Optical tomographic imaging method and apparatus
    1.
    发明授权
    Optical tomographic imaging method and apparatus 有权
    光学断层成像方法和装置

    公开(公告)号:US08317326B2

    公开(公告)日:2012-11-27

    申请号:US13101075

    申请日:2011-05-04

    IPC分类号: A61B3/14

    摘要: An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.

    摘要翻译: 提供了一种光学断层摄影方法,其中来自光源的光被分成测量光束和参考光束,测量光束被扫描光学系统移动并被引导到被检查物体,参考光束被引导到 参考镜,其中由物体反射或散射的测量光束的返回光束和由参考反射镜反射的参考光束产生物体的断层图像。 该方法包括获取关于物体的纵截面信息,从纵向剖面信息计算物体上的深度位置信息,以及通过控制由参考镜定义的参考路径长度和获取对象的三维表面图像,以及 根据关于物体的深度位置信息扫描光学系统的扫描操作。

    OPHTHALMIC APPARATUS, METHOD OF CONTROLLING OPHTHALMIC APPARATUS AND STORAGE MEDIUM
    2.
    发明申请
    OPHTHALMIC APPARATUS, METHOD OF CONTROLLING OPHTHALMIC APPARATUS AND STORAGE MEDIUM 审中-公开
    眼科设备,控制眼科设备和储存介质的方法

    公开(公告)号:US20120274904A1

    公开(公告)日:2012-11-01

    申请号:US13442225

    申请日:2012-04-09

    IPC分类号: A61B3/10

    CPC分类号: A61B3/12 A61B3/102 A61B3/1025

    摘要: An ophthalmic apparatus comprises: a first optical system which irradiates the same region on a retina with a plurality of illumination light beams through separate positions on a pupil of an eye to be examined; and an image generation unit configured to generate a two-dimensional image of the retina based on return light from the eye.

    摘要翻译: 一种眼科装置,包括:第一光学系统,其利用多个照明光束将视网膜上的相同区域照射到待检眼睛的瞳孔上的分离位置; 以及图像生成单元,被配置为基于来自眼睛的返回光来生成视网膜的二维图像。

    Optical tomographic imaging apparatus
    3.
    发明授权
    Optical tomographic imaging apparatus 有权
    光学层析成像装置

    公开(公告)号:US08274660B2

    公开(公告)日:2012-09-25

    申请号:US12683461

    申请日:2010-01-07

    申请人: Mitsuro Sugita

    发明人: Mitsuro Sugita

    IPC分类号: G01B9/02

    摘要: Provided is an optical tomographic imaging apparatus that is capable of shortening a period of time of focusing at multiple focus positions when images split in a depth direction are obtained by zone focusing. The optical tomographic imaging apparatus includes: a focus position setting device for splitting a zone within a predetermined imaging depth range into multiple focus zones so as to set multiple focus positions; a reference position setting device for setting at least two reference positions in an imaging depth direction within the predetermined imaging depth range; and a focus controlling device for performing focusing at the multiple focus positions sequentially based on focus position information generated by the focus position setting device and a focus condition of an in-focus state for the at least two reference positions set in advance by the reference position setting device.

    摘要翻译: 提供一种光学断层图像摄像装置,其能够缩短通过区域聚焦获得沿着深度方向分割的图像时的多个聚焦位置的聚焦时间。 光学层析成像装置包括:聚焦位置设定装置,用于将预定成像深度范围内的区域分割成多个聚焦区域,以便设定多个聚焦位置; 参考位置设定装置,用于在所述预定成像深度范围内的成像深度方向上设定至少两个基准位置; 以及聚焦控制装置,用于基于由聚焦位置设定装置生成的焦点位置信息和对焦状态的聚焦状态顺序地在多个聚焦位置进行聚焦,所述对焦状态对于由参考位置预先设定的至少两个基准位置 设置设备。

    OPTICAL TOMOGRAPHIC IMAGING APPARATUS
    5.
    发明申请
    OPTICAL TOMOGRAPHIC IMAGING APPARATUS 有权
    光学成像装置

    公开(公告)号:US20100181462A1

    公开(公告)日:2010-07-22

    申请号:US12683461

    申请日:2010-01-07

    申请人: Mitsuro Sugita

    发明人: Mitsuro Sugita

    IPC分类号: G01B9/023

    摘要: Provided is an optical tomographic imaging apparatus that is capable of shortening a period of time of focusing at multiple focus positions when images split in a depth direction are obtained by zone focusing. The optical tomographic imaging apparatus includes: a focus position setting device for splitting a zone within a predetermined imaging depth range into multiple focus zones so as to set multiple focus positions; a reference position setting device for setting at least two reference positions in an imaging depth direction within the predetermined imaging depth range; and a focus controlling device for performing focusing at the multiple focus positions sequentially based on focus position information generated by the focus position setting device and determining a focus condition of an in-focus state for the at least two reference positions set in advance by the reference position setting device.

    摘要翻译: 提供一种光学断层图像摄像装置,其能够缩短通过区域聚焦获得沿着深度方向分割的图像时的多个聚焦位置的聚焦时间。 光学层析成像装置包括:聚焦位置设定装置,用于将预定成像深度范围内的区域分割成多个聚焦区域,以便设定多个聚焦位置; 参考位置设定装置,用于在所述预定成像深度范围内的成像深度方向上设定至少两个基准位置; 以及聚焦控制装置,用于基于由所述对焦位置设定装置生成的焦点位置信息顺序地在所述多个焦点位置进行聚焦,并且通过所述基准来预先确定所述至少两个基准位置的对焦状态的对焦状态 位置设定装置

    OPTICAL TOMOGRAPHIC IMAGING METHOD AND APPARATUS
    6.
    发明申请
    OPTICAL TOMOGRAPHIC IMAGING METHOD AND APPARATUS 有权
    光学成像方法和装置

    公开(公告)号:US20100165289A1

    公开(公告)日:2010-07-01

    申请号:US12636607

    申请日:2009-12-11

    IPC分类号: A61B3/10 G01B9/02

    摘要: An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.

    摘要翻译: 提供了一种光学断层摄影方法,其中来自光源的光被分成测量光束和参考光束,测量光束被扫描光学系统移动并被引导到被检查物体,参考光束被引导到 参考镜,其中由物体反射或散射的测量光束的返回光束和由参考反射镜反射的参考光束产生物体的断层图像。 该方法包括获取关于物体的纵截面信息,从纵向剖面信息计算物体上的深度位置信息,以及通过控制由参考镜定义的参考路径长度和获取对象的三维表面图像,以及 根据关于物体的深度位置信息扫描光学系统的扫描操作。

    Multiple exposure method
    7.
    发明授权
    Multiple exposure method 失效
    多重曝光法

    公开(公告)号:US07505112B2

    公开(公告)日:2009-03-17

    申请号:US11230676

    申请日:2005-09-21

    IPC分类号: G03B27/42 G03B27/52 G03B27/54

    摘要: An exposure apparatus includes an illumination optical system for illuminating a predetermined mask, a projection optical system for projecting light from the mask to a predetermined exposure region, a first exposure device for illuminating the mask with a first sigma and for projecting light from the mask to the exposure region at a first spatial frequency passage spectrum of the projection system, so that the exposure region is exposed with a first pattern, and a second exposure device for illuminating the mask with a second sigma, different from the first sigma, and for projecting light from the mask to the exposure region at a second spatial frequency passage spectrum of the projection system, different from the first spatial frequency passage spectrum, so that the exposure region is exposed with a second pattern. A first exposure by the first exposure device and a second exposure by the second exposure device are carried out prior to a development process.

    摘要翻译: 曝光装置包括用于照亮预定掩模的照明光学系统,用于将来自掩模的光投射到预定曝光区域的投影光学系统,用于利用第一西格玛照亮掩模的第一曝光装置和用于将来自掩模的光投射到 所述曝光区域在所述投影系统的第一空间频率通过光谱下,使得所述曝光区域以第一图案曝光;以及第二曝光装置,用于用与所述第一西格玛不同的第二西格玛照亮所述掩模,并且用于突出 不同于第一空间频率通过光谱的投影系统的第二空间频率通过光谱从掩模到曝光区域的光,从而以第二图案曝光曝光区域。 第一曝光装置的第一曝光和第二曝光装置的第二曝光在显影处理之前进行。

    Multiple exposure method
    9.
    发明授权
    Multiple exposure method 失效
    多重曝光法

    公开(公告)号:US06930754B1

    公开(公告)日:2005-08-16

    申请号:US09337040

    申请日:1999-06-28

    IPC分类号: G03F7/20 G03B27/42 G03B27/52

    摘要: An exposure apparatus includes a first exposure device for illuminating a predetermined mask with light of a predetermined wavelength under a first illumination condition, to print a first pattern on a predetermined exposure region, and a second exposure device for illuminating the mask with light of the predetermined wavelength under a second illumination condition, different from the first illumination condition, to print a second pattern on the predetermined exposure region, in which the mask has a desired pattern and an auxiliary pattern having a shape different from that of the desired pattern, and a first exposure by the first exposure device and a second exposure by the second exposure device are carried out prior to a development process.

    摘要翻译: 曝光装置包括:用于在第一照明条件下用预定波长的光照射预定掩模的第一曝光装置,以在预定曝光区域上印刷第一图案;以及第二曝光装置,用于以预定的 在与第一照明条件不同的第二照明条件下,在掩模具有期望图案的预定曝光区域上印刷第二图案和具有与期望图案的形状不同的形状的辅助图案的第二图案,以及 在显影处理之前进行第一曝光装置的第一曝光和第二曝光装置的第二曝光。

    Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
    10.
    发明授权
    Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same 失效
    位置检测装置,使用其的装置,曝光装置和使用其的装置制造方法

    公开(公告)号:US06806477B1

    公开(公告)日:2004-10-19

    申请号:US09645434

    申请日:2000-08-25

    IPC分类号: G03F900

    摘要: A position detection device for detecting a position of an object. The detection device includes an irradiation device for irradiating light onto an alignment mark formed on a surface of the object, a probe for detecting near-field light in the vicinity of the alignment mark upon irradiation by the irradiation device and a detector for detecting position information of the object on the basis of the near-field light detected by the probe.

    摘要翻译: 一种位置检测装置,用于检测物体的位置。 检测装置包括:照射装置,用于将光照射到形成在物体表面上的对准标记;探测器,用于在照射装置照射时检测对准标记附近的近场光;以及探测器,用于检测位置信息 基于由探针检测到的近场光。