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    Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist
    1.
    发明申请
    Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist 审中-公开
    使用混合抗蚀剂制造图案化记录介质的主压模/打印机的方法

    公开(公告)号：US20080113157A1

    公开(公告)日：2008-05-15

    申请号：US11595894

    申请日：2006-11-13

    申请人： Kim Y. Lee ,  Hong Ying Wang ,  Shih-Fu Lee ,  David S. Kuo ,  Koichi Wago ,  Dieter K. Weller

    发明人： Kim Y. Lee ,  Hong Ying Wang ,  Shih-Fu Lee ,  David S. Kuo ,  Koichi Wago ,  Dieter K. Weller

    IPC分类号： G03F7/00 ,  B32B3/00

    CPC分类号： G03F7/095 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10T428/24355

    摘要： A method of fabricating a master stamper/imprinter for manufacturing a patterned recording medium by nano-imprint lithography comprises steps of: (a) providing a substrate having a surface; (b) forming a layer of a hybrid resist material on the surface, the resist layer having an exposed upper surface; (c) subjecting selected areas of the exposed upper surface of the resist layer to an energy beam to form therein a latent image of a topographical pattern to be formed in the resist layer and having a correspondence to a pattern to be formed in a patterned recording medium; and (d) developing the latent image into the topographical pattern in the resist layer, wherein only those areas of the resist layer which have received an energy beam exposure dose between a positive-tone threshold dose D0p and a negative-tone threshold dose D0n are developed.

    摘要翻译： 制造用于通过纳米压印光刻制造图案化记录介质的主压模/印刷机的方法包括以下步骤：（a）提供具有表面的基板; （b）在所述表面上形成混合抗蚀剂材料层，所述抗蚀剂层具有暴露的上表面; （c）使抗蚀剂层的暴露的上表面的选定区域能量束在其中形成要在抗蚀剂层中形成的形貌图案的潜像，并且与图案化记录中形成的图案对应 中; 并且（d）将潜像显影成抗蚀剂层中的形貌图案，其中只有已经接收了能量束曝光的抗蚀剂层的那些区域剂量在正音阈值剂量D 0 P 0和 开发出负色调阈值剂量D 0n 。

    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media
    5.
    发明授权
    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media 有权
    极化状态检测器系统和读取多层导向纳米结构光学介质的方法

    公开(公告)号：US07889616B2

    公开(公告)日：2011-02-15

    申请号：US11366569

    申请日：2006-03-03

    申请人： David S. Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    发明人： David S. Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    IPC分类号： G11B7/00

    CPC分类号： G11B7/1398 ,  G11B7/131 ,  G11B7/1395 ,  G11B7/24088

    摘要： A polarization detection system structured for optical read-out of disc-shaped optical data/information storage and retrieval media with surfaces comprised of pits or marks configured as multilevel oriented nano-structures (ONS) with varying pit or mark orientations and widths. The polarization detection system comprises: an optical beam source; a stage for mounting and rotating an optical disc medium about a central axis; at least one photodetector; a beam splitter positioned in an optical path between the source and stage, for directing an incident beam from the source onto an optical disc mounted on the stage and a return beam from the disc onto the photodetector; and an optical polarizer positioned in an optical path between the beam splitter and the at least one photodetector, for detection and analysis of changes in polarization of the return beam effected by variation of the orientation of the walls and/or widths of the pits or marks of the disc.

    摘要翻译： 一种偏振检测系统，其被构造用于光学读出盘形光学数据/信息存储和回收介质，其表面包括由具有不同凹坑或标记取向和宽度的多层定向纳米结构（ONS）构成的凹坑或标记。 偏振检测系统包括：光束源; 用于围绕中心轴线安装和旋转光盘介质的台架; 至少一个光电检测器; 位于源极和级之间的光路中的分束器，用于将来自源的入射光束引导到安装在平台上的光盘上，以及从光盘到光电检测器的返回光束; 以及位于分束器和至少一个光电检测器之间的光路中的光学偏振器，用于检测和分析通过壁的取向的变化和/或凹坑或标记的宽度来实现的返回光束的偏振变化 的光盘。

    Method for imprint lithography
    6.
    发明授权
    Method for imprint lithography 有权
    压印光刻方法

    公开(公告)号：US08771529B1

    公开(公告)日：2014-07-08

    申请号：US12894640

    申请日：2010-09-30

    申请人： Kim Yang Lee ,  Bing Yen ,  David Kuo ,  Koichi Wago ,  Shih-Fu Lee ,  Dieter Weller

    发明人： Kim Yang Lee ,  Bing Yen ,  David Kuo ,  Koichi Wago ,  Shih-Fu Lee ,  Dieter Weller

    IPC分类号： B44C1/22

    CPC分类号： B29C59/022 ,  G03F7/0002

    摘要： A method of imprint lithography includes imprinting a first pattern with a first template on a first substrate of a lithographic template. A second pattern is imprinted with a second template on the substrate of the lithographic template. The first pattern and the second pattern at least partially overlap, thus forming a third pattern. The third pattern is lithographically formed on a second substrate with the lithographic template. In an embodiment, the first pattern is a concentric line pattern formed by thin film deposition. In an embodiment, the second pattern is a radial line pattern. In an embodiment the first pattern and the second pattern may have line frequency increased.

    摘要翻译： 压印光刻的方法包括在光刻模板的第一衬底上印刷具有第一模板的第一图案。 第二图案在光刻模板的基底上印有第二模板。 第一图案和第二图案至少部分重叠，从而形成第三图案。 第三图案在具有光刻模板的第二基板上光刻形成。 在一个实施例中，第一图案是通过薄膜沉积形成的同心线图案。 在一个实施例中，第二图案是径向线图案。 在一个实施例中，第一图案和第二图案可以具有增加的线频率。

    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media
    7.
    发明申请
    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media 有权
    极化状态检测器系统和读取多层导向纳米结构光学介质的方法

    公开(公告)号：US20070206480A1

    公开(公告)日：2007-09-06

    申请号：US11366569

    申请日：2006-03-03

    申请人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    发明人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    IPC分类号： G11B7/00

    CPC分类号： G11B7/1398 ,  G11B7/131 ,  G11B7/1395 ,  G11B7/24088

    摘要： A polarization detection system structured for optical read-out of disc-shaped optical data/information storage and retrieval media with surfaces comprised of pits or marks configured as multilevel oriented nano-structures (ONS) with varying pit or mark orientations and widths. The polarization detection system comprises: an optical beam source; a stage for mounting and rotating an optical disc medium about a central axis; at least one photodetector; a beam splitter positioned in an optical path between the source and stage, for directing an incident beam from the source onto an optical disc mounted on the stage and a return beam from the disc onto the photodetector; and an optical polarizer positioned in an optical path between the beam splitter and the at least one photodetector, for detection and analysis of changes in polarization of the return beam effected by variation of the orientation of the walls and/or widths of the pits or marks of the disc.

    摘要翻译： 一种偏振检测系统，其被构造用于光学读出盘形光学数据/信息存储和回收介质，其表面包括由具有不同凹坑或标记取向和宽度的多层定向纳米结构（ONS）构成的凹坑或标记。 偏振检测系统包括：光束源; 用于围绕中心轴线安装和旋转光盘介质的台架; 至少一个光电检测器; 位于源极和级之间的光路中的分束器，用于将来自源的入射光束引导到安装在平台上的光盘上，以及从光盘到光电检测器的返回光束; 以及位于分束器和至少一个光电检测器之间的光路中的光学偏振器，用于检测和分析通过壁的取向的变化和/或凹坑或标记的宽度来实现的返回光束的偏振变化 的光盘。

    Contact printing of longitudinal magnetic media with perpendicularly applied magnetic field
    9.
    发明授权
    Contact printing of longitudinal magnetic media with perpendicularly applied magnetic field 失效
    用垂直磁场接触纵向磁性介质的印刷

    公开(公告)号：US06979524B2

    公开(公告)日：2005-12-27

    申请号：US10418124

    申请日：2003-04-18

    申请人： Koichi Wago ,  Shih-Fu Lee ,  Li-Ping Wang ,  Joseph Leigh

    发明人： Koichi Wago ,  Shih-Fu Lee ,  Li-Ping Wang ,  Joseph Leigh

    IPC分类号： G11B5/00 ,  G11B5/74 ,  G11B5/855 ,  G11B5/86 ,  G11B5/03

    CPC分类号： B82Y10/00 ,  G11B5/74 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865 ,  G11B2005/001 ,  Y10S428/90 ,  Y10T428/24248

    摘要： A method of forming a magnetic transition pattern in a longitudinal magnetic recording medium, comprising steps of: (a) providing a magnetic recording medium including a layer of a magnetic material having a surface comprised of a plurality of longitudinally extending magnetic domains; (b) contacting the surface of the layer of magnetic material with a topographically patterned imprinting surface of a stamper/imprinter formed of at least one high saturation magnetization, high permeability magnetic material; and (c) applying a unidirectional magnetic field perpendicular to the imprinting surface of the stamper/imprinter, the perpendicular magnetic field creating a longitudinal magnetic field component of sufficient strength to effect selective alignment of the magnetic domains of those portions of the layer of magnetic material which face the depressions of the imprinting surface while retaining the alignment of the magnetic domains of those portions of the layer of magnetic material which face the projections of the imprinting surface, the combination of portions forming a magnetic transition pattern replicating the topographical pattern of the imprinting surface.

    摘要翻译： 一种在纵向磁记录介质中形成磁转移图案的方法，包括以下步骤：（a）提供包括具有由多个纵向延伸磁畴构成的表面的磁性材料层的磁记录介质; （b）使磁性材料层的表面与由至少一种高饱和磁化强度高磁导率磁性材料形成的压模/冲击器的地形图案化压印表面接触; 并且（c）施加垂直于压模/冲压机的压印表面的单向磁场，垂直磁场产生足够强度的纵向磁场分量，以实现磁性材料层那些部分的磁畴的选择性对准 其面对压印表面的凹陷，同时保持面向压印表面的突起的磁性材料层的这些部分的磁畴的对准，形成复制印记的形貌图案的磁过渡图案的部分的组合 表面。

    Multilevel nano-structure optical media with oriented tracking marks
    10.
    发明申请
    Multilevel nano-structure optical media with oriented tracking marks 审中-公开
    具有定向跟踪标记的多层纳米结构光学介质

    公开(公告)号：US20070206453A1

    公开(公告)日：2007-09-06

    申请号：US11366609

    申请日：2006-03-03

    申请人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    发明人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    IPC分类号： G11B7/00

    CPC分类号： G11B7/0938 ,  B82Y10/00 ,  G11B7/00745 ,  G11B7/0906 ,  G11B7/0912 ,  G11B7/24088

    摘要： An optical data/information storage medium comprises a disk-shaped substrate with a data/information encoded surface having a plurality of concentric, radially spaced-apart data tracks formed therein, each of said data tracks comprising a plurality of spaced-apart, nano-dimensioned data pits or marks with different angular orientations with respect to a down-track direction of each data track. Each of the data tracks further comprises a plurality of spaced-apart, nano-dimensioned servo tracking pits or marks with a preselected angular orientation with respect to the down-track direction for use in obtaining radial error (RE) signals of a read-out head by means of radial push-pull (PP) or differential phase detection (DPD) tracking.

    摘要翻译： 光学数据/信息存储介质包括具有数据/信息编码表面的盘状衬底，其具有形成在其中的多个同心径向间隔开的数据轨道，每个所述数据轨道包括多个间隔开的纳米级衬底， 相对于每个数据轨道的下行方向，具有不同角取向的尺寸数据凹坑或标记。 每个数据轨道还包括多个间隔开的纳米尺寸的伺服跟踪凹坑或具有相对于下轨道方向的预选角度取向的标记，以用于获得读出的径向误差（RE）信号 通过径向推挽（PP）或差分相位检测（DPD）跟踪来实现。