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公开(公告)号：US09220162B2
公开(公告)日：2015-12-22
申请号：US13371997
申请日：2012-02-13
申请人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yukika Yamada , Yoko Nakayama , Yuki Kumagai
发明人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yukika Yamada , Yoko Nakayama , Yuki Kumagai
CPC分类号： H05H1/2406 , H05H2001/2412 , H05H2245/1225
摘要： Generated amount of active species is increased, and dew formation or moisture attachment hardly occurs on a dielectric layer. A plasma generating apparatus including a pair of electrodes, wherein a dielectric layer is arranged on at least one of surfaces of the electrodes facing each other, plasma discharge occurs as a predetermined voltage is applied to the electrodes, and a coating film is arranged on a surface of the dielectric layer.
摘要翻译： 活性物质的产生量增加，并且在电介质层上几乎不发生结露或水分附着。 一种等离子体发生装置，包括一对电极，其中电介质层布置在彼此相对的电极的至少一个表面上，当电极施加预定电压时，发生等离子体放电，并且涂覆膜 电介质层的表面。
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公开(公告)号：US20120229029A1
公开(公告)日：2012-09-13
申请号：US13371997
申请日：2012-02-13
申请人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yukika Yamada , Yoko Nakayama , Yuki Kumagai
发明人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yukika Yamada , Yoko Nakayama , Yuki Kumagai
IPC分类号： H05H1/24
CPC分类号： H05H1/2406 , H05H2001/2412 , H05H2245/1225
摘要： Generated amount of active species is increased, and dew formation or moisture attachment hardly occurs on a dielectric layer. A plasma generating apparatus including a pair of electrodes, wherein a dielectric layer is arranged on at least one of surfaces of the electrodes facing each other, plasma discharge occurs as a predetermined voltage is applied to the electrodes, and a coating film is arranged on a surface of the dielectric layer.
摘要翻译： 活性物质的产生量增加，并且在电介质层上几乎不发生结露或水分附着。 一种等离子体发生装置，包括一对电极，其中电介质层布置在彼此相对的电极的至少一个表面上，当电极施加预定电压时，发生等离子体放电，并且涂覆膜 电介质层的表面。
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3.发明授权Plasma generating device, plasma generating method, and method for suppressing ozone generation 有权等离子体发生装置，等离子体产生方法和抑制臭氧产生的方法公开(公告)号：US09149551B2
公开(公告)日：2015-10-06
申请号：US13884469
申请日：2011-11-09
申请人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yuki Kumagai , Yoko Nakayama , Hideo Nojima , Myung Chul Kim
发明人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yuki Kumagai , Yoko Nakayama , Hideo Nojima , Myung Chul Kim
CPC分类号： A61L9/015 , A61L9/22 , A61L2209/212 , H05H1/2406 , H05H2001/2412 , H05H2245/121
摘要： The purpose of the present invention is to minimize ozone production while increasing the production of an active species. The plasma generating device (100) comprises: a pair of electrodes (21, 22) in which dielectric films (21a, 21b) are disposed on at least one opposing face; voltage application means (4) for applying a pulse voltage across the electrodes (21, 22) to bring about a plasma discharger; and fluid circulation holes (21b, 22b) that are disposed in locations corresponding to the electrodes (21, 22), respectively, and that are configured to pass entirely therethrough. The plasma generating device is also configured such that a fluid passing through the fluid circulation holes (21b, 22b) comes into contact with the plasma, generating ions or radicals, wherein the voltage applying means (4) varies the peak value and/or the pulse width of the pulse voltage applied across the electrodes (21, 22).
摘要翻译： 本发明的目的是在增加活性物质的生产的同时最小化臭氧产生。 等离子体产生装置（100）包括：一对电极（21,22），其中介电膜（21a，21b）设置在至少一个相对面上; 电压施加装置（4），用于在电极（21,22）之间施加脉冲电压以产生等离子体放电器; 和流体循环孔（21b，22b），其分别设置在与电极（21,22）对应的位置，并且被配置为完全通过。 等离子体产生装置还被构造成使得通过流体循环孔（21b，22b）的流体与等离子体接触，产生离子或自由基，其中电压施加装置（4）改变峰值和/或 施加在电极（21,22）上的脉冲电压的脉冲宽度。
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4.发明申请PLASMA GENERATING DEVICE, PLASMA GENERATING METHOD, AND METHOD FOR SUPPRESSING OZONE GENERATION 有权等离子体生成装置，等离子体生成方法和用于抑制臭氧发生的方法公开(公告)号：US20140003994A1
公开(公告)日：2014-01-02
申请号：US13884469
申请日：2011-11-09
申请人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yuki Kumagai , Yoko Nakayama , Hideo Nojima , Myung Chul Kim
发明人： Kazutoshi Takenoshita , Makoto Miyamoto , Seiro Yuge , Yuki Kumagai , Yoko Nakayama , Hideo Nojima , Myung Chul Kim
IPC分类号： A61L9/015
CPC分类号： A61L9/015 , A61L9/22 , A61L2209/212 , H05H1/2406 , H05H2001/2412 , H05H2245/121
摘要： The purpose of the present invention is to minimize ozone production while increasing the production of an active species. The plasma generating device (100) comprises: a pair of electrodes (21, 22) in which dielectric films (21a, 21b) are disposed on at least one opposing face; voltage application means (4) for applying a pulse voltage across the electrodes (21, 22) to bring about a plasma discharger; and fluid circulation holes (21b, 22b) that are disposed in locations corresponding to the electrodes (21, 22), respectively, and that are configured to pass entirely therethrough. The plasma generating device is also configured such that a fluid passing through the fluid circulation holes (21b, 22b) comes into contact with the plasma, generating ions or radicals, wherein the voltage applying means (4) varies the peak value and/or the pulse width of the pulse voltage applied across the electrodes (21, 22).
摘要翻译： 本发明的目的是在增加活性物质的生产的同时最小化臭氧产生。 等离子体产生装置（100）包括：一对电极（21,22），其中介电膜（21a，21b）设置在至少一个相对面上; 电压施加装置（4），用于在电极（21,22）之间施加脉冲电压以产生等离子体放电器; 和流体循环孔（21b，22b），其分别设置在与电极（21,22）对应的位置，并且被配置为完全通过。 等离子体产生装置还被构造成使得通过流体循环孔（21b，22b）的流体与等离子体接触，产生离子或自由基，其中电压施加装置（4）改变峰值和/或 施加在电极（21,22）上的脉冲电压的脉冲宽度。
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公开(公告)号：US20140010708A1
公开(公告)日：2014-01-09
申请号：US13884457
申请日：2011-11-09
IPC分类号： A61L9/22
CPC分类号： A61L9/22 , A61L2/14 , A61L2202/23 , F25B2400/12 , F25D2317/0415 , H05H1/2406 , H05H2001/2412
摘要： The present invention obtains both the feature of deodorizing by means of active species and the feature of killing floating and attached bacteria by releasing the active species to the exterior of a device. The present invention is provided with a pair of electrodes (21, 22), electrode (21) being arranged with the dielectric film (21a) on the surface facing electrode (22) and electrode (22) being arranged with dielectric film (22a) on the surface facing electrode (21), wherein plasma is discharged when a predetermined voltage is applied between the electrodes (21, 22). The present invention is configured in a manner such that a fluid through-hole (21b, 22b) is disposed on and through each electrode (21, 22) on a corresponding location, and is characterized in that at least a portion of the outline of the corresponding fluid through-holes (21b, 22b) are positioned at a different position from one another when viewing from face plate direction of the electrodes.
摘要翻译： 本发明通过活性物质获得除臭的特征和通过将活性物质释放到装置的外部来杀死浮游和附着的细菌的特征。 本发明设置有一对电极（21,22），电极（21）与表面对置电极（22）上的电介质膜（21a）和电介质膜（22a）配置的电极（22） 在所述表面对置电极（21）上，其中当在所述电极（21,22）之间施加预定电压时，等离子体被放电。 本发明的结构是这样一种方式，使流体通孔（21b，22b）设置在相应位置上并穿过每个电极（21,22）上，并且其特征在于，至少一部分轮廓线 当从电极的面板方向观察时，相应的流体通孔（21b，22b）被定位在彼此不同的位置。
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公开(公告)号：US07718985B1
公开(公告)日：2010-05-18
申请号：US11586975
申请日：2006-10-26
申请人： Robert Bernath , Christopher Brown , Joshua Duncan , Kazutoshi Takenoshita , Martin Richardson , Jose A. Cunado
发明人： Robert Bernath , Christopher Brown , Joshua Duncan , Kazutoshi Takenoshita , Martin Richardson , Jose A. Cunado
IPC分类号： H01J35/08
摘要： Methods, systems, apparatus, devices for tracking, controlling and providing feedback on droplets used in EUV source technology. The method and system track and correct positions of droplet targets and generated plasma including generating the droplet target or plasma, optically imaging the generated target, determining position coordinates, comparing the position coordinates to a set optimal position to determine if a deviation has occurred and moving the generated target back to the optimal position if the deviation has occurred. The optical imaging step includes activating a light source to image the generated target, the light source is strobed at approximately the same rate as the droplet production to provide illumination of the droplet for stroboscopic imaging. The step of moving is accomplished mechanically by moving the generated target back to the predefined position or electronically under computer control.
摘要翻译： 用于跟踪，控制和提供EUV源技术中使用的液滴反馈的方法，系统，设备，装置。 方法和系统跟踪和校正液滴目标和产生的等离子体的位置，包括产生液滴目标或等离子体，光学地成像生成的目标，确定位置坐标，将位置坐标与设定的最佳位置进行比较，以确定偏差是否发生和移动 如果发生偏差，则生成的目标返回到最佳位置。 光学成像步骤包括激活光源以对生成的目标进行成像，以与液滴产生大致相同的速率选择光源以提供用于频闪成像的液滴的照明。 移动的步骤是通过将生成的目标物回到预定位置或在计算机控制下以电子方式机械地实现的。
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公开(公告)号：US07361204B1
公开(公告)日：2008-04-22
申请号：US10982272
申请日：2004-11-05
IPC分类号： B22F9/04
CPC分类号： B22F9/04 , B22F2998/00 , C30B7/02 , C30B29/60 , Y10S977/889 , B22F1/0018
摘要： Methods, systems and apparatus for producing a variable, known number of nanoparticles of various materials in an expanding mist in a vacuum or enclosure. The configurations allow for this mist of small particles to be produced in bursts, at repetition rates over a wide range of frequencies. The technique produces an isotropically expanding mist of particles. Direct applications of the invention can be used for the development of high power short wavelength incoherent light sources for applications in EUV lithography (EUVL), advanced microscopy, precision metrology, and other fields.
摘要翻译： 用于在真空或外壳中膨胀的雾中生产各种材料的可变已知数量的纳米颗粒的方法，系统和装置。 这些配置允许在多个频率范围内以重复率在脉冲串中产生这种小颗粒的雾。 该技术产生各向异性扩散的颗粒雾。 本发明的直接应用可用于开发用于EUV光刻（EUVL），高级显微镜，精密计量学等领域的高功率短波非相干光源。
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公开(公告)号：US08025837B2
公开(公告)日：2011-09-27
申请号：US11986057
申请日：2007-11-20
IPC分类号： C21C1/00
CPC分类号： B22F9/04 , B22F2998/00 , C30B7/02 , C30B29/60 , Y10S977/889 , B22F1/0018
摘要： Methods, systems and apparatus for producing a variable, known number of nanoparticles of various materials in an expanding mist in a vacuum or enclosure. The configurations allow for this mist of small particles to be produced in bursts, at repetition rates over a wide range of frequencies. The technique produces an isotropically expanding mist of particles. Direct applications of the invention can be used for the development of high power short wavelength incoherent light sources for applications in EUV lithography (EUVL), advanced microscopy, precision metrology, and other fields.
摘要翻译： 用于在真空或外壳中膨胀的雾中生产各种材料的可变已知数量的纳米颗粒的方法，系统和装置。 这些配置允许在多个频率范围内以重复率在脉冲串中产生这种小颗粒的雾。 该技术产生各向异性扩散的颗粒雾。 本发明的直接应用可用于开发用于EUV光刻（EUVL），高级显微镜，精密计量学等领域的高功率短波非相干光源。
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公开(公告)号：US20080142738A1
公开(公告)日：2008-06-19
申请号：US11986057
申请日：2007-11-20
IPC分类号： G21G5/00
CPC分类号： B22F9/04 , B22F2998/00 , C30B7/02 , C30B29/60 , Y10S977/889 , B22F1/0018
摘要： Methods, systems and apparatus for producing a variable, known number of nanoparticles of various materials in an expanding mist in a vacuum or enclosure. The configurations allow for this mist of small particles to be produced in bursts, at repetition rates over a wide range of frequencies. The technique produces an isotropically expanding mist of particles. Direct applications of the invention can be used for the development of high power short wavelength incoherent light sources for applications in EUV lithography (EUVL), advanced microscopy, precision metrology, and other fields.
摘要翻译： 用于在真空或外壳中膨胀的雾中生产各种材料的可变已知数量的纳米颗粒的方法，系统和装置。 这些配置允许在多个频率范围内以重复率在脉冲串中产生这种小颗粒的雾。 该技术产生各向异性扩散的颗粒雾。 本发明的直接应用可用于开发用于EUV光刻（EUVL），高级显微镜，精密计量学等领域的高功率短波非相干光源。
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