公开(公告)号：US07001014B2

公开(公告)日：2006-02-21

申请号：US10381995

申请日：2001-09-26

申请人： Hideo Torii ,  Takeshi Kamada ,  Isaku Kanno ,  Ryoichi Takayama

发明人： Hideo Torii ,  Takeshi Kamada ,  Isaku Kanno ,  Ryoichi Takayama

IPC分类号： B41J2/45

CPC分类号： C01G25/006 ,  C01P2002/34 ,  H01L41/094 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric thin film can achieve a large piezoelectric displacement. A chemical composition of the piezoelectric thin film is expressed by Pb1+a(ZrxTi1−x)O3+a(0.2≦a≦0.6 and 0.50≦x≦0.62). The crystal structure of the piezoelectric thin film is a mixture of a perovskite columnar crystal region (24) having an ionic defect in which a portion of the constitutive elements of an oxygen ion, a titanium ion, and a zirconium ion is missing and a perovskite columnar crystal region (25) of stoichiometric composition having no ionic defect. This configuration allows a residual compressive stress in the crystal to be relaxed by the perovskite columnar crystal region (24) having an ionic defect, thus achieving a large piezoelectric displacement (displacement amount).

摘要翻译： 压电薄膜可实现较大的压电位移。 压电薄膜的化学组成由Pb 1 + a（Zr x 1 Ti 1-x O）O 3+表示， （0.2 <= a <= 0.6和0.50 <= x <= 0.62）。 压电薄膜的晶体结构是具有离子缺陷的钙钛矿柱状晶体区域（24）的混合物，其中一部分氧离子，钛离子和锆离子的构成元素缺失，钙钛矿 没有离子缺陷的化学计量组成的柱状晶体区域（25）。 这种结构允许通过具有离子缺陷的钙钛矿柱状晶体区域（24）使晶体中的残余压缩应力松弛，从而实现大的压电位移（位移量）。

公开(公告)号：US06326621B1

公开(公告)日：2001-12-04

申请号：US09323730

申请日：1999-06-01

申请人： Takeshi Kamada ,  Ryoichi Takayama ,  Satoru Fujii ,  Atsushi Tomozawa ,  Isaku Kanno

发明人： Takeshi Kamada ,  Ryoichi Takayama ,  Satoru Fujii ,  Atsushi Tomozawa ,  Isaku Kanno

IPC分类号： G01J502

CPC分类号： G01J5/20 ,  G01J5/34

摘要： The invention provides a compact and high performance infrared radiation detector. The infrared radiation detector contains: a substrate; and at least two infrared radiation detector units selected from the group consisting of a pyroelectric infrared radiation detector unit, a resistive bolometer type infrared radiation detector unit and a ferroelectric bolometer type infrared radiation detector unit, the infrared radiation detector units being disposed on the same side of the substrate.

摘要翻译： 本发明提供了一种紧凑且高性能的红外辐射探测器。 红外辐射检测器包含：基板; 以及选自热电型红外线辐射检测器单元，电阻辐射热计型红外线检测器单元和铁电测辐射热计型红外线检测器单元的至少两个红外线检测器单元，所述红外线检测器单元设置在同一侧 的基底。

公开(公告)号：US07024738B2

公开(公告)日：2006-04-11

申请号：US10116096

申请日：2002-04-04

申请人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Takeshi Kamada

发明人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Takeshi Kamada

IPC分类号： H04R17/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H02N2/00

CPC分类号： G01P15/0802 ,  B41J2/14233 ,  B41J2002/14258 ,  G01P15/09 ,  H01L41/094 ,  H01L41/1132 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49147

摘要： To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films (2, 3) are formed by sputtering on the both surfaces of a metal thin plate (1) which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films (2, 3) are controlled. A pair of electrode films (5) are formed on the respective surfaces of the first and second piezoelectric thin films (2, 3) opposite to the metal thin plate (1).

摘要翻译： 为了以低成本制造紧凑且高性能的薄膜压电双晶片元件，通过溅射在金属薄板（1）的两个表面上形成第一和第二压电薄膜（2,3），所述两个表面与 彼此沿着其厚度，同时控制第一和第二压电薄膜（2,3）的各自的极化状态。 在与金属薄板（1）相对的第一和第二压电薄膜（2,3）的各个表面上形成一对电极薄膜（5）。

公开(公告)号：US06347862B1

公开(公告)日：2002-02-19

申请号：US09202419

申请日：1998-12-14

申请人： Isaku Kanno ,  Satoru Fujii ,  Ryoichi Takayama ,  Takeshi Kamada

发明人： Isaku Kanno ,  Satoru Fujii ,  Ryoichi Takayama ,  Takeshi Kamada

IPC分类号： B41J2045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2002/14258 ,  B41J2002/14379 ,  B41J2202/03

摘要： There is provided an ink-jet head having ink outlets formed at a high density for use in an ink-jet recorder. The ink-jet head comprises ink outlets, compression chambers communicating with the ink outlets, and piezoelectric vibration sections, each being provided on a part of each of the compression chambers and including a piezoelectric film containing Pb, Ti and Zr, and electrodes provided on both sides of the piezoelectric film. The piezoelectric film comprises a first layer and a second layer which each have a perovskite structure and are formed in contact with each other, wherein the first layer is formed as a layer containing no Zr or as a layer containing a smaller amount of Zr than that contained in the second layer.

摘要翻译： 提供一种喷墨头，其具有以高密度形成的用于喷墨记录器的墨水出口。 喷墨头包括墨出口，与墨出口连通的压缩室和压电振动部分，每个压电振动部分设置在每个压缩室的一部分上，并且包括含有Pb，Ti和Zr的压电膜，以及设置在 压电薄膜的两面。 压电膜包括第一层和第二层，它们各自具有钙钛矿结构并且彼此接触，其中第一层形成为不含Zr的层或作为含有少量Zr的层， 包含在第二层。

公开(公告)号：US06263734B1

公开(公告)日：2001-07-24

申请号：US09289936

申请日：1999-04-13

申请人： Satoru Fujii ,  Isaku Kanno ,  Takeshi Kamada ,  Ryoichi Takayama

发明人： Satoru Fujii ,  Isaku Kanno ,  Takeshi Kamada ,  Ryoichi Takayama

IPC分类号： G01P1509

CPC分类号： G01P15/0907 ,  G01P15/0922 ,  G01P15/18

摘要： An acceleration sensor 201 comprises a longitudinal effect type detection unit 203 and a lateral effect type detection unit 204. The longitudinal effect type detection unit 203 comprises a longitudinal effect type piezoelectric element 211 comprising a piezoelectric body 211a of a thin film, an electrode 211b and an electrode 211c, which is formed on a deposition substrate 221 serving also as a weight. The lateral effect type detection unit 204 is constituted by providing a lateral effect type piezoelectric element 213 comprising a piezoelectric body 213a of a thin film, an electrode 213b and an electrode 213c, which is formed on the deposition substrate 221 and is cantilevered above a groovy recessed part 105a on a substrate 105. A detection circuit 116 detects an acceleration in a predetermined direction, based on an output of both the longitudinal effect type detection unit 203 and the lateral effect type detection unit 204. Consequently, it is possible to detect an acceleration in a predetermined direction and to make a wider dynamic range and a wider band.

摘要翻译： 加速度传感器201包括纵向效应型检测单元203和横向效果型检测单元204.纵向效应型检测单元203包括纵向效应型压电元件211，其包括薄膜的压电体211a，电极211b和 电极211c，其形成在也用作重量的沉积基板221上。 横向效果型检测单元204通过提供一种横向效应型压电元件213构成，该横向效应型压电元件213包括薄膜压电体213a，电极213b和电极213c，其形成在沉积基板221上并且悬臂上方 检测电路116基于纵向效应型检测单元203和横向效果型检测单元204的输出，检测预定方向的加速度。因此，可以检测到 加速度在一个预定的方向上，并且形成更宽的动态范围和更宽的频带。

公开(公告)号：US6105225A

公开(公告)日：2000-08-22

申请号：US600863

申请日：1996-02-09

申请人： Hideo Torii ,  Takeshi Kamada ,  Shigenori Hayashi ,  Ryoichi Takayama ,  Takashi Hirao ,  Masumi Hattori

发明人： Hideo Torii ,  Takeshi Kamada ,  Shigenori Hayashi ,  Ryoichi Takayama ,  Takashi Hirao ,  Masumi Hattori

IPC分类号： G01P15/08 ,  G01P15/09 ,  H01L41/29 ,  H01L41/22

CPC分类号： G01P15/0922 ,  G01P15/0802 ,  H01L41/0478 ,  H01L41/0815 ,  H01L41/313 ,  Y10T29/42 ,  Y10T29/4981

摘要： A method of manufacturing a small, light, highly accurate and inexpensive thin film sensor element is disclosed. The thin film sensor element comprises a sensor holding substrate having an opening part and a multilayer film structure adhered thereon. The multilayer film structure comprises a first electrode film, a second electrode film, and a piezoelectric dielectric oxide film present between the first and second electrode films. The method of manufacturing the thin film sensor element comprises the steps of: forming the multilayer film structure by forming the first electrode film having a (100) plane orientation on a surface of an alkali halide substrate, forming the piezoelectric dielectric oxide thereon, and forming the second electrode film on the piezoelectric dielectric oxide; adhering the multilayer film structure on the surface of the sensor holding substrate having the opening part; and dissolving and removing the alkali halide substrate with water.

摘要翻译： 公开了一种制造小型，轻型，高精度和廉价的薄膜传感器元件的方法。 薄膜传感器元件包括具有开口部分和粘附在其上的多层膜结构的传感器保持基板。 多层膜结构包括第一电极膜，第二电极膜和存在于第一和第二电极膜之间的压电电介质氧化物膜。 制造薄膜传感器元件的方法包括以下步骤：通过在碱金属卤化物衬底的表面上形成具有（100）面取向的第一电极膜来形成多层膜结构，在其上形成压电电介质氧化物，并形成 压电电介质氧化物上的第二电极膜; 将多层膜结构粘附在具有开口部的传感器保持基板的表面上; 并用水溶解和除去碱金属卤化物基质。

公开(公告)号：US6014073A

公开(公告)日：2000-01-11

申请号：US776625

申请日：1997-01-10

申请人： Hideo Torii ,  Takeshi Kamada ,  Atsushi Tomozawa ,  Eiji Fujii ,  Ryoichi Takayama ,  Hiroki Moriwake

发明人： Hideo Torii ,  Takeshi Kamada ,  Atsushi Tomozawa ,  Eiji Fujii ,  Ryoichi Takayama ,  Hiroki Moriwake

IPC分类号： G01K7/22 ,  H01C7/02 ,  H01C7/10

CPC分类号： G01K7/22 ,  G01K7/223 ,  H01C7/023

摘要： A temperature sensor element for measuring the temperature of exhaust gas from car engines comprises a metallic support having a shape of a flat board, a first electric-insulating film existing on the support, a first temperature sensitive film existing on the first electric-insulating film and having a pair of electrodes, and a second electric-insulating film existing on the temperature sensitive film. The element is superior in thermal shock resistance. The element needs no heat-resistant cap. The element is superior in heat-response since the element has a small heat capacity.

摘要翻译： PCT No.PCT / JP96 / 01266 Sec。 371日期1997年1月10日 102（e）日期1997年1月10日PCT提交1996年5月10日PCT公布。 出版物WO96 / 35932 日期：1996年11月14日用于测量汽车发动机废气温度的温度传感器元件包括具有平板形状的金属支撑件，存在于支撑件上的第一电绝缘膜，存在于第一温度敏感膜 第一电绝缘膜并具有一对电极和存在于感温膜上的第二电绝缘膜。 该元件具有优异的耐热冲击性。 该元件不需要耐热帽。 该元件具有优异的热响应性，因为该元件具有较小的热容量。

公开(公告)号：US5612536A

公开(公告)日：1997-03-18

申请号：US374989

申请日：1995-01-19

申请人： Hideo Torii ,  Takeshi Kamada ,  Shigenori Hayashi ,  Ryoichi Takayama ,  Takashi Hirao ,  Masumi Hattori

发明人： Hideo Torii ,  Takeshi Kamada ,  Shigenori Hayashi ,  Ryoichi Takayama ,  Takashi Hirao ,  Masumi Hattori

IPC分类号： G01P15/08 ,  G01P15/09 ,  H01L41/29 ,  G01J5/10

CPC分类号： G01P15/0922 ,  G01P15/0802 ,  H01L41/0478 ,  H01L41/0815 ,  H01L41/313 ,  Y10T29/42 ,  Y10T29/4981

摘要： A thin film sensor element includes a sensor holding substrate having an opening part and a multilayer film adhered thereon at least consisting of an electrode film A, an electrode film B having (100) plane orientation, and a piezoelectic dielectric oxide film present between the electrode film A and the electrode film B. As a result, a thin film sensor element which is small, light, highly accurate, and inexpensive can be attained which can be used for an acceleration sensor element and a pyroelectric infrared sensor element. On the surface of a flat plate KBr substrate, a rock-salt crystal structure oxide of a conductive NiO is formed by a plasma MOCVD method whose vertical direction is crystal-oriented to direction against the substrate surface. By means of a sputtering method, a PZT film is formed by an epitaxial growth on that surface, and a Ni-Cr electrode film is formed thereon. Next, the multilayer film structure is reversed and adhered to a sensor substrate having an opening part with an adhesive. After a connection electrode is connected, the whole structure is washed with water, thereby removing the KBr substrate.

摘要翻译： 薄膜传感器元件包括：具有开口部的传感器保持基板和附着在其上的多层膜，至少由电极膜A，具有（100）面取向的电极膜B和存在于电极之间的压电电介质氧化膜 膜A和电极膜B.结果，可以获得可用于加速度传感器元件和热电型红外线传感器元件的小，轻，高精度和便宜的薄膜传感器元件。 在平板KBr基板的表面上，通过等离子体MOCVD方法形成导电NiO的岩盐晶体结构氧化物，其垂直方向相对于衬底表面<100>晶体取向。 通过溅射法，在该表面上通过外延生长形成PZT膜，在其上形成Ni-Cr电极膜。 接下来，将多层膜结构反转并粘接到具有开口部的粘合剂的传感器基板。 连接电极连接后，整个结构用水清洗，从而除去KBr基板。

公开(公告)号：US06688731B1

公开(公告)日：2004-02-10

申请号：US09701856

申请日：2000-12-01

申请人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

发明人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/313 ,  H01L41/316

摘要： A piezoelectric thin film element D, in which a piezoelectric thin film 1 with first and second electrode films 2 and 3 respectively formed on its opposite surfaces in the thickness direction is held by a hold film 5, is fabricated by forming each film 1, 2, 3, and 5 on a film formation substrate 11 and removing the film formation substrate 11 by etching. Even when the hold film 5 is made of material such as resin and therefore exhibits relatively poor adhesion with respect to the other films, the piezoelectric thin film 1 is protected from damage by etchant because the first electrode film 2 which comes into contact with the film formation substrate 11 is formed such that the overall circumference of a peripheral edge portion of the first electrode film 2 laterally extends beyond the lateral surface of the piezoelectric thin film 1 and closely adheres to the hold film 5.

摘要翻译： 通过形成每个膜1,2制造压电薄膜元件D，其中分别在其厚度方向的相对表面上形成有第一和第二电极膜2和3的压电薄膜1由保持膜5保持 ，3和5在成膜基板11上，并通过蚀刻去除成膜基板11。 即使当保持膜5由诸如树脂的材料制成并且因此相对于其它膜显示相对较差的粘合力时，由于与膜接触的第一电极膜2，保护了压电薄膜1免受腐蚀剂损伤 形成基板11形成为使得第一电极膜2的周边部分的整个周边横向延伸超过压电薄膜1的侧表面并且紧密地附着到保持膜5。

公开(公告)号：US06554408B1

公开(公告)日：2003-04-29

申请号：US09506751

申请日：2000-02-18

申请人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

发明人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

IPC分类号： B41J2045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14387

摘要： A fluid ejection device, such as for an ink jet printer or the like, having increased increasing nozzle density. A through-hole (15) is provided in a glass substrate (18) to which a second silicon substrate (19) is directly bonded to form an ink outlet (14). The first silicon substrate (17) is etched to form a pressure chamber (12), an ink channel (13) and an ink inlet (16), and bonded directly to the glass substrate (18). A piezoelectric thin film (11), having a conductive, elastic body (20), is bonded to the first substrate covering the pressure chamber (12). The elastic body (20) is sandwiched between the piezoelectric thin film (11) and a resin layer (25). The second substrate (19) has a thickness of less than about 0.8 mm in a range of thickness comprising about 1.2 to about 1.9 times (rg-rs), wherein rg is the diameter of the wide end of the through-hole (15) and rs is the diameter of the narrow end of the through-hole (15).

摘要翻译： 诸如用于喷墨打印机等的流体喷射装置具有增加的喷嘴密度的增加。 在玻璃基板（18）上设置有通孔（15），第二硅基板（19）直接接合在该玻璃基板（18）上形成出墨口（14）。 蚀刻第一硅衬底（17）以形成压力室（12），墨水通道（13）和墨水入口（16），并直接粘合到玻璃基底（18）上。 具有导电弹性体（20）的压电薄膜（11）与覆盖压力室（12）的第一基板接合。 弹性体（20）夹在压电薄膜（11）和树脂层（25）之间。 第二基板（19）的厚度小于约0.8mm，其厚度范围为约1.2至约1.9倍（rg-rs），其中rg是通孔（15）的宽端的直径， 并且rs是通孔（15）的窄端的直径。