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1.发明授权Systems and methods for using white light interferometry to measure undercut of a bi-layer structure 有权使用白光干涉测量来测量双层结构底切的系统和方法公开(公告)号：US09194692B1
公开(公告)日：2015-11-24
申请号：US14275502
申请日：2014-05-12
发明人： Robert W. Beye , Sean T. Poh
CPC分类号： G01B11/2441 , G01B9/0209 , G01B9/04 , G01B11/028 , G01B11/0675 , G01B11/14 , G01N21/88 , G03F7/30
摘要： Systems and methods for using white light interferometry to measure undercut of a bi-layer structure are provided. One such method involves performing a first scan of a first bi-layer structure with a microscope using a first scan range, where the microscope is configured for white light interferometry, generating a first interferogram using data from the first scan, performing a second scan of the first bi-layer structure with the microscope using a second scan range, generating a second interferogram using data from the second scan, determining a first distance between features of the first interferogram, determining a second distance between features of the second interferogram, and calculating a width of the undercut based on the first distance and the second distance. One such system involves using the microscope and/or a computer to perform one or more actions of this method.
摘要翻译： 提供了使用白光干涉测量来测量双层结构底切的系统和方法。 一种这样的方法包括使用第一扫描范围用显微镜执行第一双层结构的第一扫描，其中显微镜被配置用于白光干涉测量，使用来自第一扫描的数据产生第一干涉图，执行第二扫描 第一双层结构，其中显微镜使用第二扫描范围，使用来自第二扫描的数据产生第二干涉图，确定第一干涉图的特征之间的第一距离，确定第二干涉图的特征之间的第二距离和计算 基于第一距离和第二距离的底切的宽度。 一个这样的系统涉及使用显微镜和/或计算机执行该方法的一个或多个动作。
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公开(公告)号：US20110261347A1
公开(公告)日：2011-10-27
申请号：US13133659
申请日：2009-12-09
IPC分类号： G01B9/023
CPC分类号： G01B11/2441 , G01B9/02014 , G01B9/02069 , G01B9/0209 , G01B11/0675
摘要： The invention relates to a method for imaging a microfabricated device comprising at least one oscillating component. The method comprises stroboscopically illuminating in an interferometric setup said component in synchronized relationship with the excitation of the device, and detecting interference light in synchronized relationship with the illumination and excitation. According to the invention the component is illuminated at a wavelength band which is at least partly transmissible by the component, and the positions of at least two separate surfaces of the component of interest are determined based on the interference light detected at least at two temporal phases of excitation of the device. The invention provides an efficient method for in-depth characterization of micromechanical structures that provide only one-sided access during operation.
摘要翻译： 本发明涉及一种用于对包含至少一个振荡部件的微加工装置进行成像的方法。 该方法包括在与设备的激励同步的干涉测量装置中频闪照明，并且检测与照明和激发同步的干涉光。 根据本发明，组件在被组件至少部分透射的波长带上被照射，并且基于至少在两个时间阶段检测到的干涉光来确定感兴趣部件的至少两个分开的表面的位置 的激励器件。 本发明提供了用于在操作期间仅提供单面访问的微机械结构的深入表征的有效方法。
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3.发明授权Image forming method and optical coherence tomograph apparatus using optical coherence tomography 有权使用光学相干断层扫描的图像形成方法和光学相干断层扫描仪公开(公告)号：US08204300B2
公开(公告)日：2012-06-19
申请号：US12296400
申请日：2008-04-03
申请人： Mitsuro Sugita , Koji Nozato
发明人： Mitsuro Sugita , Koji Nozato
CPC分类号： G01N21/4795 , A61B3/102 , G01B9/02004 , G01B9/02011 , G01B9/02027 , G01B9/02044 , G01B9/02048 , G01B9/02063 , G01B9/02077 , G01B9/02085 , G01B9/02091 , G01B2290/70 , G01N2021/1787
摘要： An image forming method uses an optical coherence tomography as to an optical axis direction of plural pieces of image information of an object. First image information of an object is obtained at a first focus with respect to an optical axis direction to then object. A focusing position is changed by dynamic focusing from the first focus to a second focus along the optical axis. The second image information of the object is obtained at the second focus. A third image information, tomography image information of the object and including a tomography image of the first focus or the second focus, is obtained by Fourier domain optical coherence tomography. A tomography image or a three-dimensional image of the object is formed in positional relation, in the optical axis direction, between the first image information and the second image information using the third image information.
摘要翻译： 图像形成方法使用关于物体的多个图像信息的光轴方向的光学相干断层摄影。 在关于对象的光轴方向的第一焦点处获得对象的第一图像信息。 通过从第一焦点到光轴的第二焦点的动态聚焦来改变聚焦位置。 在第二焦点处获得对象的第二图像信息。 通过傅立叶域光学相干断层扫描获得第三图像信息，物体的断层摄影图像信息，并且包括第一焦点或第二焦点的断层摄影图像。 使用第三图像信息，以第一图像信息和第二图像信息之间的光轴方向上的位置关系形成层析图像或三维图像。
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公开(公告)号：US20090147268A1
公开(公告)日：2009-06-11
申请号：US12248613
申请日：2008-10-09
申请人： Peter De Groot
发明人： Peter De Groot
CPC分类号： G01B9/02088 , G01B9/02084 , G01B9/0209 , G01B2210/56
摘要： In certain aspects, disclosed methods include directing test light reflected from an object to form an image of the object on a detector, where the object includes a diffractive structure. The test light at the detector includes both specularly and non-specularly reflected light from the diffractive structure, and the diffractive structure is under-resolved in the image. The method further includes directing reference light to interfere with the test light at the detector where the reference and test light being derived from a common source, varying an optical path length difference between the test and reference light, acquiring an interference signal from the detector while varying the optical path length difference, and determining information about the diffractive structure based on the interference signal and on predetermined information derived from a mathematical model of light reflection from a model diffractive structure.
摘要翻译： 在某些方面，所公开的方法包括引导从物体反射的测试光，以在检测器上形成物体的图像，其中对象包括衍射结构。 检测器上的测试光包括来自衍射结构的镜面反射光和非镜面反射光，并且衍射结构在图像中未被分解。 该方法还包括引导参考光干涉检测器处的测试光，其中参考和测试光源从公共源导出，改变测试和参考光之间的光程长度差异，从检测器获取干扰信号，同时 改变光路长度差，以及基于干涉信号确定关于衍射结构的信息，以及根据从模型衍射结构的光反射的数学模型导出的预定信息。
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公开(公告)号：US09297646B2
公开(公告)日：2016-03-29
申请号：US13316610
申请日：2011-12-12
申请人： Yasunori Furukawa , Toru Shimizu
发明人： Yasunori Furukawa , Toru Shimizu
IPC分类号： G01B9/023 , G01B11/24 , G01B11/255
CPC分类号： G01B11/24 , G01B11/255
摘要： The present invention provides a measurement method of measuring a surface shape of a measurement target surface including an aspherical surface by using a measurement apparatus including an optical system which guides a light from the measurement target surface to a detection unit having a detection surface, including a step of converting, into coordinates on the measurement target surface by using a coordinate conversion table, coordinates on the detection surface that indicate positions where light traveling from the measurement target surface enters the detection surface, and a step of converting, by using an angle conversion table, angle differences between angles of light reflected by a reference surface and angles of light reflected by the measurement target surface at the respective coordinates on the detection surface into angle differences at a plurality of respective coordinates on the measurement target surface that correspond to the respective coordinates on the detection surface.
摘要翻译： 本发明提供一种测量方法，通过使用包括将来自测量对象表面的光引导到具有检测表面的检测单元的光学系统的测量装置，测量包括非球面的测量对象表面的表面形状，包括 通过使用坐标转换表将测量目标表面的坐标转换为表示从测量对象表面行进的光的位置的检测面上的坐标进入检测面的步骤，以及通过使用角度变换 由基准面反射的光的角度与测定对象面的检测面的各坐标上反射的光的角度之间的角度差与在各测定对象面上对应的测定对象面上的多个坐标上的角度差 坐标检测 表面。
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公开(公告)号：US20130286403A1
公开(公告)日：2013-10-31
申请号：US13455931
申请日：2012-04-25
申请人： Isao Matsubara , Chung-Chieh Yu , Yasuyuki Unno , William Dallas
发明人： Isao Matsubara , Chung-Chieh Yu , Yasuyuki Unno , William Dallas
CPC分类号： G01N21/453 , G02B21/0052 , G03H1/0443 , G03H2001/005 , G03H2001/0456 , G03H2001/046 , G03H2222/36 , G03H2222/44
摘要： An interferometric method for detecting information about a sample includes emitting a laser beam; splitting the laser beam into a reference beam and an object beam; transmitting the object beam through the sample in an incident angle; combining the reference beam with the object beam passed through the sample to form an interference pattern; detecting the interference pattern, and non-linearly scanning the object beam in order to detect a plurality of interference patterns.
摘要翻译： 用于检测关于样本的信息的干涉测量方法包括发射激光束; 将激光束分成参考光束和物体光束; 以入射角透射物体通过样品; 将参考光束与通过样本的物体光束组合以形成干涉图案; 检测干涉图案，以及非线性扫描物体光束，以便检测多个干涉图案。
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公开(公告)号：US20090153873A1
公开(公告)日：2009-06-18
申请号：US12086280
申请日：2006-11-07
申请人： Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hisashi Tsukada
发明人： Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hisashi Tsukada
IPC分类号： G01B9/023
CPC分类号： G01B9/02067 , G01B9/02014 , G01B9/02069 , G01B9/02081 , G01B9/02083 , G01B9/0209 , G01B2290/45 , G01B2290/70 , G01N21/21 , G01N21/4795
摘要： Provided is an optical image measuring apparatus capable of obtaining a high-accuracy image without being influenced by a movement of an object to be measured. Flash light is emitted from a xenon lamp (2) and converted into broad band light by an optical filter (2A). A polarization characteristic of the flash light is converted into linear polarization by a polarizing plate (3). Then, the flash light is divided into signal light (S) and reference light (R) by a half mirror (6). A polarization characteristic of the reference light (R) is converted into circular polarization by a wavelength plate (7). The signal light (S) and the reference light (R) are superimposed on each other by the half mirror (6) to produce interference light (L). A CCD (23) detects interference light having the same characteristic as that of the produced interference light (L). The produced interference light (L) is divided into an S-polarized light component (L1) and a P-polarized light component (L2) by a polarization beam splitter (11). The polarized light components are detected by CCDs (21 and 22). A signal processing section (20) of a computer (30) forms an image of the object to be measured (O) based on detection signals from the CCDs (21, 22, and 23).
摘要翻译： 本发明提供能够得到高精度图像而不受被测定物的移动影响的光学图像测定装置。 闪光灯从氙灯（2）发射并通过滤光器（2A）转换成宽带光。 闪光的偏振特性由偏光板（3）转换成线偏振光。 然后，闪光被半反射镜（6）分为信号光（S）和参考光（R）。 参考光（R）的偏振特性由波片（7）转换成圆偏振。 信号光（S）和参考光（R）通过半反射镜（6）彼此重叠以产生干涉光（L）。 CCD（23）检测与产生的干涉光（L）的特性相同的干涉光。 所产生的干涉光（L）被偏振分束器（11）分为S偏振光分量（L1）和P偏振光分量（L2）。 偏振光分量由CCD（21和22）检测。 计算机（30）的信号处理部（20）基于来自CCD（21,22,23）的检测信号，形成被测量物体（O）的图像。
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公开(公告)号：US11014212B2
公开(公告)日：2021-05-25
申请号：US15319094
申请日：2015-06-18
IPC分类号： G01B11/24 , B21J15/28 , B23B49/00 , G01B11/08 , B23Q17/24 , G01B9/023 , B21J15/14 , G01B9/02
摘要： A manufacturing system for producing airplane structural components, including a drilling unit for producing bores in a material assembly made of at least two material plies for the purposes of inserting fastening elements and having a measuring unit for ascertaining geometry parameters for a previously produced bore. The measuring unit includes measuring electronics with an optical sensor element, a measuring optical unit and a measuring lance. The measuring unit produces an optical measurement beam that emerges from the measuring lance via the measuring optical unit and that is incident on a measurement point on the respective bore inner surface. A measurement movement between measuring lance and material assembly is provided in a measurement cycle and the measuring unit cyclically ascertains distance values to various measurement points at a scanning rate during the measurement movement and ascertains at least one geometry parameter for the respective bore from the distance values.
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9.发明授权公开(公告)号：US09494411B2
公开(公告)日：2016-11-15
申请号：US14648740
申请日：2013-12-06
申请人： 3DRAGONS, LLC
发明人： Hideyoshi Horimai , Taizo Umezaki
CPC分类号： G01B9/023 , G01B9/02011 , G01B9/02047 , G01B9/02076 , G01B11/2441 , G01B2290/70 , G03H1/0443 , G03H2001/0033 , G03H2001/0458 , G03H2222/31 , G03H2222/44 , G03H2223/23
摘要： [Problem] To provide a low-cost, high-precision three-dimensional shape measuring device using vibration-resistant phase shift digital holography.[Solution] A three-dimensional shape measuring device, wherein an object-light optical system allows object light to be incident on a polarization element for detecting relative phase differences in a first circularly polarized light state, a reference-light optical system allows a reference light to be incident on a polarization element for detecting relative phase differences in a second circularly polarized light state in the direction opposite from the first circularly polarized light, and the polarization element for detecting relative phase differences transmits a component of the object light, which is the first circularly polarized light, in the polarization direction of the polarization element for detecting relative phase differences, and a component of the reference light, which is the second circularly polarized light, in the polarization direction of the polarization element for detecting relative phase differences. The polarization direction of the polarization element for detecting relative phase differences is rotated to thereby vary the relative phase difference between the object light and the reference light transmitted through the polarization element for detecting relative phase differences and to acquire a plurality of hologram images having different relative phase differences.
摘要翻译： [解决方案]一种三维形状测量装置，其中物体光学系统允许物体光入射到偏振元件上，用于检测第一圆偏振光状态下的相对相位差，参考光学系统允许参考光 光入射到偏振元件上，用于检测与第一圆偏振光相反的方向上的第二圆偏振光状态的相对相位差，并且用于检测相对相位差的偏振元件透射对象光的分量 在用于检测相对相位差的偏振元件的偏振方向上的第一圆偏振光和用于检测相对相位差的偏振元件的偏振方向上的第二圆偏振光的参考光的分量。 用于检测相对相位差的偏振元件的偏振方向被旋转，从而改变物体光与通过偏振元件透射的参考光之间的相对相位差，用于检测相对相位差，并获取具有不同相对的多个全息图像 相位差。
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10.发明申请公开(公告)号：US20150300803A1
公开(公告)日：2015-10-22
申请号：US14648740
申请日：2013-12-06
申请人： 3DRAGONS, LLC
发明人： Hideyoshi HORIMAI , Taizo UMEZAKI
CPC分类号： G01B9/023 , G01B9/02011 , G01B9/02047 , G01B9/02076 , G01B11/2441 , G01B2290/70 , G03H1/0443 , G03H2001/0033 , G03H2001/0458 , G03H2222/31 , G03H2222/44 , G03H2223/23
摘要： [Problem] To provide a low-cost, high-precision three-dimensional shape measuring device using vibration-resistant phase shift digital holography.[Solution] A three-dimensional shape measuring device, wherein an object-light optical system allows object light to be incident on a polarization element for detecting relative phase differences in a first circularly polarized light state, a reference-light optical system allows a reference light to be incident on a polarization element for detecting relative phase differences in a second circularly polarized light state in the direction opposite from the first circularly polarized light, and the polarization element for detecting relative phase differences transmits a component of the object light, which is the first circularly polarized light, in the polarization direction of the polarization element for detecting relative phase differences, and a component of the reference light, which is the second circularly polarized light, in the polarization direction of the polarization element for detecting relative phase differences. The polarization direction of the polarization element for detecting relative phase differences is rotated to thereby vary the relative phase difference between the object light and the reference light transmitted through the polarization element for detecting relative phase differences and to acquire a plurality of hologram images having different relative phase differences.
摘要翻译： [问题]提供使用抗震相移数字全息术的低成本，高精度三维形状测量装置。 [解决方案]一种三维形状测量装置，其中物体光学系统允许物体光入射到偏振元件上，用于检测第一圆偏振光状态下的相对相位差，参考光学系统允许参考光 光入射到偏振元件上，用于检测与第一圆偏振光相反的方向上的第二圆偏振光状态的相对相位差，并且用于检测相对相位差的偏振元件透射对象光的分量 在用于检测相对相位差的偏振元件的偏振方向上的第一圆偏振光和用于检测相对相位差的偏振元件的偏振方向上的第二圆偏振光的参考光的分量。 用于检测相对相位差的偏振元件的偏振方向被旋转，从而改变物体光与通过偏振元件透射的参考光之间的相对相位差，用于检测相对相位差，并获取具有不同相对的多个全息图像 相位差。
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