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公开(公告)号：US20050006556A1
公开(公告)日：2005-01-13
申请号：US10618187
申请日：2003-07-10
申请人： Kirby Floyd , Adrian Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kung Wang
发明人： Kirby Floyd , Adrian Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kung Wang
IPC分类号： C23C16/455 , C23C16/458 , H01L21/00 , H01L21/316 , H01L21/68 , F16M13/00
CPC分类号： H01L21/67259 , C23C16/455 , C23C16/4583 , H01L21/02129 , H01L21/02271 , H01L21/31625 , H01L21/68
摘要： Embodiments of the present invention are directed to adjusting the spacing between the substrate support and the faceplate of the gas distribution member to achieve improved uniformity of the layer formed on the substrate. One embodiment of the present invention is directed to a method of adjusting a spacing between a gas distribution member and a substrate support disposed generally opposite from the gas distribution member, wherein the substrate support is configured to support a substrate on which to form a layer with improved thickness uniformity. The method comprises forming a layer on the substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations. The spacing adjustment amount is positive to increase the spacing between the substrate support at the location and the gas distribution member if the thickness is greater at the location than at the reference location. The spacing adjustment amount is negative to decrease the spacing between the substrate support at the location if the thickness is smaller at the location than at the reference location.
摘要翻译： 本发明的实施例涉及调整衬底支撑件和气体分配构件的面板之间的间隔，以实现在衬底上形成的层的改进的均匀性。 本发明的一个实施例涉及一种调节气体分配构件和大致与气体分配构件相对设置的衬底支撑件之间的间隔的方法，其中衬底支撑件构造成支撑衬底，以在其上形成具有 改善厚度均匀性。 该方法包括在设置在基板支撑件上的基板上形成一层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。 如果位置处的厚度大于在参考位置处的厚度，则间距调节量是正的以增加位置处的衬底支撑件与气体分配构件之间的间隔。 如果在位置处的厚度小于在参考位置处的厚度，则间距调节量是负的，以减小位置处的衬底支撑件之间的间隔。
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2.发明授权Adjusting a spacing between a gas distribution member and a substrate support 失效调整气体分配构件和基底支撑件之间的间距公开(公告)号：US07754282B2
公开(公告)日：2010-07-13
申请号：US12182345
申请日：2008-07-30
申请人： Kirby Floyd , Adrian Q. Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kun Victor Wang
发明人： Kirby Floyd , Adrian Q. Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kun Victor Wang
IPC分类号： C23C16/52
CPC分类号： H01L21/67259 , C23C16/455 , C23C16/4583 , H01L21/02129 , H01L21/02271 , H01L21/31625 , H01L21/68
摘要： A method of adjusting a spacing between a gas distribution member and a substrate support includes forming a layer on a substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations.
摘要翻译： 调整气体分配构件和基板支撑件之间的间隔的方法包括在设置在基板支撑件上的基板上形成层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。
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公开(公告)号：US20080286444A1
公开(公告)日：2008-11-20
申请号：US12182345
申请日：2008-07-30
申请人： Kirby Floyd , Adrian Q. Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kung Victor Wang
发明人： Kirby Floyd , Adrian Q. Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kung Victor Wang
IPC分类号： C23C16/52
CPC分类号： H01L21/67259 , C23C16/455 , C23C16/4583 , H01L21/02129 , H01L21/02271 , H01L21/31625 , H01L21/68
摘要： Embodiments of the present invention are directed to adjusting the spacing between the substrate support and the faceplate of the gas distribution member to achieve improved uniformity of the layer formed on the substrate. One embodiment of the present invention is directed to a method of adjusting a spacing between a gas distribution member and a substrate support disposed generally opposite from the gas distribution member, wherein the substrate support is configured to support a substrate on which to form a layer with improved thickness uniformity. The method comprises forming a layer on the substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations. The spacing adjustment amount is positive to increase the spacing between the substrate support at the location and the gas distribution member if the thickness is greater at the location than at the reference location. The spacing adjustment amount is negative to decrease the spacing between the substrate support at the location if the thickness is smaller at the location than at the reference location.
摘要翻译： 本发明的实施例涉及调整衬底支撑件和气体分配构件的面板之间的间隔，以实现在衬底上形成的层的改进的均匀性。 本发明的一个实施例涉及一种调节气体分配构件和大致与气体分配构件相对设置的衬底支撑件之间的间隔的方法，其中衬底支撑件构造成支撑衬底，以在其上形成具有 改善厚度均匀性。 该方法包括在设置在基板支撑件上的基板上形成一层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。 如果位置处的厚度大于在参考位置处的厚度，则间距调节量是正的以增加位置处的衬底支撑件与气体分配构件之间的间隔。 如果在位置处的厚度小于在参考位置处的厚度，则间距调节量是负的，以减小位置处的衬底支撑件之间的间隔。
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公开(公告)号：US07413612B2
公开(公告)日：2008-08-19
申请号：US10618187
申请日：2003-07-10
申请人： Kirby Floyd , Adrian Q. Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kung Victor Wang
发明人： Kirby Floyd , Adrian Q. Montgomery , Jennifer Gonzales , Won Bang , Rong Pan , Amna Mohammed , Yen-Kung Victor Wang
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： H01L21/67259 , C23C16/455 , C23C16/4583 , H01L21/02129 , H01L21/02271 , H01L21/31625 , H01L21/68
摘要： Embodiments of the present invention are directed to adjusting the spacing between the substrate support and the faceplate of the gas distribution member to achieve improved uniformity of the layer formed on the substrate. One embodiment of the present invention is directed to a method of adjusting a spacing between a gas distribution member and a substrate support disposed generally opposite from the gas distribution member, wherein the substrate support is configured to support a substrate on which to form a layer with improved thickness uniformity. The method comprises forming a layer on the substrate disposed on the substrate support; measuring a thickness of the layer on the substrate; and calculating differences in thickness between a reference location on the substrate and a plurality of remaining locations on the substrate. The method further comprises computing spacing adjustment amounts for the remaining locations relative to the reference location based on the differences in thickness between the reference location and the remaining locations. The spacing adjustment amount is positive to increase the spacing between the substrate support at the location and the gas distribution member if the thickness is greater at the location than at the reference location. The spacing adjustment amount is negative to decrease the spacing between the substrate support at the location if the thickness is smaller at the location than at the reference location.
摘要翻译： 本发明的实施例涉及调整衬底支撑件和气体分配构件的面板之间的间隔，以实现在衬底上形成的层的改进的均匀性。 本发明的一个实施例涉及一种调节气体分配构件和大致与气体分配构件相对设置的衬底支撑件之间的间隔的方法，其中衬底支撑件构造成支撑衬底，以在其上形成具有 改善厚度均匀性。 该方法包括在设置在基板支撑件上的基板上形成一层; 测量衬底上的层的厚度; 并且计算衬底上的参考位置与衬底上的多个剩余位置之间的厚度差异。 该方法还包括基于参考位置和其余位置之间的厚度差来计算相对于参考位置的剩余位置的间隔调整量。 如果位置处的厚度大于在参考位置处的厚度，则间距调节量是正的以增加位置处的衬底支撑件与气体分配构件之间的间隔。 如果在位置处的厚度小于在参考位置处的厚度，则间距调节量是负的，以减小位置处的衬底支撑件之间的间隔。
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公开(公告)号：US08378186B2
公开(公告)日：2013-02-19
申请号：US11578447
申请日：2005-04-15
申请人： Virginia Ursin , Byron Froman , A. J. Nava , Jennifer Gonzales
发明人： Virginia Ursin , Byron Froman , A. J. Nava , Jennifer Gonzales
CPC分类号： C12P7/6427 , C12N9/0083 , C12N15/8247
摘要： The invention relates generally to the expression of desaturase enzymes in transgenic corn plants and compositions derived therefrom. In particular, the invention relates to the production of oils with improved omega-3 fatty acid profiles in corn plants and the seed oils produced thereby. Such oils may contain stearidonic acid, which is not naturally found in corn plants and has been shown to have beneficial effects on health.
摘要翻译： 本发明一般涉及转基因玉米植物中去饱和酶的表达及其衍生物。 特别地，本发明涉及在玉米植物中生产具有改进的ω-3脂肪酸谱的油以及由此生产的种子油。 这样的油可以含有十八碳四烯酸，其在玉米植物中不是天然存在的，并且已经显示出对健康有益的效果。
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公开(公告)号：US20080063691A1
公开(公告)日：2008-03-13
申请号：US10569387
申请日：2004-08-20
申请人： Virginia Ursin , Byron Froman , Jennifer Gonzales , Steven E. Screen , Fenggao Dong , Thomas J. Larosa
发明人： Virginia Ursin , Byron Froman , Jennifer Gonzales , Steven E. Screen , Fenggao Dong , Thomas J. Larosa
IPC分类号： A61K36/48 , A01H1/00 , A01H5/00 , C12N15/53 , C12N15/82 , C12N9/02 , C12P7/64 , C12N5/10 , C12N15/63 , A61K9/00 , A23D7/00
CPC分类号： C12N9/0004 , C12N15/8247 , C12P7/6427
摘要： The invention relates generally to methods and compositions concerning desaturase enzymes that modulate the number and location of double bonds in long chain poly-unsaturated fatty acids (LC-PUFA's). In particular, the invention relates to methods and compositions for improving omega-3 fatty acid profiles in plant products and parts using desaturase enzymes and nucleic acids encoding for such enzymes. In particular embodiments, the desaturase enzymes are Primula Δ6-desaturases. Also provided are improved soybean oil compositions having SDA and a beneficial overall content of omega-3 fatty acids relative to omega-6 fatty acids.
摘要翻译： 本发明一般涉及调节长链多不饱和脂肪酸（LC-PUFA）中双键数目和位置的去饱和酶的方法和组合物。 特别地，本发明涉及用于使用去饱和酶和编码这些酶的核酸改善植物产品和部分中的ω-3脂肪酸谱的方法和组合物。 在具体实施方案中，去饱和酶是Primula Delta6-去饱和酶。 还提供了具有SDA的改进的大豆油组合物和相对于ω-6脂肪酸的ω-3脂肪酸的有益总体含量。
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公开(公告)号：US08173870B2
公开(公告)日：2012-05-08
申请号：US10569387
申请日：2004-08-20
申请人： Virginia Ursin , Byron Froman , Jennifer Gonzales , Steven E. Screen , Fenggao Dong , Thomas J. Larosa
发明人： Virginia Ursin , Byron Froman , Jennifer Gonzales , Steven E. Screen , Fenggao Dong , Thomas J. Larosa
CPC分类号： C12N9/0004 , C12N15/8247 , C12P7/6427
摘要： The invention relates generally to methods and compositions concerning desaturase enzymes that modulate the number and location of double bonds in long chain poly-unsaturated fatty acids (LC-PUFA's). In particular, the invention relates to methods and compositions for improving omega-3 fatty acid profiles in plant products and parts using desaturase enzymes and nucleic acids encoding for such enzymes. In particular embodiments, the desaturase enzymes are Primula Δ6-desaturases. Also provided are improved soybean oil compositions having SDA and a beneficial overall content of omega-3 fatty acids relative to omega-6 fatty acids.
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公开(公告)号：US20080260929A1
公开(公告)日：2008-10-23
申请号：US11578447
申请日：2005-04-15
申请人： Virginia Ursin , Byron Froman , A.J. Nava , Jennifer Gonzales
发明人： Virginia Ursin , Byron Froman , A.J. Nava , Jennifer Gonzales
CPC分类号： C12P7/6427 , C12N9/0083 , C12N15/8247
摘要： The invention relates generally to the expression of desaturase enzymes in transgenic corn plants and compositions derived therefrom. In particular, the invention relates to the production of oils with improved omega-3 fatty acid profiles in corn plants and the seed oils produced thereby. Such oils may contain stearidonic acid, which is not naturally found in corn plants and has been shown to have beneficial effects on health.
摘要翻译： 本发明一般涉及转基因玉米植物中去饱和酶的表达及其衍生物。 特别地，本发明涉及在玉米植物中生产具有改进的ω-3脂肪酸谱的油以及由此生产的种子油。 这样的油可以含有十八碳四烯酸，其在玉米植物中不是天然存在的，并且已经显示出对健康有益的效果。
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