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    Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist
    3.
    发明申请
    Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist 审中-公开
    使用混合抗蚀剂制造图案化记录介质的主压模/打印机的方法

    公开(公告)号：US20080113157A1

    公开(公告)日：2008-05-15

    申请号：US11595894

    申请日：2006-11-13

    申请人： Kim Y. Lee ,  Hong Ying Wang ,  Shih-Fu Lee ,  David S. Kuo ,  Koichi Wago ,  Dieter K. Weller

    发明人： Kim Y. Lee ,  Hong Ying Wang ,  Shih-Fu Lee ,  David S. Kuo ,  Koichi Wago ,  Dieter K. Weller

    IPC分类号： G03F7/00 ,  B32B3/00

    CPC分类号： G03F7/095 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10T428/24355

    摘要： A method of fabricating a master stamper/imprinter for manufacturing a patterned recording medium by nano-imprint lithography comprises steps of: (a) providing a substrate having a surface; (b) forming a layer of a hybrid resist material on the surface, the resist layer having an exposed upper surface; (c) subjecting selected areas of the exposed upper surface of the resist layer to an energy beam to form therein a latent image of a topographical pattern to be formed in the resist layer and having a correspondence to a pattern to be formed in a patterned recording medium; and (d) developing the latent image into the topographical pattern in the resist layer, wherein only those areas of the resist layer which have received an energy beam exposure dose between a positive-tone threshold dose D0p and a negative-tone threshold dose D0n are developed.

    摘要翻译： 制造用于通过纳米压印光刻制造图案化记录介质的主压模/印刷机的方法包括以下步骤：（a）提供具有表面的基板; （b）在所述表面上形成混合抗蚀剂材料层，所述抗蚀剂层具有暴露的上表面; （c）使抗蚀剂层的暴露的上表面的选定区域能量束在其中形成要在抗蚀剂层中形成的形貌图案的潜像，并且与图案化记录中形成的图案对应 中; 并且（d）将潜像显影成抗蚀剂层中的形貌图案，其中只有已经接收了能量束曝光的抗蚀剂层的那些区域剂量在正音阈值剂量D 0 P 0和 开发出负色调阈值剂量D 0n 。

    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media
    5.
    发明授权
    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media 有权
    极化状态检测器系统和读取多层导向纳米结构光学介质的方法

    公开(公告)号：US07889616B2

    公开(公告)日：2011-02-15

    申请号：US11366569

    申请日：2006-03-03

    申请人： David S. Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    发明人： David S. Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    IPC分类号： G11B7/00

    CPC分类号： G11B7/1398 ,  G11B7/131 ,  G11B7/1395 ,  G11B7/24088

    摘要： A polarization detection system structured for optical read-out of disc-shaped optical data/information storage and retrieval media with surfaces comprised of pits or marks configured as multilevel oriented nano-structures (ONS) with varying pit or mark orientations and widths. The polarization detection system comprises: an optical beam source; a stage for mounting and rotating an optical disc medium about a central axis; at least one photodetector; a beam splitter positioned in an optical path between the source and stage, for directing an incident beam from the source onto an optical disc mounted on the stage and a return beam from the disc onto the photodetector; and an optical polarizer positioned in an optical path between the beam splitter and the at least one photodetector, for detection and analysis of changes in polarization of the return beam effected by variation of the orientation of the walls and/or widths of the pits or marks of the disc.

    摘要翻译： 一种偏振检测系统，其被构造用于光学读出盘形光学数据/信息存储和回收介质，其表面包括由具有不同凹坑或标记取向和宽度的多层定向纳米结构（ONS）构成的凹坑或标记。 偏振检测系统包括：光束源; 用于围绕中心轴线安装和旋转光盘介质的台架; 至少一个光电检测器; 位于源极和级之间的光路中的分束器，用于将来自源的入射光束引导到安装在平台上的光盘上，以及从光盘到光电检测器的返回光束; 以及位于分束器和至少一个光电检测器之间的光路中的光学偏振器，用于检测和分析通过壁的取向的变化和/或凹坑或标记的宽度来实现的返回光束的偏振变化 的光盘。

    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media
    6.
    发明申请
    Polarization state detector systems and methods for read-out of multilevel oriented nano-structure optical media 有权
    极化状态检测器系统和读取多层导向纳米结构光学介质的方法

    公开(公告)号：US20070206480A1

    公开(公告)日：2007-09-06

    申请号：US11366569

    申请日：2006-03-03

    申请人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    发明人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    IPC分类号： G11B7/00

    CPC分类号： G11B7/1398 ,  G11B7/131 ,  G11B7/1395 ,  G11B7/24088

    摘要： A polarization detection system structured for optical read-out of disc-shaped optical data/information storage and retrieval media with surfaces comprised of pits or marks configured as multilevel oriented nano-structures (ONS) with varying pit or mark orientations and widths. The polarization detection system comprises: an optical beam source; a stage for mounting and rotating an optical disc medium about a central axis; at least one photodetector; a beam splitter positioned in an optical path between the source and stage, for directing an incident beam from the source onto an optical disc mounted on the stage and a return beam from the disc onto the photodetector; and an optical polarizer positioned in an optical path between the beam splitter and the at least one photodetector, for detection and analysis of changes in polarization of the return beam effected by variation of the orientation of the walls and/or widths of the pits or marks of the disc.

    摘要翻译： 一种偏振检测系统，其被构造用于光学读出盘形光学数据/信息存储和回收介质，其表面包括由具有不同凹坑或标记取向和宽度的多层定向纳米结构（ONS）构成的凹坑或标记。 偏振检测系统包括：光束源; 用于围绕中心轴线安装和旋转光盘介质的台架; 至少一个光电检测器; 位于源极和级之间的光路中的分束器，用于将来自源的入射光束引导到安装在平台上的光盘上，以及从光盘到光电检测器的返回光束; 以及位于分束器和至少一个光电检测器之间的光路中的光学偏振器，用于检测和分析通过壁的取向的变化和/或凹坑或标记的宽度来实现的返回光束的偏振变化 的光盘。

    Multilevel nano-structure optical media with oriented tracking marks
    7.
    发明申请
    Multilevel nano-structure optical media with oriented tracking marks 审中-公开
    具有定向跟踪标记的多层纳米结构光学介质

    公开(公告)号：US20070206453A1

    公开(公告)日：2007-09-06

    申请号：US11366609

    申请日：2006-03-03

    申请人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    发明人： David Kuo ,  Neil Deeman ,  Shih-Fu Lee ,  Koichi Wago

    IPC分类号： G11B7/00

    CPC分类号： G11B7/0938 ,  B82Y10/00 ,  G11B7/00745 ,  G11B7/0906 ,  G11B7/0912 ,  G11B7/24088

    摘要： An optical data/information storage medium comprises a disk-shaped substrate with a data/information encoded surface having a plurality of concentric, radially spaced-apart data tracks formed therein, each of said data tracks comprising a plurality of spaced-apart, nano-dimensioned data pits or marks with different angular orientations with respect to a down-track direction of each data track. Each of the data tracks further comprises a plurality of spaced-apart, nano-dimensioned servo tracking pits or marks with a preselected angular orientation with respect to the down-track direction for use in obtaining radial error (RE) signals of a read-out head by means of radial push-pull (PP) or differential phase detection (DPD) tracking.

    摘要翻译： 光学数据/信息存储介质包括具有数据/信息编码表面的盘状衬底，其具有形成在其中的多个同心径向间隔开的数据轨道，每个所述数据轨道包括多个间隔开的纳米级衬底， 相对于每个数据轨道的下行方向，具有不同角取向的尺寸数据凹坑或标记。 每个数据轨道还包括多个间隔开的纳米尺寸的伺服跟踪凹坑或具有相对于下轨道方向的预选角度取向的标记，以用于获得读出的径向误差（RE）信号 通过径向推挽（PP）或差分相位检测（DPD）跟踪来实现。

    Method for fabricating patterned magnetic recording device
    8.
    发明授权
    Method for fabricating patterned magnetic recording device 有权
    图案化磁记录装置的制造方法

    公开(公告)号：US08900655B2

    公开(公告)日：2014-12-02

    申请号：US11542129

    申请日：2006-10-04

    申请人： Bing K. Yen ,  David S. Kuo ,  Dieter K. Weller ,  Kim Y. Lee ,  Koichi Wago

    发明人： Bing K. Yen ,  David S. Kuo ,  Dieter K. Weller ,  Kim Y. Lee ,  Koichi Wago

    IPC分类号： B05D5/12 ,  G11B5/73 ,  G11B5/65 ,  G11B5/855

    CPC分类号： G11B5/732 ,  G11B5/656 ,  G11B5/7325 ,  G11B5/855

    摘要： A method of fabricating a patterned perpendicular magnetic recording medium comprises steps of: (a) providing a layer stack including a magnetically soft underlayer (“SUL”) and an overlying non-magnetic interlayer; (b) forming a masking layer on the non-magnetic interlayer; (c) forming a resist layer on the masking layer; (d) forming a pattern of recesses extending through the resist layer and exposing spaced apart surface portions of the masking layer; (e) extending the pattern of recesses through the masking layer to expose spaced apart surface portions of the interlayer; and (f) at least partially filling the pattern of recesses with a magnetically hard material to form a perpendicular magnetic recording layer.

    摘要翻译： 制造图案化的垂直磁记录介质的方法包括以下步骤：（a）提供包括磁软底层（“SUL”）和上覆非磁性中间层的层堆叠; （b）在非磁性中间层上形成掩模层; （c）在掩模层上形成抗蚀剂层; （d）形成延伸穿过抗蚀剂层并露出掩模层的间隔开的表面部分的凹陷图案; （e）将凹槽的图案延伸穿过掩模层以暴露中间层的间隔开的表面部分; 和（f）至少部分地用磁性硬的材料填充凹槽的图案以形成垂直的磁记录层。

    Method for fabricating patterned perpendicular magnetic recording media
    9.
    发明申请
    Method for fabricating patterned perpendicular magnetic recording media 有权
    图案化垂直磁记录介质的制造方法

    公开(公告)号：US20080085362A1

    公开(公告)日：2008-04-10

    申请号：US11542129

    申请日：2006-10-04

    申请人： Bing K. Yen ,  David S. Kuo ,  Dieter K. Weller ,  Kim Y. Lee ,  Koichi Wago

    发明人： Bing K. Yen ,  David S. Kuo ,  Dieter K. Weller ,  Kim Y. Lee ,  Koichi Wago

    IPC分类号： B05D5/12 ,  B05D1/32

    CPC分类号： G11B5/732 ,  G11B5/656 ,  G11B5/7325 ,  G11B5/855

    摘要： A method of fabricating a patterned perpendicular magnetic recording medium comprises steps of: (a) providing a layer stack including a magnetically soft underlayer (“SUL”) and an overlying non-magnetic interlayer; (b) forming a masking layer on the non-magnetic interlayer; (c) forming a resist layer on the masking layer; (d) forming a pattern of recesses extending through the resist layer and exposing spaced apart surface portions of the masking layer; (e) extending the pattern of recesses through the masking layer to expose spaced apart surface portions of the interlayer; and (f) at least partially filling the pattern of recesses with a magnetically hard material to form a perpendicular magnetic recording layer.

    摘要翻译： 制造图案化的垂直磁记录介质的方法包括以下步骤：（a）提供包括磁软底层（“SUL”）和上覆非磁性中间层的层堆叠; （b）在非磁性中间层上形成掩模层; （c）在掩模层上形成抗蚀剂层; （d）形成延伸穿过抗蚀剂层并露出掩模层的间隔开的表面部分的凹陷图案; （e）将凹槽的图案延伸穿过掩模层以暴露中间层的间隔开的表面部分; 和（f）至少部分地用磁性硬的材料填充凹槽的图案以形成垂直的磁记录层。

    Styrene-acrylonitrile as a resist for making patterned media
    10.
    发明授权
    Styrene-acrylonitrile as a resist for making patterned media 有权
    苯乙烯 - 丙烯腈作为制造图案化介质的抗蚀剂

    公开(公告)号：US06617012B1

    公开(公告)日：2003-09-09

    申请号：US10112192

    申请日：2002-03-29

    申请人： HongYing Wang ,  Koichi Wago ,  Neil Deeman ,  Nobuo Kurataka

    发明人： HongYing Wang ,  Koichi Wago ,  Neil Deeman ,  Nobuo Kurataka

    IPC分类号： B32B702

    CPC分类号： G11B5/855 ,  B32B27/06 ,  G11B5/59633 ,  G11B5/74 ,  G11B5/82 ,  Y10S428/90 ,  Y10S977/712 ,  Y10S977/838 ,  Y10S977/887 ,  Y10T428/249921 ,  Y10T428/31678

    摘要： A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitrile. Ions are then accelerated towards the surface of the styrene-acrylonitrile, which stops the ions in the areas where the styrene-acrylonitrile is thick and allows the ions to penetrate through to the magnetic layer in the areas where the styrene-acrylonitrile is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped styrene-acrylonitrile pattern on the magnetic layer. The styrene-acrylonitrile is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic medium.

    摘要翻译： 公开了一种用于在磁介质上形成伺服图案的系统和方法。 用苯乙烯 - 丙烯腈层涂覆的磁性薄膜印有镍压模，其在苯乙烯 - 丙烯腈上再现压模图案的负像。 离子然后被加速到苯乙烯 - 丙烯腈的表面，这阻止了苯乙烯 - 丙烯腈厚的区域中的离子，并允许离子穿透到苯乙烯 - 丙烯腈薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用，从而改变了磁层的结构，降低了矫顽力（Hc）和剩余力矩（Mrt）。 这就在磁性层上再现了印模的苯乙烯 - 丙烯腈图案。 然后通过氧等离子体蚀刻表面留下图案化的磁性介质来除去苯乙烯 - 丙烯腈。