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1.发明授权公开(公告)号：US08558435B2
公开(公告)日：2013-10-15
申请号：US12922592
申请日：2009-03-17
申请人： Kazuo Murata , Kazuhiro Toriumi , Toshiya Kubo , Takashi Maruyama , Tomoyuki Nakazawa , Taichi Tsuchiya , Izumi Yamamoto , Akiko Katoh , Sadao Horiuchi , Hiroshi Miyauchi , Isao Arai , Akihiro Shioji , Tomoo Ikeda , Maki Takizawa , Keisuke Kigawa
发明人： Kazuo Murata , Kazuhiro Toriumi , Toshiya Kubo , Takashi Maruyama , Tomoyuki Nakazawa , Taichi Tsuchiya , Izumi Yamamoto , Akiko Katoh , Sadao Horiuchi , Hiroshi Miyauchi , Isao Arai , Akihiro Shioji , Tomoo Ikeda , Maki Takizawa , Keisuke Kigawa
IPC分类号： H03H9/19
CPC分类号： H03H9/19 , H01L23/057 , H01L2224/16225 , H03H9/0514 , H03H9/1014 , H03H9/1021 , H03H9/215
摘要： A piezoelectric device has a piezoelectric vibration element mounted in a package wherein the piezoelectric vibration element comprises two stick-like vibration legs; a central leg provided between the two vibration legs; a coupling portion that couples one end of each of the two vibration legs and one end of the central leg; and a protrusion portion that is coupled to another end of the central leg, has a predetermined angle, neither 0 nor 180 degrees, to the length direction of the central leg, and extends into a direction not interfering with the driving legs. In making the piezoelectric device smaller and thinner, this configuration avoids interference between a support point on the central leg, provided for supporting the vibration element, and conductive electrodes, improves insulation between the conductive electrodes, and reduces the generation of short-circuits between the conductive electrodes.
摘要翻译： 压电装置具有安装在封装中的压电振动元件，其中压电振动元件包括两个棒状振动支脚; 设置在两个振动腿之间的中心腿; 耦合部分，其耦合两个振动腿中的每一个的一端和中心腿的一端; 并且连接到中心腿的另一端的突出部分具有与中心腿的长度方向既不是0°也不是180度的预定角度，并且延伸到不与驱动腿部相干扰的方向。 在使压电装置越来越小的情况下，这种构造避免了用于支撑振动元件的中心支柱上的支撑点与导电电极之间的干涉，改善了导电电极之间的绝缘，并且减少了导电电极之间的短路 导电电极。
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公开(公告)号：US20110018399A1
公开(公告)日：2011-01-27
申请号：US12922592
申请日：2009-03-17
申请人： Kazuo Murata , Kazuhiro Toriumi , Toshiya Kubo , Takashi Maruyama , Tomoyuki Nakazawa , Taichi Tsuchiya , Izumi Yamamoto , Akiko Katoh , Sadao Horiuchi , Hiroshi Miyauchi , Isao Arai , Akihiro Shioji , Tomoo Ikeda , Maki Takizawa , Keisuke Kigawa
发明人： Kazuo Murata , Kazuhiro Toriumi , Toshiya Kubo , Takashi Maruyama , Tomoyuki Nakazawa , Taichi Tsuchiya , Izumi Yamamoto , Akiko Katoh , Sadao Horiuchi , Hiroshi Miyauchi , Isao Arai , Akihiro Shioji , Tomoo Ikeda , Maki Takizawa , Keisuke Kigawa
IPC分类号： H01L41/053 , H01L41/04
CPC分类号： H03H9/19 , H01L23/057 , H01L2224/16225 , H03H9/0514 , H03H9/1014 , H03H9/1021 , H03H9/215
摘要： A piezoelectric device has a piezoelectric vibration element mounted in a package wherein the piezoelectric vibration element comprises two stick-like vibration legs; a central leg provided between the two vibration legs; a coupling portion that couples one end of each of the two vibration legs and one end of the central leg; and a protrusion portion that is coupled to another end of the central leg, has a predetermined angle, neither 0 nor 180 degrees, to the length direction of the central leg, and extends into a direction not interfering with the driving legs. In making the piezoelectric device smaller and thinner, this configuration avoids interference between a support point on the central leg, provided for supporting the vibration element, and conductive electrodes, improves insulation between the conductive electrodes, and reduces the generation of short-circuits between the conductive electrodes.
摘要翻译： 压电装置具有安装在封装中的压电振动元件，其中压电振动元件包括两个棒状振动支脚; 设置在两个振动腿之间的中心腿; 耦合部分，其耦合两个振动腿中的每一个的一端和中心腿的一端; 并且连接到中心腿的另一端的突出部分具有与中心腿的长度方向既不是0°也不是180度的预定角度，并且延伸到不与驱动腿部相干扰的方向。 在使压电装置越来越小的情况下，这种构造避免了用于支撑振动元件的中心支柱上的支撑点与导电电极之间的干涉，改善了导电电极之间的绝缘，并且减少了导电电极之间的短路 导电电极。
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公开(公告)号：US20080022769A1
公开(公告)日：2008-01-31
申请号：US11716662
申请日：2007-03-12
CPC分类号： G01C19/5607 , Y10T29/42 , Y10T29/4984
摘要： An inclination of an inclined surface formed by working a ridge of a resonator is set to be within a predetermined angular range, whereby a leakage of vibration in the out-of-plane direction is reduced, the leakage of vibration being generated according to the detuning degree adjustment. In addition, a single laser beam is irradiated onto the ridge at an incident angle within a predetermined angular range, whereby a simple working on the inclined surface is established for the leakage vibration adjustment. A degree of the leakage vibration of the resonator is determined based on a relationship with the drift amount that is a ratio of the angular velocity change, and the inclination of the inclined surface is set to be within a predetermined angular range, thereby suppressing the drift amount.
摘要翻译： 将通过对共振器的脊部进行加工而形成的倾斜面的倾斜度设定在规定角度范围内，从而减小了面外方向的振动泄漏，根据失谐产生的振动泄漏 程度调整。 此外，单个激光束以预定角度范围内的入射角照射到脊上，由此建立倾斜表面上的简单工作用于泄漏振动调节。 基于与作为角速度变化率的偏移量的关系确定谐振器的泄漏振动的程度，并且将倾斜面的倾斜度设定在预定的角度范围内，从而抑制漂移的程度 量。
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公开(公告)号：US07637159B2
公开(公告)日：2009-12-29
申请号：US11716662
申请日：2007-03-12
CPC分类号： G01C19/5607 , Y10T29/42 , Y10T29/4984
摘要： An inclination of an inclined surface formed by working a ridge of a resonator is set to be within a predetermined angular range, whereby a leakage of vibration in the out-of-plane direction is reduced, the leakage of vibration being generated according to the detuning degree adjustment. In addition, a single laser beam is irradiated onto the ridge at an incident angle within a predetermined angular range, whereby a simple working on the inclined surface is established for the leakage vibration adjustment. A degree of the leakage vibration of the resonator is determined based on a relationship with the drift amount that is a ratio of the angular velocity change, and the inclination of the inclined surface is set to be within a predetermined angular range, thereby suppressing the drift amount.
摘要翻译： 将通过对共振器的脊部进行加工而形成的倾斜面的倾斜度设定在规定角度范围内，从而减小了面外方向的振动泄漏，根据失谐产生的振动泄漏 程度调整。 此外，单个激光束以预定角度范围内的入射角照射到脊上，由此建立倾斜表面上的简单工作用于泄漏振动调节。 基于与作为角速度变化率的偏移量的关系确定谐振器的泄漏振动的程度，并且将倾斜面的倾斜度设定在预定的角度范围内，从而抑制漂移的程度 量。
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公开(公告)号：US07901587B2
公开(公告)日：2011-03-08
申请号：US11662540
申请日：2005-09-16
申请人： Izumi Yamamoto , Tomoo Ikeda
发明人： Izumi Yamamoto , Tomoo Ikeda
CPC分类号： H03H3/04 , H03H9/215 , H03H2003/0492
摘要： After an external shape of a photoresist layer is patterned with use of a Cr film as an underlayer, i.e., a metal film to serve as an anticorrosive film that resists crystal etching, and an Au film as a surface layer, the Au film is etched. After groove portions are then patterned, the Cr film is etched. Since no degenerated-surface layer cannot be formed on the photoresist layer with an etchant for the Au film, the groove portions can be patterned without any degenerated-surface layer according to this method, so that high-accuracy groove portions can be formed.
摘要翻译： 在使用Cr膜作为底层（即，用作抵抗晶体蚀刻的防腐蚀膜的金属膜）和作为表面层的Au膜来图案化光致抗蚀剂层的外部形状之后，蚀刻Au膜 。 然后在对凹槽部分进行图案化之后，蚀刻Cr膜。 由于在用于Au膜的蚀刻剂不能在光致抗蚀剂层上形成退化表面层，所以根据该方法可以使凹槽部分形成图案化而没有任何退化表面层，从而可以形成高精度的凹槽部分。
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公开(公告)号：US20080067144A1
公开(公告)日：2008-03-20
申请号：US11662540
申请日：2005-09-16
申请人： Izumi Yamamoto , Tomoo Ikeda
发明人： Izumi Yamamoto , Tomoo Ikeda
CPC分类号： H03H3/04 , H03H9/215 , H03H2003/0492
摘要： After an external shape of a photoresist layer is patterned with use of a Cr film as an underlayer, i.e., a metal film to serve as an anticorrosive film that resists crystal etching, and an Au film as a surface layer, the Au film is etched. After groove portions are then patterned, the Cr film is etched. Since no degenerated-surface layer cannot be formed on the photoresist layer with an etchant for the Au film, the groove portions can be patterned without any degenerated-surface layer according to this method, so that high-accuracy groove portions can be formed.
摘要翻译： 在使用Cr膜作为底层（即，用作抵抗晶体蚀刻的防腐蚀膜的金属膜）和作为表面层的Au膜来图案化光致抗蚀剂层的外部形状之后，蚀刻Au膜 。 然后在对凹槽部分进行图案化之后，蚀刻Cr膜。 由于在用于Au膜的蚀刻剂不能在光致抗蚀剂层上形成退化表面层，所以根据该方法可以使凹槽部分形成图案化而没有任何退化表面层，从而可以形成高精度的凹槽部分。
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公开(公告)号：US20090066194A1
公开(公告)日：2009-03-12
申请号：US10588794
申请日：2005-02-10
申请人： Izumi Yamamoto
发明人： Izumi Yamamoto
IPC分类号： H01L41/047
CPC分类号： H03H9/215
摘要： Grooves (2a, 3a) are formed in the tines (2, 3) of an oscillator, side surface electrodes (2e, 3e) are formed on the side surfaces of the tines, and groove electrodes (2d, 3d) are formed in the grooves, respectively. The width of the tines (2, 3) is fixed through the whole length of the tines, while, in a part close to the lower end of the tine, the width of the grooves (2a, 3a) is gradually reduced toward the lower end, whereby a trapezoid region (D) is formed between the side surface of the tine and the groove in this part, and a part of the region (D) is used as an arrangement region of an electrode (5c) which connects the groove electrode and the side surface electrode.
摘要翻译： 在振子的齿（2,3）中形成有槽（2a，3a），在齿的侧面上形成有侧面电极（2e，3e），并且，在 凹槽。 齿（2,3）的宽度通过齿的整个长度固定，而在靠近齿的下端的部分中，槽（2a，3a）的宽度朝向下部逐渐减小 由此在该部分的齿的侧面和槽之间形成梯形区域（D），并且区域（D）的一部分用作电极（5c）的布置区域，电极（5c）的连接槽 电极和侧面电极。
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公开(公告)号：US20070068251A1
公开(公告)日：2007-03-29
申请号：US11510553
申请日：2006-08-28
申请人： Izumi Yamamoto
发明人： Izumi Yamamoto
IPC分类号： G01P15/08
CPC分类号： G01C19/5607 , G01C19/5614
摘要： A vibration gyro having a high accuracy, no vibration leak, and high S/N. The width of a detection leg of a resonator used in the vibration gyro is less than ⅗ of the width of drive legs. The length of the detection leg is larger than the length of the drive legs. As a result, the distance between the detection electrodes is decreased by comparison with the conventional vibration gyro and, therefore, the detection signal is increased and S/N is raised. Furthermore, increasing the leg length brings the natural vibration frequency of out-of-plane vibration of the drive legs close to the natural vibration frequency of the detection leg, providing good coupling and reducing vibration leak to the support section. As a result, Q is increased and S/N is accordingly further increased.
摘要翻译： 振动陀螺仪精度高，无振动泄漏，S / N高。 在振动陀螺仪中使用的谐振器的检测腿的宽度小于驱动腿的宽度的3/5。 检测腿的长度大于驱动腿的长度。 结果，与传统的振动陀螺仪相比，检测电极之间的距离减小，因此检测信号增加并且S / N升高。 此外，增加腿部长度使得驱动腿的平面外振动的固有振动频率接近检测腿的固有振动频率，从而提供良好的耦合并减少对支撑部分的振动泄漏。 结果，Q增加，S / N因此进一步增加。
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公开(公告)号：US06675651B2
公开(公告)日：2004-01-13
申请号：US10235958
申请日：2002-09-06
申请人： Tohru Yanagisawa , Izumi Yamamoto
发明人： Tohru Yanagisawa , Izumi Yamamoto
IPC分类号： G01C1900
CPC分类号： G01C19/5607
摘要： A vibration gyro has a vibrator composed of three tines (first, second, and third tines) which are aligned in a single line at prescribed intervals in one direction on a base and extend in a direction perpendicular to an aligning direction. A central second tine and an adjacent first tine on a left are driven by oscillator. Further, Coriolis force generated on the second tine and the third tine on a right is detected by a detector. In this vibration gyro, the dimensions of the parts are determined so as to cause the third tine to substantially stand still when the first and second tines are driven by the oscillator.
摘要翻译： 振动陀螺仪具有振动器，该振子由三个尖齿（第一，第二和第三尖齿）组成，它们在一个方向上以规定的间隔在一个方向上以一条直线对准，并且在垂直于对准方向的方向上延伸。 左侧的中心第二齿和相邻的第一齿由振荡器驱动。 此外，由检测器检测在第二齿上产生的科里奥利力和右侧的第三齿。 在该振动陀螺仪中，确定部件的尺寸，以便当第一和第二尖齿由振荡器驱动时，使第三齿基本静止。
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10.发明授权Tuning fork type quartz piece and oscillator comprising such tuning fork type quartz piece 有权调音叉式石英片和振荡器，包括这种音叉式石英片公开(公告)号：US07986077B2
公开(公告)日：2011-07-26
申请号：US10588794
申请日：2005-02-10
申请人： Izumi Yamamoto
发明人： Izumi Yamamoto
CPC分类号： H03H9/215
摘要： Grooves (2a, 3a) are formed in the tines (2, 3) of an oscillator, side surface electrodes (2e, 3e) are formed on the side surfaces of the tines, and groove electrodes (2d, 3d) are formed in the grooves, respectively. The width of the tines (2, 3) is fixed through the whole length of the tines, while, in a part close to the lower end of the tine, the width of the grooves (2a, 3a) is gradually reduced toward the lower end, whereby a trapezoid region (D) is formed between the side surface of the tine and the groove in this part, and a part of the region (D) is used as an arrangement region of an electrode (5c) which connects the groove electrode and the side surface electrode.
摘要翻译： 在振子的齿（2,3）中形成有槽（2a，3a），在齿的侧面上形成有侧面电极（2e，3e），并且，在 凹槽。 齿（2,3）的宽度通过齿的整个长度固定，而在靠近齿的下端的部分中，槽（2a，3a）的宽度朝向下部逐渐减小 由此在该部分的齿的侧面和槽之间形成梯形区域（D），并且区域（D）的一部分用作电极（5c）的布置区域，电极（5c）的连接槽 电极和侧面电极。
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