摘要:
A polymer includes a repeating unit shown by a general formula (1) in which R1 represents a hydrogen atom or a methyl group, R2 represents a substituted or unsubstituted linear or branched monovalent alkyl group having 1 to 20 carbon atoms, an alicyclic group having 3 to 25 carbon atoms, or an aryl group having 6 to 22 carbon atoms, and X represents a substituted or unsubstituted methylene group or a substituted or unsubstituted linear, branched or alicyclic hydrocarbon group having 2 to 25 carbon atoms. The polymer has a polystyrene-reduced weight average molecular weight determined by gel permeation chromatography (GPC) of 3000 to 100,000.
摘要:
A pattern forming method includes providing and curing a under-layer film containing a radiation-sensitive acid generator which generates an acid upon exposure to radiation on a substrate. The under-layer film is irradiated with radiation through a mask to cause an acid to be selectively generated in an exposed area of the under-layer film. An upper-layer film which does not contain a radiation-sensitive acid generator and which contains a composition capable of polymerizing or crosslinking by an action of an acid is provided. A cured film is provided by polymerization or crosslinking selectively in an area of the upper-layer film corresponding to the exposed area of the under-layer film in which the acid has been generated. An area of the upper-layer film corresponding to an area of the under-layer film in which the acid has not been generated is removed.
摘要:
Multilayered stacks having layers of silicon interleaved with layers of a dielectric, such as silicon dioxide, are plasma etched with non-corrosive process gas chemistries. Etching plasmas of fluorine source gases, such as SF6 and/or NF3 typically only suitable for dielectric layers, are energized by pulsed RF to achieve high aspect ratio etching of silicon/silicon dioxide bi-layers stacks without the addition of corrosive gases, such as HBr or Cl2. In embodiments, a mask open etch and the multi-layered stack etch are performed in a same plasma processing chamber enabling a single chamber, single recipe solution for patterning such multi-layered stacks. In embodiments, 3D NAND memory cells are fabricated with memory plug and/or word line separation etches employing a fluorine-based, pulsed-RF plasma etch.
摘要:
This torque limiter includes a first rotating member integrally provided with a plurality of fragment portions in a concentric manner and having a spring storage portion enclosed with the plurality of fragment portions, a second rotating member having a lid portion arranged to cover the spring storage portion of the first rotating member and a fit portion fitted with the outer peripheral surfaces of the plurality of fragment portions of the first rotating member and a spring member press-fitted into the spring storage portion enclosed with the inner peripheral surfaces of the plurality of fragment portions of the first rotating member thereby bringing the plurality of fragment portions into pressure contact with the fit portion of the second rotating member, for transmitting driving torque in response to pressure contact force applied by the spring member.
摘要:
In a display screen support mechanism, a first hole portion receiving a platelike support shaft is provided in the form of a symmetrical sector formed by connecting two sectoral forward ends which are symmetric with respect to a hole center, and a display screen support member is rotatable about the platelike support shaft serving as a rotating shaft within an angular range of the symmetrical sectoral hole portion in a state where an end of the platelike support shaft in a longitudinal direction comes into contact with an arcuate inner peripheral surface of the symmetrical sectoral hole portion.
摘要:
In an image generating apparatus, a push-up member for pushing up a paper and bringing the same into contact with a paper feed roller includes a first push-up member, a second push-up member and a torsion coil spring, a second engaging portion of the second push-up member is rotatably engaged with a first engaging portion of the first push-up member, a second spring engaging portion of the second push-up member is engaged with a coil portion of the torsion coil spring, and a first spring engaging portion of the first push-up member is engaged with a first arm portion of the torsion coil spring.
摘要:
A display includes a display screen portion, a display screen support member supporting the display screen portion to be rotatable in an anteroposterior direction with respect to a vertical plane and a driving source rotating the display screen support member in the anteroposterior direction by a prescribed angle with respect to the vertical plane, wherein a center of gravity of the display screen portion is located on either a frontward side or a rearward side with respect to the vertical plane in both of a state where the driving source rotates the display screen support member on the frontward side with respect to the vertical plane and a state where the driving source rotates the display screen support member on the rearward side with respect to the vertical plane.
摘要:
This image generating apparatus includes a side plate, mounted on a first side surface of a chassis provided with a print portion, integrally including a bearing, a bracket member mounted on the side plate and a support shaft arranged between the side plate and the bracket member for rotatably supporting a gear member, while a first end of the support shaft is fixedly mounted on the bracket member, and a second end of the support shaft includes a side end surface brought into line contact with the bearing of the side plate.