公开(公告)号：US20080257497A1

公开(公告)日：2008-10-23

申请号：US12022811

申请日：2008-01-30

申请人： Keiichi Shimaoka ,  Jiro Sakata ,  Takanori Mizuno ,  Katsuharu Okuda ,  Masayuki Matsui ,  Yasuhiko Suzuki

发明人： Keiichi Shimaoka ,  Jiro Sakata ,  Takanori Mizuno ,  Katsuharu Okuda ,  Masayuki Matsui ,  Yasuhiko Suzuki

IPC分类号： H01L21/306

CPC分类号： H01L21/31116 ,  H01L21/3065 ,  H01L21/32135 ,  H01L21/67069

摘要： A process for manufacturing a hollow silicon structure is simplified. A device for manufacturing the silicon structure is a device that manufactures the hollow silicon structure by processing a silicon structure, the silicon structure consisting of a silicon oxide layer formed on a silicon substrate, the silicon oxide layer being covered by a silicon layer. The device is provided with first gas supply members 20 and 21, second gas supply members 30 and 31, an etching reaction chamber 10, selective connecting means 23 to 26, 34 and 35, and a gas discharging means 42. The first gas etches silicon. The second gas etches silicon oxide and barely etches silicon. The selective connecting means 23 to 26, 34 and 35 selectively connect the etching reaction chamber 10 with either the first gas supply members 20 and 21 or the second gas supply members 30 and 31. The gas discharging means 42 discharges gas from the etching reaction chamber 10.

摘要翻译： 制造中空硅结构的方法简化。 用于制造硅结构的器件是通过处理硅结构制造中空硅结构的器件，由在硅衬底上形成的氧化硅层构成的硅结构，氧化硅层被硅层覆盖。 该装置设置有第一气体供给构件20和21，第二气体供给构件30和31，蚀刻反应室10，选择性连接装置23至26,34和35以及气体排出装置42。 第一个气体蚀刻硅。 第二种气体蚀刻氧化硅，几乎不蚀刻硅。 选择性连接装置23至26,34和35选择性地将蚀刻反应室10与第一气体供应构件20和21或第二气体供应构件30和31连接。 气体排出装置42从蚀刻反应室10排出气体。

公开(公告)号：US06802222B2

公开(公告)日：2004-10-12

申请号：US10142162

申请日：2002-05-10

申请人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Keiichi Shimaoka ,  Hirofumi Funahashi

发明人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Keiichi Shimaoka ,  Hirofumi Funahashi

IPC分类号： G01L912

CPC分类号： G01L9/0073

摘要： A diaphragm-type semiconductor device includes a semiconductor substrate, a surface of which is substantially flat, a diaphragm, which covers a circular pressure reference space located on the surface, and a circular electrode layer, a middle part of which is embedded in the diaphragm. The electrode layer is larger than the space and is coaxial with the space. Therefore, internal stress is balanced between inner and outer sides of the diaphragm, and a step formed at the outer edge of the top electrode layer is separated from the diaphragm. The device also includes a step adjuster around the space on the surface. Therefore, another step formed at the outer edge of the space disappears, and a new step is formed separately from the diaphragm at the outer edge of the step adjuster. With this structure, the diaphragm has a desired flatness.

摘要翻译： 膜片型半导体器件包括其表面基本平坦的半导体衬底，覆盖位于表面上的圆形基准空间的膜片和圆形电极层，其中间部分嵌入隔膜 。 电极层比空间大，与空间同轴。 因此，内部应力在隔膜的内侧和外侧之间平衡，并且形成在顶部电极层的外边缘处的台阶与隔膜分离。 该装置还包括在表面上的空间周围的台阶调节器。 因此，形成在空间的外边缘的另一台阶消失，并且在台阶调节器的外边缘处与隔膜分开形成新的台阶。 通过这种结构，隔膜具有期望的平坦度。

公开(公告)号：US06640643B2

公开(公告)日：2003-11-04

申请号：US10196210

申请日：2002-07-17

申请人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Keiichi Shimaoka ,  Hirofumi Funabashi

发明人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Keiichi Shimaoka ,  Hirofumi Funabashi

IPC分类号： G01L912

CPC分类号： G01L9/0042 ,  G01L9/0073

摘要： On a substrate, first and second capacitive portions are formed to have movable diaphragms having different areas for pressure measurement and diagnostic, wherein a communication structure is provided between the cavity spaces of the first and second capacitive portions to equalize the pressure in the first capacitive space to that of the second capacitive space. The different sizes provide different sensitivity for efficient diagnostic. The first and second capacitive portions can be made in one diaphragm, wherein the second capacitive portion is formed around the first capacitive portion. The cavity spaces of the first and second capacitive portions are connected. Moreover, between the first and second capacitive spaces, an insulation portion may be formed in a ring shape to support the diaphragm portion of the first capacitive portion and the diaphragm portion the second capacitive portion with communication portions.

摘要翻译： 在基板上，第一和第二电容部分形成为具有用于压力测量和诊断的不同区域的可移动隔膜，其中在第一和第二电容部分的空腔之间设置有连通结构，以使第一电容空间 到第二电容空间。 不同的尺寸为有效的诊断提供不同的灵敏度。 第一和第二电容部分可以制成在一个隔膜中，其中第二电容部分围绕第一电容部分形成。 连接第一和第二电容部分的空腔。 此外，在第一和第二电容空间之间，绝缘部分可以形成为环形，以将第一电容部分的隔膜部分和隔膜部分支撑为具有连通部分的第二电容部分。

公开(公告)号：US20060284516A1

公开(公告)日：2006-12-21

申请号：US11448799

申请日：2006-06-08

申请人： Keiichi Shimaoka ,  Hirofumi Funabashi ,  Yasuichi Mitsushima ,  Toshiaki Nakagawa ,  Toshihiro Wakita ,  Shigeru Ando ,  Nobutaka Ono

发明人： Keiichi Shimaoka ,  Hirofumi Funabashi ,  Yasuichi Mitsushima ,  Toshiaki Nakagawa ,  Toshihiro Wakita ,  Shigeru Ando ,  Nobutaka Ono

IPC分类号： H01L41/00

CPC分类号： H04R19/04 ,  H04R3/005

摘要： A microphone that may identify the direction along which acoustic waves propagate with one diaphragm, and which has superior durability is provided. The microphone comprises a circular diaphragm. The diaphragm is supported at the center portion thereof. When the diaphragm receives acoustic waves, each position around the center thereof will vibrate with a phase depending upon the direction of the acoustic waves. First electrodes are arranged on one of the surfaces of the diaphragm. Second electrodes are arranged so that each second electrode faces corresponding first electrode with gap. Each first electrode and corresponding second electrode facing thereto form a first capacitor. Third electrodes are arranged on the other surface of the diaphragm. Fourth electrodes are arranged so that each fourth electrode faces corresponding third electrode with gap. Each third electrode and corresponding fourth electrode facing thereto form a second capacitor. The controller applies a voltage to each of the second capacitors so that the capacitance of each of the first capacitors will be a constant value. The controller identifies the direction along which the acoustic waves propagate based on the difference in the voltages applied to each of the second capacitors. Vibration of the diaphragm will be inhibited by the voltages applied to the second capacitors while the direction is identified based on the voltages. The durability of the diaphragm can be improved.

摘要翻译： 提供可以识别声波以一个隔膜传播的方向并且具有优异的耐久性的麦克风。 麦克风包括圆形隔膜。 隔膜在其中心部分被支撑。 当隔膜接收到声波时，围绕其中心的每个位置将根据声波的方向以相位振动。 第一电极布置在隔膜的一个表面上。 第二电极布置成使得每个第二电极面对具有间隙的相应的第一电极。 每个第一电极和与其对应的相应的第二电极形成第一电容器。 第三电极布置在隔膜的另一个表面上。 第四电极布置成使得每个第四电极具有间隙的相应的第三电极。 每个第三电极和与其对应的相应的第四电极形成第二电容器。 控制器向每个第二电容器施加电压，使得每个第一电容器的电容将为恒定值。 控制器基于施加到每个第二电容器的电压的差异来识别声波传播的方向。 通过施加到第二电容器的电压来抑制振膜的振动，同时基于电压来识别方向。 可以提高隔膜的耐久性。

公开(公告)号：US06809527B2

公开(公告)日：2004-10-26

申请号：US10189599

申请日：2002-07-08

申请人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Hajime Ito ,  Yasuaki Makino ,  Norikazu Ohta ,  Keiichi Shimaoka ,  Hirofumi Funahashi

发明人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Hajime Ito ,  Yasuaki Makino ,  Norikazu Ohta ,  Keiichi Shimaoka ,  Hirofumi Funahashi

IPC分类号： G01R2726

CPC分类号： G01R27/2605

摘要： First and second predetermined charging voltages are applied between the movable and fixed electrodes of a capacitive type of sensor to measure first and second capacitances between the movable and fixed electrodes, respectively. The first and second electrostatic capacitances are compared to obtain a characteristic of the sensor from a result of comparison. In measuring the first and second capacitances, first and second charging voltages are generated of which magnitudes are determined in accordance with the first and second capacitances, respectively. Equalization is made between the first output voltage when the first charging voltage is applied between the movable and fixed electrodes in a predetermined normal condition of the movable electrode and the second output voltage outputted when the second charging voltage is applied between the movable and fixed electrodes in the predetermined normal condition.

摘要翻译： 第一和第二预定充电电压被施加在电容式传感器的可移动和固定电极之间，以分别测量可移动和固定电极之间的第一和第二电容。 比较第一和第二静电电容，以从比较结果获得传感器的特性。 在测量第一和第二电容时，分别产生根据第一和第二电容确定幅度的第一和第二充电电压。 在第一充电电压在可动电极的预定正常状态下施加于可动电极与固定电极之间的第一输出电压和在可动电极和固定电极之间施加第二充电电压时输出的第二输出电压之间进行均衡 预定的正常状态。

公开(公告)号：US06647795B2

公开(公告)日：2003-11-18

申请号：US10157229

申请日：2002-05-30

申请人： Yasutoshi Suzuki ,  Seiichiro Ishio ,  Keiichi Shimaoka ,  Norikazu Ohta ,  Hirofumi Funabashi

发明人： Yasutoshi Suzuki ,  Seiichiro Ishio ,  Keiichi Shimaoka ,  Norikazu Ohta ,  Hirofumi Funabashi

IPC分类号： G01L900

CPC分类号： G01L1/144 ,  G01L1/148

摘要： A capacitive physical load sensor includes a substrate, which has fixed electrodes, and a diaphragm, which has movable electrodes. The diaphragm is located across a gap from the substrate, and retaining parts for the diaphragm are formed around the diaphragm. Protruding parts extend into the gap from the diaphragm or from the substrate. The protruding parts support the diaphragm at different levels of deformation to alter the characteristics of the diaphragm and extend its range.

公开(公告)号：US4589290A

公开(公告)日：1986-05-20

申请号：US684390

申请日：1984-12-20

申请人： Jun Sugiyama ,  Yutaka Nonomura ,  Kouji Tsukada ,  Keiichi Shimaoka ,  Masaharu Takeuchi ,  Takashi Takeuchi

发明人： Jun Sugiyama ,  Yutaka Nonomura ,  Kouji Tsukada ,  Keiichi Shimaoka ,  Masaharu Takeuchi ,  Takashi Takeuchi

IPC分类号： G01L3/10

CPC分类号： G01L3/102 ,  G01L3/105 ,  Y10S73/02

摘要： A torque sensor for detecting variation in the drive torque of an automobile comprises an excitation coil wound on an excitation core and a detection coil wound on a detection core. The coils and cores are inserted into a chamber formed within a bearing for supporting a drive shaft and having an opening along the sliding surface of the bearing. The poles of the excitation core and the poles of the detection core are respectively disposed at prescribed clearances from the surface of the drive shaft in such manner that the poles of the detection core intersect the excitation core between its poles, whereby variation in drive torque is detected as magnetostriction.

摘要翻译： 用于检测汽车的驱动转矩变化的扭矩传感器包括缠绕在激励芯上的励磁线圈和卷绕在检测芯上的检测线圈。 线圈和芯线插入形成在轴承内的腔室中，用于支撑驱动轴并具有沿着轴承的滑动表面的开口。 励磁铁心和检测铁心的极分别以驱动轴的表面以规定的间隙设置，使得检测铁芯的磁极与励磁铁芯之间的极点相交，由此驱动转矩的变化是 被检测为磁致伸缩。

公开(公告)号：US06584852B2

公开(公告)日：2003-07-01

申请号：US10176590

申请日：2002-06-24

申请人： Yasutoshi Suzuki ,  Seiichiro Ishio ,  Tetsuo Fujii ,  Keiichi Shimaoka ,  Hirofumi Funahashi

发明人： Yasutoshi Suzuki ,  Seiichiro Ishio ,  Tetsuo Fujii ,  Keiichi Shimaoka ,  Hirofumi Funahashi

IPC分类号： G01L912

CPC分类号： G01L9/0073

摘要： An electrical capacitance pressure sensor has a lower electrode, a movable electrode, and an upper electrode. A first cavity portion is formed between the lower electrode and the movable electrode. A second cavity portion is formed between the upper electrode and the movable electrode. The substrate has an opening portion that penetrates the substrate from the first surface to the second surface thereof. The lower electrode has at least one first window portion that penetrates the lower electrode from the side of the substrate to the side of the first cavity portion and communicates the cavity portion to the opening portion of the substrate. The upper electrode has at least one second window portion that penetrates the upper electrode from the side of the cavity portion to the outside thereof to communicate the cavity portion with the outside.

摘要翻译： 电容式压力传感器具有下电极，可动电极和上电极。 第一空腔部分形成在下电极和可动电极之间。 第二空腔部分形成在上电极和可动电极之间。 衬底具有从第一表面到第二表面穿透衬底的开口部分。 下电极具有至少一个第一窗口部分，其从基板的侧面到第一空腔部分的侧面穿透下电极，并且将空腔部分连通到基板的开口部分。 上电极具有至少一个第二窗口部分，其从空腔部分的侧面向外部贯穿上部电极，以将空腔部分与外部连通。

公开(公告)号：US20080175012A1

公开(公告)日：2008-07-24

申请号：US11984085

申请日：2007-11-13

申请人： Keiichi Shimaoka ,  Kanae Murata ,  Yuichi Tanaka ,  Yoshiteru Omura ,  Isao Aoyagi ,  Norio Fujitsuka ,  Hiroyuki Matsubara

发明人： Keiichi Shimaoka ,  Kanae Murata ,  Yuichi Tanaka ,  Yoshiteru Omura ,  Isao Aoyagi ,  Norio Fujitsuka ,  Hiroyuki Matsubara

IPC分类号： B60Q1/24

CPC分类号： B60Q1/085 ,  B60Q1/525 ,  B60Q9/008 ,  B60Q2300/112 ,  B60Q2300/122 ,  B60Q2300/45 ,  B60Q2400/50 ,  B60T2210/32

摘要： An alerting illumination device, which includes a detecting component, a danger degree estimating component, a danger assuming component, an illuminating component and a controlling component, is provided. The danger degree estimating component estimates a degree of danger, with respect to a subject vehicle, of the person detected by the detecting component. The danger assuming component, on the basis of the estimated degree of danger, assumes whether or not the person detected by the detecting component is a danger with respect to the subject vehicle. The illuminating component illuminates light. The controlling component, in a case in which the danger assuming component assumes that the person is a danger, controls the illuminating component such that light, which shows a direction of the person who is assumed to be a danger and a distance to the person, is illuminated onto a road surface.

摘要翻译： 提供了一种警报照明装置，其包括检测部件，危险度估计部件，危险假定部件，照明部件和控制部件。 危险度估计部件估计由检测部件检测到的人对于本车辆的危险程度。 基于估计的危险程度的危险假设部件假设检测部件检测到的人是否对于本车辆是危险的。 照明组件照亮光。 控制部件在危险假定部件假设人为危险的情况下，控制照明部件，使得显示假定为危险的人的方向和与人的距离的光， 被照亮到路面上。

公开(公告)号：US06744258B2

公开(公告)日：2004-06-01

申请号：US10189565

申请日：2002-07-08

申请人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Hajime Ito ,  Yasuaki Makino ,  Norikazu Ohta ,  Keiichi Shimaoka ,  Hirofumi Funabashi

发明人： Seiichiro Ishio ,  Yasutoshi Suzuki ,  Hajime Ito ,  Yasuaki Makino ,  Norikazu Ohta ,  Keiichi Shimaoka ,  Hirofumi Funabashi

IPC分类号： G01R3112

CPC分类号： G01D3/08

摘要： In a capacitive sensor apparatus, a capacitive sensor includes a plurality of physical-quantity-detection capacitors each having a movable electrode and a fixed electrode. A conversion device operates for converting an output signal of the capacitive sensor into an apparatus output signal. Each of the physical-quantity-detection capacitors is selectively connected and disconnected to and from the conversion device. A determination is made as to whether or not each of the physical-quantity-detection capacitors fails in response to the sensor output signal. When it is determined that a first one of the physical-quantity-detection capacitors fails, the first one is disconnected from the conversion device and a second one of the physical-quantity-detection capacitors is connected to the conversion device.

摘要翻译： 在电容传感器装置中，电容式传感器包括多个物理量检测电容器，每个物理量检测电容器具有可动电极和固定电极。 转换装置用于将电容式传感器的输出信号转换成装置输出信号。 每个物理量检测电容器被选择性地连接到转换装置和从转换装置断开。 确定每个物理量检测电容器是否响应于传感器输出信号而失败。 当确定物理量检测电容器中的第一个电容器发生故障时，第一个物理量检测电容器与转换装置断开连接，并且第二个物理量检测电容器连接到转换装置。