公开(公告)号：US06806477B1

公开(公告)日：2004-10-19

申请号：US09645434

申请日：2000-08-25

申请人： Kenji Saito ,  Toshihiko Tsuji ,  Mitsuro Sugita

发明人： Kenji Saito ,  Toshihiko Tsuji ,  Mitsuro Sugita

IPC分类号： G03F900

CPC分类号： G03F9/7088 ,  B82Y10/00 ,  G03F7/70375 ,  G03F9/7061

摘要： A position detection device for detecting a position of an object. The detection device includes an irradiation device for irradiating light onto an alignment mark formed on a surface of the object, a probe for detecting near-field light in the vicinity of the alignment mark upon irradiation by the irradiation device and a detector for detecting position information of the object on the basis of the near-field light detected by the probe.

摘要翻译： 一种位置检测装置，用于检测物体的位置。 检测装置包括：照射装置，用于将光照射到形成在物体表面上的对准标记;探测器，用于在照射装置照射时检测对准标记附近的近场光;以及探测器，用于检测位置信息 基于由探针检测到的近场光。

公开(公告)号：US06946666B2

公开(公告)日：2005-09-20

申请号：US09082587

申请日：1998-05-21

申请人： Kenji Saito ,  Toshihiko Tsuji ,  Mitsuro Sugita

发明人： Kenji Saito ,  Toshihiko Tsuji ,  Mitsuro Sugita

IPC分类号： G03F7/20 ,  G03F9/00 ,  A61N5/00

CPC分类号： G03F7/70375 ,  B82Y10/00 ,  G03F9/7061 ,  G03F9/7088 ,  Y10S438/949

摘要： An exposure apparatus for irradiating exposure light onto a surface of an object to be exposed applied with a resist to form a pattern on the surface, wherein near-field light is used as the exposure light. The apparatus includes an alignment system for performing alignment using the near-field light, the alignment system detecting position information of the object to be exposed by irradiating light from an illumination device onto an alignment mark formed on the surface of the object to be exposed, and an alignment probe for detecting near-field light in the vicinity of the alignment mark.

摘要翻译： 一种曝光装置，用于将曝光光照射到被照射物体的表面上，施加抗蚀剂以在表面上形成图案，其中使用近场光作为曝光光。 该装置包括用于使用近场光进行对准的对准系统，对准系统通过将照明装置的光照射到形成在被曝光物体的表面上的对准标记来检测要曝光的物体的位置信息， 以及用于检测对准标记附近的近场光的对准探针。

公开(公告)号：US08035668B2

公开(公告)日：2011-10-11

申请号：US11336754

申请日：2006-01-19

申请人： Mitsuro Sugita ,  Kazuaki Ohmi ,  Takao Yonehara ,  Toshihiko Tsuji ,  Takaaki Terashi ,  Tohru Kohda ,  Shinji Tsutsui

发明人： Mitsuro Sugita ,  Kazuaki Ohmi ,  Takao Yonehara ,  Toshihiko Tsuji ,  Takaaki Terashi ,  Tohru Kohda ,  Shinji Tsutsui

IPC分类号： G03G13/04

CPC分类号： G03F7/70275

摘要： An exposure apparatus which forms a pattern on an object. The apparatus includes an exposure head structure in which a plurality of elemental exposure units are arrayed, each elemental exposure unit including (i) at least one light source for emitting exposure light and (ii) an optical element which forms an image of the at least one light source on the object, for exposing the object. Positions of the images of the at least one light source in a direction perpendicular to a surface of the object include plural positions different from each other. A sensor detects a position of the surface of the object and produces a detection result. A controller receives the detection result and controls the exposure head structure such that a pattern is formed on the object by the exposure is selected to expose the object based on the detection result by the sensor.

摘要翻译： 在物体上形成图案的曝光装置。 该装置包括其中排列多个元素曝光单元的曝光头结构，每个元素曝光单元包括：（i）至少一个用于发射曝光光的光源;以及（ii）至少形成至少一个图像的光学元件 对象上的一个光源，用于暴露对象。 至少一个光源的图像在垂直于物体表面的方向上的位置包括彼此不同的多个位置。 传感器检测物体表面的位置并产生检测结果。 控制器接收检测结果并控制曝光头结构，使得通过曝光在物体上形成图案被选择以基于传感器的检测结果来曝光物体。

公开(公告)号：US20060158504A1

公开(公告)日：2006-07-20

申请号：US11336754

申请日：2006-01-19

申请人： Mitsuro Sugita ,  Kazuaki Ohmi ,  Takao Yonehara ,  Toshihiko Tsuji ,  Takaaki Terashi ,  Tohru Kohda ,  Shinji Tsutsui

发明人： Mitsuro Sugita ,  Kazuaki Ohmi ,  Takao Yonehara ,  Toshihiko Tsuji ,  Takaaki Terashi ,  Tohru Kohda ,  Shinji Tsutsui

IPC分类号： B41J2/385

CPC分类号： G03F7/70275

摘要： An exposure apparatus which forms a pattern on an object includes an exposure head structure in which a plurality of elemental exposure units each including at least one light source and an optical element which forms an image of the light source on the object are arrayed, a sensor which detects the surface position of the object, and a controller which controls exposure by the exposure head structure based on the detection result by the sensor. The controller forms a pattern on the object while selectively operating one of the plurality of elemental exposure units, which satisfies a predetermined condition.

摘要翻译： 在物体上形成图案的曝光装置包括曝光头结构，其中排列有多个元件曝光单元，每个元素曝光单元包括至少一个光源和形成物体上光源的图像的光学元件，传感器 其检测物体的表面位置，以及控制器，其基于传感器的检测结果来控制曝光头结构的曝光。 控制器在选择性地操作满足预定条件的多个元素曝光单元中的一个的同时，在物体上形成图案。

公开(公告)号：US08317326B2

公开(公告)日：2012-11-27

申请号：US13101075

申请日：2011-05-04

申请人： Koji Nozato ,  Mitsuro Sugita ,  Futoshi Hirose ,  Akihiro Katayama

发明人： Koji Nozato ,  Mitsuro Sugita ,  Futoshi Hirose ,  Akihiro Katayama

IPC分类号： A61B3/14

CPC分类号： G01B9/02063 ,  A61B3/102 ,  G01B9/02002 ,  G01B9/02085 ,  G01B9/02091

摘要： An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.

摘要翻译： 提供了一种光学断层摄影方法，其中来自光源的光被分成测量光束和参考光束，测量光束被扫描光学系统移动并被引导到被检查物体，参考光束被引导到 参考镜，其中由物体反射或散射的测量光束的返回光束和由参考反射镜反射的参考光束产生物体的断层图像。 该方法包括获取关于物体的纵截面信息，从纵向剖面信息计算物体上的深度位置信息，以及通过控制由参考镜定义的参考路径长度和获取对象的三维表面图像，以及 根据关于物体的深度位置信息扫描光学系统的扫描操作。

公开(公告)号：US20120274904A1

公开(公告)日：2012-11-01

申请号：US13442225

申请日：2012-04-09

申请人： Kenichi Saito ,  Mitsuro Sugita

发明人： Kenichi Saito ,  Mitsuro Sugita

IPC分类号： A61B3/10

CPC分类号： A61B3/12 ,  A61B3/102 ,  A61B3/1025

摘要： An ophthalmic apparatus comprises: a first optical system which irradiates the same region on a retina with a plurality of illumination light beams through separate positions on a pupil of an eye to be examined; and an image generation unit configured to generate a two-dimensional image of the retina based on return light from the eye.

摘要翻译： 一种眼科装置，包括：第一光学系统，其利用多个照明光束将视网膜上的相同区域照射到待检眼睛的瞳孔上的分离位置; 以及图像生成单元，被配置为基于来自眼睛的返回光来生成视网膜的二维图像。

公开(公告)号：US08274660B2

公开(公告)日：2012-09-25

申请号：US12683461

申请日：2010-01-07

申请人： Mitsuro Sugita

发明人： Mitsuro Sugita

IPC分类号： G01B9/02

CPC分类号： G01B9/02044 ,  G01B9/02048 ,  G01B9/02063 ,  G01B9/02091

摘要： Provided is an optical tomographic imaging apparatus that is capable of shortening a period of time of focusing at multiple focus positions when images split in a depth direction are obtained by zone focusing. The optical tomographic imaging apparatus includes: a focus position setting device for splitting a zone within a predetermined imaging depth range into multiple focus zones so as to set multiple focus positions; a reference position setting device for setting at least two reference positions in an imaging depth direction within the predetermined imaging depth range; and a focus controlling device for performing focusing at the multiple focus positions sequentially based on focus position information generated by the focus position setting device and a focus condition of an in-focus state for the at least two reference positions set in advance by the reference position setting device.

摘要翻译： 提供一种光学断层图像摄像装置，其能够缩短通过区域聚焦获得沿着深度方向分割的图像时的多个聚焦位置的聚焦时间。 光学层析成像装置包括：聚焦位置设定装置，用于将预定成像深度范围内的区域分割成多个聚焦区域，以便设定多个聚焦位置; 参考位置设定装置，用于在所述预定成像深度范围内的成像深度方向上设定至少两个基准位置; 以及聚焦控制装置，用于基于由聚焦位置设定装置生成的焦点位置信息和对焦状态的聚焦状态顺序地在多个聚焦位置进行聚焦，所述对焦状态对于由参考位置预先设定的至少两个基准位置 设置设备。

公开(公告)号：US08226233B2

公开(公告)日：2012-07-24

申请号：US13101050

申请日：2011-05-04

申请人： Mitsuro Sugita ,  Shuichi Kobayashi ,  Koji Nozato ,  Akihiro Katayama ,  Futoshi Hirose

发明人： Mitsuro Sugita ,  Shuichi Kobayashi ,  Koji Nozato ,  Akihiro Katayama ,  Futoshi Hirose

IPC分类号： A61B3/14

CPC分类号： A61B5/7242 ,  A61B3/102 ,  A61B5/0066 ,  A61B5/0073 ,  A61B5/7257 ,  G01B9/02048 ,  G01B9/02089 ,  G01B9/02091 ,  G01B2290/65 ,  G02B26/0833

摘要： An image acquisition apparatus that uses optical coherence tomography includes a scanning unit provided within a light path that guides signal light to be incident on an examination object towards the examination object and configured to scan the signal light in a main scanning direction; and a control unit configured to control the scanning unit such that an integration time of an optical interference signal per pixel in at least one predetermined area other than opposite ends, in the main scanning direction, of an image acquisition region scanned by a plurality of main scan lines is increased relative to that of an area other than the predetermined area.

摘要翻译： 使用光学相干断层摄影的图像获取装置包括设置在光路内的扫描单元，该扫描单元将要入射到检查对象的信号光引导到检查对象，并且被配置为沿主扫描方向扫描信号光; 以及控制单元，被配置为控制扫描单元，使得每个像素在至少一个预定区域中的除了由主扫描方向扫描的图像采集区域的主扫描方向以外的另一个预定区域的积分时间 扫描线相对于除了预定区域之外的区域的扫描线增加。

公开(公告)号：US20100181462A1

公开(公告)日：2010-07-22

申请号：US12683461

申请日：2010-01-07

申请人： Mitsuro Sugita

发明人： Mitsuro Sugita

IPC分类号： G01B9/023

CPC分类号： G01B9/02044 ,  G01B9/02048 ,  G01B9/02063 ,  G01B9/02091

摘要： Provided is an optical tomographic imaging apparatus that is capable of shortening a period of time of focusing at multiple focus positions when images split in a depth direction are obtained by zone focusing. The optical tomographic imaging apparatus includes: a focus position setting device for splitting a zone within a predetermined imaging depth range into multiple focus zones so as to set multiple focus positions; a reference position setting device for setting at least two reference positions in an imaging depth direction within the predetermined imaging depth range; and a focus controlling device for performing focusing at the multiple focus positions sequentially based on focus position information generated by the focus position setting device and determining a focus condition of an in-focus state for the at least two reference positions set in advance by the reference position setting device.

摘要翻译： 提供一种光学断层图像摄像装置，其能够缩短通过区域聚焦获得沿着深度方向分割的图像时的多个聚焦位置的聚焦时间。 光学层析成像装置包括：聚焦位置设定装置，用于将预定成像深度范围内的区域分割成多个聚焦区域，以便设定多个聚焦位置; 参考位置设定装置，用于在所述预定成像深度范围内的成像深度方向上设定至少两个基准位置; 以及聚焦控制装置，用于基于由所述对焦位置设定装置生成的焦点位置信息顺序地在所述多个焦点位置进行聚焦，并且通过所述基准来预先确定所述至少两个基准位置的对焦状态的对焦状态 位置设定装置

公开(公告)号：US20100165289A1

公开(公告)日：2010-07-01

申请号：US12636607

申请日：2009-12-11

申请人： Koji Nozato ,  Mitsuro Sugita ,  Futoshi Hirose ,  Akihiro Katayama

发明人： Koji Nozato ,  Mitsuro Sugita ,  Futoshi Hirose ,  Akihiro Katayama

IPC分类号： A61B3/10 ,  G01B9/02

CPC分类号： G01B9/02063 ,  A61B3/102 ,  G01B9/02002 ,  G01B9/02085 ,  G01B9/02091

摘要： An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.

摘要翻译： 提供了一种光学断层摄影方法，其中来自光源的光被分成测量光束和参考光束，测量光束被扫描光学系统移动并被引导到被检查物体，参考光束被引导到 参考镜，其中由物体反射或散射的测量光束的返回光束和由参考反射镜反射的参考光束产生物体的断层图像。 该方法包括获取关于物体的纵截面信息，从纵向剖面信息计算物体上的深度位置信息，以及通过控制由参考镜定义的参考路径长度和获取对象的三维表面图像，以及 根据关于物体的深度位置信息扫描光学系统的扫描操作。