Auxiliary for forming fine pattern and process for producing the same
    1.
    发明申请
    Auxiliary for forming fine pattern and process for producing the same 有权
    辅助形成精细图案及其制造方法

    公开(公告)号:US20060211814A1

    公开(公告)日:2006-09-21

    申请号:US10550110

    申请日:2004-03-18

    IPC分类号: C08L29/04

    摘要: A modified polyvinyl alcohol (PVA) protected with a protecting group of the present invention is one wherein an amount of high-molecular weight body components of the modified polyvinyl alcohol having a weight-average molecular weight of 250,000 or more as determined by polyethylene glycol standards according to a gel permeation chromatography is 1000 ppm or less in the modified polyvinyl alcohol. The modified PVA is prepared by removing a metal ion and an acid from the modified PVA such as acetalized PVA with ion exchange treatment and then heat-treating at 80° C. or higher. An auxiliary for fine pattern formation of the present invention comprises the aforementioned modified PVA, a water-soluble crosslinking agent, and water or a mixed solvent of water and a water-soluble organic solvent. The auxiliary for fine pattern formation is applied over a resist pattern 3 and a coated layer 4 is formed thereon. Then the resist pattern 3 and the coated layer 4 are heated and thereby an acid is diffused from the resist pattern 3 to the coated layer 4. As a result, the coated layer in the vicinity of the resist pattern surface is crosslinked and cured by the diffused acid. The coated layer is developed to form a hole pattern having crosslinked and cured layer on the resist pattern, of which the hole size is less than a limit resolution of the wavelength of a light-exposure and which have no development defects.

    摘要翻译: 用本发明的保护基保护的改性聚乙烯醇(PVA)是其中通过聚乙二醇标准测定的改性聚乙烯醇的重均分子量为25万以上的高分子量体成分的量 根据凝胶渗透色谱在改性聚乙烯醇中为1000ppm以下。 通过离子交换处理从改性PVA如缩醛化PVA中除去金属离子和酸,然后在80℃或更高温度下进行热处理制备改性PVA。 本发明的精细图案形成用辅助剂包括上述改性PVA,水溶性交联剂,水或水和水溶性有机溶剂的混合溶剂。 在抗蚀剂图案3上施加用于精细图案形成的辅助件,并且在其上形成涂层4。 然后,抗蚀剂图案3和涂层4被加热,从而将酸从抗蚀剂图案3扩散到涂层4。 结果,抗蚀剂图形表面附近的涂层被扩散的酸交联和固化。 显影涂层以在抗蚀剂图案上形成具有交联和固化层的孔图案,其孔尺寸小于曝光波长的极限分辨率并且没有显影缺陷。

    Protected polyvinyl alcohol auxiliary for forming fine pattern and process for producing the same
    2.
    发明授权
    Protected polyvinyl alcohol auxiliary for forming fine pattern and process for producing the same 有权
    用于形成精细图案的保护性聚乙烯醇辅助剂及其制备方法

    公开(公告)号:US07598320B2

    公开(公告)日:2009-10-06

    申请号:US10550110

    申请日:2004-03-18

    摘要: A modified polyvinyl alcohol (PVA) protected with a protecting group of the present invention is one wherein an amount of high-molecular weight body components of the modified polyvinyl alcohol having a weight-average molecular weight of 250,000 or more as determined by polyethylene glycol standards according to a gel permeation chromatography is 1000 ppm or less in the modified polyvinyl alcohol. The modified PVA is prepared by removing a metal ion and an acid from the modified PVA such as acetalized PVA with ion exchange treatment and then heat-treating at 80° C. or higher. An auxiliary for fine pattern formation of the present invention comprises the aforementioned modified PVA, a water-soluble crosslinking agent, and water or a mixed solvent of water and a water-soluble organic solvent. The auxiliary for fine pattern formation is applied over a resist pattern 3 and a coated layer 4 is formed thereon. Then the resist pattern 3 and the coated layer 4 are heated and thereby an acid is diffused from the resist pattern 3 to the coated layer 4. As a result, the coated layer in the vicinity of the resist pattern surface is crosslinked and cured by the diffused acid. The coated layer is developed to form a hole pattern having crosslinked and cured layer on the resist pattern, of which the hole size is less than a limit resolution of the wavelength of a light-exposure and which have no development defects.

    摘要翻译: 用本发明的保护基保护的改性聚乙烯醇(PVA)是其中通过聚乙二醇标准测定的改性聚乙烯醇的重均分子量为25万以上的高分子量体成分的量 根据凝胶渗透色谱在改性聚乙烯醇中为1000ppm以下。 通过离子交换处理从改性PVA如缩醛化PVA中除去金属离子和酸,然后在80℃或更高温度下进行热处理制备改性PVA。 本发明的精细图案形成用辅助剂包括上述改性PVA,水溶性交联剂,水或水和水溶性有机溶剂的混合溶剂。 在抗蚀剂图案3上施加用于精细图案形成的辅助件,并且在其上形成涂层4。 然后加热抗蚀剂图案3和涂层4,从而将抗蚀剂图案3的酸扩散到涂层4.结果,抗蚀剂图案表面附近的涂层被交联并固化 扩散酸。 显影涂层以在抗蚀剂图案上形成具有交联和固化层的孔图案,其孔尺寸小于曝光波长的极限分辨率并且没有显影缺陷。

    Condition monitoring device and monitor main unit for condition monitoring device
    3.
    发明授权
    Condition monitoring device and monitor main unit for condition monitoring device 有权
    状态监测装置和状态监测装置监控主机

    公开(公告)号:US08142357B2

    公开(公告)日:2012-03-27

    申请号:US11936981

    申请日:2007-11-08

    摘要: A condition monitoring device for monitoring conditions related to a user. A monitor main unit includes a connection structure for detachably attachment to a first sensor unit. The first sensor unit includes a first connector mated with the connection structure of the monitor main unit and a second connector detachably attachable to a second sensor unit. Data associated with the monitored condition detected by the first sensor unit is provided to the monitor main unit via the first connector and the connection structure. Data associated with a monitored condition detected by the second sensor unit is provided to the monitor main unit via the second connector, the first sensor unit, the first connector, and the connection structure.

    摘要翻译: 一种状态监视装置,用于监视与用户有关的状况。 监视器主单元包括用于可拆卸地附接到第一传感器单元的连接结构。 第一传感器单元包括与监视器主单元的连接结构配合的第一连接器和可拆卸地附接到第二传感器单元的第二连接器。 与由第一传感器单元检测到的监视条件相关联的数据经由第一连接器和连接结构提供给监视器主单元。 通过第二连接器,第一传感器单元,第一连接器和连接结构将与由第二传感器单元检测到的监视条件相关联的数据提供给监视器主单元。

    FLUID TRANSFER DEVICE AND FUEL CELL COMPRISING SAME
    4.
    发明申请
    FLUID TRANSFER DEVICE AND FUEL CELL COMPRISING SAME 审中-公开
    流体传输装置和包含其的燃料电池

    公开(公告)号:US20100047664A1

    公开(公告)日:2010-02-25

    申请号:US12530702

    申请日:2008-03-18

    IPC分类号: H01M8/04

    摘要: A fluid transfer device having a simple structure and smaller size than conventional ones is provided.In the fluid transfer device according to the present invention, a vibrating plate 2 is placed facing a predetermined flow path, a flow path forming plate 4 is interposed in the flow path, at least one flow path hole 41 opens on the flow path forming plate 4, a gap is provided between the vibrating plate 2 and the flow path forming plate 4 so that static pressure is generated between the vibrating plate 2 and the flow path forming plate 4 when the vibrating plate 2 is vibrated in an ultrasonic range, and fluid is transferred by the static pressure.

    摘要翻译: 提供了具有简单的结构并且比常规尺寸更小的流体输送装置。 在根据本发明的流体输送装置中,面向预定的流路放置振动板2,流路形成板4插入在流路中,至少一个流路孔41在流路形成板上开口 如图4所示,在振动板2和流路形成板4之间设置有间隙,使得当振动板2在超声波范围内振动时,在振动板2和流路形成板4之间产生静压,并且流体 被静压转移。

    FUEL CELL
    5.
    发明申请
    FUEL CELL 审中-公开
    燃料电池

    公开(公告)号:US20090325011A1

    公开(公告)日:2009-12-31

    申请号:US12443629

    申请日:2007-09-27

    IPC分类号: H01M8/10 H01M8/04

    摘要: A fuel cell includes a membrane electrode assembly 1 in which an oxidant electrode and a fuel electrode are disposed on the respective sides of an electrolyte layer. The fuel cell includes a vibrating plate 32 which generates an acoustic wave, and which is disposed so as to face the oxidant electrode with a flow path 30 for a gas formed between the vibrating plate and the oxidant electrode. The vibrating plate 32 is formed to have at least one hole 34. Moreover, the gas is transferred by acoustic streaming that occurs in the flow path for the gas 30 due to vibration of the vibrating plate 32 and reflection on a surface of the oxidant electrode facing the vibrating plate 32.

    摘要翻译: 燃料电池包括其中氧化剂电极和燃料电极设置在电解质层的各个侧面上的膜电极组件1。 燃料电池包括产生声波的振动板32,并且与用于形成在振动板和氧化剂电极之间的气体的流路30面向氧化剂电极配置。 振动板32形成为具有至少一个孔34.此外,由于振动板32的振动和在氧化剂电极的表面上的反射而在气体30的流动路径中发生的声流传输气体 面对振动板32。

    Method for manufacturing prismatic battery, and laser welding jig and laser welding device for manufacturing the same
    7.
    发明授权
    Method for manufacturing prismatic battery, and laser welding jig and laser welding device for manufacturing the same 有权
    棱柱电池的制造方法,激光焊接夹具及其制造用激光焊接装置

    公开(公告)号:US08399804B2

    公开(公告)日:2013-03-19

    申请号:US12567925

    申请日:2009-09-28

    IPC分类号: B23K9/16

    摘要: A laser welding device for manufacturing a prismatic battery 10 of the invention has a pair of jigs 12A, 12B for securing a prismatic battery outer can B1, a gas supply section for supplying inert gas to welding points of a sealing cover B2 fitted to the prismatic battery outer can B1, and a laser unit 11 for irradiating laser beam. Each of the jigs 12A, 12B is provided with a slit-shaped blower outlet and the blower outlet is positioned below the welding points. The inert gas is supplied to the blower outlet from the gas supply section and is blown from the blower outlet to the welding points from below. The laser welding device for manufacturing a prismatic battery 10 can obtain a laser welding device that welds the sealing cover B2 fitted to the prismatic battery outer can B1 fast, preventing weld droops and allowing uniform welding.

    摘要翻译: 用于制造本发明的棱柱形电池10的激光焊接装置具有一对用于固定棱柱形电池外罐B1的夹具12A,12B,用于将惰性气体供应到安装在棱柱形的密封盖B2的焊接点的气体供给部 电池外壳B1和用于照射激光束的激光单元11。 每个夹具12A,12B设置有狭缝状鼓风机出口,鼓风机出口位于焊接点的下方。 惰性气体从气体供给部供给到鼓风机出口,并从鼓风机出口从下方吹送到焊接点。 用于制造棱柱形电池10的激光焊接装置可以获得激光焊接装置,其快速焊接装配到棱柱形电池外筒B1的密封盖B2,防止焊接凹陷并允许均匀焊接。

    Self-traveling cleaner
    8.
    发明授权
    Self-traveling cleaner 有权
    自助清洁剂

    公开(公告)号:US07827654B2

    公开(公告)日:2010-11-09

    申请号:US11188846

    申请日:2005-07-26

    申请人: Masato Nishikawa

    发明人: Masato Nishikawa

    IPC分类号: A47L9/00 A47L9/04

    CPC分类号: A47L9/009 A47L2201/00

    摘要: In a self-traveling cleaner of the present invention, a cleaning mechanism includes a brush mechanism rotatable along a floor surface and a driving mechanism for rotatingly driving the brush mechanism. The brush mechanism includes a rotation axis extending perpendicular to the floor surface, one arm projecting laterally from a lower end of the rotation axis, and a brush planted on the arm. The rotation axis is provided within a reverse side of the main body, and the arm has a rotation angle range in which the arm projects outwardly from an outer periphery of the main body and a rotation angle range in which the arm is contained within the outer periphery of the main body.

    摘要翻译: 在本发明的自行式清洁器中,清洁机构包括可沿着地板表面旋转的刷子机构和用于旋转地驱动刷子机构的驱动机构。 电刷机构包括垂直于地板表面延伸的旋转轴线,从旋转轴线的下端侧向突出的一个臂和植入在臂上的刷子。 旋转轴设置在主体的相反侧,臂具有旋转角度范围,其中臂从主体的外周向外突出,并且臂处于外部的旋转角度范围内 主体周边。

    FLUID TRANSFER DEVICE AND FUEL CELL COMPRISING SAME
    9.
    发明申请
    FLUID TRANSFER DEVICE AND FUEL CELL COMPRISING SAME 审中-公开
    流体传输装置和包含其的燃料电池

    公开(公告)号:US20100209812A1

    公开(公告)日:2010-08-19

    申请号:US12682016

    申请日:2008-09-26

    IPC分类号: H01M8/10 F04B17/00

    摘要: Provided are a fluid transfer device having higher efficiency than conventional devices and a fuel cell comprising the fluid transfer device.The fluid transfer device according to the present invention comprises a loop-like elastic body 1, at least two piezoelectric elements 3, 3 arranged on the elastic body 1 along a loop direction, and at least one flow path 6 formed along a flat plate part 11 of the elastic body 1. Voltages having phases different from each other are applied to both the piezoelectric elements 3, 3 to generate in the elastic body 1 a flexural wave advancing in the direction of the loop, and this transfers fluid in the flow path 6. The fuel cell according to the present invention comprises an MEA placed in the loop-like elastic body, and a liquid flow path and a gas flow path are formed along the MEA.

    摘要翻译: 提供了一种具有比常规装置更高效率的流体输送装置和包括流体输送装置的燃料电池。 根据本发明的流体传送装置包括环状弹性体1,沿着环形方向布置在弹性体1上的至少两个压电元件3,3和沿着平板部分形成的至少一个流路6, 弹簧体1的相互不同的电压施加到两个压电元件3,3上,以在弹性体1中产生沿着环的方向前进的弯曲波,并且这在流路中传递流体 根据本发明的燃料电池包括放置在环状弹性体中的MEA,并且沿着MEA形成液体流路和气体流路。

    FUEL CELL
    10.
    发明申请
    FUEL CELL 失效
    燃料电池

    公开(公告)号:US20100028739A1

    公开(公告)日:2010-02-04

    申请号:US12525698

    申请日:2008-01-31

    IPC分类号: H01M8/10 H01M8/04

    摘要: Fuel cell of this invention generates electricity by supplying fuel fluid to one of a pair of electrodes forming an MEA 1, supplying oxidation fluid to the other electrode, at least one of the fuel and oxidation fluids being gas, comprising a gas supply device transferring the gas along a flow path 10 defined on a surface of the MEA 1 and a drive circuit driving the gas supply device comprising a vibrating plate 4 and a reflection wall on both sides of the flow path 10, and the drive circuit performs a normal operation control generating gas flow from inlet to outlet of the flow path 10 due to sound pressure gradient generated in the flow path 10 by vibrating the vibrating plate 4 and a foreign material elimination operation control eliminating foreign material in the flow path 10 by changing a vibration mode of the vibrating plate 4.

    摘要翻译: 本发明的燃料电池通过向形成MEA 1的一对电极中的一个电极供应燃料流体,向另一个电极供应氧化流体,至少一个燃料和氧化流体是气体,从而产生电力,该气体供给装置将 气体沿着流过路径10限定在MEA1的表面上,驱动电路驱动气体供给装置,该气体供给装置包括在流路10两侧的振动板4和反射壁,并且驱动电路进行正常的操作控制 由于通过振动振动板4在流路10中产生的声压梯度而产生从流路10的入口到出口的气流,以及通过改变振动模式来消除流路10中的异物的异物消除操作控制 振动板4。