摘要:
A positive-working radiation-sensitive resin composition showing a good throughput upon production of semiconductors or the like and less process dependence of dimensional accuracy as well as having high sensitivity and high resolution, and being able to form a pattern with good shape and a high aspect ratio. The positive-working radiation-sensitive resin composition comprises (i) a radiation-sensitive novolak resin comprising a reaction product between an alkali-soluble novolak resin from which low-molecular-weight components have been removed by fractional treatment and an o-naphthoquinonediazide compound, or a product obtained by removing low-molecular-weight components by fractional treatment from a reaction product between an alkali-soluble novolak resin and an o-naphthoquinonediazide compound, and (ii) a low-molecular compound represented by the general formula (I) and having phenolic hydroxyl group or groups: wherein R1, R2, R3, R4, R5, R6 and R7 each represents independently H, a C1 to C4 alkyl group, a C1 to C4 alkoxyl group, a cyclohexyl group or a group represented by the formula: wherein R8 represents H, a C1 to C4 alkyl group, a C1 to C4 alkoxyl group or a cyclohexyl group; each of m and n is 0, 1 or 2; each of a, b, c, d, e, f, g and h is 0 or an integer of 1 to 5 satisfying a+b≦5, c+d≦5, e+f≦5, and g+h≦5; and i is 0, 1 or 2.
摘要翻译:在半导体等的制造中显示出良好的生产能力以及尺寸精度的工艺依赖性以及具有高灵敏度和高分辨率的正性辐射敏感性树脂组合物,并且能够形成具有良好形状和高度的图案 宽高比。 正性工作辐射敏感性树脂组合物包含(i)辐射敏感性酚醛清漆树脂,其包含通过分级处理除去低分子量组分的碱溶性酚醛清漆树脂与邻萘醌二叠氮化合物 或通过从碱溶性酚醛清漆树脂和邻萘醌二叠氮化合物之间的反应产物中分级处理除去低分子量成分得到的产物,和(ii)由通式(I)表示的低分子化合物 )和具有酚羟基或基团:其中R1,R2,R3,R4,R5,R6和R7各自独立地表示H,C1至C4烷基,C1至C4烷氧基,环己基或由 式中,R8表示H,C1〜C4烷基,C1〜C4烷氧基或环己基; m和n各自为0,1或2; a,b,c,d,e,f,g和h中的每一个为0或1〜5的整数,满足+ b <= 5,c + d <= 5,e + f <= 5,g + h <= 5; 我是0,1或2。
摘要:
The positive-working radiation sensitive resin composition which has high sensitivity, high resolution and no residues in development and ability to form a pattern having a good profile. The positive-working radiation sensitive resin composition contains a mixed radiation sensitive novolak resin comprising the mixture of 1,2-naphthoquinonediazide-4-sulfonic acid ester of an alkali soluble novolak resin and 1,2-naphthoquinonediazide-5-sulfonic acid ester of an alkali soluble novolak resin, wherein the ratio by weight of the 1,2-naphthoquinonediazide-4-sulfonyl group and 1,2-naphthoquinonediazide-5-sulfonyl group ranges from 5:95 to 20:80.
摘要:
A condition monitoring device for monitoring conditions related to a user. A monitor main unit includes a connection structure for detachably attachment to a first sensor unit. The first sensor unit includes a first connector mated with the connection structure of the monitor main unit and a second connector detachably attachable to a second sensor unit. Data associated with the monitored condition detected by the first sensor unit is provided to the monitor main unit via the first connector and the connection structure. Data associated with a monitored condition detected by the second sensor unit is provided to the monitor main unit via the second connector, the first sensor unit, the first connector, and the connection structure.
摘要:
A fluid transfer device having a simple structure and smaller size than conventional ones is provided.In the fluid transfer device according to the present invention, a vibrating plate 2 is placed facing a predetermined flow path, a flow path forming plate 4 is interposed in the flow path, at least one flow path hole 41 opens on the flow path forming plate 4, a gap is provided between the vibrating plate 2 and the flow path forming plate 4 so that static pressure is generated between the vibrating plate 2 and the flow path forming plate 4 when the vibrating plate 2 is vibrated in an ultrasonic range, and fluid is transferred by the static pressure.
摘要:
A fuel cell includes a membrane electrode assembly 1 in which an oxidant electrode and a fuel electrode are disposed on the respective sides of an electrolyte layer. The fuel cell includes a vibrating plate 32 which generates an acoustic wave, and which is disposed so as to face the oxidant electrode with a flow path 30 for a gas formed between the vibrating plate and the oxidant electrode. The vibrating plate 32 is formed to have at least one hole 34. Moreover, the gas is transferred by acoustic streaming that occurs in the flow path for the gas 30 due to vibration of the vibrating plate 32 and reflection on a surface of the oxidant electrode facing the vibrating plate 32.
摘要:
A modified polyvinyl alcohol (PVA) protected with a protecting group of the present invention is one wherein an amount of high-molecular weight body components of the modified polyvinyl alcohol having a weight-average molecular weight of 250,000 or more as determined by polyethylene glycol standards according to a gel permeation chromatography is 1000 ppm or less in the modified polyvinyl alcohol. The modified PVA is prepared by removing a metal ion and an acid from the modified PVA such as acetalized PVA with ion exchange treatment and then heat-treating at 80° C. or higher. An auxiliary for fine pattern formation of the present invention comprises the aforementioned modified PVA, a water-soluble crosslinking agent, and water or a mixed solvent of water and a water-soluble organic solvent. The auxiliary for fine pattern formation is applied over a resist pattern 3 and a coated layer 4 is formed thereon. Then the resist pattern 3 and the coated layer 4 are heated and thereby an acid is diffused from the resist pattern 3 to the coated layer 4. As a result, the coated layer in the vicinity of the resist pattern surface is crosslinked and cured by the diffused acid. The coated layer is developed to form a hole pattern having crosslinked and cured layer on the resist pattern, of which the hole size is less than a limit resolution of the wavelength of a light-exposure and which have no development defects.
摘要:
A radiating spacer consisting essentially of a silicone solidified product containing a heat conductive filler, said spacer having a thermal conductivity of at least 0.8 W/m.multidot.K and a compressibility of at least 10% under a load of 30 g/cm.sup.2.
摘要翻译:基本上由含有导热填料的硅氧烷凝固产品组成的散热垫片,所述垫片的导热率至少为0.8W / m×K,压缩率在30g / cm 2的载荷下至少为10%。
摘要:
A laser welding device for manufacturing a prismatic battery 10 of the invention has a pair of jigs 12A, 12B for securing a prismatic battery outer can B1, a gas supply section for supplying inert gas to welding points of a sealing cover B2 fitted to the prismatic battery outer can B1, and a laser unit 11 for irradiating laser beam. Each of the jigs 12A, 12B is provided with a slit-shaped blower outlet and the blower outlet is positioned below the welding points. The inert gas is supplied to the blower outlet from the gas supply section and is blown from the blower outlet to the welding points from below. The laser welding device for manufacturing a prismatic battery 10 can obtain a laser welding device that welds the sealing cover B2 fitted to the prismatic battery outer can B1 fast, preventing weld droops and allowing uniform welding.
摘要:
In a self-traveling cleaner of the present invention, a cleaning mechanism includes a brush mechanism rotatable along a floor surface and a driving mechanism for rotatingly driving the brush mechanism. The brush mechanism includes a rotation axis extending perpendicular to the floor surface, one arm projecting laterally from a lower end of the rotation axis, and a brush planted on the arm. The rotation axis is provided within a reverse side of the main body, and the arm has a rotation angle range in which the arm projects outwardly from an outer periphery of the main body and a rotation angle range in which the arm is contained within the outer periphery of the main body.
摘要:
Provided are a fluid transfer device having higher efficiency than conventional devices and a fuel cell comprising the fluid transfer device.The fluid transfer device according to the present invention comprises a loop-like elastic body 1, at least two piezoelectric elements 3, 3 arranged on the elastic body 1 along a loop direction, and at least one flow path 6 formed along a flat plate part 11 of the elastic body 1. Voltages having phases different from each other are applied to both the piezoelectric elements 3, 3 to generate in the elastic body 1 a flexural wave advancing in the direction of the loop, and this transfers fluid in the flow path 6. The fuel cell according to the present invention comprises an MEA placed in the loop-like elastic body, and a liquid flow path and a gas flow path are formed along the MEA.