressure chambers together with the concaves and are separately provided correspondingly to one or plural pressure chambers, piezoelectric device respectively provided on surfaces of the vibration plates opposite to the pressure chambers correspondingly to the pressure chambers and individual electrodes respectively provided on surfaces of said piezoelectric devices opposite to said vibration plates for applying a voltage to said piezoelectric devices together with said vibration plates. The vibration plates are deformed in a manner that volumes of the pressure chambers are decreased by applying a voltage to the piezoelectric devices through the vibration plates and the individual electrodes, whereby ink contained in the pressure chambers is discharged through the discharge ports. Additionally, a portion of each of the vibration plates corresponding to each of the pressure chambers is bent into a convex projecting toward an opposite direction to the corresponding pressure chamber due to a compressive internal stress action of each of the piezoelectric devices.

摘要翻译： 一种喷墨头，包括：头本体，包括多个压力室凹部，每个压力室凹部具有用于供应墨水的供给口和用于排出墨水的排出口;以及压电致动器，包括相互电连接的振动板，该振动板覆盖头部本体的凹部以形成 压力室与凹部一起分开设置并分别设置在一个或多个压力室中，压电装置分别设置在与压力室相对的振动板的与压力室相对的表面上，分别设置在相对的压电装置的表面上 到所述振动板，用于与所述振动板一起向所述压电装置施加电压。 振动板以通过振动板和单独电极向压电元件施加电压来减小压力室的体积的方式变形，由此压缩室中容纳的油通过排出口排出。 另外，由于每个压电室的压缩内应力作用，每个压力室对应的每个振动板的一部分被弯曲成与相应的压力室相反的方向突出的凸起。

公开(公告)号：US06347862B1

公开(公告)日：2002-02-19

申请号：US09202419

申请日：1998-12-14

申请人： Isaku Kanno ,  Satoru Fujii ,  Ryoichi Takayama ,  Takeshi Kamada

发明人： Isaku Kanno ,  Satoru Fujii ,  Ryoichi Takayama ,  Takeshi Kamada

IPC分类号： B41J2045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2002/14258 ,  B41J2002/14379 ,  B41J2202/03

摘要： There is provided an ink-jet head having ink outlets formed at a high density for use in an ink-jet recorder. The ink-jet head comprises ink outlets, compression chambers communicating with the ink outlets, and piezoelectric vibration sections, each being provided on a part of each of the compression chambers and including a piezoelectric film containing Pb, Ti and Zr, and electrodes provided on both sides of the piezoelectric film. The piezoelectric film comprises a first layer and a second layer which each have a perovskite structure and are formed in contact with each other, wherein the first layer is formed as a layer containing no Zr or as a layer containing a smaller amount of Zr than that contained in the second layer.

摘要翻译： 提供一种喷墨头，其具有以高密度形成的用于喷墨记录器的墨水出口。 喷墨头包括墨出口，与墨出口连通的压缩室和压电振动部分，每个压电振动部分设置在每个压缩室的一部分上，并且包括含有Pb，Ti和Zr的压电膜，以及设置在 压电薄膜的两面。 压电膜包括第一层和第二层，它们各自具有钙钛矿结构并且彼此接触，其中第一层形成为不含Zr的层或作为含有少量Zr的层， 包含在第二层。

公开(公告)号：US06263734B1

公开(公告)日：2001-07-24

申请号：US09289936

申请日：1999-04-13

申请人： Satoru Fujii ,  Isaku Kanno ,  Takeshi Kamada ,  Ryoichi Takayama

发明人： Satoru Fujii ,  Isaku Kanno ,  Takeshi Kamada ,  Ryoichi Takayama

IPC分类号： G01P1509

CPC分类号： G01P15/0907 ,  G01P15/0922 ,  G01P15/18

摘要： An acceleration sensor 201 comprises a longitudinal effect type detection unit 203 and a lateral effect type detection unit 204. The longitudinal effect type detection unit 203 comprises a longitudinal effect type piezoelectric element 211 comprising a piezoelectric body 211a of a thin film, an electrode 211b and an electrode 211c, which is formed on a deposition substrate 221 serving also as a weight. The lateral effect type detection unit 204 is constituted by providing a lateral effect type piezoelectric element 213 comprising a piezoelectric body 213a of a thin film, an electrode 213b and an electrode 213c, which is formed on the deposition substrate 221 and is cantilevered above a groovy recessed part 105a on a substrate 105. A detection circuit 116 detects an acceleration in a predetermined direction, based on an output of both the longitudinal effect type detection unit 203 and the lateral effect type detection unit 204. Consequently, it is possible to detect an acceleration in a predetermined direction and to make a wider dynamic range and a wider band.

摘要翻译： 加速度传感器201包括纵向效应型检测单元203和横向效果型检测单元204.纵向效应型检测单元203包括纵向效应型压电元件211，其包括薄膜的压电体211a，电极211b和 电极211c，其形成在也用作重量的沉积基板221上。 横向效果型检测单元204通过提供一种横向效应型压电元件213构成，该横向效应型压电元件213包括薄膜压电体213a，电极213b和电极213c，其形成在沉积基板221上并且悬臂上方 检测电路116基于纵向效应型检测单元203和横向效果型检测单元204的输出，检测预定方向的加速度。因此，可以检测到 加速度在一个预定的方向上，并且形成更宽的动态范围和更宽的频带。

公开(公告)号：US20080084595A1

公开(公告)日：2008-04-10

申请号：US11907121

申请日：2007-10-09

申请人： Hideki Chouji ,  Shigeo Maeda ,  Hidetoshi Kotera ,  Isaku Kanno

发明人： Hideki Chouji ,  Shigeo Maeda ,  Hidetoshi Kotera ,  Isaku Kanno

IPC分类号： G02B26/08

CPC分类号： G11B7/13925 ,  G02B26/06 ,  G02B26/0825 ,  G11B7/1362

摘要： A variable shape mirror is composed of a substrate, a lower electrode film which is disposed on the substrate, a piezoelectric film which is disposed on the lower electrode film, an upper electrode film which is disposed on the piezoelectric film, an insulating film which is disposed on the upper electrode film, and a mirror film which is disposed on the insulating film. The lower electrode film, the piezoelectric film, and the upper electrode film function as a driving portion to deform the mirror film. The upper electrode film is divided into a plurality of divided electrodes and the driving portion includes a part which performs main deformation of the mirror film and a part which performs fine adjustment of deformation of the mirror film.

摘要翻译： 可变形状镜由基板，设置在基板上的下电极膜，设置在下电极膜上的压电膜，设置在压电膜上的上电极膜，绝缘膜， 设置在上电极膜上，镜面膜设置在绝缘膜上。 下电极膜，压电膜和上电极膜用作使镜面膜变形的驱动部。 上电极膜被分成多个分开的电极，并且驱动部分包括执行镜膜的主要变形的部分和执行镜膜的变形的微调的部分。

公开(公告)号：US08867114B2

公开(公告)日：2014-10-21

申请号：US13520411

申请日：2010-12-24

申请人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Naoki Inoue

发明人： Isaku Kanno ,  Hidetoshi Kotera ,  Manabu Murayama ,  Naoki Inoue

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.

摘要翻译： 该振动镜元件（100）包括镜部（10），悬臂的第一驱动部（41），包括形成在第一方向的第一侧上的第一固定端（41a）和第一自由端（41b） ），其形成在其第二侧上并线性延伸，能够以倾斜状态支撑所述镜部（10）的第一反射镜支撑部（46），悬臂的第二驱动部（51），包括第二固定端 形成在第一方向的第二侧上的第一自由端（51b）和形成在第一方向上的第二自由端（51b），其相对于反射镜的中心与第一驱动部分对称并且线性延伸，并且 第二反射镜支撑部分（56）相对于反射镜的中心与第一反射镜支撑部分对称，并且能够以倾斜状态支撑反射镜部分。