公开(公告)号：US5788763A

公开(公告)日：1998-08-04

申请号：US612214

申请日：1996-03-07

申请人： Kenro Hayashi ,  Ryuji Takeda ,  Katsuhiro Chaki ,  Ping Xin ,  Jun Yoshikawa ,  Hiroyuki Saito

发明人： Kenro Hayashi ,  Ryuji Takeda ,  Katsuhiro Chaki ,  Ping Xin ,  Jun Yoshikawa ,  Hiroyuki Saito

IPC分类号： C30B15/00 ,  C30B33/00 ,  H01L21/322 ,  C30B25/02

CPC分类号： C30B29/06 ,  C30B15/206 ,  C30B33/00 ,  H01L21/3225

摘要： In a heat history initializing step, a heat treatment in performed in an atmosphere including at least one of hydrogen, helium, and argon while the temperature is increased in a range of 700.degree. C. to 1,000.degree. C. at a rate of 15.degree.-1,000.degree. C./min. In a controlled nuclei growing step, a heat treatment is performed in the above atmosphere while the temperature is kept constant in a range of 850.degree. C. to 980.degree. C. for 0.5-60 minutes.

摘要翻译： 在热历史初始化步骤中，在包括氢，氦和氩中的至少一种的气氛中进行热处理，同时温度在70℃至1000℃的范围内以15℃的速度增加 -1000℃/分钟。 在受控核生长步骤中，在上述气氛中进行热处理，同时将温度保持在850℃至980℃的范围内恒定0.5-60分钟。

公开(公告)号：US20090261299A1

公开(公告)日：2009-10-22

申请号：US12404740

申请日：2009-03-16

申请人： Takashi WATANABE ,  Ryuji Takeda

发明人： Takashi WATANABE ,  Ryuji Takeda

IPC分类号： H01B1/04

CPC分类号： H01L21/3225 ,  C30B25/20 ,  C30B29/06 ,  C30B31/06 ,  C30B33/02 ,  C30B33/04 ,  H01L21/3221

摘要： A silicon wafer which has DZ layers formed on both sides thereof by heat treatment in an atmosphere of reducing gas (such as hydrogen) or rare gas (such as argon) with a specific temperature profile for heating, holding, and cooling, and which also has a gettering site of BMD in the bulk inside the DZ layer. A silicon wafer which has a silicon epitaxial layer formed on one side thereof. The DZ layer and the silicon epitaxial layer contain dissolved oxygen introduced into their surface parts, with the concentration and distribution of dissolved oxygen properly controlled. Introduction of oxygen into the surface part is accomplished by heat treatment and ensuing rapid cooling in an atmosphere of oxygen-containing gas.

摘要翻译： 通过在还原性气体（例如氢气）或稀有气体（例如氩气）的气氛中进行热处理，具有用于加热，保持和冷却的特定温度特性，在其两侧形成DZ层的硅晶片，并且还 在DZ层内有大量的BMD吸气点。 硅晶片，其一侧形成硅外延层。 DZ层和硅外延层含有引入其表面部分的溶解氧，适当控制溶解氧的浓度和分布。 将氧气引入表面部分是通过热处理实现的，并且随后在含氧气体的气氛中快速冷却。

公开(公告)号：US20110053350A1

公开(公告)日：2011-03-03

申请号：US12940754

申请日：2010-11-05

申请人： Takashi WATANABE ,  Ryuji Takeda

发明人： Takashi WATANABE ,  Ryuji Takeda

IPC分类号： H01L21/322

CPC分类号： H01L21/3225 ,  C30B25/20 ,  C30B29/06 ,  C30B31/06 ,  C30B33/02 ,  C30B33/04 ,  H01L21/3221

摘要： A silicon wafer which has DZ layers formed on both sides thereof by heat treatment in an atmosphere of reducing gas (such as hydrogen) or rare gas (such as argon) with a specific temperature profile for heating, holding, and cooling, and which also has a gettering site of BMD in the bulk inside the DZ layer. A silicon wafer which has a silicon epitaxial layer formed on one side thereof. The DZ layer and the silicon epitaxial layer contain dissolved oxygen introduced into their surface parts, with the concentration and distribution of dissolved oxygen properly controlled. Introduction of oxygen into the surface part is accomplished by heat treatment and ensuing rapid cooling in an atmosphere of oxygen-containing gas.

摘要翻译： 通过在还原性气体（例如氢气）或稀有气体（例如氩气）的气氛中进行热处理，具有用于加热，保持和冷却的特定温度特性，在其两侧形成DZ层的硅晶片，并且还 在DZ层内有大量的BMD吸气点。 硅晶片，其一侧形成硅外延层。 DZ层和硅外延层含有引入其表面部分的溶解氧，适当控制溶解氧的浓度和分布。 将氧气引入表面部分是通过热处理实现的，并且随后在含氧气体的气氛中快速冷却。

公开(公告)号：US06276225B1

公开(公告)日：2001-08-21

申请号：US09438961

申请日：1999-11-12

申请人： Ryuji Takeda ,  Tetsuhiro Nishide ,  Hiroshi Niwa ,  Mitsuaki Honma

发明人： Ryuji Takeda ,  Tetsuhiro Nishide ,  Hiroshi Niwa ,  Mitsuaki Honma

IPC分类号： F16H2522

CPC分类号： F16H25/2418 ,  F16H25/2204 ,  Y10T74/19749

摘要： A ball screw assembly includes a screw shaft with a spiral groove, balls along the groove, a nut with the screw shaft relatively rotatable with the balls, and a seal device. A portion of each seal member is radially divided into blocks by plural slits so as to extend from one end surface directing outward in an axial direction of the nut to an axial intermediate portion of the seal member, each block having a pair of end faces, the end faces including one end face directed to a rotational direction of the nut with respect to the screw shaft when the screw shaft is screwed into the nut and another end face opposing to the other end face, this one end face being inclined so as to be gradually displaced, towards an outer peripheral side from an inner peripheral side of the seal member, in a direction reverse to the rotational direction with respect to a radial direction of the nut, and the other end face extending in this radial direction of the nut or in a direction inclined to a side reverse to the one end face with respect to the radial direction of the nut.

摘要翻译： 滚珠丝杠组件包括具有螺旋槽的螺杆轴，沿着凹槽的球，具有与球相对旋转的螺杆的螺母和密封装置。 每个密封构件的一部分通过多个狭缝径向地划分为多个狭缝，从而在从螺母的轴向方向向外引导到密封构件的轴向中间部分的一个端面处延伸，每个块具有一对端面， 所述端面包括当所述螺杆轴旋入所述螺母中时相对于所述螺杆轴线相对于所述螺母的旋转方向的一个端面和与所述另一端面相对的另一端面，所述一个端面倾斜，以便 在与螺母的径向方向相反的旋转方向的方向上从密封构件的内周侧向外周侧逐渐移位，另一端面在螺母的径向方向上延伸 或者相对于螺母的径向相对于与该一个端面相反的一侧倾斜的方向。

公开(公告)号：US07336570B1

公开(公告)日：2008-02-26

申请号：US09476776

申请日：1999-12-30

申请人： Tetsuhiro Shiomi ,  Seiichiro Oishi ,  Ryuji Takeda ,  Mitsuhiko Awata ,  Takahiro Komazaki ,  Yasushi Saito

发明人： Tetsuhiro Shiomi ,  Seiichiro Oishi ,  Ryuji Takeda ,  Mitsuhiko Awata ,  Takahiro Komazaki ,  Yasushi Saito

IPC分类号： B11B7/00

CPC分类号： G11B7/0956 ,  G11B7/08582

摘要： A disk drive apparatus for recording (writing) and/or reproducing (reading) information on an optical disk by rotating the optical disk, and adjusting the tilt angle of an optical pickup device with respect to the optical disk. A spindle chassis rotationally supports a turntable on which the optical disk is placed. A pickup chassis, rotationally supported on said spindle chassis, movably supports an optical pickup device that writes and/or reads the information to/from the optical disk and is movable toward and away from the turntable. A tilt mechanism adjusts the tilt angle of the optical pickup device with respect to the optical disk by rotating the pickup chassis with respect to the spindle chassis.

摘要翻译： 一种用于通过旋转光盘在光盘上记录（写入）和/或再现（读取）信息并且调整光学拾取装置相对于光盘的倾斜角的盘驱动装置。 主轴机架旋转地支撑放置光盘的转台。 旋转地支撑在所述主轴机架上的拾取器底盘可移动地支撑光学拾取装置，该光学拾取装置向/从光盘写入和/或读取信息，并且可朝向和远离转台移动。 倾斜机构通过相对于主轴机架旋转拾取器底盘来调节光学拾取装置相对于光盘的倾斜角度。

公开(公告)号：US6089117A

公开(公告)日：2000-07-18

申请号：US269167

申请日：1999-03-23

申请人： Shigeru Ebina ,  Ryuji Takeda

发明人： Shigeru Ebina ,  Ryuji Takeda

IPC分类号： F16C33/38 ,  F16H25/22

CPC分类号： F16C33/3825 ,  F16H25/2219 ,  F16H25/2238 ,  F16H2025/2242 ,  Y10T74/19772

摘要： A ball screw unit comprising a screw having a helical ball rolling groove on the outer peripheral surface thereof, a nut assembly having a load zone formed of a helical load rolling groove opposing to the ball rolling groove of the screw and a no-load zone forming a ball endless track by establishing communication between the starting end and the terminating end of the load zone, a number of balls rolling within the endless track of the nut assembly and a ball coupler comprised of coupling members for retaining the balls to rotate in their aligned state, wherein guide grooves for guiding the coupling members of the ball coupler are formed in the load zone of the ball endless track such that the coupling members of the ball coupler are moved by each of the balls in the no-load zone of the endless track while each of the balls is guided to move by the coupling members of the ball coupler in the no-load zone of the endless track, and guide sections for guiding the ball coupling members of the ball coupler along the progressing direction of the balls moving in the load zone are provided at least at both ends of the no-load zone near the load zone, respectively. Thus, according to the present invention, the delivery and reception of the balls are performed smoothly between the load zone and the no-load zone of the ball endless track to thereby achieve the smooth circulation of the balls.

摘要翻译： PCT No.PCT / JP98 / 03390 371 1999年3月23日 102（e）1999年3月23日PCT PCT 1998年7月30日PCT公布。 出版物WO99 /​​ 06740 日期1999年2月11日一种滚珠丝杠单元，包括在其外周面上具有螺旋形滚珠槽的螺杆，具有由与螺杆的滚珠滚动槽相对的螺旋载荷滚动槽形成的载荷区的螺母组件， 通过建立负载区的起始端和终止端之间的连通，在螺母组件的环形轨道内滚动的多个滚珠和由联接构件保持球的球联接器构成的无负载区域形成球环形履带 在其对准状态下旋转，其中用于引导球联接器的联接构件的引导槽形成在球环形轨道的加载区域中，使得球联接器的联接构件通过球形连接器中的每个球移动， 环形轨道的负载区域，而每个球被引导到环形轨道的空载区域中的球形联轴器的联接构件移动，以及用于引导球c 至少在装载区域附近的空载区域的两端分别设置球联接器沿着在负载区域中移动的球的前进方向的耦合构件。 因此，根据本发明，滚珠的传送和接收在球环形履带的载荷区域和空载区域之间平滑地进行，从而实现球的平稳循环。

公开(公告)号：US6054373A

公开(公告)日：2000-04-25

申请号：US6996

申请日：1998-01-14

申请人： Hiroshi Tomita ,  Hisashi Muraoka ,  Ryuji Takeda

发明人： Hiroshi Tomita ,  Hisashi Muraoka ,  Ryuji Takeda

IPC分类号： H01L21/304 ,  H01L21/00 ,  H01L21/322

CPC分类号： H01L21/67057 ,  H01L21/3221

摘要： A method of removing metallic impurities diffused in a semiconductor substrate, comprising, the semiconductor-substrate-heating step of heating a semiconductor substrate to at least 200.degree. C. or higher and promoting the release and rediffusion of metallic impurities diffused in the semiconductor substrate, and the metallic-impurity-removing step of dissolving the metallic impurities arrived at the surface of the semiconductor substrate with a chemical agent and removing them from the substrate.

摘要翻译： 一种去除在半导体衬底中扩散的金属杂质的方法，包括将半导体衬底加热到​​至少200℃或更高并促进在半导体衬底中扩散的金属杂质的释放和再扩散的半导体衬底加热步骤， 以及金属杂质去除步骤，用金属杂质去除步骤，用化学试剂将金属杂质溶解到半导体衬底的表面，并将其从衬底上除去。

公开(公告)号：US08642449B2

公开(公告)日：2014-02-04

申请号：US12940754

申请日：2010-11-05

申请人： Takashi Watanabe ,  Ryuji Takeda

发明人： Takashi Watanabe ,  Ryuji Takeda

IPC分类号： H01L21/322 ,  H01L21/20 ,  H01L21/36 ,  H01L33/00 ,  H01B1/12 ,  C30B15/00 ,  C30B21/06 ,  C30B27/02 ,  C30B28/10 ,  C30B30/04 ,  C30B23/00 ,  C30B25/00 ,  C30B28/12 ,  C30B28/14

CPC分类号： H01L21/3225 ,  C30B25/20 ,  C30B29/06 ,  C30B31/06 ,  C30B33/02 ,  C30B33/04 ,  H01L21/3221

摘要： A silicon wafer which has DZ layers formed on both sides thereof by heat treatment in an atmosphere of reducing gas (such as hydrogen) or rare gas (such as argon) with a specific temperature profile for heating, holding, and cooling, and which also has a gettering site of BMD in the bulk inside the DZ layer. A silicon wafer which has a silicon epitaxial layer formed on one side thereof. The DZ layer and the silicon epitaxial layer contain dissolved oxygen introduced into their surface parts, with the concentration and distribution of dissolved oxygen properly controlled. Introduction of oxygen into the surface part is accomplished by heat treatment and ensuing rapid cooling in an atmosphere of oxygen-containing gas.

摘要翻译： 通过在还原性气体（例如氢气）或稀有气体（例如氩气）的气氛中进行热处理，具有用于加热，保持和冷却的特定温度特性，在其两侧形成DZ层的硅晶片，并且还 在DZ层内有大量的BMD吸气点。 硅晶片，其一侧形成硅外延层。 DZ层和硅外延层含有引入其表面部分的溶解氧，适当控制溶解氧的浓度和分布。 将氧气引入表面部分是通过热处理实现的，并且随后在含氧气体的气氛中快速冷却。

公开(公告)号：US06341103B1

公开(公告)日：2002-01-22

申请号：US09500215

申请日：2000-02-08

申请人： Ryuji Takeda ,  Seiichiro Oishi ,  Tetsuhiro Shiomi

发明人： Ryuji Takeda ,  Seiichiro Oishi ,  Tetsuhiro Shiomi

IPC分类号： G11B1722

CPC分类号： G11B7/08505 ,  G11B7/08582

摘要： A slide-feed drive part (27) uses a stepping motor as a slide-feed motor for changing the position of a optical pick-up (3) with respect to the rotation surface of an optical disk (1), and has a micro-controller (31) provided therein and a slide-feed motor controller (32) both for correcting drive current waveforms to drive the stepping motor. Therefore, by correcting the motor driving waveforms, the optical pick-up (3) can be linearly moved with respect to the rotation of the slide-feed motor (14). It is thereby possible to do away with a position sensor and make a fine positional control of the optical pick-up (3) with no variation. As a result of this, it is possible to provide an optical disk driving apparatus, an optical disk driving method, and an optical disk apparatus, which enhances the linearity of the rotation of the motor with a simple construction.

摘要翻译： 滑动进给驱动部件（27）使用步进电机作为滑动进给电动机，用于相对于光盘（1）的旋转表面改变光学拾取器（3）的位置，并且具有微型 - 控制器（31）和用于校正驱动电流波形以驱动步进电机的滑动进给电动机控制器（32）。 因此，通过校正电动机驱动波形，光学拾取器（3）可以相对于滑动进给电动机（14）的旋转而线性移动。 从而可以避免位置传感器，并且不会发生变化而对光学拾取器（3）进行精细的位置控制。 结果，可以提供一种光盘驱动装置，光盘驱动方法和光盘装置，其以简单的结构提高电动机的旋转的线性。

公开(公告)号：US06282971B1

公开(公告)日：2001-09-04

申请号：US09332110

申请日：1999-06-14

申请人： Takeki Shirai ,  Shigeru Ebina ,  Ryuji Takeda

发明人： Takeki Shirai ,  Shigeru Ebina ,  Ryuji Takeda

IPC分类号： F16H2522

CPC分类号： F16H25/2214 ,  Y10T74/19772

摘要： A ball screw comprises a screw shaft formed on an outer peripheral surface thereof with a spiral ball rolling groove, a nut member having an inner peripheral surface on which a spiral loaded ball rolling groove corresponding to the spiral ball rolling groove of the screw shaft is formed, both the spiral grooves constituting a loaded ball rolling passage in combination thereof when the screw shaft is fitted to the nut member, a number of balls rolling in the loaded ball rolling passage, and a return pipe having one end connected to one end of the loaded ball rolling passage and another end connected to another end of the loaded ball rolling passage so as to scoop the balls rolling in the loaded ball rolling passage at the one end of the return pipe and return the balls to the loaded ball rolling passage at the other one end of the return pipe. Cutouts, each having a width gradually reduced, are formed to both end portions of the return pipe so that the width of the cutout is gradually reduced towards the inside of the return pipe.

摘要翻译： 滚珠丝杠包括在其外周面上形成有螺旋滚珠滚动槽的螺杆轴，具有内周面的螺母部件，螺旋滚珠滚珠槽与丝杠轴的螺旋滚珠滚动槽对应， 当将螺杆轴装配到螺母构件上时，构成负载球滚动通道的螺旋槽两者，在负载球滚动通道中滚动的多个滚珠，以及一端连接到所述螺母槽的一端的回流管 另一端连接到负载球滚动通道的另一端，以便在回流管的一端舀取在负载滚珠滚动通道中滚动的滚珠，并将滚珠返回到负载球滚动通道 回流管的另一端。 在返回管的两端部形成有宽度逐渐减小的切口，使得切口的宽度朝向返回管的内侧逐渐减小。