Exposure apparatus and device manufacturing method
    1.
    发明授权
    Exposure apparatus and device manufacturing method 失效
    曝光装置和装置制造方法

    公开(公告)号:US06762820B2

    公开(公告)日:2004-07-13

    申请号:US09948796

    申请日:2001-09-10

    IPC分类号: G03B2752

    CPC分类号: G03F7/708 G03B27/42

    摘要: A chemical filter, which removes chemical pollutants from gas and controls temperature fluctuation of the gas before and after passing through the filter to within a predetermined range, is arranged in a portion of a ventilation path extending from a machine chamber housing at least a portion of an air conditioning unit to a main body chamber housing an exposure apparatus main body. Accordingly, the atmosphere around the exposure apparatus main body arranged downstream of the chemical filter is kept chemically clean, and the temperature fluctuation of the gas, of which the temperature is set to a target temperature by the air conditioner, after passing through the chemical filter is limited. That is, occurrence of a problem such as an illumination reduction caused by tarnish of optical members and an increase of the temperature fluctuation amount of the gas supplied into the main body chamber can be effectively limited.

    摘要翻译: 一种化学过滤器,其从气体中除去化学污染物并且将通过过滤器之前和之后的气体的温度波动控制在预定范围内,设置在从容纳至少一部分 空调单元到容纳曝光装置主体的主体室。 因此,布置在化学过滤器下游的曝光装置主体周围的气氛保持化学清洁,并且在通过化学过滤器之后,通过空调将温度设定为目标温度的气体的温度波动 有限 也就是说,可以有效地限制诸如由光学构件的晦暗引起的照明减少和供应到主体室中的气体的温度波动量的增加的问题的发生。

    Air cleaning filter
    2.
    发明授权
    Air cleaning filter 失效
    空气净化过滤器

    公开(公告)号:US5830414A

    公开(公告)日:1998-11-03

    申请号:US682569

    申请日:1996-07-29

    CPC分类号: A61L9/16 B01D53/38 B01J20/20

    摘要: An air cleaning filter having a carrier made of activated carbon fibers in the form of a web which supports at least one kind of chemical agent selected from the group consisting of (a) an alkali agent selected from a hydroxide or carbonate or an alkali metal, (b) an acidifying agent selected from acid aluminum phosphate or phosphoric acid, and (c) an oxidizing agent composed of two compounds, i.e. active manganese dioxide resulting from an alkali permanganate and an alkali iodate, or which supports combined chemicals of (a) the alkali agent and (c) the oxidizing agent, or combined chemicals of (b) the acidifying agent and (c) the oxidizing agent, wherein one or both surfaces of the web are covered with a nonwoven fabric to make an integrated filter.

    摘要翻译: PCT No.PCT / JP94 / 02016 Sec。 371日期:1996年7月29日 102(e)日期1996年7月29日PCT 1994年11月30日PCT PCT。 第WO96 / 16719号公报 日期1996年6月6日,一种空气净化过滤器,其具有由纤维网形式的活性炭纤维制成的载体,所述载体支持至少一种选自以下的化学试剂:(a)选自氢氧化物或碳酸盐的碱剂 或碱金属,(b)选自酸式磷酸铝或磷酸的酸化剂,和(c)由两种化合物组成的氧化剂,即由碱金属高锰酸盐和碱式碘酸盐得到的活性二氧化锰,或者其组合 (a)碱剂和(c)氧化剂的化学品,或(b)酸化剂和(c)氧化剂的组合化学品,其中纤维网的一个或两个表面被无纺布覆盖以制成 一个集成的过滤器。

    Microfilm reader and control method therefor
    4.
    发明授权
    Microfilm reader and control method therefor 失效
    微型读卡器及其控制方法

    公开(公告)号:US6057941A

    公开(公告)日:2000-05-02

    申请号:US667806

    申请日:1996-06-20

    摘要: A microfilm reader and a control method therefor, suitable for reduction in size and enabling high-speed reading and efficient retrieval with less wear in the moving parts. The microfilm reader for reading an image recorded on a microfilm to supply an image data of the read image to a printer, comprising: a two-dimensional area sensor for reading plural images in respective frames of the microfilm to supply a first image data; a display for displaying the images continuously or intermittently by using the first image data so that an image of a target frame can be retrieved from the microfilm; a line sensor for reading the image of the target frame specified in the retrieval operation to supply the second image data of the target frame as the image data of the read image to be printed out. A line sensor capable of high-quality reading is used for the image to be printed out, whereas a two-dimensional area sensor with no mechanical moving part and capable of high-speed reading is used for the image to be displayed for reference.

    摘要翻译: 一种微缩胶片读取器及其控制方法,适用于减小尺寸并实现高速读取和高效率检索,同时减少运动部件的磨损。 用于读取记录在缩微胶卷上的图像的微缩胶片读取器,用于将读取的图像的图像数据提供给打印机,包括:二维区域传感器,用于读取微缩胶片的各个帧中的多个图像以提供第一图像数据; 用于通过使用第一图像数据连续地或间歇地显示图像的显示器,使得可以从缩微胶片检索目标帧的图像; 线传感器,用于读取在检索操作中指定的目标帧的图像,以将目标帧的第二图像数据提供为要打印的读取图像的图像数据。 使用能够进行高品质读取的线传感器用于要打印的图像,而使用没有机械移动部件并且能够高速读取的二维区域传感器用于要显示的图像供参考。

    Method and apparatus for converting a threshold matrix which is then
used to binarize image signals
    5.
    发明授权
    Method and apparatus for converting a threshold matrix which is then used to binarize image signals 失效
    用于转换阈值矩阵的方法和装置,其然后用于二值化图像信号

    公开(公告)号:US5710828A

    公开(公告)日:1998-01-20

    申请号:US413849

    申请日:1995-03-30

    CPC分类号: H04N1/4051 H04N1/4074

    摘要: An image processing method that employs a threshold matrix to binarize image signals obtained by reading an image recorded on a film such as microfilm. A middle tone image brightness range, which corresponds to a middle or half tone image, is discriminated by referring a brightness histogram for image signals. The upper- and lower-most brightness values of the middle tone image brightness range are used to convert the elements of a threshold matrix in accordance with a predetermined conversion expression, and the converted threshold matrix used for binarization processing. Even if a film density variation occurs or if there is a background density change, binary conversion (a dithering process) can be performed, without deterioration of image quality, within a middle tone density area of, for example, a photograph.

    摘要翻译: 一种图像处理方法,其采用阈值矩阵来二值化通过读取记录在诸如微缩胶片的胶片上的图像而获得的图像信号。 通过参考图像信号的亮度直方图来区分对应于中等或半色调图像的中间色调图像亮度范围。 中间色调图像亮度范围的最高和最低亮度值用于根据预定的转换表达式转换阈值矩阵的元素,以及用于二值化处理的转换的阈值矩阵。 即使发生胶片浓度变化或者如果存在背景浓度变化,也可以在例如照片的中等色调浓度区域内进行二值转换(抖动处理),而不会降低图像质量。

    Control method for microfilm image reader
    6.
    发明授权
    Control method for microfilm image reader 失效
    微缩胶片图像读取器的控制方法

    公开(公告)号:US5909537A

    公开(公告)日:1999-06-01

    申请号:US672113

    申请日:1996-06-27

    CPC分类号: H04N1/40062

    摘要: There is provided a control method of a microfilm image reader, in which a scanner reads an image in a frame recorded on a microfilm and supplies image data of the read image to a printer, for printing out image data of an original image faithfully in a relatively easy processing even if the original image largely contains middle tone portions, without either calculating a threshold value for binarization by a complicated method or performing a special image processing to be uniquely performed to a binary density image. The scanner reads the image in a multi-tone gradation and the printer prints out image data of at least one portion of the read image in the multi-tone gradation. When the image in a frame contains both a multi-tone gradation portion in a photograph area and a binary density portion in a document area, image data of the photograph area and image data of the document area are printed out in the multi-tone gradation and the binary density or gradation, respectively. If the frames are photographed on the microfilm in a predetermined form or forms, coordinates of the photograph area are previously memorized in each form so that the photograph area can be printed out in the multi-tone gradation automatically.

    摘要翻译: 提供了一种微缩胶片图像读取器的控制方法,其中扫描仪读取在微缩胶片上记录的帧中的图像,并将读取的图像的图像数据提供给打印机,用于将原始图像的图像数据忠实地印刷在 即使原始图像大部分含有中间色调部分,也不用通过复杂的方法计算用于二值化的阈值或者执行对二进制密度图像唯一地执行的特殊图像处理,所以相对容易的处理。 扫描仪以多色调等级读取图像,并且打印机以多色调灰度打印出读取图像的至少一部分的图像数据。 当帧中的图像包含照片区域中的多色调灰度部分和文档区域中的二进制密度部分时,照片区域的图像数据和文档区域的图像数据以多色调等级 和二进制密度或灰度。 如果以预定的形式或形式在微缩胶卷上拍摄帧,则以各种形式预先存储照片区域的坐标,使得照片区域可以自动以多色调灰度打印出来。

    Control method for microfilm image reader
    7.
    发明授权
    Control method for microfilm image reader 失效
    微缩胶片图像读取器的控制方法

    公开(公告)号:US5690406A

    公开(公告)日:1997-11-25

    申请号:US668824

    申请日:1996-06-24

    IPC分类号: G03B21/11 H04N1/38 G03B21/14

    CPC分类号: H04N1/38

    摘要: A control method of a microfilm image reader is provided for reducing the amount of image data to be transferred from a scanner to a host computer, making the transfer time short and hence lengthening the free time of a bus, reducing the storage capacity needed for storing the image data, and simplifying the operation procedure by omitting the process of eliminating the black frame portion when printed out. The host computer supplies the scanner with a window parameter containing a range of reading area, and the scanner detects only an image area from all the reading area to transfer image data of the detected image area to the host computer together with attribute information containing the size of the image area. The attribute information may be managed by a header system, and data on a print position of the target image may be contained in the attribute information.

    摘要翻译: 提供了一种缩微胶卷图像读取器的控制方法,用于减少要从扫描仪传送到主计算机的图像数据量,使传输时间缩短,从而延长总线的空闲时间,从而降低存储所需的存储容量 图像数据,并且通过在打印出时省略黑框部分的处理来简化操作过程。 主机为扫描仪提供包含读取范围范围的窗口参数,扫描仪仅检测所有阅读区域的图像区域,将检测到的图像区域的图像数据与包含尺寸的属性信息一起传送到主机 的图像区域。 属性信息可以由头系统管理,并且目标图像的打印位置上的数据可以包含在属性信息中。