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公开(公告)号：US20100298995A1
公开(公告)日：2010-11-25
申请号：US12773441
申请日：2010-05-04
申请人： Tie Ling Zhang , Yu Zhou , Khoon Peng Lim , Bung Chai Chin , Pey Yen Siew , Jiann Yi Ho , Wan Ying Chen , Jiun Keat Ong , Kiran Kishan Rao Nandedkar
发明人： Tie Ling Zhang , Yu Zhou , Khoon Peng Lim , Bung Chai Chin , Pey Yen Siew , Jiann Yi Ho , Wan Ying Chen , Jiun Keat Ong , Kiran Kishan Rao Nandedkar
IPC分类号： G06F19/00
CPC分类号： F03D7/042 , F03D7/0292 , F03D17/00 , F05B2260/821 , F05B2270/32 , F05B2270/321 , F05B2270/332 , Y02E10/723
摘要： Methods and systems for controlling operation of a wind turbine. The method may comprise determining an alarm level for at least one component of the wind turbine. In the case that an alarm level for at least one component exceeds a predefined level, the method comprises estimating an expected remaining lifetime for the component under the current operating conditions, and controlling operation of the wind turbine in order to adjust the expected remaining lifetime for the component to a desired expected remaining lifetime for said component. Thereby, the expected remaining lifetime for the component can be prolonged until the next scheduled service event. Downtime of the wind turbine is considerably reduced, and unscheduled service events are avoided to the greatest possible extent. Mean time between inspections (MTBI) is also extended.
摘要翻译： 控制风力发电机运行的方法和系统。 该方法可以包括确定风力涡轮机的至少一个部件的报警水平。 在至少一个组件的报警水平超过预定水平的情况下，该方法包括在当前操作条件下估计该组件的预期剩余寿命，以及控制风力涡轮机的运行，以便调整预期的剩余寿命 所述组件到所述组件的期望的预期剩余寿命。 因此，可以将组件的预期剩余寿命延长到下一个计划的服务事件。 风力涡轮机的停机时间大大减少，并且在最大程度上避免了非计划的服务事件。 检查之间的平均时间（MTBI）也延长了。
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公开(公告)号：US20090249880A1
公开(公告)日：2009-10-08
申请号：US12080893
申请日：2008-04-07
申请人： Khoon Peng Lim
发明人： Khoon Peng Lim
IPC分类号： G01M7/02
CPC分类号： G01M7/025
摘要： Methods and systems for detecting wafer shift/slide in a semiconductor process chamber have been disclosed. The vibration amplitude is measured in terms of acceleration because an increase in vibrational acceleration correlates with an increase of displacement of a wafer. The vibration of a chamber is measured. External vibratory forces acting on the chamber may be transmitted to the wafer inside the chamber. The methods/systems determine if there is a net resultant force that may cause an unconstrained wafer to move from its original position in a chamber by measuring the relative chamber vibrations in three orthogonal directions. A tri-axial or three uni-axial accelerometers are mounted on a preferably exterior wall of the chamber to measure its vibration amplitude. The signal obtained as a function of time is then compared against a predetermined alarm amplitude to provide notification for corrective action.
摘要翻译： 已经公开了用于检测半导体处理室中的晶片移位/滑动的方法和系统。 由于振动加速度的增加与晶片的位移增大有关，因此以加速度来测量振动幅度。 测量室的振动。 作用在室上的外部振动力可以传递到室内的晶片。 方法/系统确定是否存在可能通过测量三个正交方向上的相对室振动而导致无约束晶片从其原始位置移动到室中的净合力。 三轴或三个单向加速度计安装在室的优选外壁上以测量其振幅。 然后将作为时间的函数获得的信号与预定的报警幅度进行比较，以提供纠正措施的通知。
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公开(公告)号：US07750819B2
公开(公告)日：2010-07-06
申请号：US12080893
申请日：2008-04-07
申请人： Khoon Peng Lim
发明人： Khoon Peng Lim
IPC分类号： G08B21/00
CPC分类号： G01M7/025
摘要： Methods and systems for detecting wafer shift/slide in a semiconductor process chamber have been disclosed. The vibration amplitude is measured in terms of acceleration because an increase in vibrational acceleration correlates with an increase of displacement of a wafer. The vibration of a chamber is measured. External vibratory forces acting on the chamber may be transmitted to the wafer inside the chamber. The methods/systems determine if there is a net resultant force that may cause an unconstrained wafer to move from its original position in a chamber by measuring the relative chamber vibrations in three orthogonal directions. A tri-axial or three uni-axial accelerometers are mounted on a preferably exterior wall of the chamber to measure its vibration amplitude. The signal obtained as a function of time is then compared against a predetermined alarm amplitude to provide notification for corrective action.
摘要翻译： 已经公开了用于检测半导体处理室中的晶片移位/滑动的方法和系统。 由于振动加速度的增加与晶片的位移增大有关，因此以加速度来测量振动幅度。 测量室的振动。 作用在室上的外部振动力可以传递到室内的晶片。 方法/系统确定是否存在可能通过测量三个正交方向上的相对室振动而导致无约束晶片从其原始位置移动到室中的净合力。 三轴或三个单向加速度计安装在室的优选外壁上以测量其振幅。 然后将作为时间的函数获得的信号与预定的报警幅度进行比较，以提供纠正措施的通知。
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公开(公告)号：US07163435B2
公开(公告)日：2007-01-16
申请号：US11047117
申请日：2005-01-31
申请人： Khoon Peng Lim , Kok Eng Lee
发明人： Khoon Peng Lim , Kok Eng Lee
CPC分类号： B24B53/017 , B24B49/003
摘要： CMP pad conditioning processes have been monitored and controlled by detecting the vibrational spectrum of a sensor mounted on the conditioner support arm. An accelerometer is used as the detector so that vibrational velocity (which correlates with pad wear) can be measured, rather than displacement or acceleration. After the vibrational spectrum has been transformed to its frequency domain equivalent, it is monitored for the presence of abnormal peaks in order to control the conditioning process.
摘要翻译： 已经通过检测安装在调节器支撑臂上的传感器的振动谱来监测和控制CMP垫调节过程。 使用加速度计作为检测器，从而可以测量振动速度（与焊盘磨损相关），而不是位移或加速度。 在将振动谱转换为其频域等效物之后，监测异常峰的存在以控制调节过程。
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公开(公告)号：US08577509B2
公开(公告)日：2013-11-05
申请号：US12820194
申请日：2010-06-22
申请人： Jiun Keat Ong , Tie Ling Zhang , Yu Zhou , Khoon Peng Lim , Wan Ying Chen , Pey Yen Siew , Kiran Kishan Rao Nandedkar , Jiann Yi Ho , Bung Chai Chin
发明人： Jiun Keat Ong , Tie Ling Zhang , Yu Zhou , Khoon Peng Lim , Wan Ying Chen , Pey Yen Siew , Kiran Kishan Rao Nandedkar , Jiann Yi Ho , Bung Chai Chin
CPC分类号： G05B23/0283 , F03D7/0292 , F03D7/042 , F03D17/00 , F05B2270/109 , F05B2270/32 , F05B2270/321 , F05B2270/332 , F05B2270/334 , G05B13/024 , G06Q10/00 , G06Q10/0637 , G06Q10/20 , Y02E10/723 , Y02E10/726 , Y02E40/76 , Y02P90/86 , Y04S10/54 , Y04S10/545
摘要： A method and a system for controlling operation of a wind turbine are provided. The method includes determining at least one failure mode relating to one or more components of the wind turbine, estimating a remaining lifetime of the component under current operating conditions, determining one or more control schemes to control the operation of the wind turbine in order to adjust the remaining lifetime of the component to a desired remaining lifetime of the component, determining a power production yield for the determined one or more control schemes and selecting a determined control scheme for controlling the operation of the wind turbine that maximizes the power production yield.
摘要翻译： 提供了一种用于控制风力涡轮机的操作的方法和系统。 该方法包括确定与风力涡轮机的一个或多个部件相关的至少一个故障模式，估计当前操作条件下的部件的剩余寿命，确定一个或多个控制方案以控制风力涡轮机的操作以便调整 将组件的剩余寿命延长到组件的期望的剩余寿命，确定所确定的一个或多个控制方案的功率产出产量，并且选择确定的控制方案以控制最大化发电产量的风力涡轮机的运行。
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6.发明申请公开(公告)号：US20100148507A1
公开(公告)日：2010-06-17
申请号：US12636091
申请日：2009-12-11
IPC分类号： H02P9/04
CPC分类号： F03D7/042 , F03D7/0292 , F03D7/0296 , F03D15/00 , F03D17/00 , F03D80/70 , F05B2260/845 , F05B2270/334 , Y02E10/723
摘要： A method for controlling the operation of a wind turbine includes determining a first measure of a mechanical input of a component of the wind turbine, and concurrently, determining a second measure of a mechanical output of the component, determining an operating frequency response function of the component from an analysis of the relation between the first measure and the second measure, comparing the operating frequency response function with a predetermined operating frequency response function and determining a possible deviation between the two, and controlling the operation of the wind turbine so as to alter the mechanical input to the component in response to the deviation. A wind turbine that implements such a method is also disclosed.
摘要翻译： 用于控制风力涡轮机的操作的方法包括确定风力涡轮机的部件的机械输入的第一测量，以及同时确定部件的机械输出的第二测量，确定所述风力涡轮机的操作频率响应功能 从第一测量和第二测量之间的关系的分析中分析操作频率响应函数与预定的操作频率响应函数并确定两者之间的可能偏差，并且控制风力涡轮机的操作以便改变 响应于偏差对组件的机械输入。 还公开了实现这种方法的风力涡轮机。
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公开(公告)号：US20100126115A1
公开(公告)日：2010-05-27
申请号：US12340091
申请日：2008-12-19
申请人： Khoon Peng Lim , Lie Ling Zhang , Pey Yen Siew , Xiao Qian Li
发明人： Khoon Peng Lim , Lie Ling Zhang , Pey Yen Siew , Xiao Qian Li
CPC分类号： G01M5/0041 , E04H12/085 , F03D13/20 , F03D17/00 , F05B2220/709 , F05B2240/912 , F05B2260/80 , G01M5/0083 , Y02E10/728
摘要： A wind turbine installation monitoring device, for detecting relative movement between two adjacent components of a wind turbine installation is provided. The device comprises a deformable member together with a securing device. The securing device is configured to enable the device to be connectable to a wind turbine installation, in use. The deformable member is located across an interface between the adjacent components of a wind turbine installation. Further, a detection device is provided and configured to detect deflection of the deformable member and thereby to detect relative movement between the two components.
摘要翻译： 提供了一种用于检测风力涡轮机装置的两个相邻部件之间的相对运动的风力涡轮机安装监视装置。 该装置包括可变形构件以及固定装置。 固定装置构造成使得该装置能够在使用中与风力涡轮机装置连接。 可变形构件位于风力涡轮机装置的相邻部件之间的界面上。 此外，检测装置被设置和配置为检测可变形部件的偏转，从而检测两个部件之间的相对运动。
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8.发明授权公开(公告)号：US07248975B2
公开(公告)日：2007-07-24
申请号：US11230386
申请日：2005-09-20
申请人： Khoon Peng Lim , Lai Seng Foo
发明人： Khoon Peng Lim , Lai Seng Foo
IPC分类号： G06F19/00
CPC分类号： H01L21/67115 , H01L21/67253 , H01L21/67288
摘要： An apparatus and method for use is described which permits real time monitoring of build-up of particulate contamination in a wafer processing chamber. The apparatus is capable of monitoring particle build up in regions of a processing chamber which are not accessible by traditional optical particle scanners. An accelerometer is fastened to a body in the chamber upon which particulates deposit. The body is subjected to vibrations and produces a vibration signal which is detected by the accelerometer. The signal is processed to form a frequency spectrum of vibration amplitudes. Frequencies in a selected band are directly proportional to the particulate build up on the body. The invention is applied to a wafer annealing tool with a rotatable platform wherein particles deposit on a support body under the wafer. The method and apparatus have been shown to be reliable and accurate as well as cost effective and easily implemented.
摘要翻译： 描述了一种使用的装置和方法，其允许对晶片处理室中的颗粒污染物的累积进行实时监测。 该装置能够监测处理室的不能被传统光学粒子扫描仪访问的区域中的颗粒积聚。 一个加速度传感器被固定在腔室内的一个物体上，颗粒沉积在其上。 身体受到振动并产生由加速度计检测到的振动信号。 信号被处理以形成振幅的频谱。 所选频带中的频率与身体上的颗粒积聚成正比。 本发明应用于具有可旋转平台的晶片退火工具，其中颗粒沉积在晶片下方的支撑体上。 该方法和装置已经被证明是可靠和准确的以及成本有效且容易实现的。
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公开(公告)号：US10031048B2
公开(公告)日：2018-07-24
申请号：US13807426
申请日：2011-06-27
申请人： Khoon Peng Lim , Yu Zhou , Wanying Chen
发明人： Khoon Peng Lim , Yu Zhou , Wanying Chen
摘要： A method for performing condition monitoring on a plurality of wind turbines of a wind farm comprises for each wind turbine, obtaining at least one vibration signal representing vibrations of one or more monitored components; generating a plurality of faulty frequency indexes on the basis of one or more of the obtained vibration signals, and in such a manner that variations in rotational speed of one or more rotating shafts of the wind turbine are filtered; comparing faulty frequency indexes originating from different wind turbines; and determining the condition of each of the monitored components based on the comparison.
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公开(公告)号：US20110254282A1
公开(公告)日：2011-10-20
申请号：US13130439
申请日：2009-11-20
申请人： Khoon Peng Lim , Tieling Zhang , Pey Yen Siew , Xiao Qian Li
发明人： Khoon Peng Lim , Tieling Zhang , Pey Yen Siew , Xiao Qian Li
CPC分类号： G01M5/0041 , E04H12/085 , F03D13/20 , F03D17/00 , F05B2220/709 , F05B2240/912 , F05B2260/80 , G01M5/0083 , Y02E10/728
摘要： A wind turbine installation monitoring device, for detecting relative movement between two adjacent components of a wind turbine installation is provided. The device comprises a deformable member together with securing means. The securing means is configured to enable the device to be connectable to a wind turbine installation, in use. The deformable member is located across an interface between the adjacent components of a wind turbine installation. Further, detection means are provided and are configured to detect deflection of the deformable member and thereby to detect relative movement between the two components.
摘要翻译： 提供了一种用于检测风力涡轮机装置的两个相邻部件之间的相对运动的风力涡轮机安装监视装置。 该装置包括与固定装置一起的可变形构件。 固定装置构造成使得该装置能够在使用中可连接到风力涡轮机装置。 可变形构件位于风力涡轮机装置的相邻部件之间的界面上。 此外，提供检测装置并且被配置为检测可变形部件的偏转，从而检测两个部件之间的相对运动。
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