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公开(公告)号：US20090250594A1
公开(公告)日：2009-10-08
申请号：US12415127
申请日：2009-03-31
IPC分类号： H01L27/146 , H01L21/00 , H01L27/14
CPC分类号： H01L27/14627 , G02B5/201 , H01L27/14621 , H01L27/14623 , H01L27/14685 , H01L27/14689
摘要： A solid-state image sensor that has a high pixel count and includes a color filter having high color reproducibility is provided. The solid-state image sensor includes: light-collecting elements each of which is a medium containing dispersant particles; light-receiving elements each of which is provided for a corresponding one of the light-collecting elements, and which receives light collected by the corresponding one of the light-collecting elements and generates an electric signal; and electrical wiring for transferring the electric signal, wherein each of the light-collecting elements has one of plural light-dispersion functions that are different depending on the corresponding light-receiving elements.
摘要翻译： 提供了具有高像素数并且包括具有高颜色再现性的滤色器的固态图像传感器。 固态图像传感器包括：各自是含有分散剂颗粒的介质的集光元件; 光接收元件被设置用于相应的一个集光元件，并且接收由相应的一个光收集元件收集的光并产生电信号; 以及用于传送电信号的电线，其中每个集光元件具有根据相应的光接收元件而不同的多个光分散功能之一。
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公开(公告)号：US08610228B2
公开(公告)日：2013-12-17
申请号：US13054222
申请日：2009-07-16
IPC分类号： H01L31/0232
CPC分类号： G02B3/0056 , G02B3/0087 , G02B3/08 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14629 , H01L27/14632 , H01L27/14685
摘要： A solid-state image sensor having a configuration which reduces increases in light-collection loss and light mixing due to an increase in the angle of light entering into a waveguide path during oblique incidence and which is effective for sensitivity improvement includes: an Si substrate; unit-pixels arranged on the Si substrate; a wiring layer formed on the unit-pixels; optical waveguide regions each formed on a photoelectric conversion region included in a corresponding one of the unit-pixels, and penetrating the wiring layer; and light-collecting elements each formed above a corresponding one of the optical waveguide regions, wherein each of the light-collecting elements is a gradient index microlens having an effective refractive index distribution.
摘要翻译： 一种固态图像传感器，其具有减少由于在倾斜入射期间进入波导路径的光的角度增加而引起的光收集损失和光混合的增加并且对灵敏度改善有效的构造，其包括：Si衬底; 布置在Si衬底上的单位像素; 形成在单位像素上的布线层; 每个光波导区域形成在包括在相应的一个单位像素中的光电转换区域上并穿透布线层; 以及各自形成在相应的一个光波导区域上方的光收集元件，其中每个聚光元件是具有有效折射率分布的梯度折射率微透镜。
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公开(公告)号：US20110121422A1
公开(公告)日：2011-05-26
申请号：US13054222
申请日：2009-07-16
IPC分类号： H01L31/0232
CPC分类号： G02B3/0056 , G02B3/0087 , G02B3/08 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14629 , H01L27/14632 , H01L27/14685
摘要： A solid-state image sensor having a configuration which reduces increases in light-collection loss and light mixing due to an increase in the angle of light entering into a waveguide path during oblique incidence and which is effective for sensitivity improvement includes: an Si substrate; unit-pixels arranged on the Si substrate; a wiring layer formed on the unit-pixels; optical waveguide regions each formed on a photoelectric conversion region included in a corresponding one of the unit-pixels, and penetrating the wiring layer; and light-collecting elements each formed above a corresponding one of the optical waveguide regions, wherein each of the light-collecting elements is a gradient index microlens having an effective refractive index distribution.
摘要翻译： 一种固态图像传感器，其具有减少由于在倾斜入射期间进入波导路径的光的角度增加而引起的光收集损失和光混合的增加并且对灵敏度改善有效的构造，其包括：Si衬底; 布置在Si衬底上的单位像素; 形成在单位像素上的布线层; 每个光波导区域形成在包括在相应的一个单位像素中的光电转换区域上并穿透布线层; 以及各自形成在相应的一个光波导区域上方的光收集元件，其中每个聚光元件是具有有效折射率分布的梯度折射率微透镜。
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4.发明授权公开(公告)号：US07768711B2
公开(公告)日：2010-08-03
申请号：US11423989
申请日：2006-06-14
IPC分类号： G02B3/00
CPC分类号： G02B5/1847 , G02B5/1876 , G02B5/1885 , G02B27/4205
摘要： The present invention provides a method of manufacturing a lens, in which the method includes exposing a photoresist to light using a phase shift mask. Here, the phase shift mask includes layout portions respectively corresponding to pixels and lens, in which each of the layout portions has: a light-blocking portion which has a shape of a substantially circle or a substantially concentric zone; a light-transmitting portion which has a shape of a substantially circle or a substantially concentric zone; a phase shift portion which has a shape of a substantially circle or a substantially concentric zone; and a light-blocking frame. Furthermore, the light-transmitting portion, the light-blocking portion and the phase shift portion are arranged alternately so as to form concentric circles, and the light-blocking frame corresponds to a whole or a part of a perimeter of the lens.
摘要翻译： 本发明提供一种制造透镜的方法，其中所述方法包括使用相移掩模将光致抗蚀剂曝光。 这里，相移掩模包括分别对应于像素和透镜的布局部分，其中每个布局部分具有：具有基本圆形或基本同心的形状的遮光部分; 具有基本上圆形或大体上同心的形状的透光部分; 相移部，其具有大致圆形或大致同心的区域的形状; 和遮光框架。 此外，光透射部分，遮光部分和相移部分交替地布置以形成同心圆，并且遮光框对应于透镜的周边的全部或一部分。
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公开(公告)号：US07846620B2
公开(公告)日：2010-12-07
申请号：US11860756
申请日：2007-09-25
IPC分类号： G03F1/00
CPC分类号： G03F7/0005 , G03F1/30
摘要： The phase shift mask according to the present invention is a phase shift mask for manufacturing a semiconductor device. The phase shift mask includes a light-blocking portion, a light-transmitting portion, a phase shift portion, and an auxiliary pattern portion, the light-blocking portion, the light-transmitting portion, the phase shift portion, and the auxiliary pattern portion being concentrically arranged, wherein a width of the auxiliary pattern portion in a radius direction is less than a width of the light-transmitting portion and a width of the phase shift portion in a radius direction. Furthermore, it is possible that a phase of exposure light which passes through an auxiliary pattern portion is opposite to a phase of exposure light which passes through a light-transmitting portion or a phase shift portion, the light-transmitting portion or the phase shift portion being the closest to the auxiliary pattern portion.
摘要翻译： 根据本发明的相移掩模是用于制造半导体器件的相移掩模。 相移掩模包括遮光部分，透光部分，相移部分和辅助图案部分，遮光部分，透光部分，相移部分和辅助图案部分 其中所述辅助图形部分在半径方向上的宽度小于所述透光部分的宽度和所述相移部分在半径方向上的宽度。 此外，通过辅助图案部分的曝光光的相位可能与通过透光部分或相移部分的曝光光的相位相反，透光部分或相移部分 最靠近辅助图案部分。
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6.发明授权公开(公告)号：US07663084B2
公开(公告)日：2010-02-16
申请号：US12189971
申请日：2008-08-12
IPC分类号： H01L27/00
CPC分类号： H01L27/14627 , H01L27/14685
摘要： A solid-state imaging apparatus includes a plurality of unit pixels with associated microlenses arranged in a two-dimensional array. Each microlens includes a distributed index lens with a modulated effective refractive index distribution obtained by including a combination of a plurality of patterns having a concentric structure, the plurality of patterns being divided into line widths equal to or shorter than a wavelength of an incident light. At least one of the plurality of patterns includes a lower light-transmitting film having the concentric structure and a first line width and a first film thickness, and an upper light-transmitting film having the concentric structure configured on the lower light-transmitting film having a second line width and a second film thickness. The distributed index lens has a structure in which a refractive index material is dense at a center and becomes sparse gradually toward an outer side in the concentric structure.
摘要翻译： 固态成像装置包括具有以二维阵列排列的相关联的微透镜的多个单位像素。 每个微透镜包括具有调制的有效折射率分布的分布式折射率透镜，通过包括具有同心结构的多个图案的组合而获得，所述多个图案被划分成等于或短于入射光的波长的线宽。 多个图案中的至少一个图案包括具有同心结构且第一线宽度和第一膜厚度的下部透光膜，以及具有同心结构的上部透光膜，其在下部透光膜上具有 第二线宽度和第二膜厚度。 分布式折射率透镜具有其中折射率材料在中心处致密并且在同心结构中朝向外侧逐渐变稀的结构。
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7.发明授权公开(公告)号：US07692129B2
公开(公告)日：2010-04-06
申请号：US11423776
申请日：2006-06-13
IPC分类号： H01L27/00
CPC分类号： H01L27/14627 , H01L27/14685
摘要： The present invention provides a solid-state imaging apparatus and the like which is able to support an optical system whose incident angle is wide. Each pixel is 2.25 μm square in size, and includes a distributed index lens (1), a color filter (for example, for green) (2), an Al interconnections (3), a signal transmitting unit (4), a planarized layer (5), a light-receiving device (Si photodiodes) (6), and an Si substrate (7). The two-stage concentric circle structure of the distributed index lens is formed by SiO2 (n=2) with the film thickness 1.2 μm (“grey color”), the film thickness 0.8 μm (“dots pattern”) and the film thickness of 0 μm (“without pattern: white color”), and the medium surrounding the distributed index lens (1)is air (n=1).
摘要翻译： 本发明提供能够支持入射角较宽的光学系统的固体摄像装置等。 每个像素的尺寸为2.25μm正方形，并且包括分布式折射率透镜（1），滤色器（例如，绿色）（2），Al互连（3），信号发送单元（4），平面化 层（5），光接收装置（Si光电二极管）（6）和Si衬底（7）。 分布式折射率透镜的两级同心圆结构由SiO 2（n = 2）形成，膜厚为1.2μm（“灰色”），膜厚为0.8μm（“点图案”），膜厚为 0μm（“无图案：白色”），分布式折射率透镜（1）周围的介质为空气（n = 1）。
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8.发明授权公开(公告)号：US07667286B2
公开(公告)日：2010-02-23
申请号：US11658666
申请日：2005-09-01
IPC分类号： H01L31/0232
CPC分类号： G02B5/1876 , G02B5/1885 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14632 , H01L27/14685 , H01L27/14687 , H01L31/02162 , H01L31/02327
摘要： A high sensitive solid-state imaging apparatus which corresponds to an optical system has a short focal length (an optical system having a large incident angle θ). Each pixel (2.8 mm square in size) includes a distributed refractive index lens, a color filter for green, Al wirings, a signal transmitting unit, a planarized layer, a light-receiving element (Si photodiode), and an Si substrate. The concentric circle structure of the distributed index lens is made of four types of materials having different refractive indexes such as TiO2 (n=2.53), SiN (n=2.53), SiO2 (n=2.53), and air (n=1.0). In the concentric structure, a radial difference of outer peripheries of adjacent circular light-transmitting films is 100 nm. Furthermore, the film thickness is 0.4 νm.
摘要翻译： 对应于光学系统的高灵敏度固态成像装置具有短焦距（具有大入射角的光学系统）。 每个像素（尺寸为2.8mm正方形）包括分布折射率透镜，绿色滤色器，Al布线，信号传输单元，平面化层，光接收元件（Si光电二极管）和Si衬底。 分布式折射率透镜的同心圆结构由诸如TiO 2（n = 2.53），SiN（n = 2.53），SiO 2（n = 2.53）和空气（n = 1.0）的折射率不同的四种材料制成， 。 在同心结构中，相邻圆形透光膜的外周的径向差为100nm。 此外，膜厚度为0.4μm。
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9.发明申请Liquid crystal display projector, liquid crystal display panel, and manufacturing method thereof 审中-公开液晶显示投影仪，液晶显示面板及其制造方法公开(公告)号：US20060066775A1
公开(公告)日：2006-03-30
申请号：US11235225
申请日：2005-09-27
申请人： Kimiaki Toshikiyo
发明人： Kimiaki Toshikiyo
IPC分类号： G02F1/1335
CPC分类号： H04N9/3108 , G02F1/133526 , H04N9/315
摘要： An optical device and the like which can collect incident light with a higher angle than an existing microlens is provided in order to realize a liquid crystal display panel corresponding to an optical system having a greater incident angle θ. A unit pixel (20 μm square in size) of a liquid crystal display panel includes a gradient index lens 1, a color filter 2 for green G, a black matrix filter 3, transparent electrodes 4, a liquid crystal layer 5, a counter glass substrate 6, and a glass substrate 7. The gradient index lens having a concentric circle structure is made up of high refractive index materials 10 (e.g. TiO2 (n=2.43)) and low refractive index materials 11 (e.g. air (n=1.0)), and a difference of radiuses of parameters of circular light-transmitting films that are adjacent to each other is 200 nm. Further, the film thickness is 0.5 μm.
摘要翻译： 提供了可以收集比现有微透镜更大角度的入射光的光学装置等，以便实现对应于具有较大入射角θ的光学系统的液晶显示面板。
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公开(公告)号：US08018508B2
公开(公告)日：2011-09-13
申请号：US10576023
申请日：2004-12-15
申请人： Kimiaki Toshikiyo
发明人： Kimiaki Toshikiyo
IPC分类号： H01L27/146 , G02B5/18
CPC分类号： H01L27/14625 , G02B5/1876 , G02B5/1885 , G02B27/4205 , H01L27/14621 , H01L27/14627 , H01L27/14632
摘要： The present invention provides an optical device and the like which can collect incident light at a high incident angle than an existing microlens, in order to realize a solid-state imaging apparatus and the like corresponding to an optical system (an optical system with a high incident angle θ) with a short focal length for a thin camera.Each unit pixel (2.8 μm square in size) is made up of a distributed index lens 1, a color filter 2 for green G, Al wirings 3, a signal transmitting unit 4, planarizing films 5, a light-receiving device (Si photodiodes) 6, and a Si substrate 7. The distributed index lens 1 is made of high refractive index materials 33 [TiO2 (n=2.53)] and low refractive index materials 34 [air (n=1.0)] having concentric zones. Further, in a distributed refractive index lens, a width 35 of adjacent divided areas is 200 nm. Also, a film thickness t is 0.5 μm.
摘要翻译： 本发明提供一种可以以比现有的微透镜高的入射角收集入射光的光学器件等，以实现对应于光学系统的固态成像设备等（具有高的光学系统 入射角度和角度;），具有短焦距的薄型相机。 每个单位像素（尺寸为2.8μm正方形）由分布式折射率透镜1，绿色G，Al布线3，信号传输单元4，平面化膜5，光接收装置（Si光电二极管 ）6和Si衬底7.分布式折射率透镜1由具有同心区的高折射率材料33 [TiO 2（n = 2.53）]和低折射率材料34 [空气（n = 1.0）]制成。 此外，在分布折射率透镜中，相邻分割区域的宽度35为200nm。 此外，膜厚t为0.5μm。
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