公开(公告)号：US20120299117A1

公开(公告)日：2012-11-29

申请号：US13477632

申请日：2012-05-22

申请人： Ki Hong LEE ,  Seung Ho Pyi ,  Sung Chui Shin

发明人： Ki Hong LEE ,  Seung Ho Pyi ,  Sung Chui Shin

IPC分类号： H01L27/088 ,  H01L21/20

CPC分类号： H01L27/115 ,  H01L27/1157 ,  H01L27/11582 ,  H01L29/7926

摘要： A 3-dimensional (3-D) non-volatile memory device includes a first channel protruding from a substrate, a selection gate formed on sidewalls of the first channel and in an L shape, and a gate insulating layer interposed between the first channel and the selection gate and surrounding the first channel. A method of manufacturing a 3-D non-volatile memory device includes forming first channels protruding from a substrate, forming a first gate insulating layer surrounding the first channels, and forming first selection gates having an L shape on sidewalls of the first channels on which the first gate insulating layers are formed.

摘要翻译： 三维（3-D）非易失性存储装置包括从基板突出的第一通道，形成在第一通道的侧壁上且呈L形的选择栅极，以及插入在第一通道和第二通道之间的栅极绝缘层 选择门和围绕第一通道。 一种制造3-D非易失性存储器件的方法包括形成从衬底突出的第一通道，形成围绕第一通道的第一栅极绝缘层，以及在第一通道的侧壁上形成具有L形形状的第一选择栅极， 形成第一栅极绝缘层。

公开(公告)号：US20130320424A1

公开(公告)日：2013-12-05

申请号：US13601396

申请日：2012-08-31

申请人： Ki Hong LEE ,  Seung Ho PYI ,  Seok Min JEON

发明人： Ki Hong LEE ,  Seung Ho PYI ,  Seok Min JEON

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L27/11578 ,  H01L27/11519 ,  H01L27/11553 ,  H01L27/11556 ,  H01L27/11565 ,  H01L27/1158 ,  H01L27/11582 ,  H01L27/12 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/7889 ,  H01L29/7926

摘要： A semiconductor device includes a first source layer; at least one of a second source layer, the second source layer formed substantially in the first source layer; a plurality of conductive layers stacked substantially over the first source layer; channel layers that pass through the plurality of conductive layers and couple to the second source layer; and at least one of a third source layer, the third source layer formed substantially in the second source layer, wherein the third source layer passes through the second source layer and is coupled to the first source layer.

摘要翻译： 半导体器件包括第一源极层; 第二源层中的至少一个，第二源极层基本上形成在第一源极层中; 基本上层叠在所述第一源极层上的多个导电层; 沟道层，其穿过所述多个导电层并耦合到所述第二源极层; 以及第三源层中的至少一个，所述第三源极层基本上形成在所述第二源极层中，其中所述第三源极层穿过所述第二源极层并且耦合到所述第一源极层。

公开(公告)号：US20130153978A1

公开(公告)日：2013-06-20

申请号：US13598528

申请日：2012-08-29

申请人： Ki Hong LEE ,  Seung Ho PYI ,  Seok Min JEON

发明人： Ki Hong LEE ,  Seung Ho PYI ,  Seok Min JEON

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L27/11582 ,  H01L29/66833 ,  H01L29/7926

摘要： A 3D non-volatile memory device includes a pipe gate, at least one first channel layer including a first pipe channel layer formed in the pipe gate and a pair of first source side channel layer and first drain side channel layer connected to the first pipe channel layer, and at least one second channel layer including a second pipe channel layer formed in the pipe gate and positioned over the first pipe channel layer and a pair of second source side channel layer and second drain side channel layer connected to the second pipe channel layer.

公开(公告)号：US20130009229A1

公开(公告)日：2013-01-10

申请号：US13537650

申请日：2012-06-29

申请人： Ki Hong LEE ,  Seung Ho PYI ,  Jung Yun CHANG

发明人： Ki Hong LEE ,  Seung Ho PYI ,  Jung Yun CHANG

IPC分类号： H01L27/088 ,  H01L21/8239

CPC分类号： H01L27/11582 ,  H01L21/31111 ,  H01L21/32133 ,  H01L27/11519 ,  H01L27/11556 ,  H01L27/11565 ,  H01L27/1157 ,  H01L29/1037 ,  H01L29/66833 ,  H01L29/7926

摘要： A semiconductor device includes memory blocks each configured to comprise a pair of channels, each channel including a pipe channel formed in a pipe gate of the memory block and a drain-side channel and a source-side channel coupled to the pipe channel; first slits placed between the memory blocks adjacent to other memory blocks; and a second slit placed between the source-side channel and the drain-side channel of each pair of channels.

摘要翻译： 半导体器件包括各自被配置为包括一对通道的存储器块，每个通道包括形成在存储器块的管道中的管道通道和与管道通道耦合的漏极侧通道和源极通道; 位于与其他存储块相邻的存储块之间的第一狭缝; 以及设置在每对通道的源极侧通道和漏极侧通道之间的第二狭缝。

公开(公告)号：US20140015057A1

公开(公告)日：2014-01-16

申请号：US13599148

申请日：2012-08-30

申请人： Ki Hong LEE ,  Seung Ho PYI ,  Sung Ik MOON

发明人： Ki Hong LEE ,  Seung Ho PYI ,  Sung Ik MOON

IPC分类号： H01L27/088 ,  H01L21/336

CPC分类号： H01L27/11582 ,  H01L21/0332 ,  H01L27/11548 ,  H01L27/11556 ,  H01L27/11575

摘要： A semiconductor device includes a cell structure; n first pad structures formed on one side of the cell structure and each configured to have a step form in which 2n layers form one stage; and n second pad structures formed on the other side of the cell structure each configured to have a step form in which 2n layers form one stage, wherein n is a natural number of 1 or higher, and the first pad structures and the second pad structures have asymmetrical step forms having different heights.

摘要翻译： 半导体器件包括单元结构; n个第一衬垫结构，形成在单元结构的一侧，并且每个构造成具有其中2n层形成一个阶段的阶梯形式; 以及形成在所述电池结构的另一侧上的n个第二焊盘结构，每个被配置为具有其中2n层形成一个级的阶梯形式，其中n是1或更高的自然数，并且所述第一焊盘结构和所述第二焊盘结构 具有不同高度的不对称步骤形式。

公开(公告)号：US20130240994A1

公开(公告)日：2013-09-19

申请号：US13598604

申请日：2012-08-29

申请人： Ki Hong LEE ,  Seung Ho Pyi ,  Il Young Kwon

发明人： Ki Hong LEE ,  Seung Ho Pyi ,  Il Young Kwon

IPC分类号： H01L29/423 ,  H01L21/28

CPC分类号： H01L27/11582 ,  H01L21/76802 ,  H01L21/76841 ,  H01L21/76877 ,  H01L29/4238 ,  H01L29/66833 ,  H01L29/7926

摘要： A semiconductor device includes a substrate, and a gate line, located over the substrate, which includes a first conductive layer and one or more second conductive pattern layers located in the first conductive layer. The second conductive pattern layer comprises a metal layer to thus reduce resistance of a gate line.

公开(公告)号：US20130207182A1

公开(公告)日：2013-08-15

申请号：US13600190

申请日：2012-08-30

申请人： Ki Hong LEE ,  Seung Ho PYI ,  Jin Ho BIN

发明人： Ki Hong LEE ,  Seung Ho PYI ,  Jin Ho BIN

IPC分类号： H01L21/20 ,  H01L29/78

CPC分类号： H01L27/11582

摘要： A semiconductor device includes vertical channel layers, a pipe channel layer coupling bottoms of the vertical channel layers, a pipe gate contacting a bottom surface and side surfaces of the pipe channel layer, and a dummy pipe gate formed of a non-conductive material and contacting a top surface of the pipe channel layer.

摘要翻译： 半导体器件包括垂直沟道层，连接垂直沟道层的底部的管道沟道层，与底部表面接触的管道和管道沟道层的侧表面，以及由非导电材料形成的虚拟管栅极和接触 管道通道层的顶表面。

公开(公告)号：US20130193503A1

公开(公告)日：2013-08-01

申请号：US13602038

申请日：2012-08-31

申请人： Ki Hong LEE ,  Seung Ho PYI ,  Hyun Soo SHON

发明人： Ki Hong LEE ,  Seung Ho PYI ,  Hyun Soo SHON

IPC分类号： H01L29/792 ,  H01L21/336

CPC分类号： H01L27/11582 ,  H01L27/11573

摘要： A semiconductor device includes: vertical channel layers; a pipe channel layer configured to connect lower ends of the vertical channel layers; and a pipe gate surrounding the pipe channel layer and including a first region, which is in contact with the pipe channel layer and includes a first-type impurity, and remaining second regions including a second-type impurity different from the first type impurity.

公开(公告)号：US20130161731A1

公开(公告)日：2013-06-27

申请号：US13601355

申请日：2012-08-31

申请人： Jin Ho BIN ,  Ki Hong LEE

发明人： Jin Ho BIN ,  Ki Hong LEE

IPC分类号： H01L21/336 ,  H01L29/78

CPC分类号： H01L29/7926 ,  H01L27/1158 ,  H01L27/11582 ,  H01L29/66833 ,  H01L29/78

摘要： A three-dimensional (3D) semiconductor device includes first interlayer dielectric layers and word lines that are alternately stacked on a substrate; select lines formed on the first interlayer dielectric layers and the word lines; etch stop patterns formed on the select lines to contact the select lines; channel holes formed to pass through the select lines, the first interlayer dielectric layers, and the word lines; channel layers formed on surfaces of the channel holes; insulating layers formed in the channel holes, the insulating layers having an upper surface that is lower than upper surfaces of the etch stop patterns; impurity-doped layers formed in channel holes on upper surface of the insulating layers; and a second interlayer dielectric layer formed over the etch stop patterns and the impurity-doped layers.

摘要翻译： 三维（3D）半导体器件包括交替堆叠在衬底上的第一层间电介质层和字线; 形成在第一层间电介质层和字线上的选择线; 形成在选择线上以接触选择线的蚀刻停止图案; 形成为通过选择线，第一层间电介质层和字线的通道孔; 通道层形成在通道孔的表面上; 绝缘层形成在通道孔中，绝缘层具有比蚀刻停止图案的上表面低的上表面; 在绝缘层的上表面的通道孔中形成杂质掺杂层; 以及形成在蚀刻停止图案和杂质掺杂层之上的第二层间介电层。

公开(公告)号：US20130009239A1

公开(公告)日：2013-01-10

申请号：US13542853

申请日：2012-07-06

申请人： Ki Hong LEE ,  In Su Park

发明人： Ki Hong LEE ,  In Su Park

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L27/11582

摘要： A 3-D non-volatile memory device includes a pipe gate having a first trench formed therein, word lines stacked in multiple layers over the pipe gate, second trenches coupled to the first trench and formed to penetrate the word lines, a first channel layer formed within the first trench, and second channel layers formed within the second trenches, respectively, and coupled to the first channel layer, wherein the width or depth of the first trench is smaller than the diameter of each of the second trenches.

摘要翻译： 3-D非易失性存储器件包括：管栅，其中形成有第一沟槽，多个层叠在管栅上的字线;耦合到第一沟槽并形成为穿透字线的第二沟槽;第一沟道层 形成在所述第一沟槽内，以及分别在所述第二沟槽内形成并耦合到所述第一沟道层的第二沟道层，其中所述第一沟槽的宽度或深度小于所述第二沟槽中的每一个的直径。