公开(公告)号：US20130278279A1

公开(公告)日：2013-10-24

申请号：US13978411

申请日：2011-12-09

申请人： Kazunari Ishii ,  Tetsuji Watanabe ,  Shinya Koizumi ,  Koichi Matsuzaki

发明人： Kazunari Ishii ,  Tetsuji Watanabe ,  Shinya Koizumi ,  Koichi Matsuzaki

IPC分类号： G01R1/073

CPC分类号： G01R1/07342 ,  G01R31/2863 ,  G01R31/2891

摘要： In a method for thermal stabilization of a probe card, a probe card is adjusted to a prescribed temperature in a short time by making a heat source directly contact the probe card and is accurately determined whether the probe card is thermally stable. A heat transfer substrate is mounted on a mounting table. The temperature of the heat transfer substrate is adjusted through the mounting table. The mounting table is raised, and a plurality of probes is brought into contact with the heat transfer substrate at a prescribed target load. The contact load between the heat transfer substrate and the probes, which changes according to the thermal changes in the probe card, is detected. The mounting table is controlled vertically through a vertical drive mechanism such that the contact load becomes the target load until the probe card is thermally stable.

摘要翻译： 在探针卡的热稳定化方法中，通过使热源与探针卡直接接触，将探针卡在短时间内调整为规定的温度，并且准确地确定探针卡是否热稳定。 传热基板安装在安装台上。 通过安装台调节传热基板的温度。 安装台升起，多个探针以规定的目标载荷与传热基板接触。 检测传感基板和探针之间根据探针卡的热变化而变化的接触负载。 安装台通过垂直驱动机构垂直控制，使得接触负载成为目标负载，直到探针卡热稳定。

公开(公告)号：US09030218B2

公开(公告)日：2015-05-12

申请号：US13978411

申请日：2011-12-09

申请人： Kazunari Ishii ,  Tetsuji Watanabe ,  Shinya Koizumi ,  Koichi Matsuzaki

发明人： Kazunari Ishii ,  Tetsuji Watanabe ,  Shinya Koizumi ,  Koichi Matsuzaki

IPC分类号： G01R1/073 ,  G01R31/28

CPC分类号： G01R1/07342 ,  G01R31/2863 ,  G01R31/2891

摘要： In a method for thermal stabilization of a probe card, a probe card is adjusted to a prescribed temperature in a short time by making a heat source directly contact the probe card and is accurately determined whether the probe card is thermally stable. A heat transfer substrate is mounted on a mounting table. The temperature of the heat transfer substrate is adjusted through the mounting table. The mounting table is raised, and a plurality of probes is brought into contact with the heat transfer substrate at a prescribed target load. The contact load between the heat transfer substrate and the probes, which changes according to the thermal changes in the probe card, is detected. The mounting table is controlled vertically through a vertical drive mechanism such that the contact load becomes the target load until the probe card is thermally stable.

摘要翻译： 在探针卡的热稳定化方法中，通过使热源与探针卡直接接触，将探针卡在短时间内调整到规定的温度，并且准确地确定探针卡是否热稳定。 传热基板安装在安装台上。 通过安装台调节传热基板的温度。 安装台升起，多个探针以规定的目标载荷与传热基板接触。 检测传感基板和探针之间根据探针卡的热变化而变化的接触负载。 安装台通过垂直驱动机构垂直控制，使得接触负载成为目标负载，直到探针卡热稳定。

公开(公告)号：US08027528B2

公开(公告)日：2011-09-27

申请号：US12034182

申请日：2008-02-20

申请人： Kazunari Ishii ,  Masaru Suzuki

发明人： Kazunari Ishii ,  Masaru Suzuki

IPC分类号： G06K9/00

CPC分类号： G01B21/02 ,  G01R31/2891

摘要： A method is for calculating a height of a chuck top. A height of the top surface of the chuck top which corresponds to an arbitrary position specified on the XY coordinate plane by a computer is calculated in each of the four quadrants based on a coordinate transformation formulas. The method includes setting, by using the computer, a conical model in which two adjacent points other than the center point of the chuck top which correspond to the specified coordinates in a predetermined quadrant of the XY coordinate plane are obtained on a circumference having the center point of the chuck top as the origin and specifying an arbitrary point in the predetermined quadrant by using the computer and calculating a height of the arbitrary point of the chuck top based on the conical model, the coordinate transformation formulas and the specified coordinates.

摘要翻译： 一种用于计算卡盘顶部的高度的方法。 基于坐标变换公式，在四个象限中的每一个中计算与计算机在XY坐标平面上指定的任意位置对应的卡盘顶部顶面的高度。 该方法包括通过使用计算机设置圆锥模型，其中在具有中心的圆周上获得与夹头顶部的中心点以外的两个相邻点相对应于XY坐标平面的预定象限中的指定坐标的圆锥模型 并且通过使用计算机指定预定象限中的任意点，并且基于圆锥模型，坐标变换公式和指定坐标来计算卡盘顶部的任意点的高度。

公开(公告)号：US20090290765A1

公开(公告)日：2009-11-26

申请号：US12095474

申请日：2006-10-24

申请人： Kazunari Ishii ,  Kiyotaka Watanabe ,  Shuya Miki ,  Kazuo Hamada

发明人： Kazunari Ishii ,  Kiyotaka Watanabe ,  Shuya Miki ,  Kazuo Hamada

IPC分类号： G06K9/00

CPC分类号： A61B5/055 ,  A61B5/4088 ,  A61B6/037 ,  A61B6/481 ,  G01T1/00 ,  G06T7/0012 ,  G06T2207/10104 ,  G06T2207/20104 ,  G06T2207/30016

摘要： A method of detecting a neurodegenerative disease includes (a) a standardization step of creating a first image by applying anatomical standardization to a brain nuclear medical image; (b) a conversion step of creating a second image by converting the pixel value of each pixel of an image based on the first image into a z score or a t value; (c) an addition step of calculating the sum of the pixel values of individual pixels in a predetermined region of interest in the second image; and (d) a detection step of obtaining the results of the detection of the neurodegenerative disease through an operation of comparison of the sum with a predetermined threshold.

摘要翻译： 检测神经变性疾病的方法包括：（a）通过对脑核医学图像应用解剖标准化来创建第一图像的标准化步骤; （b）转换步骤，通过将基于第一图像的图像的每个像素的像素值转换为z分数或t值来创建第二图像; （c）附加步骤，计算第二图像中预定感兴趣区域中的各个像素的像素值的和; 和（d）检测步骤，通过比较和预定阈值的操作来获得神经变性疾病的检测结果。

公开(公告)号：US06297656B1

公开(公告)日：2001-10-02

申请号：US09110073

申请日：1998-07-02

申请人： Masahito Kobayashi ,  Kazunari Ishii

发明人： Masahito Kobayashi ,  Kazunari Ishii

IPC分类号： G01R104

CPC分类号： G01R31/2886

摘要： With a probe-test method and a prober for examining certain electric characteristics of an object of examination, a main chuck is adapted to be driven to move in the X-, Y-, Z- and &thgr;-directions in order to bring the object into contact with the probes of the prober and then the shaft of the support of the main chuck is warped under the contact pressure applied by the probes to tilt the main chuck. The position where each of the probes contacts the corresponding one of the electrodes on the object is displaced (moved) in the X-, Y- and Z-directions by the tilt. The displacement is predicted by an operation. unit and the main chuck is moved in the X-, Y- and Z-directions to correct the displacement.

摘要翻译： 使用探针测试方法和用于检查检查对象的某些电特性的探测器，主卡盘适于被驱动以在X，Y，Z和θ方向上移动，以便使物体 与探针的探针接触，然后主夹头的支撑轴在由探针施加的接触压力下翘曲，以使主卡盘倾斜。 每个探针接触物体上相应的一个电极的位置通过倾斜在X，Y和Z方向上移动（移动）。 通过操作预测位移。 单元，主夹头在X，Y和Z方向上移动以校正位移。

公开(公告)号：US08866503B2

公开(公告)日：2014-10-21

申请号：US13071881

申请日：2011-03-25

申请人： Kazunari Ishii ,  Toshihiko Iijima ,  Shuji Akiyama

发明人： Kazunari Ishii ,  Toshihiko Iijima ,  Shuji Akiyama

IPC分类号： G01R31/00 ,  G01R31/28

CPC分类号： G01R31/2891 ,  G01R31/2887

摘要： A method for correcting inclination of a wafer chuck includes obtaining in advance a correction amount for each of the semiconductor chips which corrects the inclination of the wafer chuck in the case of applying a contact load to at least each one of the semiconductor chips and storing each of the correction amounts in a data storage unit; calculating a total correction amount for correcting the inclination of the wafer chuck by calculating the correction amount of each of the semiconductor chips bringing into contact with the probes when the semiconductor wafer comes into electrical contact with the probes and adding the calculated correction amounts; and correcting the inclination of the wafer chuck based on the total correction amount.

摘要翻译： 一种用于校正晶片卡盘倾斜度的方法，包括：在对至少每个半导体芯片施加接触负载的情况下，预先获得校正每个半导体芯片的校正量，该半导体芯片校正晶片卡盘的倾斜度， 在数据存储单元中的校正量; 计算用于通过计算当半导体晶片与探针电接触而与探针接触的每个半导体芯片的校正量并添加所计算的校正量时，计算校正晶片卡盘的倾斜度的总校正量; 并且基于总校正量来校正晶片卡盘的倾斜度。

公开(公告)号：US08693746B2

公开(公告)日：2014-04-08

申请号：US13056614

申请日：2008-07-28

申请人： Kazunari Ishii

发明人： Kazunari Ishii

IPC分类号： G06K9/00

CPC分类号： A61B6/032 ,  A61B6/037 ,  A61B6/501 ,  A61B6/5235 ,  A61B6/5247 ,  G06T7/0012 ,  G06T2207/10072 ,  G06T2207/20104 ,  G06T2207/30016

摘要： In one embodiment of the present invention, a significance test of pixel values is performed between a region where functions could be deteriorated in a disease-specific manner and a region where functions could be preserved even in cases of diseases using brain functional images. Then, the mean pixel value of the functionally preserved site is significantly greater than the mean pixel value of the functionally deteriorated site according to the significance test is determined as an a image including a neurodegenerative disorder. According to this embodiment, it becomes possible to objectively detect images of neurodegenerative disorders without using a database for healthy subjects.

摘要翻译： 在本发明的一个实施例中，在功能可以以疾病特异性方式恶化的区域和即使在使用脑功能图像的疾病的情况下也可以保存功能的区域之间进行像素值的显着性检验。 然后，根据显着性检验，功能保存部位的平均像素值明显大于功能恶化部位的平均像素值，被确定为包括神经退行性病症的图像。 根据本实施例，可以客观地检测神经变性疾病的图像，而不使用健康受试者的数据库。

公开(公告)号：US07626406B2

公开(公告)日：2009-12-01

申请号：US12049799

申请日：2008-03-17

申请人： Kazunari Ishii

发明人： Kazunari Ishii

IPC分类号： G01R31/02

CPC分类号： G01R31/2887

摘要： A probing method measures electrical characteristics of an object to be inspected by bringing a probe needle to make a contact with an electrode pad of the object, the probe needle formed to be vertically pointing the object. The method includes the steps of: mounting the object on a mounting table; aligning the object and the probe needle; thereafter, contacting the probe needle with the electrode pad by moving the mounting table upwards, and then moving the mounting table vertically upwards while moving same horizontally to rend an oxide film formed on a surface of the electrode pad, so that a tip of the probe needle is stuck into the electrode pad and the probe needle and the electrode pad to conduct with each other.

摘要翻译： 探测方法通过使探针与物体的电极焊盘接触来测量待检查物体的电特性，探针形成为垂直指向物体。 该方法包括以下步骤：将物体安装在安装台上; 对准物体和探针; 此后，通过向上移动安装台使探针与电极焊盘接触，然后垂直向上移动安装台，同时水平移动，以形成在电极焊盘的表面上形成的氧化膜，使得探针的尖端 针头插入电极垫，探针和电极垫相互导电。

公开(公告)号：US07009415B2

公开(公告)日：2006-03-07

申请号：US10870073

申请日：2004-06-18

申请人： Masahito Kobayashi ,  Kazunari Ishii

发明人： Masahito Kobayashi ,  Kazunari Ishii

IPC分类号： G01R31/02

CPC分类号： G01R31/2887

摘要： Disclosed is a probing method comprising steps of moving a main chuck to align an object of inspection on the main chuck with probes of a probe card located over the main chuck, moving the main chuck toward the probe card, thereby bringing electrodes of the object of inspection into contact with the probes, overdriving the main chuck toward the probe card while measuring a load applied to the object of inspection by contact with the probes and controlling the movement of the main chuck in accordance with the measured load, and inspecting the electrical properties of the object of inspection by means of the probes.

摘要翻译： 公开了一种探测方法，包括以下步骤：移动主卡盘以使主卡盘上的检查对象与位于主卡盘上方的探针卡的探针对准，使主卡盘朝向探针卡移动，从而使主体卡盘的电极 检查与探头接触，通过与探头接触测量施加到检查对象的负载并根据测量的负载来控制主夹头的移动，检测主夹头朝向探针卡，并检查电气特性 通过探头进行检查。

公开(公告)号：US06777968B1

公开(公告)日：2004-08-17

申请号：US09667502

申请日：2000-09-22

申请人： Masahito Kobayashi ,  Kazunari Ishii

发明人： Masahito Kobayashi ,  Kazunari Ishii

IPC分类号： G01R3102

CPC分类号： G01R31/2887

摘要： A probing method including the steps of moving a main chuck to align an object of inspection on the main chuck with probes of a probe card located over the main chuck. The method includes moving the main chuck toward the probe card, thereby bringing electrodes of the object of inspection into contact with the probes, and overdriving the main chuck toward the probe card while measuring a load applied to the object of inspection by contact with the probe and controlling the movement of the main chuck in accordance with the measured load. The method also includes inspecting the electrical properties of the object of inspection using the probes.

摘要翻译： 一种探测方法，包括以下步骤：移动主卡盘以使主卡盘上的检查对象与位于主卡盘上方的探针卡的探针对准。 该方法包括将主卡盘移向探针卡，从而使检查对象的电极与探针接触，并且通过与探针接触来测量施加于检查对象的载荷，将主卡盘过度驱动向探针卡 并根据测量的负载来控制主夹头的移动。 该方法还包括使用探针检查检查对象的电气特性。