公开(公告)号：US20050094302A1

公开(公告)日：2005-05-05

申请号：US11012973

申请日：2004-12-14

申请人： Kazuo Matsuzaki ,  Taku Furuta ,  Kazumi Takagiwa ,  Zenchi Hayashi

发明人： Kazuo Matsuzaki ,  Taku Furuta ,  Kazumi Takagiwa ,  Zenchi Hayashi

IPC分类号： G11B5/31 ,  G11B5/37 ,  H01F1/00 ,  H01F10/00 ,  H01F10/32 ,  H01F17/00 ,  H01F41/16 ,  H01L23/31 ,  H01L23/522 ,  H01L23/64 ,  G11B5/02 ,  G11B5/147

CPC分类号： H01L23/645 ,  B82Y25/00 ,  G11B5/3109 ,  G11B5/37 ,  H01F1/0027 ,  H01F10/005 ,  H01F10/007 ,  H01F10/3254 ,  H01F17/0006 ,  H01F41/16 ,  H01F2017/0066 ,  H01L23/3128 ,  H01L23/3135 ,  H01L23/5227 ,  H01L23/552 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/45015 ,  H01L2224/451 ,  H01L2224/45147 ,  H01L2224/48227 ,  H01L2224/48247 ,  H01L2924/01012 ,  H01L2924/01015 ,  H01L2924/01039 ,  H01L2924/01068 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19104 ,  H01L2924/30107 ,  H01L2924/3025 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/00015 ,  H01L2924/00012

摘要： On top of a silicon substrate, a polyimide film with a thickness of 10 μm is formed. On top of this, a magnetic thin film that is a polyimide film containing Fe fine particles and that has a thickness of 20 μm is formed. On top of this magnetic thin film, a patterned Ti/Au film and a Ti/Au connection conductor are formed. On top of this, a polyimide film with a thickness of 10 μm, and a Cu coil with a height 35 μm, width 90 μm, space 25 μm, and a polyimide layer that fills the spaces in the Cu coil are formed. On top of this, via a polyimide film with a thickness of 10 μm, a magnetic thin film that is a polyimide film containing Fe particles and that has a thickness of 20 μm is formed. This thin film inductor has a small alternating current resistance. The present invention provides a magnetic thin film that is well suited for mass production, can be manufactured easily, can be made into a thick film, has soft magnetic qualities, and is inexpensive. The present invention also provides a magnetic component that uses this magnetic thin film, manufacturing methods for these, and a power conversion device.

摘要翻译： 在硅衬底之上，形成厚度为10μm的聚酰亚胺膜。 此外，形成作为含有Fe微粒并且厚度为20μm的聚酰亚胺膜的磁性薄膜。 在该磁性薄膜的顶部，形成图案化的Ti / Au膜和Ti / Au连接导体。 此外，形成厚度为10μm的聚酰亚胺膜和填充Cu线圈中的空间的高度为35μm，宽度为90μm，间隙为25μm的聚酰亚胺层的Cu线圈。 此外，通过厚度为10μm的聚酰亚胺膜，形成作为含有Fe粒子并且厚度为20μm的聚酰亚胺膜的磁性薄膜。 该薄膜电感器具有小的交流电阻。 本发明提供一种非常适合批量生产的磁性薄膜，可以容易地制造，可以制成厚膜，具有软磁性，并且便宜。 本发明还提供使用该磁性薄膜的磁性部件，其制造方法以及电力转换装置。

公开(公告)号：US06835576B2

公开(公告)日：2004-12-28

申请号：US09846773

申请日：2001-05-01

申请人： Kazuo Matsuzaki ,  Taku Furuta ,  Kazumi Takagiwa ,  Zenchi Hayashi

发明人： Kazuo Matsuzaki ,  Taku Furuta ,  Kazumi Takagiwa ,  Zenchi Hayashi

IPC分类号： H01L2100

CPC分类号： H01L23/645 ,  B82Y25/00 ,  G11B5/3109 ,  G11B5/37 ,  H01F1/0027 ,  H01F10/005 ,  H01F10/007 ,  H01F10/3254 ,  H01F17/0006 ,  H01F41/16 ,  H01F2017/0066 ,  H01L23/3128 ,  H01L23/3135 ,  H01L23/5227 ,  H01L23/552 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/45015 ,  H01L2224/451 ,  H01L2224/45147 ,  H01L2224/48227 ,  H01L2224/48247 ,  H01L2924/01012 ,  H01L2924/01015 ,  H01L2924/01039 ,  H01L2924/01068 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19104 ,  H01L2924/30107 ,  H01L2924/3025 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/00015 ,  H01L2924/00012

摘要： On top of a silicon substrate, a polyimide film with a thickness of 10 &mgr;m is formed. On top of this, a magnetic thin film that is a polyimide film containing Fe fine particles and that has a thickness of 20 &mgr;m is formed. On top of this magnetic thin film, a patterned Ti/Au film and a Ti/Au connection conductor are formed. On top of this, a polyimide film with a thickness of 10 &mgr;m, and a Cu coil with a height 35 &mgr;m, width 90 &mgr;m, space 25 &mgr;m, and a polyimide layer that fills the spaces in the Cu coil are formed. On top of this, via a polyimide film with a thickness of 10 &mgr;m, a magnetic thin film that is a polyimide film containing Fe particles and that has a thickness of 20 &mgr;m is formed. This thin film inductor has a small alternating current resistance. The present invention provides a magnetic thin film that is well suited for mass production, can be manufactured easily, can be made into a thick film, has soft magnetic qualities, and is inexpensive. The present invention also provides a magnetic component that uses this magnetic thin film, manufacturing methods for these, and a power conversion device.

摘要翻译： 在硅衬底之上，形成厚度为10μm的聚酰亚胺膜。 此外，形成作为含有Fe微粒并且厚度为20μm的聚酰亚胺膜的磁性薄膜。 在该磁性薄膜的顶部，形成图案化的Ti / Au膜和Ti / Au连接导体。 此外，形成厚度为10μm的聚酰亚胺膜和填充Cu线圈中的空间的高度为35μm，宽度为90μm，间隙为25μm的聚酰亚胺层的Cu线圈。 此外，通过厚度为10μm的聚酰亚胺膜，形成作为含有Fe粒子并且厚度为20μm的聚酰亚胺膜的磁性薄膜。 该薄膜电感器具有小的交流电阻。 本发明提供一种非常适合批量生产的磁性薄膜，可以容易地制造，可以制成厚膜，具有软磁性，并且便宜。 本发明还提供使用该磁性薄膜的磁性部件，其制造方法以及电力转换装置。

公开(公告)号：US06930584B2

公开(公告)日：2005-08-16

申请号：US10760116

申请日：2004-01-16

申请人： Masaharu Edo ,  Zenchi Hayashi

发明人： Masaharu Edo ,  Zenchi Hayashi

IPC分类号： H01F27/28 ,  H01F17/00 ,  H01F27/255 ,  H01F27/32 ,  H01F30/00 ,  H01L23/12 ,  H01L27/01 ,  H02M3/155 ,  H02M7/00 ,  H01F5/00

CPC分类号： H01L27/016 ,  H01F17/0033 ,  H01L2224/73204 ,  H01L2924/13091 ,  H02M7/003 ,  H01L2924/00

摘要： A microminiature power converter includes a semiconductor substrate on which a semiconductor integrated circuit is formed, a thin film magnetic induction element, and a capacitor. The thin film magnetic induction element includes a magnetic insulating substrate, and a solenoid coil conductor in which a first conductor is formed on a first principal plane of the magnetic insulating substrate, a second conductor is formed on a second principal plane of the magnetic insulating substrate, and a connection conductor is formed in a through hole passing through the magnetic insulating substrate are connected. A relationship of a length L of the magnetic insulating substrate in a direction vertical to a magnetic field generated by the solenoid coil and a length d of the coil conductor is d≧L/2.

摘要翻译： 微型功率转换器包括其上形成半导体集成电路的半导体衬底，薄膜磁感应元件和电容器。 薄膜磁感应元件包括磁绝缘基板和电磁线圈导体，其中第一导体形成在磁绝缘基板的第一主平面上，第二导体形成在磁绝缘基板的第二主平面上 并且连接导体形成在通过磁绝缘基板的通孔中。 磁绝缘基板的与螺线管线圈产生的磁场垂直的方向和线圈导体的长度d的长度L的关系为d> = L / 2。